A Design of 300 GHz Waveguide Bandpass Filter
with H-plane Offset Inductive Window
Hao Wang, Wei-Dong Hu, Rui-Ting Liu, Li-Ming Si Jian-Yong Yin, Tao Dong
School of Information and Electronic Engineering State Key Laboratory of Space-Ground Integrated
Beijing Institute of Technology Information Technology, Space Star Technology CO., Ltd.,
Beijing, China Beijing, China
hoowind@[Link]
Abstract—In this paper, a WR-2.8 band (220–325 GHz) accurately designed with the theory of transmission lines and
waveguide bandpass filter is presented, and it is composed of five also can be analyzed based on the theory of coupling matrix.
waveguide resonators. This improved directly coupled resonator The Fig.1.(b) shows the synchronously tuned coupled
filter with asymmetrical inductive windows is realized using H- resonator circuit with magnetic coupling.
plane offsets. The Chebyshev response filter has a centre
frequency of 300 GHz, a fractional bandwidth of 4.6% and a
passband return loss of 20 dB. Through the tolerance analysis,
the micro-electromechanical systems(MEMS) and ultra-precision
machining process with the precision within 5ȝm can be chosen
for the filter fabricating.
Keywords—waveguide filter, terahertz , inductive windows
(a) (b)
I. INTRODUCTION Fig.1. Traditional inductive window coupling structure
With the deepening of related research on terahertz
technology, terahertz filters with high performance are Equation (1) can be used to find the magnetic coupling
increasingly demanded [1]. Accurate theoretical design and coefficient k
high precision of the process has become a problem that must L f 2− f2
k = m = 22 12 (1)
be solved in this area [2]. In the terahertz frequency range, the
L f 2 + f1
physical dimensions are important factors limiting the
development of terahertz filter, so processing difficulty has where f1 and f2 are respectively the resonant frequencies of
become an important consideration in designing the filter. the two cavities after coupling.
Among terahertz filters, the waveguide filter has metal This five-order Chebyshev-type response filter was
enclosed structure, and compared with other forms of designed by general coupling matrix for coupled-resonator
terahertz filter, it can avoid electromagnetic radiation and has filters. From the theory described in [1], the coupling matrix
larger power capacity [3]. In addition, its repeatability and coefficients (i.e. M) and external quality factors (i.e. Qe ) can
simplicity of structure also makes it have advantages in terms
of performance and effective cost. be calculated by the formula
The authors chose the waveguide resonant cavity structure, g 0 g1 g n g n +1 FBW (2)
Qe1 = Qen = M i,i+1 =
simplifying and innovating the traditional symmetrical H- FBW FBW gi gi +1
plane inductive window coupling structure. H-plane offsets
are used to form the asymmetrical inductive windows. The for i=1 to n-1, where n is the order of the filter, g n is the
new structure are considered more appropriate than value of the Chebyshev lowpass prototype element, and FBW
symmetrical windows, which cannot be realized with a zero is the fractional bandwidth of the filter. Substituting the values
physical length, and the thick of the inductive diaphragms and of designed centre frequency and fractional bandwidth into (1),
strips may influenced the performance of the filter [4]-[6]. H- the design parameters for the filer with FBW=5% are
plane offsets are important in the design of the 300GHz filter Qe1 = Qe6 = 15.13 , M 23 = M 34 =0.05 , M 23 = M 34 =0.035 .
proposed in this paper. Moreover, filter with the simplified
coupling structure is easier to be processed.
B. The filter model
II. DESIGN The designed WR-2.8 filter with input and output
waveguides is shown in Fig. [Link] facilitate the processing and
A. Magnetic Coupling testing, the design of the structure should avoid being too
complex, and the centers of input and output port are located
In Fig.1.(a), it shows the most widely used inductive in a straight line. The WR-2.8 standard rectangular waveguide
window coupling structure. Its symmetric structure can be is used as the port of the filter.
978-1-5090-2276-2/16/$31.00 ©2016 IEEE
3dB bandwidth of the filter reaches 14GHz; the return loss in
the pass band is better than 20dB; the out-of-band rejection is
better than 33dB; the rejection of low frequency band reaches
42dB, and the rectangular coefficient is good.
1
m2 m3
0.00
Curve Info
m1
-20.00 dB(S(1,1))
Setup1 : Sw eep
S Parameters, dB
dB(S(2,1))
Setup1 : Sw eep
-45.00
-70.00 Name X Y
m1 295.4000 -19.9616
-95.00 m2 292.9594 -2.9940
m3 307.3077 -3.0410
-120.00
250.00 275.00 300.00 325.00 350.00
Freq [GHz]
Fig. 2. Configurations of proposed filter with inductive windows realized
Fig. 4. Simulated results for the 300GHz filter
using H-plane offsets.
Five of the resonant cavities are shifted away from input The micro-electromechanical systems and ultra-precision
and output waveguide arranged in the axis. The two resonant machining process with the precision within 5ȝm can be
cavities are staggered to form an inductive window, chosen for the filter fabricating [7]. The machining error
substituting the diaphragms and strips, and as a result, simple affects the performance of the components. According to the
machining process can be obtained. tolerance analysis, it is noted that the dimension of the offset,
i.e. C1, C2, C3, has a great influence on the performance of
The couplings between cavities can be adjusted by the filter. Fluctuation of 10 ȝm mainly influence the insertion
altering the displacement between the cavities, i.e.C2, C3. loss in the pass band, and the operating frequency band
When the window size decreases, the coupling reduces. In slightly offsets, as shown in Fig.5.
addition, by changing the relative positions of the port and
adjacent cavity, i.e.C1, the external Q can be tuned. The
window size and the cavity length could be optimized in
HFSS according to the Equation (1) and the value of M, Q.
III. RESULTS
The final designed dimensions of the filter after full-wave
optimisation are shown in TABLE I, and the Fig.3 exhibits the
electric field distribution of this filter.
TABLE I. OPTIMIZED DIMENSIONS OF THE FILTER
parameter value(mm) parameter value(mm) Fig. 5. Typical results of the tolerance analysis
L1 0.608 C1 0.438
In the maximum error range of the machining process, the
L2 0.611 C2 0.326
impact on the filter performance due to the variation of each
L3 0.614 C3 0.304 parameter value is in the acceptable range. It is proved that the
processing method mentioned above is feasible in the
fabricating.
IV. CONCLUSION
In this paper, an improved inductive window coupling
waveguide filter is presents, and it shows excellent
performance in simulation results. The filter is easy to
fabricate due to its simple structure. From the results of the
analysis, it is feasible to use the ultra precision machining or
MEMS process for practical fabricating. This improved filter
topology provides an alternative for designing terahertz
waveguide filters. The next step of this work is to do
Fig. 3. Electric field distribution of the proposed filter
fabrication and measurement.
The simulated results in HFSS are shown in Fig. 4. The
ACKNOWLEDGMENT [2] Shang X, Ke M L, Wang Y, et al. Micromachined WR-3 waveguide
filter with embedded bends[J]. Electronics Letters, 2011, 47(9): 545-547.
This work was supported by the National Natural Science [3] Chen Q, Shang X, Tian Y, et al. SU-8 micromachined WR-3 band
Foundation of China (Grants nos. 61307128, 61275107, and waveguide bandpass filter with low insertion loss[J]. Electronics Letters,
61527805), the Specialized Research Fund for the Doctoral 2013, 49(7): 480-482.
Program of Higher Education of China (Grant no. [4] Stephens D, Young P R, Robertson I D. Design and characterization of
20131101120027), the Open Research Fund of State Key 180 GHz filters in photoimageable thick-film technology[J]. IEEE MTT-
Laboratory of Space-Ground Integrated Information S IMS, 2005, 1: 451-454.
Technology (Grant no. 2014_CXJJ- TX_03), and the Basic [5] Hu J, Xie S, Zhang Y. Micromachined terahertz rectangular waveguide
bandpass filter on silicon-substrate[J]. IEEE microwave and wireless
Research Foundation of Beijing Institute of Technology, components letters, 2012, 22(12): 636-638.
China (Grants nos. 20120542015 and 20130542010). [6] Shang X, Tian Y, Lancaster M J, et al. A SU8 micromachined WR-1.5
band waveguide filter[J]. IEEE Microwave and Wireless Components
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