Surface Characterization
Techniques
Surface Characterization Techniques
AFM
SEM
Profilometer
Elipsometer
Fluorimeter
Scanning Electron Microscopy(SEM):
SEM stands for scanning electron microscope
The SEM is a microscope that uses electrons instead of light to form an
image
Advantages over traditional microscopes:
The SEM has a large depth of field, which allows more of a specimen
to be in focus at one time
The SEM also has much higher resolution
User has much more control in the degree of magnification
Scanning
Electron
Microscopy
(SEM):
Scanning Electron Microscopy (SEM):
A beam of electrons is produced at
the top of the microscope by an
electron gun
The beam travels through electromagnetic
fields and lenses, which focus the beam down
towards the sample
Once the beam hits the sample, electrons and X-rays are ejected from the
sample
Scanning Electron Microscopy (SEM):
Detectors collect these X-rays, backscattered electrons, and secondary
electrons and convert them into a signal that is sent to a screen similar
to a television screen.
This produces the final image
AFM- Atomic Force Microscopy
Scanning probe microscope- 2 types
STM- Scanning Tunneling Microscope
ATM- Atomic Force Microscope
1. Critical Components
2. Operational Aspects
3. Basic Physics (Atomic Force) ?
AFM- Atomic Force Microscopy
In 1980s, SPM produced the first real space images of a surface
SPM is a imaging tool with vast dynamic range.
In some cases, SPM can measure physical properties such as surface
conductivity, static charge distribution, localized friction, magnetic
fields and elastic moduli
AFM- Atomic Force Microscopy
AFM- Atomic Force Microscopy
Inter Atomic Interaction forces
Van Der Walls Forces
In ATM, the imaging of the surface is done based
on modulation of interaction forces between
two atoms
In reality, the instrument operates based on the interaction
between two surfaces, the sample and the sharp tip
Beam Bounce Method
AFM-Origin of Interatomic Interaction
Dispersion Forces
Induced Dipole
Induced Dipole
Type of Interaction
AFM-Origin of Interatomic Interaction
AFM
AFM-Step 1
Once the AFM is aligned, the tip then
needs to be brought in close proximity
to the sample surface so that it can start
scanning
This is typically done, by means of a
stepper motor
Initially, the tip is far away from the
sample, as can be seen from figure A
AFM-Step 2
The stepper motor now starts bringing the
tip closer to the sample
Initially the tip is far away from the
surface and there is no interaction between
the two, and therefore there is no
deflection of the cantilever
This is seen in figure B, where the
reflected laser spot is still seen to fall at the
center of the QPD
AFM-Step 3
As the tip comes in close proximity to
the surface (< 100 nm), it first
experiences an attractive force
originating due to inter surface van der
Waals interaction
This leads to a deflection of the
cantilever towards the sample surface
With progressive movement of the
stepper motor, eventually the edge of
the tip touches the sample surface
This is known as the
Jump to contact
AFM-Step 4
Further movement of the stepper motor
pushes the cantilever tip against the
surface, eventually changing the nature of
the deflection in the cantilever from
attractive to repulsive
The stepper motor stops and the approach
is considered to be complete when the
deflection of the cantilever tip matches
the set point
Typically, the set point is pre-fixed before
the sequence of approach starts
Tip-Surface Separation on a Force Curve
Ellipsometry
This method is often used to measure the thickness of very thin films,
even down to 1 angstrom (0.1 nm)
In this technique, the change in polarization of a light reflected from a
sample is measured
In general, a light reflected at an angle (from the sample) is elliptically
polarized. Normally a light source yields un-polarized light.
Ellipsometry
The light is passed through a polarizer.
Only a plane polarized light comes out the polarizer.
It falls onto the sample and the reflected light will pass through
another polarizer (called analyzer) and finally will be measured by a
detector.
Ellipsometry
Ellipsometers measure the amplitude (Y)and phase difference (D).
The film thickness and refractive index values are calculated from
these values.
Ellipsometry is an indirect method
Ellipsometry
Advantages:
It is very quick, accurate and reproducible.
By changing the angle of incidence, the data can be acquired in many
angles(variable angle ellipsometry)
Similarly by using light of different wavelengths, the data can be acquired at
many wavelengths (spectroscopic ellipsometry)
These allow for building robust models and facilitate accurately estimation of
the film properties.
Profilometer
A profilometer is a device used to measure the roughness of a surface.
Gives difference between the high and low point of a surface in
nanometers.
Types of Profilometers :1. Non-Contact Profilometer
2. Contact Profilometer
Contact Profilometer
Stylus Profilometer
Atomic Force Microscopy
Scanning Tunneling Microscopy
Non-Contact Profilometer
Optical Methods
Focus Detection Methods
Pattern Projection Methods
Contact Profilometer
Contact Profilometer
Advantages
Acceptance & Easy to Use
Surface Independence
Resolution : The stylus tip radius can be as small as 20 nanometer's
Direct Technique : No modelling required
Contact Profilometer
Disadvantages
Not suitable for very soft (or even liquid) and easily damageable
surface
Very hard and damage surface can damage the stylus
Only 2D
Non-Contact Profilometer
Uses beams of light to read a surface
They shoot a beam out and measure the time it takes to return.
No wear since none of its parts touch anything
Non-Contact Profilometer
Advantages:
Good Resolution: Vertical resolution is usually in the nm level
High Speed
Reliability : cannot be damaged by surface wear or careless operators
Spot size or lateral resolution ranges from a few micrometers down to
sub micrometer
Non-Contact Profilometer
Limitations:
Surface Modelling is required to convert the digital code to human
usable data
Limited by very high slopes, where the light is reflected away from
the objective, unless the slope has enough texture to provide the light.
