CEC340 MEMS DESIGN
INTRODUCTION
MEMS stands for Micro-electromechanical systems,
a manufacturing technology that enables the development of electromechanical
systems using batch fabrication techniques similar to those used in integrated circuit
(IC) design.
They can range in size from micrometers to millimeters
MEMS integrate mechanical elements, sensors, actuators and electronics on a
silicon substrate using a process technology called micro fabrication.
Micro electro mechanical System (MEMS) is making and
combining of miniaturized mechanical and electrical
components on a common silicon substrate through micro
fabrication technology.
•The sensors gather information by
measuring mechanical, thermal, biological,
chemical,magnetic and optical signals from
the environment.
•The microelectronic Ics act as the decision-
making piece of the system, by processing
the information given by the sensors.
•Finally, the actuators help the system
respond by moving, pumping, filtering or
some how controlling the surrounding
environment to achieve its
purpose.
Advantages of MEMS
Highly scalable in manufacturing, resulting in very low unit
costs when mass-produced
MEMS sensors possess extremely high sensitivity
MEMS devices require very low power consumption
Disadvantages of MEMS
Very expensive during the research and development stage
for any new MEMS design or devices
Very expensive upfront setup cost for fabrication cleanrooms
and foundry facilities
Fabrication and assembly unit costs can be very high for low
quantities.
Testing equipment to characterize the quality and
performance can also be expensive.
Applications of MEMS
inkjet-printer cartridges,
accelerometer,
miniature robots,
micro engines,
inertial sensors,
micro actuators,
optical scanners,
fluid pumps,
chemical, pressure and flow sensors.
Application in Radio frequency (RF)
Examples of MEMS
Micronozzles to control the flow of ink in inkjet printers.
Tiny gyroscopes, barometers, accelerometers and
microphones to support Mobile apps.
Disposable pressure sensors for use in healthcare.
Optical switching devices that allow one optical signal to
control another optical signal.
