Materials Chemistry C: Journal of
Materials Chemistry C: Journal of
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A solution processed Ag-ion-exchanged Li5AlO4 thin film has been used to fabricate a high performance
oxide memristor device with enhanced bistable switching and memory retention. For this device
fabrication, an Li5AlO4 thin film has been deposited on a highly p-doped silicon (p+-Si) substrate
followed by an ion exchange and reduction process that allows the conversion of the Li5AlO4 thin film
to an Ag(Ag+)–Al2O3 film. The Ag(Ag+)–Al2O3 film is a mixed phase consisting of an Ag nanoparticle
embedded Al2O3 film and silver ions and is responsible for resistive switching whereas the p+-Si
substrate works as the bottom electrode. A silver electrode has been used on top of Ag(Ag+)–Al2O3/p+-
Si that works as the top electrode of this memristor device. The I–V characteristics of the device
Received 17th June 2024, demonstrate a reversible switching behaviour that remains stable even after 200 consecutive operation
Accepted 27th August 2024 cycles. Furthermore, the ratio between the forward and reverse sweeps of the device exceeds 103 orders
DOI: 10.1039/d4tc02527j of magnitude and the device has a stable data retention capability of B4 104 seconds (B12 hours)
maintaining its on/off ratio of B104. Also, this device effectively emulates the properties of ReRAM up to
rsc.li/materials-c 200 iterations.
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In this work, a solution processed Li5AlO4 thin film has been 10 minutes) to remove organic substances and make the
deposited on a highly p-doped Si (p+-Si) substrate to fabricate a surfaces hydrophilic. The hydrophilic surfaces of p+-Si allow
high performance memristor device. Li5AlO4 is a well-known deposition of a pin-hole-free thin film of Li5AlO4 which is an
ion-conducting oxide electrolyte material that contains highly important step in the memristor device fabrication. After the
mobile Li+ through its crystal channel.34 The mobile Li+ of the cleaning process, the precursor sol of Li5AlO4 is spin coated
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Li5AlO4 thin film is replaced by Ag+ through an ion-exchange over these substrates at a spinning speed of 2500 rpm for one
process that has been metallized after the reduction process minute under ambient atmospheric conditions and dried at
resulting in an Al2O3 embedded Ag nanoparticle thin film 90 1C for two minutes to remove the solvent. After spin coating,
Ag(Ag+)–Al2O3.35,36 A silver electrode has been deposited on the precursor film is annealed at 350 1C for 30 minutes. This
top of this Ag(Ag+)–Al2O3/p+-Si film to complete the device process is repeated three times to achieve the desired thickness
fabrication. The ambient condition I–V characteristics of this of the Li5AlO4 thin film. Finally, thin films are annealed
device indicate its bistable resistive memory switching with a at 500 1C for one hour to get a polycrystalline film of Li5AlO4.
high on/off ratio and repeatability. Besides, devices show high After that, the thin films are dipped inside a 100 mM silver
memory retention with high endurance capability. nitrate [AgNO3] solution for 45 minutes to initiate the ion
exchange process. Through the ion-exchange process, silver
ions (Ag+) from the solution interchange with mobile lithium
2. Experimental section ions (Li+) from the Li5AlO4 thin film to form an Ag ion-
2.1. Material synthesis exchanged film (Ag5AlO4). Ag5AlO4 is thermodynamically
unstable and partly converts to the Ag(Ag+)–Al2O3 phase
The Li5AlO4 dielectric thin films are deposited by a sol–gel (Ag/Ag+–Al2O3) which is confirmed through XRD (discussed in
technique followed by an annealing process.34 The thin film the Results and discussion section). After this ion exchange
synthesis method allows the precursors to react uniformly procedure, the samples are rinsed with DI water to eliminate
at the molecular level and form a polycrystalline single any excess AgNO3 from the film’s surface. After washing, the
phase compound of Li5AlO4. Aluminum nitrate nonahydrate substrates are immersed in a 300 mM NaBH4 solution at
[Al(NO3)39H2O] (acquired from S D Fine Chem Limited, ambient temperature for one hour. During this process, the
498.0% pure) and lithium(II) acetate [CH3COOLi] (acquired remaining Ag+ has been transformed to metallic silver (Ag0) to
from TCI, 498.0% pure) are used as precursor materials for the form Ag-NPs, and the initial Ag5AlO4 film is transformed to
synthesis process. In the beginning, the Yoldas method is form the final Al2O3 embedded Ag nanoparticle thin film
employed to prepare a 300 mM alumina sol. Besides, a 300 mM Ag(Ag+)–Al2O3. After reduction, the films are cleaned by dipping
lithium acetate solution is prepared by using 2-methoxy etha- inside DI water to eliminate any remaining NaBH4 from the
nol as a solvent. These two solvents are then mixed in a 1 : 5 surface of the film. Finally, Ag electrodes of thickness 100 nm
ratio, so that the final product (Li5AlO4) maintains its stoichio- are deposited through the thermal evaporation method on top
metric ratio. To create a transparent, homogeneous precursor of Ag(Ag+)–Al2O3 with an electrode area of B0.71 mm2
solution of Li5AlO4, the resulting mixture is stirred at room (0.84 mm 0.84 mm) (Fig. 1).
temperature for 30 minutes. This mixture is then fabricated Ion exchange and reduction reaction:
on a heavily boron-doped p-type silicon (p+-Si) substrate after
being filtered through a PVDF syringe filter (0.45 mm).
To perform the ion exchange and reduction process of the
Li5AlO4 thin films, a silver nitrate [AgNO3] (acquired from
(1)
Sigma-Aldrich, 98% purity) solution (100 mM) is prepared
using deionized water whereas an aqueous solution of
300 mM sodium borohydride (crystals) [NaBH4] (acquired from
Sisco Research Laboratories Pvt. Ltd 498.0% pure) has been (2)
prepared for the reduction process.
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Fig. 1 Schematic configuration of the (a) reference device based on Li5AlO4 dielectric (p+-Si/Li5AlO4/Ag), (b) device after ion exchange based on
Ag5AlO4 dielectric (p+-Si/(Ag/Ag+)–Al2O3/Ag) and (c) proposed device based on Ag(Ag+)–Al2O3 dielectric (p+-Si/Ag(Ag+)–Al2O3/Ag) respectively.
imaging. A Thermo Scientific K-a apparatus equipped out of those the peaks at 2y E 31.921 and 57.671 correspond to
with a monochromatic Al X-ray source was used to conduct the Al2O3(220) and Al2O3(116) planes, matched from the JCPDS
X-ray photoelectron spectroscopy (XPS) studies. A semiconduc- data (file no. 79-1558). The other two peaks are located at 2y E
tor parametric analyzer (Keysight B1500A) and a dual 37.761 and 43.71 which correspond to Ag(111) and Ag(200)
source meter (Keysight B2912A) are used to perform all elec- respectively (JCPDS file no. 89-7322). These data indicate
trical characterization studies and retention time measure- metallic silver and Al2O3 formation in the Ag-ion exchange
ments of the memristor under ambient conditions. The set film. However, after reduction, only two highly intense XRD
and reset probability curves have been fitted by a Gaussian peaks located at 2y E 37.761 and 43.71 are observed which
curve using Python. The ReRAM study of the device has been correspond to the Ag(111) and Ag(200) planes (JCPDS 89-7322).
performed using an AFG 31000 SERIES Arbitrary Function These peak intensities are B3 times higher than those of ion-
Generator. exchange samples, implying metallization of most of the Ag+ in
the film. This comparative XRD study clearly indicates Ag+ are
partly formed Ag metal during ion-exchange process and mostly
3. Results and discussion remains in the ionic form ((Ag/Ag+)–Al2O3). However, after
reduction surface Ag+ are mostly form metallic silver (Ag) and
3.1. XRD and UV-Vis absorption
deeper Ag+ of this film remain in the ionic form which is
Crystalline phase identification of all different thin films has further investigated through the XPS study, is presenting as
been conducted through an XRD study which is shown in Ag(Ag+)–Al2O3.
Fig. 2(a). Initially, a Li5AlO4 thin film is prepared on a p+-Si Normalized UV-Vis absorption spectra of Li5AlO4 and
substrate exactly in a similar way to that of device fabrication. Ag(Ag+)–Al2O3 thin films that are deposited on a quartz sub-
The XRD data of the sample indicate polycrystalline thin film strate are depicted in Fig. 2(b). The data indicate strong UV-
formation with intense peaks at 2y E 21.041, 22.941, 31.31, absorption of the Li5AlO4 thin film in the 200–350 nm region,
39.461 and 44.761 corresponding to the (102), (112), (113), (132) whereas the absorption band of the Ag(Ag+)–Al2O3 thin film
and (142) planes of the crystalline phase of Li5AlO4, identified exhibits a strong visible range absorption. The absorption band
from the JCPDS data file 70-0432.34 However, after Ag-ion of the Ag(Ag+)–Al2O3 thin film is extended up to B600 nm with
exchange of the Li5AlO4 thin film, it shows a completely a peak position at 375 nm which originates due to the plas-
different XRD pattern, indicating a new phase formation from monic absorption of Ag NPs. Although the plasmonic peak for
the earlier. As it shows, four intense peaks are generated, and silver NPs is commonly observed in the range of 400–500 nm,
Fig. 2 (a) Thin film XRD patterns of Li5AlO4, (Ag/Ag+)–Al2O3, and Ag(Ag+)–Al2O3 thin films, coated on the silicon (p+-Si) substrate. (b) UV-Vis analysis of
Li5AlO4 and Ag(Ag+)–Al2O3 thin films, coated on a quartz substrate.
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the blue shift in the plasmonic peak is caused due to the nanoparticles is around 10 nm as obtained from the TEM
change in the electronic environment around silver atoms image of the Ag(Ag+)–Al2O3 film sample (Fig. S2, ESI†).
caused due to the surrounding Al2O3 layer.38
3.3. X-ray photoemission spectroscopy (XPS)
To verify the chemical state of the containing element in the
3.2. Surface morphology study through AFM, particle size
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Fig. 3 (a) and (b) 2-D and 3-D AFM images of p+-Si/Li5AlO4, (c) and (d) 2-D and 3-D AFM images of p+-Si/(Ag/Ag+)–Al2O3, and (e) and (f) 2-D and 3-D
AFM images of p+-Si/Ag(Ag+)–Al2O3.
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Fig. 4 High-resolution XPS spectra of the Ag(Ag+)–Al2O3 sample: (a) Ag 3d, (b) Al 2p, and (c) O 1s.
531.3 eV, respectively, corresponding to lattice oxygen and of Device-2) and Ag NPs (in the case of Device-3) catalyses the
oxygen vacancy (Fig. 4c).39,42,43 The peak positions of all these formation of a conductive filament. This filamentary structure,
systems match those of the previously published Ag–Al2O3 under the influence of bias voltage, undergoes a cyclic for-
systems quite closely.39 Thus, the XPS analysis of the sample mation and rupture process. The formation of the filament
provides additional evidence supporting the thin-film Ag(Ag+)– represents the SET process of the device and is named the high
Al2O3 synthesis. It also clearly shows in this thin film the ratio resistance state (HRS). In contrast to this process, the rupture
of Ag+ is higher than Ag0. represents the RESET process and is termed the low resistance
state (LRS). Consequently, the inception of Ag ions and Ag NPs
empowers the device to prominently showcase memristive
3.4. Electrical characteristics properties. The device performance has also been studied by
Ambient atmosphere electrical characterization has been per- varying the concentration of the switching layer (100 mM,
formed to realize the resistive switching properties of these 200 mM, and 500 mM), as pictured in Fig. S3 (ESI†). The
devices. For this study, two reference devices have been fabri- data reveal no significant switching behaviour in any of the
cated: one of them by using solely the Li5AlO4 thin film and the devices, indicating that resistive switching (RS) occurs only at a
other one with the (Ag/Ag+)–Al2O3 film. Devices with active particular concentration of Ag(Ag+)–Al2O3. The performance
materials of Li5AlO4, (Ag/Ag+)–Al2O3 and Ag(Ag+)–Al2O3 are analysis has also been studied by altering the top electrode
referred to as Device-1, Device-2 and Device-3 respectively. area (Fig. S4, ESI†).
Fig. 5 shows the current–voltage (I–V) characteristics of these The endurance of a memristor that determines the stability
devices on a linear scale for a single current–voltage iteration of the device under consecutive resistive switching cycles is one
cycle within the voltage range of 4 V. The red-coloured arrows of the most important studies to realize the performance and
show the direction of the applied voltage sequences and the reliability of the device. Therefore, the resistive switching
corresponding current. In this investigation, Device-1 did not behaviour of these devices has been investigated through
exhibit any discernible switching behaviour (Fig. 5a), but repeated cyclic I–V characterization. As described in the earlier
Device-2 and 3 demonstrated distinctly robust switching beha- section, the resistive switching behaviour of Device-1 is not
viour (Fig. 5b and c) respectively). The switching characteristics observed; therefore, these endurance studies have been inves-
are found at B4 V of external bias, both for Device-2 and 3. tigated for Device-2 and 3. The semi-log plot of such I–V
This behavior implies that the introduction of Ag+ (in the case characteristics of Device-2 is plotted in Fig. 6(a). This study
Fig. 5 Linear plot of current vs. voltage curve for (a) p+-Si/Li5AlO4/Ag, (b) p+-Si/(Ag/Ag+)–Al2O3/Ag, and (c) p+-Si/Ag(Ag+)–Al2O3/Ag, respectively.
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Fig. 6 (a) Current vs. voltage curve of p+-Si/(Ag/Ag+)–Al2O3/Ag on a semi-logarithmic scale and (b) endurance property of p+-Si/(Ag/Ag+)–Al2O3/Ag for
100 cycles of continuous measurement.
reveals that Device-2 is capable of maintaining its resistive An endurance test has also been performed by subjecting
switching up to 100 continuous sweeps with an HRS-to-LRS the devices to a set and reset voltage pulse of a pulse width of
ratio of B102. However, above this limit the device is totally 10 ms with a pulse height of 5 V. Device-2 exhibits the ability to
degraded. It can be noted that the RESET-step has a wider maintain two stable resistance states throughout cycle stress-
variation in different cycles with respect to the SET-step. ing, lasting up to 3 104 cycles, while Device-3 achieves
Current vs. number of iterations for both the LRS and HRS stability for an impressive 9 104 cycles. Beyond this point,
are shown in Fig. 6(b). there is no sudden switch from the low resistance state (LRS) to
A similar study has been performed with Device-3 which is the high resistance state (HRS). To provide a comprehensive
shown in Fig. 7. The data indicate that Device-3 can maintain view of the endurance curve, data have been chosen selectively
an HRS-to-LRS ratio of B103 with minimal cycle-to-cycle varia- for the LRS and HRS at regular intervals, as illustrated in
tion for continuous sweep up to the 100 cycles (Fig. 7a). Fig. 8(a and b). The complete dataset for endurance cycles is
Above this range, Device-3 can still show its resistive switching available in Fig. S7 of the ESI.†
behaviour but the HRS-to-LRS ratio reduces by one order The statistical distribution of set and reset voltages in
of magnitude (102). However, this ratio still maintains up to consecutive cyclic I–V characterization of a memristor device
200 consecutive cycles (Fig. 7b). This reduction may be due to can provide information about its switching voltage. Besides, it
the degradation of the device, caused by the continuous bias also provides insight into the switching mechanism of the
stress that crosses the tolerance limit of the device. Current vs. device. A narrow distribution of the plot is expected for a high
number of iterations for both the LRS and HRS are shown in performance memristor device. As depicted in Fig. 8(c and d),
Fig. 7(c). The cyclic stability and endurance of the device have the set voltage of Device-3 exhibits variability spanning from
also been documented by replacing the top electrode from Ag to 2.5 V to 4 V. The accompanying Gaussian curve fit highlights
Au, and the data are shown in Fig. S5 (ESI†). Besides this, a peak centred at 3.3 V, indicating that the mean set voltage for
device-to-device variation for switching voltages and HRS to the p+-Si/Ag(Ag+)–Al2O3/Ag configuration is B3.3 V. On the
LRS ratios is illustrated in Fig. S6 (ESI†). other hand, reset voltages exhibit a broad dispersion ranging
Fig. 7 (a) and (b) Current vs. voltage curve of p+-Si/Ag(Ag+)–Al2O3/Ag on a semi-logarithmic scale and (c) endurance property of p+-Si/Ag(Ag+)–Al2O3/
Ag for 200 cycles of continuous measurement.
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Fig. 8 Pulse switching endurance for two resistance states of (a) p+-Si/(Ag/Ag+)–Al2O3/Ag and (b) p+-Si/Ag(Ag+)–Al2O3/Ag respectively and (c) and (d)
the statistical histograms of set and reset voltages over 200 consecutive cycles of p+-Si/Ag(Ag+)–Al2O3/Ag. Lines are obtained by fitting to the Gaussian
distribution.
from 2.9 V to 4.2 V. The distribution curve demonstrates a the ON and OFF state currents. In contrast, Device-2 and
predominant peak at 3.55 V, implying an average reset voltage Device-3 both displayed notably favourable behavior, with the
of approximately 3.55 V. A similar study has been carried out ON state to OFF state current ratio of 104 which has remained
for the device p+-Si/(Ag/Ag+)–Al2O3/Ag represented in Fig. S8 stable over the span of 3 hours (103 s) and 12 hours (more than
(ESI†). 104 s) for these devices respectively. Such a long retention time
by maintaining an on/off ratio of 104 is rarely reported in the
3.5. Retention time literature. However, it is observed that the performance of
The data retention capability of the devices, namely Device-1, Device-2 highly diminishes after 103 s resulting in a negligible
Device-2 and Device-3, has been investigated as shown in Fig. 9. ON/OFF ratio, thus displaying its relatively poor performance as
The initial step involved applying a voltage of 3 V to attain the a data retention device. On the other hand, Device-3 displays no
high-resistance state (HRS) and a bias of 5 V to achieve the low such degradation in device performance and hence shows its
resistance state (LRS). Subsequently, a current vs. time (I–t) capability to be used as a memory storage device. These data
measurement is carried out. In the case of Device-1, it is have been projected over a period of at least 30 days, revealing
observed that no significant distinction is evident between the sustained preservation of the ON/OFF ratio even after this
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Device structure Fabrication process ION/IOFF Retention time (s) Endurance Ref.
Pt/HfO2/Pt Focused ion beam technique B10 4
103
100 30
Ag/NiOx/TiO2/FTO Spin-coated and sputtering-deposited B103 104 100 44
GaIn/NiO/CeO2/ITO Sol–gel spin coating B103 — 100 45
Ag/ZrO2/Pt Magnetic sputtering and spin coating — 3000 100 46
p+-Si/b-Ga2O3/Au VLS 10 — — 47
Ti/Pt/MoO3/Ti/Au e-Beam evaporation 102 B105 100 48
Pt/a-GMO/Pt PAD B103 B103 150 49
p+-Si/Ag(Ag+)–Al2O3/Ag Solution-processed B103 4104 200 This work
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Fig. 11 Schematic model showing the mechanism of filament formation and rupture at the (a) initial state; (b) SET process and (c) RESET process,
respectively.
Fig. 12 Band diagram depicting (a) the initial state, (b) Ag accumulation, (c) metallic contact, and (d) Ag depletion of p+-Si/Ag(Ag+)–Al2O3/Ag,
respectively.
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