SEM microscope
By:
Doug, Holly & Oleg
Scanning Electron Microscope
vs.
Optical Microscope
Advantages Disadvantages
Continuously variable Cost
magnification
More knobs
High resolution
Vacuum
Depth of focus Sample limitations
Elemental analysis
attachments
Scanning Electron Microscope
(simplified drawing)
tungsten filament (electron source)
e- electrostatic lens (F = qE)
accelerating voltage anode
electromagnetic lenses (F = q v x B)
(condenser lenses)
electromagnetic lens (objective lens)
& deflector coils (raster scan)
SE detector (scintillator & PMT)
sample
Signal Generation
In (Probe)
Focused mono-energetic electron beam
Out (Signal)
Imaging
• Backscattered electrons
• Secondary electrons
Analysis
• X-rays
Characteristic x-rays
Bremsstrahlung x-rays (background “noise”)
• Auger electrons
Topographic contrast
surface
same penetration depth
shorter exit distance, longer exit distance,
higher signal lower signal
SEM general info
SEM General info
•Mount the sample on the holder
•“Paint” the conductive path
SEM General info
Load the sample into the SEM
SEM general info
•Vacuum pump 4
minutes
•Turn on filament
current & accelerating
voltage
•Fiddle with the knobs
Sample Prep
Low C steel Quenched from 1700
High C steel degF
Unknown C steel Anneal to 900 degF
Furnace cooled from
1700 degF
High C (optical 600x)
High C (SEM 400x)
High C (SEM 3000x)
Low C (600x optical)
Low C (SEM 400x)
Low C (SEM 3000x)
Unknown (optical 600x)
Unknown C (SEM 400x)
Unknown (SEM 3000x)
Low C vs High C (SEM 200x)
Low Carbon
Plastic
High Carbon
Low C
(3000x vs 10000x)