NXT Head Maintenance
NXT Head Maintenance
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QD160-00
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Placing Head
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Maintenance Manual 54
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CAUTION !
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Contact Fuji or a Fuji representative before
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transporting this product to a foreign location within
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maintenance.
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Maintenance Manual FV
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QD160-00
Trademark Rights
is a trademark of Fuji Machine Manufacturing Co., Ltd., and registered in the following
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countries and areas:CTM (All EU member countries ), Benelux (Belgium, the Netherlands, Luxembourg ),
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Indonesia, Japan, Singapore, Australia, Switzerland, Turkey, Norway, Bulgaria, Romania, Korea, Taiwan,
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China and the U.S.A.
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Warranty and Liability
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Fuji Machine Manufacturing Co., Ltd. accepts no responsibility for situations that may arise due to any of
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the following:
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• The use of third party parts.
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• The use of non-genuine Fuji parts. 3U
• Incorrect settings made by the customer.
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Notice
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Fuji Machine Manufacturing Co., Ltd. reserves the right to change the content of this manual without
notice.
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Every effort has been made to ensure that this manual is correct in every detail. However, please contact
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Fuji Machine Manufacturing Co., Ltd. accepts no liability whatsoever for damages that may arise as a
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result of this manual, with the exception of problems that originate in our products.
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QD160-00 Contents
Contents
Introduction ....................................................................v
1. About Preventative Maintenance .......................... 1
1.1 Maintenance frequency..................................... 1
1.2 Points of caution................................................ 1
1.3 Applying grease ................................................ 1
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1.3.1 Typical lubrication methods .....................................1
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2. H01 Head.............................................................. 3
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2.1 Maintenance Items and Frequency................... 3
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2.2 Required equipment.......................................... 4
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2.3 Monthly Maintenance (Every 700 Hrs).............. 5
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2.3.1 Cleaning the placing head vacuum filters ................5
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2.3.2 Placing head nozzle clamp pin replacement and
nozzle pick-up surface cleaning ................................6
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3. H02 Head............................................................ 15
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4.3.1 Cleaning the placing head vacuum filters ............. 28
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4.3.2 Cleaning the placing head syringes ...................... 29
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4.3.3 Placing head syringes and O-rings lubrication...... 33
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4.3.4 Checking and replacing mechanical valve
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O-rings.................................................................... 36
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4.4 6 Monthly Maintenance (Every 4000 Hrs)....... 37
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4.4.1 Lubricating the rotational axis for the arm ............. 37
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4.5 Yearly Maintenance (Every 8000 Hrs) ............ 38
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O-rings.................................................................... 56
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6.3.2 Cleaning the placing head syringes.......................69
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6.3.3 Placing head syringes and O-rings lubrication ......73
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6.3.4 Checking and replacing mechanical valve
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O-rings ....................................................................76
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6.4 6 Monthly Maintenance (Every 4000 Hrs)....... 77
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6.4.1 Lubricating the rotational axis for the arm..............77
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6.5 Yearly Maintenance (Every 8000 Hrs) ............ 78
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6.5.1 Replacing the placing head vacuum filters ............78
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6.6 12000 Hr Maintenance.................................... 79
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7. H12HS Head....................................................... 85
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O-rings ....................................................................96
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Introduction
About This Manual
This manual provides instructions on performing maintenance for the heads listed below.
The contents conforms to the maintenance items for placing head in the “Preventive
Maintenance” chapters in the NXT, NTX-2, and AIM mechanical reference manuals and the
“Preventive Maintenance” and “Replacing Consumable Parts” chapters in the Heads with
Part Side Recognition Instruction Manual. It is helpful to remove the placing head from the
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machine, such as when performing maintenance, because the procedures in this manual
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start with the placing head already removed from the machine.
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Note: Refer to the “Basic Operation” chapter in the mechanical reference manuals for procedures
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on removing and attaching heads.
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• H01 head
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• H02 head
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• H04 head
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• H08 head
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• H012(S) head
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• H12HS head
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• Heads with Part Side Recognition (H08Q head, H12SQ head, H12HSQ head)
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• The preventive maintenance items noted here are mainly directed towards
maintenance staff. However, there are certain tasks whose responsibility lies
with the operators.
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1.1 Maintenance frequency
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Fuji recommends that preventative maintenance tasks be performed at 1 week (160 hrs),
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1 month (700 hrs), 6 month (4,000 hrs), 1 year (8,000 hrs) and 12,000 hour intervals.
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Furthermore, it is also recommended that maintenance be performed periodically after long
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periods of continuous operation, and at those times when experiencing production related
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problems on the machine.
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1.2 Points of caution
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a. When performing work on a placing head, set it in the optional head maintenance
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stand or lay it down flat on a work bench.
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There are several methods for applying grease such as applying grease to grease fittings,
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using a brush, spraying from a can. The procedures to be used to apply grease depending
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on the location are explained step-by-step later in this chapter. This section explains the
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Note: A Fuji grease gun is used for calculating the amount of grease to be applied. One shot from
the grease gun (1 pump) is approximately 0.6 cc. Use the number of shots as the target
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when applying grease. The number of shots specified is a little more than the required
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amount of grease. Clean off any extra grease that comes out.
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1. Wipe off any filth from the ball screws and LM guides with a clean cloth.
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2. Use the grease gun from the Fuji grease gun kit (AWPJ8201) to apply the required
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number of shots directly to a brush and then apply the grease over the unit.
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4. Wipe off any excess grease off from the unit with a clean cloth.
5. Manually move the unit to work in the grease on the ball screws/LM guides. (Move one
full stroke)
MEMO:
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2. H01 Head
2.1 Maintenance Items and Frequency
CLN: indicates cleaning LUB: indicates lubrication CHK: indicates check EXG: indicates
exchange.
The times listed in this chart are only recommendations. Actual work time may differ. The
time required for personnel to pull modules forward or load and unload units may add to the
total work time required.
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Maintenance Locations
Every 6 months
Time Required
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12,000 hrs
(4000 hrs)
(700 hrs)
irregular
Monthly
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(min.)
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H01 head Q-axis gears - - LUB - 10
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Z-axis ball screw - - LUB - 10
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Z-axis LM guide 3U - - LUB - 10
Nozzle vacuum filter CLN - - CHK 10
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12,000 hour
Jig Head maintenance stand AA0AMO* Used to clean and lub the
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NXTPHD027a
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Jig Filter cleaning basket K1325C Used to clean the head filters.
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Jig H01 Q-axis gear fixing jig PM28083 Used when removing the H01
head sleeve assembly.
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NXTPHD104
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• H04, H08, H12(S), H12HS head: Maximum 40 filters
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• H01, H02 head: Maximum 20 filters
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NXTPHD028
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Procedure
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1. Using the small-type blade screw driver, loosen and remove the filter cases and filters.
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Filter case
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Filter
Drawing number : XH0056*(Rev.2, 3)
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: XH0094*(Rev.4)
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Filter case
Filter NXTPHD013Ec
2. Wash the filter cases and filters in neutral detergent solvent, or replace if excessively
dirty.
Note: Put the filter while still in the case in the optional filter cleaning basket (K1325C). Clean
them by soaking them in neutral detergent in an ultrasonic cleaning machine for 5 minutes.
2.3.2 Placing head nozzle clamp pin replacement and nozzle pick-
up surface cleaning
1. Pinch the nozzle clamp pin fixing tabs with needle nose pliers to make removal easy.
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Pickup position
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correction marks
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NXTPHD038E
Caution: There are four marks for pickup position correction. Do not touch these marks.
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2. Remove the nozzle clamp pin.
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3. There are two pins used to clamp the nozzle. Repeat these procedures to remove the
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second pin.
4. Clean the nozzle pickup surface. Gently wipe with cleaning paper to remove items from
the surface.
Pickup position
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correction marks
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NXTPHD041E
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Caution: There are four marks for pickup position correction. Do not touch these marks.
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5. Attach the new nozzle clamp pins. Use an item that matches the inside diameter of the
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pin in order to be able to securely push in the pin into place.
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NXTPHD040E
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Caution: Be careful to not damage the clamp items on the clamp pins.
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Flange
Filter
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NXTPHD105E
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1. Remove the filter lock and then gently pull out the filter from the head.
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Filter Flange
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(AA1FZ0*)
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NXTPHD116E
Hook
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1. Vacuum pad (H1339A)
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2. O-ring (A5202W)
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3. Spring (PZ0933*)
NXTPHD112E
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1. Put a 2.5 mm Allen wrench in the hole at the top of the head and use it to turn the
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ballscrew until the Z-axis has been fully lowered.
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Wrench
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Cover
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NXTPHD107E
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3. Remove the bolts shown in the diagram and then move the bracket.
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NXTPHD108E
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Note: A short ended 2.5 mm Allen wrench is required to remove these bolts.
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4. Set the Q-axis gear fixing jig in the holes in the Q-axis gear.
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Q-axis gear
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NXTPHD109E
Gear holes (the jig pins fit in here)
5. Lock the Q-axis in place and using an 8 mm spanner, loosen the sleeve assembly.
Sleeve assembly
Spanner (8 mm)
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NXTPHD110E
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6. Remove the sleeve assembly from the placing head.
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Note: There are cases when the vacuum pad comes off. Be careful to not lose it.
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Vacuum pad
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Sleeve assembly
O-ring
Spring
Cap
NXTPHD113E
8. Use an air gun to remove any grime from the spring and internal section of the sleeve
assembly. Use a cloth to clean and wipe off any grime that was not removed.
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NXTPHD114E
9. After cleaning the parts, lubricate the sleeve assembly O-ring and spring. Then put back
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together the sleeve assembly. Ensure that the up and down movement of the shaft with
the attached vacuum pad is smooth.
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Used grease: MDV235-ZB (Kuroda)
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(Manufacture type: K3032K)
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Sleeve assembly
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Vacuum pad
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Spring
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Cap
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NXTPHD115Ea
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[Link] the removal steps in reverse order to reattach the sleeve assembly back into the
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H01 head.
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(3) Z-axis LM guide 1 shot 0.292
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1. Wipe off filth from the Q-axis gear (1) with a clean cloth.
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2. Use the grease gun to apply one shot of the specified grease onto a brush.
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3. Spread the grease on the Q-axis gear teeth (1).
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4. Rotate the Q-axis (1) by hand to lubricate the gear teeth evenly.
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5. Wipe off filth from the Z-axis ballscrew (2) with a clean cloth.
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6. Use the grease gun to apply one shot of the specified grease onto a brush.
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8. Wipe off filth from the Z-axis LM guide rail (3) with a clean cloth.
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9. Use the grease gun to apply one shot of the specified grease onto a brush.
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[Link] the Z-axis up and down by hand to lubricate the ballscrew and LM guide evenly.
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NXTPHD011b
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3. H02 Head
3.1 Maintenance Items and Frequency
CLN: indicates cleaning LUB: indicates lubrication CHK: indicates check EXG: indicates
exchange.
The times listed in this chart are only recommendations. Actual work time may differ. The
time required for personnel to pull modules forward or load and unload units may add to the
total work time required.
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irregular R
Maintenance Locations
Time Required
b
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Monthly
(min.)
12,000
D(700
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H02 head Q-axis gears - LUB - 10
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Z1, Z2-axes ball screws - LUB - 10
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Z1, Z2-axes LM guides
3U - LUB - 10
Nozzle vacuum filter CLN - CHK, 10
Exchanging nozzle clamp pins, EXG, - - 5
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Jig Head maintenance stand AA0AM** Used to clean and lub the
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placing head
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NXTPHD027a
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Jig Filter cleaning basket K1325C Used to clean the head filters.
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NXTPHD028
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12,000 hour
5
cloth.
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12,000 hour
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• H04, H08, H12(S), H12HS head: Maximum 40 filters
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• H01, H02 head: Maximum 20 filters
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NXTPHD028
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Procedure
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1. Using the small-type blade screw driver, loosen and remove the filter cases and filters.
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Filter case
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Filter
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(Drawing number:
XH0094*)
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Filter
Filter case (Drawing number: XH0094*)
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Filter case
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(Drawing number:
XH0094*)
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Filter
(Drawing number: XH0094*)
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Filter case
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01MEC-0462E
2. Wash the filter cases and filters in neutral detergent solvent, or replace if excessively
dirty.
Note: Put the filter while still in the case in the optional filter cleaning basket (K1325C). Clean
them by soaking them in neutral detergent in an ultrasonic cleaning machine for 5 minutes.
3.3.2 Placing head nozzle clamp pin replacement and nozzle pick-
up surface cleaning
1. Pinch the nozzle clamp pin fixing tabs with needle nose pliers to make removal easy.
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Pickup position
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correction marks
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NXTPHD038E
Caution: There are four marks for pickup position correction. Do not touch these marks.
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2. Remove the nozzle clamp pin.
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3. There are two pins used to clamp the nozzle. Repeat these procedures to remove the
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second pin.
4. Clean the nozzle pickup surface. Gently wipe with cleaning paper to remove items from
the surface.
Pickup position
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correction marks
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NXTPHD041E
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Caution: There are four marks for pickup position correction. Do not touch these marks.
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5. Attach the new nozzle clamp pins. Use an item that matches the inside diameter of the
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pin in order to be able to securely push in the pin into place.
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NXTPHD040E
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Caution: Be careful to not damage the clamp items on the clamp pins.
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Flange
Filter
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NXTPHD105E
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Filter Flange
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(AA1FZ0*)
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NXTPHD116E
Hook
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Daphne Eponex No. 2 (2) Z1, Z2-axes ball screws 1 shot 0.117
(Idemitsu)
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(3) Z1, Z2-axes LM guides 1 shot 0.292
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There is a brake on top of the placing head to prevent the Z-axes from dropping. When
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moving the Z-axes during these procedures, squeeze the Z-axes brake using your fingers
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to release the brake (refer to the diagram).
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1. Remove the cover that is covering the Z-axes brake area.
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2. While holding the ball nuts for the Z-axes ball screws, squeeze both sides of the Z-axes
35
brake using your fingers to release the brake and gently move the axes to their lowest
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positions (fully extended).
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3. Wipe off any filth from the Q-axes gears (1) with a clean cloth.
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5. Apply the specified grease on the brush to the Q-axes gears (1).
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6. Rotate the Q-axes gears (1) by hand to work in the grease evenly.
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7. Wipe off any filth from the Z1- and Z2-axis ball screws (2) with a clean cloth.
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9. Apply the specified grease on the brush to the Z1- and Z2-axis ball screws (2).
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[Link] holding the ball nuts for the Z-axes ball screws, squeeze both sides of the Z-axes
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brake using your fingers to release the brake and gently move the axes to their highest
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[Link] off any filth from the Z1- and Z2-axis LM guides (3) with a clean cloth.
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[Link] the specified grease on the brush on the rails for the Z1- and Z2-axis LM guides
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(3).
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[Link] move the Z-axes up and down several times to work in the grease.
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[Link] the cover for the Z-axes brake back on the placing head.
Cover
Z1-axis Z2-axis
Z-axes drop
prevention brake
2
2
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1
1
1
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Z1- and Z2-axes ball nuts 3U
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Apply to the entire 3
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MEMO:
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4. H04 Head
4.1 Maintenance Items and Frequency
CLN: indicates cleaning LUB: indicates lubrication CHK: indicates check EXG: indicates
exchange.
The times listed in this chart are only recommendations. Actual work time may differ. The
time required for personnel to pull modules forward or load and unload units may add to the
total work time required.
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Every 6 months
Time Required
12,000 hrs
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(4000 hrs)
(8000 hrs)
(700 hrs)
Monthly
Yearly
(min.)
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Maintenance Locations
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H04 head Z-axis ball screw - - - LUB 10
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Z-axis guide shaft - - - LUB 10
Cam follower of the
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- - - LUB 10
stepping motor 3U
Q-axis gear (upper, motor - - - LUB 5
side)
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O-ring LUB 10
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- - -
syringe LUB 10
Nozzle vacuum filter CLN - EXG - 20
5
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Jig Fuji grease gun kit AWPJ8201 Used to apply lubricant to grease
fittings
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Jig Head maintenance stand AA0AMO* Used to clean and lub the placing
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head
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35
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NXTPHD027a
3U
Jig Filter cleaning basket K1325C Used to clean the head filters.
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NXTPHD028
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Jig Syringe O-ring lubrication jig AA40R0* Used to lubricate the O-ring in the
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syringe.
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NXTPHD122a
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Jig Syringe cleaning unit QK00C** Used for cleaning the syringes on
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01MEC-0523
01MEC-0567
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Jig Mechanical valve O-ring exchange tool Used for exchanging the
PM072M* mechanical valve O-rings on the
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placing head.
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1 month (700 hrs)
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12,000 hour
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01MEC-0566
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Tools Metric Allen wrench set 1 month (700 hrs)
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3U 12,000 hour
K3032K (30 g)
1 month (700 hrs)
5
12,000 hour
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12,000 hour
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• H04, H08, H12(S), H12HS head: Maximum 40 filters
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• H01, H02 head: Maximum 20 filters
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L#
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NXTPHD028
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Procedure
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1. Slide the aluminum lock-ring to the right and remove the filter cases (with filter inside).
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Lock-ring
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2. Wash the filter cases and filters in neutral detergent solvent, or replace if excessively
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dirty.
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Note: Put the filter while still in the case in the optional filter cleaning basket (K1325C). Clean
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them by soaking them in neutral detergent in an ultrasonic cleaning machine for 5 minutes.
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1. Connect an air hose to the syringe cleaning unit (QK00C**) to supply air.
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01MEC-0523
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2. Remove the side cover from the head.
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Cover
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01MEC-542E
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3. Ensure that there no objects or dust on the attaching surfaces of the placing head and
the holder. Use a clean dry cloth to remove any foreign objects.
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ed
01MEC-0526E
4. While holding the head handle, insert the clamp joints into the grooves on the holder.
Pull the lever on the syringe cleaning unit forward and down to secure the placing head.
Placing head
i
Tp
bR
C
s3
L#
D
Press the head down
54
firmly against the holder.
35
Placing head
FV
Holder
3U
01MEC-0527E
by
5. Set a box covered with a cloth or put a cloth under the head.
T
Caution: Use a box size that does not interfere with the head. Remove the box when attaching or
JS
removing a head.
7
:3
13
5
/0
03
0 9/
20
at
ed
oad
nl
ow
D
01MEC-0545
6. Replace the all of the filters with new filters or with cleaned filters. It is also possible to
set filter cases without filters in the head. Refer to section 4.3.1 "Cleaning the placing
head vacuum filters" for details.
Caution: Do not use dirty filters.
i
Tp
Filter locked Filter unlocked
bR
C
s3
L#
D
54
35
FV
01MEC-0546E
3U
8. Open the air valve to supply air to the head.
by
T
JS
7
:3
13
5
/0
03
0 9/
01MEC-0528E
ed
ad
o
nl
ow
D
9. Lower only one of the vacuum valves to supply air to the syringe. While supplying air
for 30 seconds to the syringe, move the syringe up and down five times.
Caution: Clean only one syringe at a time because the effectiveness of the cleaning is reduced due
to the air pressure dropping when air is supplied to multiple syringes at the same time.
CAUTION
i
that items can be blown into the eyes from the syringe when the
Tp
vacuum valve is lowered.
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
01MEC-0547
7
:3
[Link] cleaning with filters in the cases, the filter positions become displaced. Push the
13
filters back in place. If cleaning was performed with just filter cases attached, replace
the filter cases with filter cases that have filters.
5
/0
03
0 9/
20
at
ed
oad
nl
ow
01MEC-0531
D
[Link] off any foreign objects clinging to the side of the syringe with a clean dry cloth.
Lubricate the syringes at the same time as cleaning them. Refer to section 4.3.3
"Placing head syringes and O-rings lubrication" for details on lubricating the syringes.
[Link] all the syringes have been cleaned, while holding the head handle, lift the lever
on the syringe cleaning unit and then remove the head from the unit. Reattach the side
cover back on the head.
i
Tp
MDV235-ZB (Kuroda) (3) O-rings inside syringe Lubrication jig -
bR
(rod)
C
s3
1. Remove the side cover from the head.
L#
2. Use a clean cloth soaked with the Biral T&D to wipe and clean the syringe (1), then apply
D
a thin coat to the circumference of the syringe.
54
3. Move the syringe (1) up and down to lubricate the syringe.
35
4. Apply a thin coat of the Biral T&D to the Q-axis gear teeth (2) with a clean cloth.
FV
5. Rotate the Q-axis gear (2) by hand to lubricate the gear teeth.
3U
by
T
JS
7
(2) Cover
:3
(1)
13
5
/0
03
0 9/
20
(1)
at
ed
NXTPHD022Eb
ad
o
nl
ow
D
6. Lubricate the O-ring in the syringes with MDV235-ZB grease by following the substeps
below.
a. Put the specified grease in the jar and then put the lid with the rods in it back on the
jar.
b. Remove the rod for lubricating the O-ring on the H04 head from the jig.
i
Tp
bR
C
s3
Rod (for H04)
L#
D
54
35
FV
Case
3U
by
NXTPHD118a
T
c. Wipe the excess grease off end of the rod with a clean cloth.
JS
7
Wipe here
:3
13
Rod
5
Excess grease
/0
03
0 9/
01MEC-0011E
20
at
ed
oad
nl
ow
D
d. Insert the rod into the syringe. Use the groove as a guide for the depth. Once the rod
is correctly inserted, lightly rotate it to apply the grease to the O-ring.
Note: Use a clean cloth to remove any grease from the top of the syringe.
Rod
i
Tp
Excess grease
Wipe here
bR
(3) O-ring
Syringe
C
s3
L#
D
Groove
54
35
FV
3U
NXTPHD119Ea
by
e. Put the rod back in the jig to apply more grease and then continue to lubricate the
other syringes on the head.
T
JS
1. Use a clean cloth to wipe off any excess grease around the holes where the rods are
:3
inserted.
13
5
/0
Wipe here
03
9/
dia.
0
20
dia.
at
ed
ad
o
㧦for H01
nl
01MEC-0012E
2. Make sure that the sizes of rod and hole match before inserting the rod.
D
3. When there is grease inside the jig (jar), keep it away from direct sunlight and store it in
a cool place.
1. Attach the mechanical valve sliding resistance measuring head (AA6KN**) to a push-
pull gauge.
Note: Use a push-pull gauge that has a maximum load value of 10 N.
2. Set the measuring head on the mechanical valve and read the measurement values on
the push-pull gauge as the you move the valve up and down.
i
Tp
3. Measure all of the mechanical valves. If any measurements fall out of the permissible
bR
range of 0.4 N to 2.0 N, then exchange the O-rings for that mechanical valve. Refer to
C
section 4.6.1 "Exchanging mechanical valve O-rings" for procedures on exchanging
s3
these items.
L#
D
54
0.4 N㨪2.0 N
35
FV
3U
by
Push-pull gauge
7
:3
13
Mechanical valve
5
/0
03
0 9/
20
at
ed
01MEC-0572E
ad
o
nl
ow
D
i
Tp
1. Wipe off any filth from the arm rotation axis with a clean cloth.
bR
2. Use an item like a cotton swab to apply a thin layer of Daphne Eponex No. 2 grease to
the stepping motor axis item, arm rotation axis and to the immediate items around it.
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
0 9/
20
at
ed
Arm
ad
o
01MEC-0534E
nl
ow
3. Turn the arm rotation axis several times to spread the lubricant.
D
i
Tp
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
0 9/
20
at
ed
ad
o
nl
ow
D
2. Remove the bolts from the mechanical valve retainers for the valves to exchange, and
then remove the retainers.
i
Tp
bR
C
s3
L#
Cover
D
Mechanical valve
54
35
FV
3U
by
T
JS
7
:3
13
NXTPHD117E
20
4. By using something such as fingernails, pull up on the O-ring for the mechanical valve.
at
Then insert the pointed end of the mechanical valve O-ring exchange tool (PM072M*)
ed
in the created gap and then remove the O-ring. Remove all six O-rings in the same
manner.
ad
o
nl
ow
D
5. Slide the new O-rings on the mechanical valve O-ring exchange tool from the pointed
end. Insert the mechanical valve into the O-ring exchange tool. Align a position on the
mechanical valve that has an O-ring groove with the end of the tool and then slide an O-
ring into the groove. Repeat for all 6 O-rings.
Mechanical valve
i
Tp
O-ring
bR
Groove
C
s3
L#
01MEC-0571E
D
6. Apply a thin layer of specified grease to the surface of the O-rings on the mechanical
54
valves.
35
FV
Required grease Application No. of grease Amount
location
3U gun shots (cc)
rings
T
7. Return the mechanical valve back to its position, set the valve retainer and then secure
JS
Caution: Do not overtighten. If overtightened the threads for the bolt on the head will be damaged
13
i
Tp
(3) Cam followers of 1 shot 0.005
bR
the stepping motor
C
Mobilith SHC100 (Mobil) (4) Q-axis gear 1 shot 0.18
s3
(upper, motor side)
L#
(5) R-axis gear 1 shot 0.26
D
54
1. Remove the side cover from the head.
35
2. Wipe off filth from the Z-axis ballscrew (1) and the Z-axis guide shaft (2) with a clean
FV
cloth. 3U
3. Use the grease gun to apply one shot of the specified grease onto a brush.
by
6. Move the Z-axis up and down by hand to lubricate the ballscrew and the guide shaft
7
:3
evenly.
13
8. Wipe off any filth from the stepping motor’s cam followers (3) with a clean cloth.
03
9. Apply a thin layer of the specified grease to the inside and circumference of the cam
9/
followers (3).
0
20
[Link] off from the Q-axis gear (4) and the R-axis gear (5) with a clean cloth.
ed
ad
[Link] the grease gun to apply one shot of the specified grease onto a brush.
o
[Link] the grease on the Q-axis gear teeth (4) and the R-axis gear teeth (5).
nl
ow
[Link] the Q-axis gear (4) and the R-axis gear (5) by hand to lubricate the gear teeth
D
evenly.
i
Tp
bR
1
C
2
s3
L#
5
D
54
35
Cover
FV
3U
3
by
3
T
JS
7
NXTPHD020Eb
:3
13
5
/0
03
9/
0
20
at
ed
oad
nl
ow
D
<Mechanical valves>
It is not possible to remove the mechanical valves for heads with serial number 00590 and
prior. Contact your Fuji representative to perform maintenance on these heads.
i
Tp
1. Remove the side cover from the head.
bR
2. Loosen the attachment bolts and then remove the mechanical valve retainers and
C
valves (4).
s3
3. Gently pull up on the mechanical valves to remove them from the head.
L#
D
4. Wipe off any filth from the mechanical valves with a clean cloth.
54
5. Use the grease gun to apply one shot of the specified grease onto a brush.
35
6. Apply a thin coat of grease to the surface of the mechanical valve O-rings.
Caution: Do not over tighten. If over tightened, the threads for the bolt on the head will be damaged
T
Cover
0 9/
Mechanical valve
20
at
ed
ad
o
nl
ow
D
MEMO:
i
Tp
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
9/
0
20
at
ed
oad
nl
ow
D
5. H08 Head
5.1 Maintenance Items and Frequency
CLN: indicates cleaning LUB: indicates lubrication CHK: indicates check EXG: indicates
exchange.
The times listed in this chart are only recommendations. Actual work time may differ. The
time required for personnel to pull modules forward or load and unload units may add to the
total work time required.
i
Tp
bR
Maintenance Locations
Every 6 months
Time Required
3C
12,000shrs
(4000 hrs)
L# hrs)
(160 hrs)
(700 hrs)
irregular
Monthly
Weekly
Yearly
(min.)
D(8000
54
H08 head Z-axis ball screw - - - - LUB - 10
35
H08Q head Z-axis guide shaft - - - - LUB - 10
FV
Cam follower of the - 3U- - - LUB - 10
stepping motor
Q-axis gear (upper, - - - - LUB - 5
by
motor side)
T
syringe side)
R-axis gear - - - - LUB - 5
7
:3
O-ring LUB 10
Syringes, O-rings - CLN, - - - - 15,
5
LUB 10
/0
inside syringe
03
* prism
at
* : This maintenance item is only required for a H08Q head. Refer to section 8. "Heads with
ad
Jig Fuji grease gun kit AWPJ8201 Used to apply lubricant to grease
fittings
i
Tp
Jig Head maintenance stand AA0AMO* Used to clean and lub the placing
bR
head
C
s3
L#
D
54
35
NXTPHD027a
FV
3U
Jig Filter cleaning basket K1325C Used to clean the head filters.
by
NXTPHD028
7
:3
13
Jig Syringe O-ring lubrication jig AA40R0* Used to lubricate the O-ring in the
syringe.
5
/0
NXTPHD122a
o
Jig Syringe cleaning unit QK00C** Used for cleaning the syringes on
nl
01MEC-0523
Jig Mechanical valve sliding resistance Used for inspecting the mechanical
measuring head AA6KN** valve O-rings on the placing head.
01MEC-0567
Jig Mechanical valve O-ring exchange tool Used for exchanging the
i
Tp
PM072M* mechanical valve O-rings on the
placing head.
bR
1 month (700 hrs)
C
12,000 hour
s3
L#
D
01MEC-0566
54
Tools Metric Allen wrench set 1 month (700 hrs)
35
12,000 hour
FV
Torque wrench 3U 12,000 hour
(30 g)
1 month (700 hrs)
7
12,000 hour
:3
13
12,000 hour
20
i
Tp
• H04, H08, H12(S), H12HS head: Maximum 40 filters
bR
• H01, H02 head: Maximum 20 filters
C
s3
L#
D
54
NXTPHD028
35
Procedure
FV
1. Slide the aluminum lock-ring to the right and remove the filter cases (with filter inside).
3U
by
T
JS
7
:3
13
5
/0
Filter
03
DWG No.:AA0AL0*
0 9/
20
Filter case
at
Lock-ring NXTPHD006Eb
ed
2. Wash the filter cases and filters in neutral detergent solvent, or replace if excessively
ad
dirty.
o
nl
Note: Put the filter while still in the case in the optional filter cleaning basket (K1325C). Clean
ow
them by soaking them in neutral detergent in an ultrasonic cleaning machine for 5 minutes.
D
1. Connect an air hose to the syringe cleaning unit (QK00C**) to supply air.
i
Tp
bR
C
s3
L#
D
01MEC-0523
54
2. Remove the side cover from the head.
35
FV
3U
by
T
JS
Cover
7
:3
13
5
/0
03
9/
01MEC-543E
0
20
3. Ensure that there no objects or dust on the attaching surfaces of the placing head and
the holder. Use a clean dry cloth to remove any foreign objects.
at
ed
01MEC-0526E
4. While holding the head handle, insert the clamp joints into the grooves on the holder.
Pull the lever on the syringe cleaning unit forward and down to secure the placing head.
Placing head
i
Tp
bR
C
s3
L#
D
Press the head down
54
firmly against the holder.
35
Placing head
FV
Holder
3U
01MEC-0527E
by
5. Set a box covered with a cloth or put a cloth under the head.
T
Caution: Use a box size that does not interfere with the head. Remove the box when attaching or
JS
removing a head.
7
:3
13
5
/0
03
0 9/
20
at
ed
oad
nl
ow
D
01MEC-0545
6. Replace the all of the filters with new filters or with cleaned filters. It is also possible to
set filter cases without filters in the head. Refer to section 5.3.1 "Cleaning the placing
head vacuum filters" for details.
Caution: Do not use dirty filters.
i
Tp
bR
C
s3
Filter locked Filter unlocked
L#
D
54
35
FV
3U
by
01MEC-0548E
T
01MEC-0528E
nl
ow
D
9. Lower only one of the vacuum valves to supply air to the syringe. While supplying air
for 30 seconds to the syringe, move the syringe up and down five times.
Caution: Clean only one syringe at a time because the effectiveness of the cleaning is reduced due
to the air pressure dropping when air is supplied to multiple syringes at the same time.
CAUTION
i
that items can be blown into the eyes from the syringe when the
Tp
vacuum valve is lowered.
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
01MEC-0549
5
[Link] cleaning with filters in the cases, the filter positions become displaced. Push the
/0
03
filters back in place. If cleaning was performed with just filter cases attached, replace
the filter cases with filter cases that have filters.
0 9/
20
at
ed
oad
nl
ow
D
01MEC-0532
[Link] off any foreign objects clinging to the side of the syringe with a clean dry cloth.
Lubricate the syringes at the same time as cleaning them. Refer to section 5.3.3
"Placing head syringes and O-rings lubrication" for details on lubricating the syringes.
[Link] all the syringes have been cleaned, while holding the head handle, lift the lever
on the syringe cleaning unit and then remove the head from the unit. Reattach the side
cover back on the head.
i
Tp
jig (rod)
bR
1. Remove the side cover from the head.
C
s3
2. Use a clean cloth soaked with the Biral T&D to wipe and clean the syringe (1), then apply
a thin coat to the circumference of the syringe.
L#
D
3. Move the syringe (1) up and down to lubricate the syringe.
54
35
FV
3U
(1)
by
T
JS
7
:3
13
(1)
5
/0
NXTPHD016Eb
03
9/
4. Apply a thin coat of the Biral T&D to the Q-axis gear teeth (2) with a clean cloth.
0
20
5. Rotate the Q-axis gear (2) by hand to lubricate the gear teeth.
at
ed
(2)
ad
o
nl
ow
D
01MEC-0538
6. Lubricate the O-ring in the syringes with MDV235-ZB grease by following the substeps
below.
a. Put the specified grease in the jar and then put the lid with the rods in it back on the
jar.
b. Remove the rod for lubricating the O-ring on the H12(S)/H08 head from the jig.
i
Tp
bR
C
s3
Rod
L#
(for H8/H12(S)/H12HS)
D
54
35
FV
Case
3U
by
NXTPHD120Ea
T
c. Wipe the excess grease off end of the rod with a clean cloth.
JS
7
:3
Wipe here
13
5
01MEC-0013E
20
at
ed
oad
nl
ow
D
d. Insert the rod into the syringe. Use the groove as a guide for the depth. Once the rod
is inserted, lightly rotate it to apply the grease to the O-ring.
Note: Use a clean cloth to remove any grease from the top of the syringe.
Rod
Excess grease
i
Tp
Wipe here
bR
Syringe
C
s3
L#
D
54
Groove
(3) O-ring
35
FV
3U
by
T
NXTPHD121Eb
JS
e. Put the rod back in the jig to apply more grease and then continue to lubricate the
other syringes on the head.
7
:3
1. Use a clean cloth to wipe off any excess grease around the holes where the rods are
5
/0
inserted.
03
0 9/
Wipe here
20
dia.
at
ed
dia.
ad
o
nl
ow
㧦for H04
㧦for H08/H12/H12HS
D
01MEC-0012Ea
2. Make sure that the sizes of rod and hole match before inserting the rod.
3. When there is grease inside the jig (jar), keep it away from direct sunlight and store it in
a cool place.
1. Attach the mechanical valve sliding resistance measuring head (AA6KN**) to a push-
pull gauge.
Note: Use a push-pull gauge that has a maximum load value of 10 N.
2. Set the measuring head on the mechanical valve and read the measurement values on
the push-pull gauge as the you move the valve up and down.
i
Tp
3. Measure all of the mechanical valves. If any measurements fall out of the permissible
bR
range of 0.4 N to 2.0 N, then exchange the O-rings for that mechanical valve. Refer to
C
section 5.6.1 "Exchanging mechanical valve O-rings" for procedures on exchanging
s3
these items.
L#
D
54
0.4 N㨪2.0 N
35
FV
3U
by
Push-pull gauge
7
:3
Mechanical valve
13
5
/0
03
0 9/
20
at
ed
01MEC-0573E
ad
o
nl
ow
D
i
Tp
1. Wipe off any filth from the arm rotation axis with a clean cloth.
bR
2. Use an item like a cotton swab to apply a thin layer of Daphne Eponex No. 2 grease to
the stepping motor axis item, arm rotation axis and to the immediate items around it.
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
0 9/
20
at
ed
ad
Arm
o
NXTPHD042E
nl
ow
3. Turn the arm rotation axis several times to spread the lubricant.
D
i
Tp
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
0 9/
20
at
ed
ad
o
nl
ow
D
2. Remove the bolts from the mechanical valve retainers for the valves to exchange, and
then remove the retainers.
i
Tp
bR
C
s3
L#
D
54
Cover
35
FV
3U Mechanical valve
by
T
JS
7
0.35 Nm
13
5
/0
03
0 9/
NXTPHD009Ed
at
4. By using something such as fingernails, pull up on the O-ring for the mechanical valve.
ed
Then insert the pointed end of the mechanical valve O-ring exchange tool (PM072M*)
in the created gap and then remove the O-ring. Remove all six O-rings in the same
ad
manner.
o
nl
ow
D
5. Slide the new O-rings on the mechanical valve O-ring exchange tool from the pointed
end. Insert the mechanical valve into the O-ring exchange tool. Align a position on the
mechanical valve that has an O-ring groove with the end of the tool and then slide an O-
ring into the groove. Repeat for all 6 O-rings.
Mechanical valve
i
Tp
O-ring
bR
Groove
C
s3
L#
01MEC-0571E
D
6. Apply a thin layer of specified grease to the surface of the O-rings on the mechanical
54
valves.
35
FV
Required grease Application No. of grease Amount
location
3U gun shots (cc)
rings
T
7. Return the mechanical valve back to its position, set the valve retainer and then secure
JS
Caution: Do not overtighten. If overtightened the threads for the bolt on the head will be damaged
13
i
Tp
(3) Cam follower of 1 shot 0.004
bR
the stepping motor
C
Mobilith SHC100 (Mobil) (4) Q-axis gear 1 shot 0.138
s3
(upper, motor side)
L#
(5) R-axis gear 1 shot 0.224
D
54
1. Remove the side cover from the head.
35
2. Wipe off filth from the Z-axis ballscrew (1) and the Z-axis guide shaft (2) with a clean
FV
cloth. 3U
3. Use the grease gun to apply one shot of the specified grease onto a brush.
by
6. Move the Z-axis up and down by hand to lubricate the ballscrew and the guide shaft
7
:3
evenly.
13
8. Wipe off filth from the stepping motor’s cam followers (3) with a clean cloth.
03
9. Apply a thin layer of the specified grease to the inside and circumference of the cam
9/
followers (3).
0
20
[Link] off from the Q-axis gear (4) and the R-axis gear (5) with a clean cloth.
ed
ad
[Link] the grease gun to apply one shot of the specified grease onto a brush.
o
[Link] the grease on the Q-axis gear teeth (4) and the R-axis gear teeth (5).
nl
ow
[Link] the Q-axis gear (4) and the R-axis gear (5) by hand to lubricate the gear teeth
D
evenly.
5
4
i
1
Tp
Cover
bR
C
2
s3
L#
D
54
35
FV
3U
by
3
T
3
JS
7
:3
NXTPHD010Ef
13
5
/0
03
9/
0
20
at
ed
oad
nl
ow
D
<Mechanical valves>
2. Loosen the attachment bolts and then remove the mechanical valve retainers and
i
Tp
valves (8).
bR
3. Gently pull up on the mechanical valves to remove them from the head.
C
s3
4. Wipe off any filth from the mechanical valves with a clean cloth.
L#
5. Use the grease gun to apply one shot of the specified grease onto a brush.
D
6. Apply a thin coat of grease to the surface of the mechanical valve O-rings.
54
35
7. Reinsert the mechanical valves.
FV
8. Set the mechanical valve retainers and tighten them with a bolt.
3U
Caution: Do not overtighten. If overtightened the threads for the bolt on the head will be damaged
and the head will need to be replaced.
by
T
JS
7
:3
13
5
/0
03
Cover
0 9/
20
Mechanical valve
at
ed
ad
o
nl
ow
MEMO:
i
Tp
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
9/
0
20
at
ed
oad
nl
ow
D
6. H12(S) Head
6.1 Maintenance Items and Frequency
CLN: indicates cleaning LUB: indicates lubrication CHK: indicates check EXG: indicates
exchange.
The times listed in this chart are only recommendations. Actual work time may differ. The
time required for personnel to pull modules forward or load and unload units may add to the
total work time required.
i
Tp
bR
Maintenance Locations
6 months
Time Required
C
shrs
(4000 hrs)
L# hrs)
(160 hrs)
(700 hrs)
irregular
Monthly
Weekly
12,000 3
DYearly
(min.)
(8000
5Every
4
H12(S) head Z-axis ball screw - - - - LUB - 10
35
Z-axis guide shaft - - - - LUB - 10
FV
Cam follower of the - 3U - - - LUB - 10
stepping motor
Q-axis gear (upper, - - - - LUB - 5
by
motor side)
T
syringe side)
R-axis gear - - - - LUB - 5
7
:3
O-ring LUB 10
Syringes, O-rings - CLN, - - - - 15,
5
LUB 10
/0
inside syringe
03
prism
at
* : This maintenance item is only required for a H12SQ head. Refer to section 8. "Heads
ad
with Part Side Recognition" for the procedures on this maintenance item.
o
nl
ow
D
Jig Fuji grease gun kit AWPJ8201 Used to apply lubricant to grease
fittings
i
Tp
Jig Head maintenance stand AA0AMO* Used to clean and lub the placing
bR
head
C
s3
L#
D
54
35
FV
NXTPHD027a
3U
Jig Filter cleaning basket K1325C Used to clean the head filters.
by
NXTPHD028
7
:3
Jig Syringe O-ring lubrication jig AA40R0* Used to lubricate the O-ring in the
13
syringe.
5
NXTPHD122a
ad
Jig Syringe cleaning unit QK00C** Used for cleaning the syringes on
o
nl
01MEC-0523
Jig Mechanical valve sliding resistance Used for inspecting the mechanical
measuring head AA6KN** valve O-rings on the placing head.
01MEC-0567
Jig Mechanical valve O-ring exchange tool Used for exchanging the mechanical
i
Tp
PM072M* valve O-rings on the placing head.
bR
1 month (700 hrs)
12,000 hour
C
s3
L#
D
01MEC-0566
54
Tools Metric Allen wrench set 1 month (700 hrs)
35
12,000 hour
FV
Torque wrench 3U 12,000 hour
(30 g)
1 month (700 hrs)
7
12,000 hour
:3
13
12,000 hour
20
i
Tp
• H04, H08, H12(S), H12HS head: Maximum 40 filters
bR
• H01, H02 head: Maximum 20 filters
C
s3
L#
D
54
NXTPHD028
35
Procedure
FV
1. Slide the aluminum lock-ring to the right and remove the filter cases (with filter inside).
3U
by
T
JS
Filter cover
7
:3
13
Filter
5
(AA19H0*)
/0
03
Filter case
0 9/
20
at
01MEC-0194E
ed
2. Wash the filter cases and filters in neutral detergent solvent, or replace if excessively
ad
dirty.
o
nl
Note: Put the filter while still in the case in the optional filter cleaning basket (K1325C). Clean
ow
them by soaking them in neutral detergent in an ultrasonic cleaning machine for 5 minutes.
D
1. Connect an air hose to the syringe cleaning unit (QK00C**) to supply air.
i
Tp
bR
C
s3
L#
D
01MEC-0523
54
2. Remove the side cover from the head.
35
FV
3U
by
T
JS
Cover
7
:3
13
5
/0
03
0 9/
01MEC-0525E
20
3. Ensure that there no objects or dust on the attaching surfaces of the placing head and
the holder. Use a clean dry cloth to remove any foreign objects.
at
ed
01MEC-0526E
4. While holding the head handle, insert the clamp joints into the grooves on the holder.
Pull the lever on the syringe cleaning unit forward and down to secure the placing head.
Placing head
i
Tp
bR
C
s3
L#
D
Press the head down
54
firmly against the holder.
35
Placing head
FV
Holder
3U
01MEC-0527E
by
5. Set a box covered with a cloth or put a cloth under the head.
T
Caution: Use a box size that does not interfere with the head. Remove the box when attaching or
JS
removing a head.
7
:3
13
5
/0
03
0 9/
20
at
ed
oad
nl
ow
D
01MEC-0545
6. Replace the all of the filters with new filters or with cleaned filters. It is also possible to
set filter cases without filters in the head. Refer to section 6.3.1 "Cleaning the placing
head vacuum filters" for details.
Caution: Do not use dirty filters.
i
Tp
bR
C
s3
L#
Filter locked Filter unlocked
D
54
35
FV
3U
by
01MEC-0529E
T
JS
01MEC-0528E
ow
D
9. Lower only one of the vacuum valves to supply air to the syringe. While supplying air
for 30 seconds to the syringe, move the syringe up and down five times.
Caution: Clean only one syringe at a time because the effectiveness of the cleaning is reduced due
to the air pressure dropping when air is supplied to multiple syringes at the same time.
CAUTION
i
that items can be blown into the eyes from the syringe when the
Tp
vacuum valve is lowered.
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
01MEC-0550
/0
[Link] cleaning with filters in the cases, the filter positions become displaced. Push the
03
filters back in place. If cleaning was performed with just filter cases attached, replace
9/
01MEC-0551
[Link] off any foreign objects clinging to the side of the syringe with a clean dry cloth.
Lubricate the syringes at the same time as cleaning them. Refer to section 6.3.3
"Placing head syringes and O-rings lubrication" for details on lubricating the syringes.
[Link] all the syringes have been cleaned, while holding the head handle, lift the lever
on the syringe cleaning unit and then remove the head from the unit. Reattach the side
cover back on the head.
i
Tp
bR
1. Remove the side cover from the head.
C
2. Use a clean cloth soaked with the Biral T&D to wipe and clean the syringe (1), then apply
s3
a thin coat to the circumference of the syringe.
L#
3. Move the syringe (1) up and down to lubricate the syringe.
D
54
35
FV
3U
by
T
JS
(1)
7
:3
13
5
/0
03
(1)
0 9/
20
01MEC-0551
at
4. Apply a thin coat of the Biral T&D to the Q-axis gear teeth (2) with a clean cloth.
ed
5. Rotate the Q-axis gear (2) by hand to lubricate the gear teeth.
ad
o
nl
(2)
ow
D
01MEC-0539
6. Lubricate the O-ring in the syringes with MDV235-ZB grease by following the substeps
below.
a. Put the specified grease in the jar and then put the lid with the rods in it back on the
jar.
b. Remove the rod for lubricating the O-ring on the H12(S)/H08 head from the jig.
i
Tp
bR
C
s3
Rod
L#
(for H8/H12(S)/H12HS)
D
54
35
FV
Case
3U
by
NXTPHD120Ea
T
c. Wipe the excess grease off end of the rod with a clean cloth.
JS
7
:3
Wipe here
13
5
01MEC-0013E
20
at
ed
oad
nl
ow
D
d. Insert the rod into the syringe. Use the groove as a guide for the depth. Once the rod
is inserted, lightly rotate it to apply the grease to the O-ring.
Note: Use a clean cloth to remove any grease from the top of the syringe.
Rod
i
Tp
bR
Excess grease
Wipe here
C
s3
Syringe
L#
D
54
35
Groove
FV
(3) O-ring
3U
by
T
JS
01MEC-0524E
7
:3
e. Put the rod back in the jig to apply more grease and then continue to lubricate the
13
1. Use a clean cloth to wipe off any excess grease around the holes where the rods are
9/
inserted.
0
20
at
Wipe here
ed
dia.
ad
o
dia.
nl
ow
D
㧦for H04
㧦for H08/H12/H12HS
01MEC-0012Ea
2. Make sure that the sizes of rod and hole match before inserting the rod.
3. When there is grease inside the jig (jar), keep it away from direct sunlight and store it in
a cool place.
1. Attach the mechanical valve sliding resistance measuring head (AA6KN**) to a push-
pull gauge.
Note: Use a push-pull gauge that has a maximum load value of 10 N.
2. Set the measuring head on the mechanical valve and read the measurement values on
the push-pull gauge as the you move the valve up and down.
i
Tp
3. Measure all of the mechanical valves. If any measurements fall out of the permissible
bR
range of 0.4 N to 2.0 N, then exchange the O-rings for that mechanical valve. Refer to
C
section 6.6.1 "Exchanging mechanical valve O-rings" for procedures on exchanging
s3
these items.
L#
D
54
0.4 N㨪2.0 N
35
FV
3U
by
01MEC-0568E
ed
ad
o
nl
ow
D
i
Tp
1. Wipe off any filth from the arm rotation axis with a clean cloth.
bR
2. Use an item like a cotton swab to apply a thin layer of Daphne Eponex No. 2 grease to
the stepping motor axis item, arm rotation axis and to the immediate items around it.
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
0 9/
20
at
ed
ad
Arm
o
nl
01MEC-0535E
ow
3. Turn the arm rotation axis several times to spread the lubricant.
D
i
Tp
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
0 9/
20
at
ed
ad
o
nl
ow
D
2. Remove the bolts from the mechanical valve retainers for the valves to exchange, and
then remove the retainers.
i
Tp
bR
C
s3
L#
D
Cover
54
35
Mechanical valve
FV
3U
by
T
JS
7
:3
0.35 Nm
5
/0
03
0 9/
01MEC-0525E
at
4. By using something such as fingernails, pull up on the O-ring for the mechanical valve.
ed
Then insert the pointed end of the mechanical valve O-ring exchange tool (PM072M*)
in the created gap and then remove the O-ring. Remove all six O-rings in the same
ad
manner.
o
nl
ow
D
5. Slide the new O-rings on the mechanical valve O-ring exchange tool from the pointed
end. Insert the mechanical valve into the O-ring exchange tool. Align a position on the
mechanical valve that has an O-ring groove with the end of the tool and then slide an O-
ring into the groove. Repeat for all 6 O-rings.
Mechanical valve
i
Tp
O-ring
bR
Groove
C
s3
L#
01MEC-0571E
D
6. Apply a thin layer of specified grease to the surface of the O-rings on the mechanical
54
valves.
35
FV
Required grease Application No. of grease Amount
location
3U gun shots (cc)
rings
T
7. Return the mechanical valve back to its position, set the valve retainer and then secure
JS
Caution: Do not overtighten. If overtightened the threads for the bolt on the head will be damaged
13
i
Tp
(3) Cam follower of 1 shot 0.004
bR
the stepping motor
C
Mobilith SHC100 (Mobil) (4) Q-axis gear 1 shot 0.138
s3
(upper, motor side)
L#
(5) R-axis gear 1 shot 0.224
D
54
1. Remove the side cover from the head.
35
2. Wipe off filth from the Z-axis ballscrew (1) and the Z-axis guide shaft (2) with a clean
FV
cloth. 3U
3. Use the grease gun to apply one shot of the specified grease onto a brush.
by
6. Move the Z-axis up and down by hand to lubricate the ballscrew and the guide shaft
7
:3
evenly.
13
8. Wipe off filth from the stepping motor’s cam followers (3) with a clean cloth.
03
9. Apply a thin layer of the specified grease to the inside and circumference of the cam
9/
followers (3).
0
20
[Link] off from the Q-axis gear (4) and the R-axis gear (5) with a clean cloth.
ed
ad
[Link] the grease gun to apply one shot of the specified grease onto a brush.
o
[Link] the grease on the Q-axis gear teeth (4) and the R-axis gear teeth (5).
nl
ow
[Link] the Q-axis gear (4) and the R-axis gear (5) by hand to lubricate the gear teeth
D
evenly.
1 5
2
Cover
i
Tp
4
bR
C
s3
L#
D
54
35
FV
3U
by
3
T
3
JS
7
:3
01MEC-0541E
13
5
/0
03
9/
0
20
at
ed
oad
nl
ow
D
<Mechanical valves>
2. Loosen the attachment bolts and then remove the mechanical valve retainers and
i
Tp
valves (12).
bR
3. Gently pull up on the mechanical valves to remove them from the head.
C
s3
4. Wipe off any filth from the mechanical valves with a clean cloth.
L#
5. Use the grease gun to apply one shot of the specified grease onto a brush.
D
6. Apply a thin coat of grease to the surface of the mechanical valve O-rings.
54
35
7. Reinsert the mechanical valves.
FV
8. Set the mechanical valve retainers and tighten them with a bolt.
3U
Caution: Do not overtighten. If overtightened the threads for the bolt on the head will be damaged
and the head will need to be replaced.
by
T
JS
7
:3
13
5
/0
Cover
03
9/
Mechanical valve
0
20
at
ed
ad
o
nl
ow
0.35 Nm
MEMO:
i
Tp
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
9/
0
20
at
ed
oad
nl
ow
D
7. H12HS Head
7.1 Maintenance Items and Frequency
CLN: indicates cleaning LUB: indicates lubrication CHK: indicates check EXG: indicates
exchange.
The times listed in this chart are only recommendations. Actual work time may differ. The
time required for personnel to pull modules forward or load and unload units may add to the
total work time required.
i
Tp
bR
Maintenance Locations
6 months
Time Required
C
shrs
(4000 hrs)
L# hrs)
(160 hrs)
(700 hrs)
irregular
Monthly
Weekly
12,000 3
DYearly
(min.)
(8000
5Every
4
H12HS head Z-axis ball screw - - - - LUB - 10
35
Z-axis guide shaft - - - - LUB - 10
FV
Cam follower of the - 3U - - - LUB - 10
stepping motor
Q-axis gear (upper, - - - - LUB - 5
by
motor side)
T
syringe side)
R-axis gear - - - - LUB - 5
7
:3
O-ring LUB 10
Syringes, O-rings - CLN, - - - - 15,
5
LUB 10
/0
inside syringe
03
* prism
at
* : This maintenance item is only required for a H12HSQ head. Refer to section 8. "Heads
ad
with Part Side Recognition" for the procedures on this maintenance item.
o
nl
ow
D
Jig Fuji grease gun kit AWPJ8201 Used to apply lubricant to grease
fittings
i
Tp
Jig Head maintenance stand AA0AMO* Used to clean and lub the placing
bR
head
C
s3
L#
D
54
35
FV
NXTPHD027a
3U
Jig Filter cleaning basket K1325C Used to clean the head filters.
by
NXTPHD028
7
:3
Jig Syringe O-ring lubrication jig AA40R0* Used to lubricate the O-ring in the
13
syringe.
5
NXTPHD122a
ad
Jig Syringe cleaning unit QK00C** Used for cleaning the syringes on
o
nl
01MEC-0523
01MEC-0567
Jig Mechanical valve O-ring exchange tool Used for exchanging the
i
Tp
PM072M* mechanical valve O-rings on the
placing head.
bR
1 month (700 hrs)
C
12,000 hour
s3
L#
D
01MEC-0566
54
Tools Metric Allen wrench set 1 month (700 hrs), 12,000 hour
35
FV
Torque wrench 12,000 hour
3U
Lubri Daphne Eponex No.2 (Idemitsu) 6 month (4,000 hrs)
cants 12,000 hour
by
K3032K (30 g)
JS
12,000 hour
20
i
Tp
• H04, H08, H12(S), H12HS head: Maximum 40 filters
bR
• H01, H02 head: Maximum 20 filters
C
s3
L#
D
54
NXTPHD028
35
Procedure
FV
1. Slide the aluminum lock-ring to the right and remove the filter cases (with filter inside).
3U
by
T
JS
7
:3
Filter cover
13
5
Filter
/0
(AA19H0*)
03
9/
Filter case
0
20
at
ed
01MEC-0194E
ad
2. Wash the filter cases and filters in neutral detergent solvent, or replace if excessively
o
dirty.
nl
ow
Note: Put the filter while still in the case in the optional filter cleaning basket (K1325C). Clean
them by soaking them in neutral detergent in an ultrasonic cleaning machine for 5 minutes.
D
1. Connect an air hose to the syringe cleaning unit (QK00C**) to supply air.
i
Tp
bR
C
s3
L#
D
01MEC-0523
54
2. Remove the side cover from the head.
35
FV
3U
by
T
JS
Cover
7
:3
13
5
/0
03
9/
01MEC-0544E
0
20
3. Ensure that there no objects or dust on the attaching surfaces of the placing head and
the holder. Use a clean dry cloth to remove any foreign objects.
at
ed
01MEC-0526E
4. While holding the head handle, insert the clamp joints into the grooves on the holder.
Pull the lever on the syringe cleaning unit forward and down to secure the placing head.
Placing head
i
Tp
bR
C
s3
L#
D
Press the head down
54
firmly against the holder.
35
Placing head
FV
Holder
3U
01MEC-0527E
by
5. Set a box covered with a cloth or put a cloth under the head.
T
Caution: Use a box size that does not interfere with the head. Remove the box when attaching or
JS
removing a head.
7
:3
13
5
/0
03
0 9/
20
at
ed
oad
nl
ow
D
01MEC-0545
6. Replace the all of the filters with new filters or with cleaned filters. It is also possible to
set filter cases without filters in the head. Refer to section 7.3.1 "Cleaning the placing
head vacuum filters" for details.
Caution: Do not use dirty filters.
i
Tp
bR
C
s3
L#
Filter locked Filter unlocked
D
54
35
FV
3U
by
01MEC-0530E
T
JS
01MEC-0528E
ow
D
9. Lower only one of the vacuum valves to supply air to the syringe. While supplying air
for 30 seconds to the syringe, move the syringe up and down five times.
Caution: Clean only one syringe at a time because the effectiveness of the cleaning is reduced due
to the air pressure dropping when air is supplied to multiple syringes at the same time.
CAUTION
i
that items can be blown into the eyes from the syringe when the
Tp
vacuum valve is lowered.
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
01MEC-0554
/0
[Link] cleaning with filters in the cases, the filter positions become displaced. Push the
03
filters back in place. If cleaning was performed with just filter cases attached, replace
9/
01MEC-0555
[Link] off any foreign objects clinging to the side of the syringe with a clean dry cloth.
Lubricate the syringes at the same time as cleaning them. Refer to section 7.3.3
"Placing head syringes and O-rings lubrication" for details on lubricating the syringes.
[Link] all the syringes have been cleaned, while holding the head handle, lift the lever
on the syringe cleaning unit and then remove the head from the unit. Reattach the side
cover back on the head.
i
Tp
jig (rod)
bR
1. Use a clean cloth soaked with the Biral T&D to wipe and clean the syringe (1), then apply
C
a thin coat to the circumference of the syringe.
s3
2. Move the syringe (1) up and down to lubricate the syringe.
L#
D
54
35
FV
3U
(1)
by
T
JS
7
:3
13
(1)
5
/0
01MEC-0555
03
3. Apply a thin coat of the Biral T&D to the Q-axis gear teeth (2) with a clean cloth.
0 9/
4. For H12HS heads, apply Biral T&D to the syringe gear teeth (2).
20
5. Rotate the Q-axis gear (2) by hand to lubricate the gear teeth.
at
ed
ad
(2)
o
nl
ow
D
(2)
01MEC-0540
6. Lubricate the O-ring in the syringes with MDV235-ZB grease by following the substeps
below.
a. Put the specified grease in the jar and then put the lid with the rods in it back on the
jar.
b. Remove the rod for lubricating the O-ring on the H12(S)/H08 head from the jig.
i
Tp
bR
C
s3
L#
Rod
(for H8/H12(S)/H12HS)
D
54
35
FV
3U
Case
by
NXTPHD120Ea
T
JS
c. Wipe the excess grease off end of the rod with a clean cloth.
7
:3
13
Wipe here
5
/0
03
01MEC-0013E
ed
oad
nl
ow
D
d. Insert the rod into the syringe. Use the groove as a guide for the depth. Once the rod
is inserted, lightly rotate it to apply the grease to the O-ring.
Note: Use a clean cloth to remove any grease from the top of the syringe.
Rod
i
Tp
Excess grease
bR
Wipe here
C
s3
Syringe
L#
D
54
35
Groove
FV
(3) O-ring
3U
by
T
JS
01MEC-0533E
7
e. Put the rod back in the jig to apply more grease and then continue to lubricate the
:3
1. Use a clean cloth to wipe off any excess grease around the holes where the rods are
03
inserted.
0 9/
20
Wipe here
at
ed
dia.
ad
dia.
o
nl
ow
D
㧦for H04
㧦for H08/H12/H12HS
01MEC-0012Ea
2. Make sure that the sizes of rod and hole match before inserting the rod.
3. When there is grease inside the jig (jar), keep it away from direct sunlight and store it in
a cool place.
1. Attach the mechanical valve sliding resistance measuring head (AA6KN**) to a push-
pull gauge.
Note: Use a push-pull gauge that has a maximum load value of 10 N.
2. Set the measuring head on the mechanical valve and read the measurement values on
the push-pull gauge as the you move the valve up and down.
i
Tp
3. Measure all of the mechanical valves. If any measurements fall out of the permissible
bR
range of 0.4 N to 2.0 N, then exchange the O-rings for that mechanical valve. Refer to
C
section 7.6.1 "Exchanging mechanical valve O-rings" for procedures on exchanging
s3
these items.
L#
D
54
0.4 N㨪2.0 N
35
FV
3U
by
01MEC-0574E
at
ed
ad
o
nl
ow
D
i
Tp
1. Wipe off any filth from the arm rotation axis with a clean cloth.
bR
2. Use an item like a cotton swab to apply a thin layer of Daphne Eponex No. 2 grease to
the stepping motor axis item, arm rotation axis and to the immediate items around it.
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
0 9/
20
at
ed
ad
Arm
o
01MEC-0536E
nl
ow
3. Turn the arm rotation axis several times to spread the lubricant.
D
i
Tp
bR
C
s3
L#
D
54
35
FV
3U
by
T
JS
7
:3
13
5
/0
03
0 9/
20
at
ed
ad
o
nl
ow
D
2. Remove the bolts from the mechanical valve retainers for the valves to exchange, and
then remove the retainers.
i
Tp
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Cover
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Mechanical valve
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4. By using something such as fingernails, pull up on the O-ring for the mechanical valve.
ed
Then insert the pointed end of the mechanical valve O-ring exchange tool (PM072M*)
ad
in the created gap and then remove the O-ring. Remove all six O-rings in the same
manner.
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ow
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5. Slide the new O-rings on the mechanical valve O-ring exchange tool from the pointed
end. Insert the mechanical valve into the O-ring exchange tool. Align a position on the
mechanical valve that has an O-ring groove with the end of the tool and then slide an O-
ring into the groove. Repeat for all 6 O-rings.
Mechanical valve
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O-ring
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Groove
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01MEC-0571E
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6. Apply a thin layer of specified grease to the surface of the O-rings on the mechanical
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valves.
35
FV
Required grease Application No. of grease Amount
location
3U gun shots (cc)
rings
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7. Return the mechanical valve back to its position, set the valve retainer and then secure
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Caution: Do not overtighten. If overtightened the threads for the bolt on the head will be damaged
13
NS7 (NSK) or Multemp SRL (Kyodo (1) Z-axis ballscrew 1 shot 0.058
Yushi)
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Daphne Eponex No. 2 (Idemitsu) (2) Z-axis guide shaft 1 shot 0.064
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(3) Cam follower of 1 shot 0.004
the stepping motor
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Mobilith SHC100 (Mobil) (4) Q-axis gear 1 shot 0.138
(upper, motor side)
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(5) R-axis gear 1 shot 0.224
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1. Remove the side cover from the head.
FV
2. Wipe off filth from the Z-axis ballscrew (1) and the Z-axis guide shaft (2) with a clean
cloth.
3U
3. Use the grease gun to apply one shot of the specified grease onto a brush.
by
6. Move the Z-axis up and down by hand to lubricate the ballscrew and the guide shaft
13
evenly.
5
8. Wipe off filth from the stepping motor’s cam followers (3) with a clean cloth.
9/
9. Apply a thin layer of the specified grease to the inside and circumference of the cam
0
20
followers (3).
at
[Link] off from the Q-axis gear (4) and the R-axis gear (5) with a clean cloth.
ad
[Link] the grease gun to apply one shot of the specified grease onto a brush.
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[Link] the grease on the Q-axis gear teeth (4) and the R-axis gear teeth (5).
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[Link] the Q-axis gear (4) and the R-axis gear (5) by hand to lubricate the gear teeth
D
evenly.
5
2
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01MEC-0195a
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5
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<Mechanical valves>
2. Loosen the attachment bolts and then remove the mechanical valve retainers and
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valves (12).
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3. Gently pull up on the mechanical valves to remove them from the head.
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4. Wipe off any filth from the mechanical valves with a clean cloth.
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5. Use the grease gun to apply one shot of the specified grease onto a brush.
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6. Apply a thin coat of grease to the surface of the mechanical valve O-rings.
54
35
7. Reinsert the mechanical valves.
FV
8. Set the mechanical valve retainers and tighten them with a bolt.
3U
Caution: Do not overtighten. If overtightened the threads for the bolt on the head will be damaged
and the head will need to be replaced.
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5
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Cover
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0 9/
Mechanical valve
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MEMO:
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Prepare a cotton swab and perform the procedures listed below.
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1. Use the cotton swab to gently wipe the glass cover clean.
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Glass cover
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Glass cover
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01NST-0202aE
Type
Information on the type of fluorescent seal used is listed below. Translucent tape is also
required for the replacement. Prepare the fluorescent tape and the translucent tape as a
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set.
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Fluorescent tape Translucent tape
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H08Q PS290x PS0310x
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H12SQ / H12SQ PS291x PS0311x
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Fluorescent seal
7
:3
01NST-0199E
13
Replacement procedures
5
/0
Ring
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01NST-0200E
2. Remove both the translucent tape and the fluorescent tape from the cap.
Translucent tape
Fluorescent tape
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01NST-0201E
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3. Affix the new fluorescent tape to the cap. Align the beginning of the tape with the
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elliptical hole at the bottom of the cap.
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Fluorescent tape
35
FV
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Note:
13
3. The two ends of the fluorescent tape should overlap slightly when affixed (see the picture
below).
0 9/
20
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Overlap
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01NST-0213E
4. Affix the translucent tape to the cap. Check the position of the fluorescent tape end and
then affix the translucent tape by aligning the beginning of the tape on the opposite side
of the fluorescent tape end.
End of fluorescant
tape
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Translucent
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tape
01NST-0212E
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01NST-0214aE
:3
13
Note: Ensure that the translucent tape is affixed smoothly, with no air bubbles or foreign objects
caught beneath the tape.
5
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from manual updates and virtual training, to online technical reports. Fuji
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hopes that this site will be used as a source of information in addition to
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the services provided by your agent.
Fuji Internet is located at [Link]
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Fuji Internet membership is required to access the Technical Information
section of the site. Please contact your agent for membership details.
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At any comments or opinions regarding this document can be sent to
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intnetqst@[Link]
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Fuji America Corporation
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171 Corporate Woods Parkway, Vernon Hills, IL. 60061 USA
Tel: 847-913-0162 Fax: 847-913-0186
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Fuji Machine Mfg (Europe) GmbH
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Peter-Sander-Str. 43, D-55252 Mainz-Kastel Germany
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Tel: 06134-202120 Fax: 06134-202200
54
Fuji do Brasil Maquinas Industriais Ltda.
35
Rua Joao Cachoeira, 128 Itaim Bibi, Sao Paulo, SP 04535-000 Brazil
FV
Tel: 55-11-3167-1650 Fax: 55-11-3079-1833
3U
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by
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C/O Ascentex Industry Corp. 3 Fl, No. 396, Sec. 1, Nei Hu Rd., Taipei,
o
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nl
Room A, 26F, Zhaofeng World Trade Building, No. 369, Jiangsu Road,
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