Training module

This document is ASML Confidential

Configuration: Document ID: Issue date:

01-09-2004 68674, version00 1-9-04
SW 3.4
Module ID: Status:
Event Log Viewer Draft

EVENT LOG VIEWER

FOR ASML INTERNAL TRAINING PURPOSES ONLY

ASML Confidential - This document is provided for employees of ASML and for selected employees of ASML's customers
and agents, in order to assist them in efficient use of ASML products. The document must not be disclosed to third parties.
 ii About this module Event Log Viewer

COPYRIGHT © 2004, ASML Holding N.V. (including affiliates). All rights reserved.
This publication is subject to change without notice and contains confidential and
proprietary information of ASML Holding N.V. or its affiliates (“ASML”).
This documentation is for the intended purpose only and for the use of the intended
recipient only. Please retain control of this documentation. It is not to be forwarded or
distributed. Any unauthorized review, copying, use, disclosure or distribution is strictly
prohibited. The material herein is provided “AS-IS” AND ASML makes no warranty of
any kind with regard to this material. ASML shall not be liable for errors and
omissions contained herein.

Trademarks ASML, ASM Lithography, TWINSCAN, MASKRIGGER, MASKWEAVER,

LITHOCRUISER, ATHENA, QUASAR, IRIS, MICRALIGN, PAS 5500, PAS 5000,
3DAlign, 2DStitching, 3DMetrology, and the ASML logo are trademarks of ASML
Holding N.V. or affiliate companies. The trademarks may be used either alone or in
combination with a further product designation.

Starlith and Aerial are trademarks of Carl Zeiss.

Nothing in this publication is intended to make representations with regard to whether

any trademark is registered or to suggest that any sign other than those mentioned
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should not be considered to be a trademark of ASML or of any third party.

 About this module Event Log Viewer iii

ABOUT THIS MODULE EVENT LOG VIEWER

MODULE INTRODUCTION

This document describes the “event Log Viewer”, one of the building blocks of the
First Line Diagnostic Tool (FLDT).The Event Log Viewer provides a history of the
machine and user activities based on TWINSCAN ER/error [Link] files.
In order to understand the cause of a machine problem, the service engineer needs:
1. To identify quickly & accurately true Root errors of a problem.
2. To know the history (to understand the context in which the problem occurred),
e.g. whether MC were changed, or a HW part was replaced.
3. It is important to have an overview of the recovery actions performed after the
problem took place.

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Objectives Upon successful completion of the module, you are able to:
• Use the eventlog viewer
• Find the root causes of most machine problems

Test There are practicle cases available on a SAWS or TWINSCAN machine.

Prerequisites The following training courses/modules should have been already covered:
• xxxxxxxxxxx(TT-xx-xx)
• xxxxxxxxxxx (TT-xx-xx)

Additional Materials There are currently no additional materials required.

 iv About this module Event Log Viewer

SAFETY

Safety related items are indicated in this manual by:

• A pictogram
• A description that tells how serious the danger is and any actions necessary to
prevent it
The three levels in safety are:
• Danger, shows a very dangerous situation that, if not prevented, could result in
death or a very serious injury
• Warning, shows a dangerous situation where there is a risk of serious injury
• Caution, shows that equipment or property could be damaged or there is a risk of
minor injury
Before you install, operate or maintain the system, read the applicable safety manual.
There is a safety manual for each system.

Definition of The following pictograms are used in ASML equipment:

pictograms :
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General hazard Electrostatic damage Laser radiation UV radiation Electrical hazard

Flammable substance Toxic hazard Chemical hazard Hot surface(s) Sharp object(s)

Strong magnetic field(s) Lifting heavy object(s) Moving parts Moving heavy object(s) Radio frequency radiation

General warnings
Warning All forms of operation, installation work, maintenance, repair, modification and all
other activities involving the different systems must only be carried out by authorized,
fully qualified personnel.
Warning Only personnel who have received ASML maintenance training are allowed to open
system covers.
Warning All safety and other requirements described in ASML manuals, the applicable
contracts and the law must be observed at all times.
Warning Use of controls or adjustments or performance of procedures other than those
specified in ASML manuals may result in hazardous radiation exposure.
Warning The mains power switch can be locked off during maintenance. Lockout/tagout
procedures should be according to local fab standards. In the U.S.A. these
procedures must conform to OSHA standard 1910.147.
Warning During maintenance, all machine operating control points must be tagged to prevent
accidental operation.
 Table of Contents 0

Chapter 1 Event log viewer

Purpose Event Logviewer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
How can the Event Log viewer support you 4

Chapter 2 Event Log viewer

The concept. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Information organized in the tool 11

Special Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Document function 22

Examples of Main events . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Airmount stable / unstable 31
Cover Open / Closed 33
Gas Maintenance start / done 34
Lot OK / stopped / abort 36

Appendix A 41
How to install 41

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Event Log Viewer more info 41

Appendix B Differences between

“Eventlog viewer” 1.0 & 1.2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

Appendix C tips to use ELV tool release 1.0 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47

General tips 47

Appendix D tips to use ELV tool release 1.2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

General tips 51
Wafer reject reasons 55
ASML Confidential i Table of Contents
 1
EVENT LOG VIEWER

INTRODUCTION This document describes the “event Log Viewer”, one of the building blocks of the
First Line Diagnostic Tool (FLDT).The Event Log Viewer provides a history of the ma-
chine and user activities based on TWINSCAN ER/error [Link] files.
In order to understand the cause of a machine problem, the service engineer needs:
1. To identify quickly & accurately true Root errors of a problem.
2. To know the history (to understand the context in which the problem occurred),

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e.g. whether MC were changed, or a HW part was replaced.
3. It is important to have an overview of the recovery actions performed after the
problem took place.
Currently, the user has to look at many different data sources to find this type of infor-
mation (e.g. Event Log, MC files, Lot reports). Furthermore, some data sources, like
the Event Logs, are difficult to read: finding relevant information may be very time
consuming. The data the FSE sent to the 2 nd/3rd line engineer identifying a root error
to be investigated, is more than half of the time wrong or incomplete.
The Event Log Viewer is part of the TWINSCAN software and therefore available on
TWINSCAN systems ,SAWS’s and labtop’s ,so to have remote capabilities.
After reading this document and practice on a machine/ workstation the trainee is
able to use the EventLog viewer and find the root causes of most of the machine
problems.
 2 For training purposes only

PURPOSE EVENT LOGVIEWER

The goals of the Event Log Viewer are:

• Center the information necessary to rebuild the "history":
– What was the machine trying to do when the problem occurred.
– What happened before the problem occurred, that may have affected the
machine behavior.
– Were there signs of degradation.
– Has the problem occurred before in the same context.
– What was done to recover the machine.
• Make it easier for the user to find and access this type of information.
• Make the diagnostic process more effective and efficient.
• Reduce machine down time, Mean Time To Repair (MTTR). The ASML goal is to
reach and exceed > 92% machine availability.
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In Figure 1.1 it is shown what information is gathered and organized in the Event Log
Viewer. The centralization of the information represents a big advantage in the
diagnostic process for several reasons:
• It is easier to understand the context in which the error occurred: all the necessary
information is organized in one place.
• The user is triggered from information that could otherwise be ignored.

Multiple Data sources

Test report

Lot report

Event log
Centralisation in one
Log book

Patch list
First line Diagnostic Tool
MCs file - Phase 1 Event Log Viewer -

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FCs files

MBDS

EMFC files

C&T

CH

Laser

Figure 1.1 How the “Event log viewer” collect information

The Event log files can provide a lot of information and the Event Log viewer will
support to find the root error.
Certain type of tasks are only partially supported by the Event Log (dashed arrows)
Figure 1.2. Data from a lot of tasks in the Event Log are hard to analyze and organize
to find root error without a tool. This because the whole Error log data is one piece of
information.
The error logging file ([Link] logging) is the current file which provides the
information to answer the questions of a current problem on the machine via the
Event Log Viewer tool.
Due to synchronizing problems in the machine logging (WS, IF, MO) a 100%
guarantee to find the correct root error with this tool is not yet possible -> 80-90%
(depends on the sw release). But this will improved soon with rel.3.4

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Current Tools Main User tasks New Diagnostic Tool

In what context did the error occur?

Is the problem intermittent?

Did the problem occur before in the

Event log same context?

Is it possible to recover the Event Log Viewer

wafer and reticle?

Are there signs of First line Diagnostic Tool

degradations?

Is the problem related to the Phase 1

recipe? Event Log Viewer
What changes took place before the
problem occurred?

Is the problem related to general

conditions/utilities?

What is the driver status?

Figure 1.2 Supported tasks Event Log viewer

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How can the Event Log viewer support you

Support at the Twinscan

The ELV tool will be part of the Twinscan Software since SW 3.4 and can be started
via the Maintenance View Tools --> Event Log Viewer menu.
Remark:
1. It is still possible to run this ELV tool on a machine while the Twinscan application
is down. This by opening the Terminal tool and type ERtool ER.
2. The logging (error log files; [Link]) stopped when the Twinscan application is
down!

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Support at you office

You can run the ELV tool on you Laptop or on a Stand Alone Workstation in the local
office.

PC SAWS

LAN
event log [Link]

From your PC via

Citrix / CDE 99%
or
On the SAWS
Figure 1.3 Support at local office

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The ELV tool will be a separate executable that can run on a Sun with the same Unix
version and configuration as used for the Twinscan machines.
The tool can be used to analize error logging files ( *.csv ) from any “AT” system from
release 3.2 and up.
If you use a laptop then you need access to Citrix by using remote logging access to
the ASML Intranet via Citrix.(see install/configure procedure in the Appendix A and/or
webside :
[Link]
Laptop users can start the tool from their own share drive if installed, with the log files
to be analyzed as input parameter.
Additionally the tool can also be used while working from a remote location like a
hotel room, by using a telephone line.

Support the “Way Of Working “process

In Figure 1.4 you see the ASML call escalation diagram (diagnosing). First you use
the ELV to find the Root Error and document the problem description. Later in the
diagnosing process you use the Root Error in combination with Coach PCS are this
problem/error is known within ASML. The 2nd and 3rd line engineer will use the tool
to further analyzing after escalation.

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Fast start up if nok When standard recovery When problem is unknown

Observe and write
reset all processor fails, determine if gather all required information
down the error
perform a full start up problem seen before or as listed in the PTCL and
situation
if NOK initialize via ADT not . Use PCS in Coach escalate

Error History and recovery File (Currently the logbook)

Root error
Use the Event Log
Return
A finding Recovery
system Viewer to follow part
(30 to 60 min)
to customer of the PTCLs.

Use the Event Log Check if Follow Return Use the Event Log Viewer
Viewer to find the B problem is PCS & check system to document the problem
“known” ASML-Q to customer description for escalation.
Root Error and
document it.
When problem Follow PTCL Escalate to Perform Return Make
C is (DATA 2nd or action system LDT
Use the Root Error in combination “unknown” collection) 3 rd line plan to customer Report
with Coach PCS.
The Event log viewer will inMaxthe
2 hours before you escalate to a higher level
future offer a direct link to PCS.
The 2nd and 3rd line Eng.
will use the tool to further
Availability focus of Working supervisor, Fab team leader, reliability coordinator analyze the problem after
escalation.

Figure 1.4 Escalation process

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 2
EVENT LOG VIEWER

INTRODUCTION This chapter will explain how to use the ELV (Event Log Viewer) tool and how it can
support you with:
• Defining the problem
• Escalating the problem
• Diagnosing the problem

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 8 For training purposes only

THE CONCEPT

In the Event Log Viewer the user can:

a. View the list of Main Events that occurred at the machine (e.g. Lot, TSW,
Start up) (see table xxx for the list of Main Events in the Overview panel).
b. View the brief summary related to a selected Main Event (e.g. rejected
wafers, root error tree).
c. View the list of active warnings.
d. View the logging related to a selected Main Event.

The User Interface of the Event Log Viewer consists of several areas(see Figure 2.1):
1. OVERIEW panel: Provides an Overview of the Main Events that took place at the
machine.(left)
2. SUMMARY panel: it shows a summary about a selected Main Event.
3. ACTIVE WARNINGS panel: Shows warning being active during a selected main
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event.
4. LOGGING panel: It shows the part of the Event log that is related to a selected
Main Event (the selected one).
5. MICRO HELP area: It shows what a certain object is for.
6. NAVIGATION area: contains Close, Help and Document buttons.

When the user selects a Main Event from the Overview panel, the Logging panel and
the Summary panel are updated with the information related to the selected Main
Event
The three panels are described in the next paragraphs.
The Event Log Viewer is:
• Resizable only when working on a pc and not SAWS or AT system.
• Movable.s all systems

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Detailed Information about

Break down in
Main Events: Main Events organized in 3 levels:
Overview Summary Panel
Panel Active Warning Panel
Logging Panel

Micro help area

Navigation area

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Figure 2.1 Event Log Viewer main screen

The Event Log Viewer will use:

– The Error log files ([Link]) from the system (last 7 days only)
– Offline-PMA collected database. Every night the ASML servers collect data
from the machines in the field and update the PMA data. Tool can access
through unix.
– Usable by the remote version.

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Next table gives you a overview of all main events.

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Figure 2.2 List of Main Events 1

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Figure 2.3 List of Main Events 2

Information organized in the tool

The Tool screens are organized in next way (see Figure 2.4):

• The main header of the tool contains ELV tool version ,machine number and
machine SW versions used during de logging period. Example of a main header:
– EventLog Viewer version 1.2 Machine number - 6472 Release 2.3.0.c /3.4.0.b
• The Header of the Overview contains this text: "Overview of:<start date> - <end
date >". The date is indicated in the following way:
– Mmm dd/yyyy E.g. Overview: Oct 22/2004 - Oct 29/2004.
• In the Overview panel all Main Events available in the Machine History are shown.
• The overview panel contains one Main Event per line.
• For each Main Event is indicated time in <hh:mm:ss> and the Main Event 's.
name.

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If only one file is present, then the :<start date> date is indicated and next date. E.g.
Overview:
– Oct 22/2004 - Oct 23/2004
• There are Date Separators between days: "---- Start of <date > ----" (e.g. ---- Start
of Oct 22/2004 ---)
• When the viewer is started, the most recent Main Event is selected.
• When the user selects a Main Event, the Logging panel and the Summary panel
are updated with the information related to the selected Main Event.
• A Main Event can be selected by single clicking on the item or using " . " and " ."
cursor keys.
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Select a Main Event to get more detailed

information about it.
This information is shown in the 3 tabs:
Summary
Active Warnings
Logging

Figure 2.4 Event Log Viewer overview screen

Indentation is used to show child events that have occurred when their parent events
had been active. Example can be seen in Figure 2.4, Gas maintenance was
performed at [Link], when its parent Idle event that had started at [Link] was
still active. Parent event can be one of: Lot, Test, Startup or Idle.

Note:
When multiple SW releases are found among the *.csv files, it is
indicated in the header of the user interface.

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"Goto" function of the overview panel:

The user can quickly navigate to a certain Main Event of the overview panel. In the
input field (left of the “GOTO” button) any string or a part of a string that is also
present in the Overview (e.g. lot ID, lot name)can be typed. The item that matches
the search is selected and the Logging and Summary panels are updated. It is
possible to provide Figure 2.5 the "GoTo" function with multiple items separated with
commas to search for (see Figure 2.1). Example: "Lot,test,MX". The "GoTo" function
will start searching from currently selected Main Event down the Overview list until it
finds either Lot, test or MX. If no match is found until the end of the Overview, search
will be continued from the top of the list. The GoTo function is aware of the "~"
masking character in a search string. An Overview item that matches part of the
string between the tilde "~" and comma "," will be ignored.

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<Go to>:
Next “ LUSU” Selected Main Event
In the Overview

<Go to>:
Use this function to find
a certain Main Event displayed in
the Overview

Figure 2.5 Event Log Viewer overview screen by using the “GOTO” button

Example:
Consider the search string "test,~lusu", in this case only event that contain word "test"
but no word "lusu" will be selected.

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If no match is found (see Figure 2.6) an information box will be presented:

Figure 2.6 Nothing found screen

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"Filter" function of the overview panel :

The user can define what type of information to filter (e.g. Lot, Test, NOK) will be
shown in the Overview panel (see Figure 2.7 ). Both the GoTo and the Filter functions
share the same text input field.
The text field is case insensitive, which means that strings "TEST, ~OK", "test, ~ok"
and even "tEsT,~oK" will produce identical result.

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If one of the two functions is active, the other one is disabled (the two functions are
mutually exclusive). The scope of the GoTo and Filter functions is limited to Overview
panel, though identical GoTo function can be used for Logging panel as well.

<Filter>:
All ” LUSU” filtered in the Overview screen

<Filter>:
use this function to get an overview
of specific items: e.g. only “LUSU”

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Figure 2.7 Event Log Viewer overview screen by using the “Filter” flag

Help function
The main screen of the Eventlog viewer on a TWINSCAN machine and SAWS has a
extra “help” button. This button will not shown on a Eventlog viewer on a laptob. With
this button the user can open a “help” file. This file gives a brief description of the goal
of this software program and explains briefly the main function of each buttons.

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Help Button
Not shown on a laptop
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Figure 2.8 Event Log Viewer main screen + help function

Summery panel
The SUMMARY panel will shows:
• The summary of the most relevant diagnostic information (see Figure 2.9) about
the selected Main Event in the Overview window (e.g. Lot: What wafer was
rejected ;what recipe was used etc.)
• Root error and error tree if applicable.(In case of failure of the Main Event)
• Indication for other information sources in order to get more detailed information
(e.g. for lot report).
• Date, start time and end time of main [Link] first (top) line for the summary of
each event will be the same and show the date the main event started, the start
time and the end time (both hh:mm:ss format) and duration if applicable.
Summary cannot be shown if event data is incomplete, for instance in absence of
preceding or posterior event log file.

Note:
The root error detection used within the SUMMARY panel is not 100%
reliable yet. The main reason is that within the error logging itself some
links are broken/missing. This is known but will be solved in a later
version.

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In the Summary tab,

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Main Event specific information is
summarized.

Figure 2.9 Event Log Viewer “Summery” screen

Active warning panel

The Active Warnings panel consists of two parts:
• List of active warnings in short "hh:mm:ss ErrorCode Development Text" format.
If certain warning had become active during the Main Event selected in the
Overview list, it will be preceded by a " => " string. Similar to the selected warning
in the bottom of the list in Figure 2.10.
• Full text information about currently selected from the list warning. Format of the
full text box is as the following:
– Event code
- Start : MM/DD/YYYY hh:mm:ss
- End: MM/DD/YYYY hh:mm:ss
- Duration:hh:mm:ss
– User text
– Development text
Warnings list is chronological.

Note:
main recovery such as lot recovery is also displayed if it took place during the
selected main event.
NOT ALL recoveries can be displayed as they are not logged in a consistent way in
the Error logging.

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The Warning at the bottom that have arrows are connected to the main event. They
were activated DURING the main event. Others shall be considered REMAINING
ACTIVE during the main event.
Some warnings may have nothing to do with the current Main Event- Some events
don’t clear out of the Logging Window, they appear at the top.

List of active warning

Arrows, connected
to main event (=>)

Full text of the

selected warning
In the Active Warnings tab you can see
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if signs of degradations were present when the

error occurred:

•what warnings were activated before and remained

activated during the Main Event.
•what warnings were activated during
the Main Event (=>).

Figure 2.10 Event Log Viewer “Active Warning” screen

Logging panel
The logging panel will show All logged events and errors that took place from the
beginning to the end of the selected Main Event. The logging entries connected to the
main event will be colored red.
The event messages contain the following info:
• Date in mm/dd/yyyy format, e.g. Aug 10 2004.
• Time, accurate to hundreds of microseconds, e.g. [Link].
• Classification type and severity level, e.g. SYSTEM ERROR
• Event code, e.g. XS -0068
• linking information, e.g. (linked to XS-0068)

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Logging screen

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Figure 2.11 Event Log Viewer “Logging” screen

Note:
The “Goto” button in the logging window will find a certain event in the
logging screen. This “GoTo” function can not be used in the “Active
Warnings” or “Summery window”.

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Detailed logging
The logging has a feature “detailed logging” This is a extra information option for 3
line Software Support.

Logging screen

Detailed logging
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“Detailed logging” flag box

Figure 2.12

Note:
While in the logging panel, it is possible to toggle between <Logging>
and <Detailed Logging> whithout loss of focus of the selected section.

Logging panel supports highlighting of the linked trees. Root error tree, once found,
will be automatically shown with red cell background, as in Figure 2.13.
Logging panel can also display secondary linked trees present in logging file. To do
so, double click event that contains text "(linked to …)". A link tree will be built and
shown in yellow. At the bottom of the Logging panel the link tree is repeated in text
format. To deactivate highlighting select a Main Event in the Overview panel once
again. Note that only yellow link tree can be deactivated; red, root Error tree is always
shown.

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Highlighted link tree

Link root error tree

in text format from
selected “red” cel

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Figure 2.13 Event Log Viewer “Logging” screen with the link tree

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SPECIAL FUNCTIONS

There are two special functions available in the tool:

• Document function
• Find all function

Document function
The "Document" function is meant to support quick escalation and archiving.
The information related to a selected Main Event is copied in a text format and under
unique self- descriptive file name, for instance file M5022_20040518_234425.fldt
documents an event from machine 5022 having occurred on May 18th, 2004 at
[Link]. This file will always be stored on the machine in the same directory : e.g.
m5022/usr/asm/service_data/CO/M5022_20040518_234425.fldt
directory on a SAWS/laptop you can store it at any location.
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The Document button is only accessible when a Main Event is selected.

This function copies information the following order:
• Machine number and release.
• content of the Summary Tab.
• memo text.
• content of the Active Warnings.
• content of Logging Tab.
• part of the Overview list including as many as available but not more then 15
leading and 15 following events.
• Text string used with Find All function.
• Result of the latest Find All function.
• text string used for Filter in Overview panel.
• Status of the Overview filter.
• Current selection in the Logging panel.
Any of the Summary, Warnings, Logging, Overview and FindAll sections can be
omitted. Resulting file contains also information about the state of the viewer at the
moment of file creation. This data include active Overview panel selection, Logging
panel selection, names of files in use, absolute path to the analyzed files and a time
stamp.

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Memo Text box and

selected item belongs
to the main event
copied in a unique file

Selected
main event 2

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1

Figure 2.14 Example:contents of a “Document function” file

After opening the Text box (1)”Document” and fill in your “text” remarks you can
select/omit the items you want to see in this text file. Default all items switched on.

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If this is done you have to hit the save (2) button. Now you get a screen as shown in
Figure 2.15. now you select the location directory where you want to save this file,
give it a unique name and hit the save (3) button.

Selected
Directory to save

Fill in name
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Figure 2.15 Example:how to save “Document function” file

ALL Event
In the “Document function” there is also a feature to select an <All Event> button.

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This button is only enable if the overview panel is filtered.

All Events check

box is enabled

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“Filter” flag box

Figure 2.16 Example:contents of a “Document function” file with “All Event” disable

In Figure 2.16 the “Overview panel” is filtered on [All lots with rejected wafers (!)] and
in the “Document” pop-up window the “All Event” check box is enabled.
If “All Events” is selected, in this case all Lots with rejected wafers will be documented
at once upon the selection made on Summery , Warnings , Logging and Overview
per lot.
Example:
Lot ID 19 (!)
Summary
Warning
Logging
Lot ID 20 (!)
Summary
Warning
Logging
Lot ID 21 (!)
Summary
Warning
Logging
ETC.....

The “document” file is divided in next section.

- < TIMESTAMP >
Date document file is generated

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 26 For training purposes only

- < MACHINE >

Machine number belongs to the report includin his Software Release.
< MEMO >
Text written by the user in the memo text box of the tool.
< OVERVIEW >
List of selected main events. If the user only select one main event then the report will
show you in the this section the selected main event including 15 items before and 15
after the selected main event.
< SUMMERY >
The “Summery” reports of each selected main event will be printed here one by one.
< WARNING >
The “Warning” reports of each selected main event will be printed here one by one.
< LOGGING >
The “Logging” reports of each selected main event will be printed here one by one.
< FINDALLSTRING >
This is the “string” the user types in the “All find” box to seach for in the whole logging
data. This can be an error code and/or term. (e.g: laser/MX-ooc)
< FIND ALL >
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Results data of the “findall string” search.

< IMPORT DATA >
Info needed to Import the report data back into the tool. This is a feature that is not
available now, but in the future it can, and will be used only then by 3 line support.
< MACHINE SECTION >
Info needed for the “import data “ option not available now and only used then by 3
line support.
< PATH >
Info needed for the “import data “ option not available now and only used then by 3
line support.
< FILE >
Here is the file name mentioned of this report. This is also Info needed for the “import
data “ option not available now and only used then by 3 line support.
< OVERVIEWSELECTION >
This is the number of the selected item. e.g if number 86 is mentioned here. This
means if there are 1000 Main Events listed in the overview panel then you selected
main event number 86 to create a report.
Also info needed for the future “import data” option.
< LOGGINGSELECTION >
This is a index number, means the total amount of logging items in the report. Also
info needed for the future “import data” option.
< MACHINE_SECTION >
info needed for the future “import data” option.

With the notepath program you can open this “document” file. Next you will see an
example of the contents of a “document” file:

<TIMESTAMP>
Fri Jul 9 [Link] 2004
</TIMESTAMP>

<MACHINE>

Event Log Viewer

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 For training purposes only Chapter 2 27

Machine: 8574 Release: 3.4.0.

</MACHINE>

<MEMO>
Fill in your remarks here .....
Training example ...............
</MEMO>

<OVERVIEW>
[Link] Reticle pod removed
[Link] Lot ID 2525 - Aborted (1)
[Link] Idle
[Link] Lot queue stopped
[Link] Fast startup - OK
[Link] Idle
.............
...........
...........
[Link] Lot queue started
[Link] Lot ID 2526 - Aborted (1-) <==== Selected ====<
[Link] Idle
[Link] Lot queue stopped
[Link] Fast startup - OK
[Link] Idle
[Link] Wafer cleared (2526)

</OVERVIEW>

<SUMMARY>
Date: Apr 04/2004Start: [Link] End: [Link]

Duration : [Link]

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Lot name : 1- (Lot id 2526)
Recipe name : JOB/K5/TMK577-NA
Layer ID : 360B

Wafers exposed : 0
Wafers unexposed : 0
Wafers rejected : 0
Wafers remaining in the machine: 1

Wafers supplied by TRACK : 1

Wafers supplied by Carrier : 0

Wafers put back to TRACK : 0

Wafers put back to Carrier : 0

Root error :
SYSTEM WARNING 04/04/2004 [Link].3925
LO-840E

The Lot has received abort signal.

A abort signal has been received for lot '1-' (ID=2526).

Error tree :

[Link].3925 LO-840E A abort signal has been received for lot '1-' (ID=2526).
[Link].3930 LO-0075 (linked to LO-840E) LOQM Error occurred for Lot '1-' (ID=2526) -->
RESTART
[Link].3935 LO-847D (linked to LO-0075) A lot abort has been initiated for Lot '1-'
(ID=2526).
[Link].4265 LO-0052 (linked to LO-847D) (04/04/2004 [Link].3925 LO-840E 'The Lot has
received abort signal.' 'A abort signal has been received for lot '1-' (ID=2526).
</SUMMARY>

<WARNINGS>
ER-000A 04/04/2004 [Link] - Duration: unknown
Context buffer full, field dropped.
Context buffer too small for all context, buffer is truncated.
-------------------------------------------------------------------
AR-1331 04/04/2004 [Link] - Duration: unknown
Reticle carrier tag could not be read
[ARPERL_read_carrier_id:ARPERL_TAGREADER_WARNING]
Reticle carrier tag could not be read
-------------------------------------------------------------------
WH-190E 04/04/2004 [Link] - Duration: unknown
Track not responding on output. Output path full while unloading wafer (lot id=2518, wafer
number=15)
[WHAPLM_evt_output_path_full:WHAPLM_OUTPUT_PATH_FULL_WARNING]
Output path is full while unloading wafer
-------------------------------------------------------------------
.........
...........

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 28 For training purposes only

..........
-------------------------------------------------------------------
CT-2106 04/04/2004 [Link] - 04/04/2004 [Link] Duration: [Link]
Lens gas pressure ( 2.9996[bar]) is out of warning range (3.0000,10.0000).
Lens gas supply pressure ( 2.9996[bar]) is out of normal range (3.0000,10.0000).
-------------------------------------------------------------------
=> WH-8857 04/04/2004 [Link] - 04/04/2004 [Link] Duration: [Link]
Timeout PLXAsem_take in WHIOGI_tsu_wait_until for WHIOGI_VACUUM_PA_TSU_VACUUM_INNER (to
state WHIOGI_TSU_WINDOW_IN_RANGE)
[WHIOGI_tsu_wait_until:WHIOGI_TSU_WAIT_UNTIL_TIMEOUT_WARNING]
Timeout PLXAsem_take in WHIOGI_tsu_wait_until
-------------------------------------------------------------------
</WARNINGS>

<LOGGING>
LO-0050 04/04/2004 [Link]
SYSTEM EVENT (LOQM [10790], LOQMgeneral.c, 1.171, 4456)
Lot '1-' (ID=2526) has started processing.
Recipe='JOB/K5/TMK577-NA', layer='360B', number of wafers=1.
A new lot has started processing.
-------------------------------------------------------------------
WH-28FF 04/04/2004 [Link]
SYSTEM EVENT (WHRO_main [wh-8574], WHAPEX_wt.c, 1.19, 1380)
Wafer no. 1 of lot 2526 ('CAR20040404003.04') retrieved from track, state =
WH_WAFER_STATE_NORMAL_UNEXPOSED
Wafer retrieved from track.
-------------------------------------------------------------------
..........
..........
.........
-------------------------------------------------------------------
LO-0052 04/04/2004 [Link]
ASML Confidential

SYSTEM EVENT (LOQM [10790], LOQMhandle_error.c, 1.25, 584) linked to LO-847D

(04/04/2004 [Link].3925 LO-840E 'The Lot has received abort signal.' 'A abort signal
has been received for lot '1-' (ID=2526).
')
Lot aborted due to root error:
-------------------------------------------------------------------
</LOGGING>

<FINDALLSTRING>
LASER
</FINDALLSTRING>

<FINDALL>
DG-33DA 04/04/2004 [Link]
[dgpels_laser_on:DGPELS_LASER_ON_STARTED]
LASER EVENT: Laser on started; may take up to 20 minutes
-------------------------------------------------------------------
..............
..............
.............
-------------------------------------------------------------------
DG-33DA 04/04/2004 [Link]
[dgpels_laser_on:DGPELS_LASER_ON_STARTED]
LASER EVENT: Laser on started; may take up to 20 minutes
-------------------------------------------------------------------
DG-33B5 04/04/2004 [Link]
[dgpels_laser_on:DGPELS_LASER_SWITCHED_ON]
LASER EVENT: The laser has been switched on
-------------------------------------------------------------------
</FINDALL>

<MACHINE_SECTION>
<PATH>
PILOT/
</PATH>
<FILE>
M8574t20040404_0000.csv
</FILE>
<OVERVIEWSELECTION>
86
</OVERVIEWSELECTION>
<LOGGINGSELECTION>
21
</LOGGINGSELECTION>
</MACHINE_SECTION>

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 For training purposes only Chapter 2 29

Find all function

Find All function performs search of the text string through all active event log files.
Text search is case insensitive, strings "EM-5204" and "em-5204" will produce
identical result. It opens another window and searches the full range of dates in the
Main Event window for the string. This can be used to find periodic or intermittent
failures.
Text string may contain one or more substrings separated by commas. String
"Lot,test" will bring all events that contain either word "Lot", word "test" or both.
Find All function is aware of the tilde "~" character. Any log event that contains the
search substring preceded with tilde will be excluded from search. Search string
"lot,~Lot ID 140" will return all events containing word "lot" but not the ones
containing string "Lot ID 140".
Found Items window is modeless, movable, Resizable, and should always remain on
top. All events that match the search criteria are listed in the upper part of the
window. Events from different days are separated with the "--- Start of MMM dd/yyyy -
-" date separators.
Search is case insensitive.
If no item is found a "Nothing found" pop up window will be shown.

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List of events returned
by “Find All” search

Full text of the

selected event

<Go to>: Use this function to find a

certain event in the displayed Logging

Figure 2.17 <Find All> function screen

The “Find All” function has also a “Filter Overview” flag box. In this case it has been
selected and in the “overview panel” are displayed only the main events that
containded <EM-5205> in their logging, this between Aug 10 and Aug 25 [Link]
Figure 2.18

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 30 For training purposes only

REMARK: As the “Overview panel ” is filtered it is

possible to Use the “Document” – “All Event ” Function and
therefore document them all at once

List of filtered main events that

contains “EM-5204” in their logging
“ Filtered Overview”
check box is enabled
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<Find All>: Use this function to find if a certain item ([Link]-5204 Event)
occurred before, within all available event log files

Figure 2.18 <Find All> function screen with “Filter Overview” selected

Remark:
As the “Overview panel” is filtered it is possible to use the “Document”-
”All Events” Function and therefore document them all at once.

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 For training purposes only Chapter 2 31

EXAMPLES OF MAIN EVENTS

This chapter will show you some main event as examples.

Next main events are worked out:
• Airmount stable/unstable.
• Cover open/close.
• Gas refill start/done.
• Lot OK/NOK.

Airmount stable / unstable

When the airmounts are not stable, the performance can not be guaranteed. For this
reason a main event to indicate a possible (performance) issue due to the instability
of the airmounts is needed.

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Both the transition from a stable to an unstable state of the airmount and the
transition from unstable to stable must be shown as individual main event. This is
necessary since the airmounts can be unstable for a longer period of time (from
seconds to hours or even longer) and within this time other main events can be
performed (e.g. running lots, initializing the machine, covers open etc.)

Information to be shown in Overview Panel:

<start time>" Airmounts "<status>

<status>: = "Unstable" | "Stable"

Examples: see Figure 2.19

Information to be shown in Summary Panel :

- The duration of the airmount instability in hours, minutes and seconds (hh:mm:ss).

Example: Figure 2.19

Figure 2.19 overview - Summary panel AIRMOUNTS un/stable

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Information to be shown in Logging Panel:

Start of the airmount unstable situation can be detected from the event logging by
(example):Figure 2.20
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Figure 2.20 Logging panel - AIRMOUNTS unstable

End of the airmount unstable situation be detected from the event logging by
(example):
Figure 2.21

Figure 2.21 Logging panel - AIRMOUNTS stable

Since the machine can log events (warnings, errors,) while the airmounts are
unstable, the Airmount Unstable main event shall show the logging from the Unstable
event up and including the Stable event. The Airmount Stable event shall only display
the closing event.

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 For training purposes only Chapter 2 33

Cover Open / Closed

If a FSE and/or Operator opening the machine by removing any of the covers for a
maintanance actions or materials (wafers / reticles ) had to remove manually from the
machine.
Both the opening and the closing of the cover(s) must be shown as a main event. The
reason is that covers can be opened for a longer period of time. By separating the
action into two main events it is clear from the overview which other action (e.g.
system stop / system start) were performed while cover(s) were opened.

Information to be shown in Overview Panel:

See Figure 2.22

<start time>" Cover "<status>

<status>: = "Open" | Closed"

Information to be shown in Summary Panel :

- The duration of the cover open action in hours, minutes and seconds (hh:mm:ss).

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Examples:

Figure 2.22 overview - Summary panel Cover open/closed

Information to be shown in Logging Panel:

Opening the covers can be detected from the event logging by (example):

Figure 2.23 Logging panel - Cover open

Closing the covers can be detected from the event logging by (example):

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 34 For training purposes only

See Figure 2.24

Figure 2.24 Logging panel - Cover closed

Since the machine can log events (warnings, errors,.) while the covers are opened,
the Cover Open main event shall show the logging from the opening event up and
including the closing event. The Cover Closed event shall only display the cover
closing event.

Gas Maintenance start / done

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If the frequency of the gas maintenance is increasing significantly, this can be an

indication that the laser needs maintenance. Also, since the duration of the gas
maintenance can be significant (longer than 1 minute) and thus disturb the wafer flow
it is necessary to show it as a main event.

Information to be shown in Logging Panel:

Start of the refill can be detected from the event logging by (example):
See Figure 2.25

Figure 2.25 Logging panel - gas maintenance

End of the gas maintenance can be detected from the event logging by (example):
See Figure 2.26.

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 For training purposes only Chapter 2 35

Figure 2.26 Logging panel - gas maintenance end

Since the machine can log events (warnings, errors ) while the gas maintenance is
busy, the Gas maintenance start main event shall show the logging from the start
event up and including the end event. The Gasgas maintenance done event shall
only display the end event.

Information to be shown in Overview Panel:

<start time>" Gas refill "<status>

<status>: = "start" | "done"

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Examples: see Figure 2.27

Figure 2.27 overview - Summary panel gas maintenance

Information to be shown in Summary Panel :

- The duration of the gas refill action in hours, minutes and seconds (hh:mm:ss).
Example: see Figure 2.27

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 36 For training purposes only

Lot OK / stopped / abort

Since running lots is the main purpose of the Twinscan machines, this is also the
most important event in the overview. The success of the lot production determines
whether a service engineer needs to be called (escalation to ASML). An overview of
the lots processed gives a good history of the production that has been realized in a
certain time frame.

General Specifi cati on of Mai n Event:

To distinguish the "success" of a lot several states are defined to trigger the service
engineer:
a. ("OK") - The lot finished successfully, all wafers are exposed and no signs
for performance issues detected.
b. (“OK”(!) - The lot finished successfully, all wafers are exposed, but some
abnormal behavior was detected during the processing of this lot.
c. ("Stopped") - The processing of the lot is halted due to operator intervention.
d. ("Aborted") - The processing of the lot is interrupted due to an error detected
in the machine.
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e. (NOTE:)The "success" (/ state) of the lot can not determined, neither of the
previous mentioned states can be determined. this typically happens when
not the entire logging is available (yet)
The following events are classified as abnormal behavior referred to under b):
1. Wafers rejected during the processing of a lot.
2. Automatic recoveries performed to finish lot successful

UI layout of Summary Panel for Lot:

The SUMMARY Panel for Lot contains:
1. Lot related information
2. If applicable: remarks
3. Wafer related information
4. Reticle related information
5. If applicable: List of rejected wafers with reject reason
6. If applicable: Error tree for the root error of the lot abort

Each of these events is specified into more detail below.

Lot related information:

See Figure 2.27
• Lot name: <name> (max 80 characters)
• Recipe name: <recipe name> (max 80 characters)
• Layer ID: <>
• Lot status:
• fully processed | aborted | stopped (Only one of these items can be shown)
• Lot type: <lot type> (e.g. production)

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 For training purposes only Chapter 2 37

Wafer related information:

• Wafer accepted: <number of wafers accepted>
• Wafer rejected: <number of wafers rejected> (Note: the wafers of the selected lot)
• Wafers still in machine: <number of wafers in machine>

Reticle related information:

In a table (one column) an overview of all reticles used for this lot will be given. The
first cell will contain the header "reticle names" and as many cells as necessary (one
per reticle) will be added to list a name of a reticle. A maximum of 80 characters is
reserved for a reticle name.

If applicable: List of rejected wafers with reject reason :

If wafers of this lot are rejected, a table will be listed consisting of two columns. The
header for the two columns will be wafer #, reject reason. For each rejected wafer of
the lot a row will be added to the table with in the first column the wafer number within
this lot and in the second column the reason for rejecting the wafer.

If applicable: Error tree for the root error of the lot abort:
root error tree shows the root error and the error tree of the Lot Abort

ASML Confidential

Figure 2.28 overview - Summery panel - Lot

Wafers rejected during the processing of this lot:

Tough the Twinscan can finish a lot “successful” the wafers can be rejected for
several reasons. Since rejecting wafers can be a reason for the customer to escalate
to ASML, the overview must indicate that the lot finished abnormally. Two different
events are available in the Event logging indicating a wafer is rejected, both listed
below:

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 38 For training purposes only

Information to be shown i n Overvi ew Panel:

<start time>" Lot "<Lot ID>" - "<status>

<Lot ID>:= <sequential number of the Lot in the sw>

. (The Lot ID is represented by a number)
<start time>:= <hh:mm:ss>
<status>: = "OK" | "OK (!)" | "Stopped" | "Aborted" | <blank>
(Only one of these items can be shown)

Examples:
See Figure 2.27

Information to be shown in Logging Panel:

The start event for this main event is:
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Figure 2.29 overview - Logging panel - Lot

There are several events that determine the end of the logging for the lot main event
and these different events can be translated into the lot state. Per state the different
events are given.

status = OK:
11/07/2003 [Link].3608 Machine:6137 (Rel:3.4.0., LOQM [3092], LOQMgeneral.c, 4624)
EVENT: LO-0051
Lot 'KH546_21231' (ID=673) has finished processing.
Lot 'KH546_21231' (ID=673) has finished processing.

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 For training purposes only Chapter 2 39

Due to the fact that the software component LO (Lot Operation) and the driver WH
(Wafer Handler) are running asynchronous, the event to log that the last wafer of the
lot is transferred to the track / carrier can be logged after the lot finish (LO-0051).
Therefor the tool must check whether all the wafers retrieved from track / carrier for
this specific lot have been logged before the LO-0051 event. If not, the part of the
logging must be extended to the event indicating the transport of the last wafer to the
track / carrier. This check can be done by counting the number of wafers retrieved
from track / carrier and counting the number of wafers transported back to track /
scanner.

Event indicating a wafer is transported from the track into the Twinscan:
11/07/2003 [Link].7851 Machine:6137 (Rel:3.4.0.c, Romaine [wh-6137], WHAPEX_wt.c, 1380)
EVENT: WH-28FF
Wafer no. 18 of lot 673 ('KH546_21231.18') retrieved from track, state = WH_WAFER_STATE_NORMAL_UNEXPOSED
Wafer no. 18 of lot 673 ('KH546_21231.18') retrieved from track, state = WH_WAFER_STATE_NORMAL_UNEXPOSED

Event indicating an exposed wafer is transported from the Twinscan to the

track:
11/07/2003 [Link].7010 Machine:6137 (Rel:3.4.0., WHRO_main [wh-6137], WHAPEX_wt.c, 1467)
EVENT: WH-28FE
Wafer no. 18 of lot 673 ('KH546_21231.18') removed to track, state = WH_WAFER_STATE_NORMAL_EXPOSED
Wafer no. 18 of lot 673 ('KH546_21231.18') removed to track, state = WH_WAFER_STATE_NORMAL_EXPOSED

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 A
APPENDIX:

How to install
You can find the procedures on the webside ( [Link]
plsm/twinscan/epm/ ) how to install Event Log Viewer on a:
- Labtop
- SAWS

ASML Confidential
Event Log Viewer more info

There is a webside available about all kind of info wrt the Event Log Viewer / first line
diagnostic tool.
Like:
• How to analyze the .csv files from PMA.
• Training materials.
• ens.
The webside is:
[Link]
ASML Confidential 42 For training purposes only

Event Log Viewer

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 B
APPENDIX: DIFFERENCES BETWEEN
“EVENTLOG VIEWER” 1.0 & 1.2

This section gives information about the differences between “Eventlog viewer” 1.0
and 1.2, this in relation with AT system Software version 3.3 and 3.4.
With the introduction of the AT system SW release 3.4 they also introduced some
new logging features. To support these new features they also introduced a new

ASML Confidential
“Eventlog viewer” tool, release 1.2.
In next table you can see what is new in AT system SW release 3.4 w.r.t. 3.3, what is
new in the “Event log viewer”1.2 w.r.t 1.0 version and how these new features will be
supported by the new tool(1.2) for the different screens.

Table B.1

Main Event in <overview> panel Machine Tool Remarks / Definition main events
SW SW
Release Release

Airmounts unstable/stable 3.3 & 3.4 1.0 & 1.2 Nothing changed

Cover open 3.3 & 3.4 1.0 & 1.2 Nothing changed

Lot OK/NOK 3.3 & 3.4 1.2 <Overview> Lot followed by (!) indicates that wafer(s) is/
are rejected
Definition improved,with reason why rejected,since SW
3.4 & Tool1.2

Recovery successful / failed 3.3 & 3.4 1.2 <Overview> new main event.

Wafer cleared (only outside lot) 3.3 & 3.4 1.0 & 1.2 Nothing changed

Lot prep. failed 3.3 & 3.4 1.0 & 1.2 Nothing changed

Lot queue 3.3 & 3.4 1.0 & 1.2 Nothing changed

Lot Queue stopped 3.3 & 3.4 1.0 & 1.2 Nothing changed

Idle 3.3 & 3.4 1.0 & 1.2 More accurate information less fuzzy

Recovery outside / outside production lot 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

Mx actions start/finish ( maintanance 3.3 & 3.4 1.0 & 1.2 Nothing changed
schedule)

Full startup 3.3 1.0 If NOK, Summery> Only the failed drivers are given.

Fast startup 3.3 1.0 If NOK <Summery> Only the failed drivers are given.
 44 For training purposes only

Table B.1

Main Event in <overview> panel Machine Tool Remarks / Definition main events
SW SW
Release Release

Startup drivers (Full/Fast startup is the same) 3.4 1.2 If NOK <Summery> The description of the failed drivers
are given.

Shutdown drivers start/finish 3.3 & 3.4 1.0 & 1.2 Nothing changed

Shut down system 3.3 & 3.4 1.0 & 1.2 Nothing changed

Shutdown system & unix 3.3 & 3.4 1.0 & 1.2 Nothing changed

System Stop 3.3 & 3.4 1.0 & 1.2 Nothing changed

System start 3.3 & 3.4 1.0 & 1.2 Nothing changed

System not initialized 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

Prepare for maintenance start/finish 3.3 & 3.4 1.0 & 1.2 Nothing changed

Machine Constants change 3.3 & 3.4 1.2 <Overview> Information improved.
Summery> Information improved.

Test Constants changed 3.4 1.2 New feature in SW 3.4, logging & tool will support it.
ASML Confidential

Reticle cleared 3.3 & 3.4 1.0 & 1.2 Nothing changed

Reticle pot placed 3.3 & 3.4 1.0 & 1.2 Nothing changed

Reticle pot removed 3.3 & 3.4 1.0 & 1.2 Nothing changed

Reticle pot misplaced 3.3 & 3.4 1.0 & 1.2 Nothing changed

Test queue stopped 3.3 & 3.4 1.0 & 1.2 Nothing changed

Gas refill started/complated 3.3 & 3.4 1.0 & 1.2 Nothing changed

Gas maintenance started/completed 3.3 & 3.4 1.0 & 1.2 Nothing changed

Ct Board rebooted 3.3 & 3.4 1.0 & 1.2 Nothing changed

Ct not initialized activated/deactivated 3.3 & 3.4 1.0 & 1.2 Nothing changed

Ct ready for production activated/deactivated 3.3 & 3.4 1.0 & 1.2 Nothing changed

Ct ready not for production activated/ 3.3 & 3.4 1.0 & 1.2 Nothing changed
deactivated

Ct acc. temperature stable activated/ 3.3 & 3.4 1.0 & 1.2 Nothing changed
deactivated

Task died unexpectedly 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

Ct lens temp. stabilizing activated/deactivated 3.3 & 3.4 1.0 & 1.2 Nothing changed

ADT 3.4 1.2 <Summery> : Info identicle now as given in the

logging,Test layout summery.

IRIS 3.3 & 3.4 1.2 <Summery>: Indicate the reticle ID.
<Logging> : Reticle ID moves Robot <- -> IRIS

Recovery failed/succesful 3.3 &3.4 1.2 Summery>: Recoved error /root error mentioned (SW 3.4
main event)

SECS (no) communication) 3.3 & 3.4 1.2 <Overview> : New main event.

System not initialized 3.3 & 3.4 1.2 System not initialized during idle

Test start/finish 3.3 & 3.4 1.0 & 1.2 Nothing changed

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 For training purposes only Chapter B 45

Table B.1

Main Event in <overview> panel Machine Tool Remarks / Definition main events
SW SW
Release Release

Test queue Started/Finished 3.3 & 3.4 1.2 Same as in Tool 1.0 version only <Summery> Name and
status queue given

Track not communicated 3.4 1.2 <Summery> No info given (Only new main event)

Track input enabled 3.4 1.2 <Summery> No info given (Only new main event)

Track output communicated 3.4 1.2 <Summery> No info given (Only new main event)

Test xxxx Failed 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

Test xxxx MS Quality NOK 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

Test xxxx OK 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

Test xxxx Finished 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

Test xxxx Exited 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

Test xxxx Resul NOK 3.4 1.2 New feature in SW 3.4, logging & tool will support it.

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 C
APPENDIX: TIPS TO USE ELV TOOL RELEASE 1.0

INTRODUCTION This chapter gives the user of this ELV tool release 1.0 some hints and tips, it
contains out of two section.
• Part one called “genaral tips”, this is a quick reference guide about how to use the
main function “Filter”, “ GoTo” and “ Find all”.
• Part two called “ Wafer reject reason” gives information in a matrix about the
Software description of the reject wafer reason with possible causes as a hint for

ASML Confidential
the user.

General tips
General tips for Filter, GoTo and Find All
• Filter button under the Overview panel:
– Can be used on multiple main events when using "," (coma)
e.g: test,lot,pod
The result will show only the main events containing any of these terms:
"test" and/or "lot" and/or "pod "
– Can be used to hide main events in the overview when using "~" (tilde)
e.g: ~test.
The result will show all main events but the one containing the term "test"
• The GoTo button under the Overview panel:
– Can be used on multiple main events when using "," (coma)
e.g: test,lot,pod
The result will be to GoTo the main events containing "test" and/or "lot"
and/or "pod"

• Find All under the logging panel:

– Can be used on multiple main event when using "," (coma)
e.g: RS-1D14,AF-0901
The result of the search will be done on RS-1D14 and / or AF-0901 error
codes within the event log files.
– The GoTo button in Logging panel:
 48 For training purposes only

Can be used on multiple terms "," (coma)

e.g: EVENT,WARNING,ERROR
The result will be to GoTo in the logging where the terms "EVENT" and/or
"WARNING" and/or "ERROR" are found.

Note: The " " [space] is considered as a character when you use the above functions.
Table C.1

Main Events in the Definition of the main events Status Status when Examples of Remarks
overview panel performed/being performed when failed possible
succesful filters
ADT Advance Diagnostic Tool used NA NA adt
Air mount Air mount status Stable Unstable air
C&T CPU rebooted NA NA ct For the filter mind the
lens temp status stable stabilizing space preceding the
acc temp status stable stabilizing characters
production status OK Nok
production status [3 minutes Ready Not ready
wait..]
Clear Reticle A reticle was / is cleared NA NA le c For the filter mind the
space between the
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characters
Clear Wafer A wafer was / is cleared NA NA fer c The relevant lot ID is
indicated when available
Cover A cover was / is opened / NA NA open/closed
closed
Gas Refill Refill Start Done NA fill
Gas maintenance Injects Start Done NA s ma Mind the space between
the charcters
Idle Period when none of the other NA failed prep.
main events took /takes place
Lot Lot was / is processed OK aborted lot I
Lot (!) lot was / is processed and NA failed prep.
wafers were / are rejected
Lot preparation failed The lot preparation failed NA failed prep
Lot Queue Lot queue started, stopped Started NA que
Stopped
Continued
MC changed [if stated in Machine constants change, NA NA mc use a space after the
the Event log file!] the subsystem is mentioned, [Link] that in the
indentation indicates to what event lg not all Machine
main event it related. Constant changes are
logged! Eg when manually
changed.
MX action M-actions is performed OK NOK mx M-actions are claimed by
MX but not all are
performed if not due. Mind
the duration to find if they
are performed or not!
Prepare for Maintenance Prepare for maintenance of NA NA ws use a space after the
[WS & RS] WS and / or RS was / is rs characters.
performed
Reticle Pod Reticle pod was / is placed placed misplaced pot
removed misplaced removed

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 For training purposes only Chapter C 49

Table C.1

Main Events in the Definition of the main events Status Status when Examples of Remarks
overview panel performed/being performed when failed possible
succesful filters
Shutdown system Shutdown system via the NA NA shut
Shutdown system and TWINSCAN application
Unix Shutdown system via
command line was / is
performed
Startup Full startup, Fast startup was / OK NOK startup
is performed
Startup (!) Full startup, Fast startup was / OK (!) NOK (!) startup
is performed and an
entanglement was / is detected
System Start / Stop System start Start NA em s mind the space between
System stop Stop the characters
Shutdown drivers All drivers were / are shutdown NA NA drive
TSW Test run Stopped Failed test Because no clear OK-NOK
status can be found in the
event log the duration of
the test is indicated. For
the filter use a space after
the characters.

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ASML Confidential 50 For training purposes only

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 D
APPENDIX: TIPS TO USE ELV TOOL RELEASE 1.2

INTRODUCTION This chapter gives the user of this ELV release 1.2 tool some hints and tips, it
contains out of two section.
• Part one called “genaral tips”, this is a quick reference guide about how to use the
main function “Filter”, “ GoTo” and “ Find all”.
• Part two called “ Wafer reject reason” gives information in a matrix about the
Software description of the reject wafer reason with possible causes as a hint for

ASML Confidential
the user.

General tips
General tips for Filter, GoTo and Find All
• Filter button under the Overview panel:
– Can be used on multiple main events when using "," (coma)
e.g: test,lot,pod
The result will show only the main events containing any of these terms:
"test" and/or "lot" and/or "pod "
– Can be used to hide main events in the overview when using "~" (tilde)
e.g: ~test.
The result will show all main events but the one containing the term "test"
• The GoTo button under the Overview panel:
– Can be used on multiple main events when using "," (coma)
e.g: test,lot,pod
The result will be to GoTo the main events containing "test" and/or "lot"
and/or "pod"

• Find All under the logging panel:

– Can be used on multiple main event when using "," (coma)
e.g: RS-1D14,AF-0901
The result of the search will be done on RS-1D14 and / or AF-0901 error
codes within the event log files.
– The GoTo button in Logging panel:
 52 For training purposes only

Can be used on multiple terms "," (coma)

e.g: EVENT,WARNING,ERROR
The result will be to GoTo in the logging where the terms "EVENT" and/or
"WARNING" and/or "ERROR" are found.

Note: The " " [space] is considered as a character when you use the above functions.
Table D.1

Main Events in the Definition of the main events Status when Status when Examples Remarks
overview panel performed/being performed succesful failed of possible
filters
ADT Advance Diagnostic Tool used NA NA adt The Summery panel layout is indentical to
Tests Summery
Air mount Air mount status Stable Unstable air
C&T CPU rebooted NA NA ct For the filter mind the space preceding the
lens temp status stable stabilizing characters
acc temp status stable stabilizing
production status OK Nok
production status [3 minutes wait..] Ready Not ready
Clear Reticle A reticle was / is cleared NA NA le c For the filter mind the space between the
characters
Clear Wafer A wafer was / is cleared NA NA fer c The relevant lot ID is indicated when
available
ASML Confidential

Cover A cover was / is opened / closed NA NA open/closed Indication that safety shutter are closed
added in the Overview
Gas Refill Refill performed Start Done NA fill
Gas maintenance Injects or PGR’s performed Start Done NA s ma Mind the space between the charcters
Idle Period when none of the other main NA NA idl Only the warning and Logging panels give
events took /takes place relevant information
IRIS Inspection IRIS inspection IRIS reticle IRIS reticle iris The Summary panel indicates the related
inspection OK inspection Reticle ID
failed The Logging panel contains information
between:
Reticle ”ID” moves from Robot to IRIS
Reticle “ID” moves from IRIS to robot
Lot Lot was / is processed OK aborted lot I
Lot (!) lot was / is processed and wafers OK (!) aborted !) ( Wafer reject reason catagories logged
were / are rejected “ No reject reason”
“Exception”
“Rejected by track”
“Lot stopped”
“Lot aborted”
“Mark sensor pre-alignment”
“Global level circle”
“Coarse alignment”
“Fine alignment”
“Measure height map”
“Reticle alignment”
“Exposure”
“Dynamic performance”
“Focus spots”
“Chuck spots”
“Reticle Shape”
Lot preparation failed The lot preparation failed NA failed prep
Lot Queue Lot queue started, stopped Started NA que
Stopped
Continued
MC changed Machine constants changed NA NA mc use a space after the characters. Mind that
FC changed fc in the event lg not all Machine Constant
TC changed tc changes are logged! Eg when manually
changed.
In the Overview the indentation indicates
to what main event it relates.
The Summery indicates the full description
of the component that has updated the
Constants [when applicable]

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 For training purposes only Chapter D 53

Table D.1

Main Events in the Definition of the main events Status when Status when Examples Remarks
overview panel performed/being performed succesful failed of possible
filters
MX action M-actions is performed OK NOK mx M-actions are claimed by MX but not all
are performed if not due. Mind the duration
to find if they are performed or not!
Release changes When PMA data are used, the .csv NA NA relea When multiple releases are found, thes
error log files might cover more are indicated in the Header of the user
than one SW release. The Release interface.
changes are now mentioned in the Only in this situation the Rel. number will
Overview be recalled within the Detailed Logging
panel
Reticle Pod Reticle pod was / is placed placed removed misplaced pot
removed misplaced
Recovery Recovery performed Successfull Failed reco recovery are taking place also outside
production lot.
It is now an indepandent event in the
Overview
SECS communication SECS communication SECS status SECS not secs
remote communicating
SECS status
Offline
SECS status
Communicating
Shutdown system Shutdown system via the NA NA shut
Shutdown system and TWINSCAN application Shutdown

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Unix system via command line
System Not initialized ONLY DURING IDLE: NA NA initial The Summary indicates what are the
This indicates that the system drivers not available to run production.
became NOT INITIALIZED The purpose is to indicate to the user that
a Startup Driver is required before running
any activity on the equipment
Startup Drivers Startup drivers performed OK NOK startup It only initialises the necessary drivers, no
retry is attempted if one driver failed it
Startup Drivers (!) Startup Drivers performed and OK (!) NOK (!) startup The type of entanglement is specified
entanglement detected [drivers involved] in the summary.
System Start / Stop System start Start NA em s mind the space between the characters
System stop Stop
Shutdown drivers All drivers were / are shutdown NA NA down
Task Died A SW task died and possibly the NA NA Task If this happen during a Test it might be
Unexpectedly system has to be stopped and sufficient to restart the test, if this fails a
started again. system stopped is required.
This main event is not shown during
System stop, System shutdown,Shutdown
drivers as it is logged almost
systematically in these situations
Test Queue Test queue Start Failed test q The Summary indicates what is the name
Finished of the Test queue.
Stopped
TRACK Track communication TRACK input TRACK not track
communication enabled communicating
TRACK input
disabled
TRACK output
enabled
TRACK output
disabled
TRACK
communicating
TRACK
interface
disabled

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 54 For training purposes only

Table D.1

Main Events in the Definition of the main events Status when Status when Examples Remarks
overview panel performed/being performed succesful failed of possible
filters
TSW Test run OK -Failed test,~queue The status in the overview indicates the
Finished -Test MS following:
Quality - Test failed =>any test that failed
-NOK Test MS quality NOK => flexqueueable
Test Result test with measurement quality nok
NOK Test Resul NOK => flexqueueable test
-Exited with result out of spec.
Test OK => flexqueueable test finished
with result in spec.
Test finished => non flexqueueable test
finished
Test Exited +> Test exited prematurely

If a default set of Test Constant [TC] is

used it is notified in the Summary
Functionality Definition Remarks
Find All & Filter When using the Find All function, the Pop window will show the founs
Overview items
Filtered Overview & Document multiple main events:
Document All Events This only applies when the overview is filtered. Either via the Filter button.
Detailed Logging This button adds extra software information for software specialists, and While in the logging panel, it is possible to toggle between
panel only applies to the logging panel and it’s content. Logging and Detailed Logging without loss focus of the
selected section
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Real time update The last main event selected is current main event Example if a lot runs and an inject [gas maintenance] takes
mode place during the lot, the gas maintenance is indented and
the focus in the Overview remains on the Lot ID. This until
the next main event which will be then the new focus in the
overview.
In the Real time mode in the Logging panel, events being
logged are displayed continously.
Any time the user makes any other selection the Real time
mode display is stopped to focus on the slection of the user.
To return to real mode re-select the current main event in
the Overview.

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 For training purposes only Chapter D 55

Wafer reject reasons

Description table of wafer rejection possibilities with posible cause.

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ASML Confidential 56 For training purposes only

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