

APPLIED MATERIALS

GP Software
Release Notes
Version 7.50
Build 55

July 2012
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 APPLIED MATERIALS SANTA CLARA: Factory Automation Software Group
Effective Date: July 2012
Title: GP Software Release Notes Version 7.50_55

Table of Contents

1 INTRODUCTION ................................................................................................................................. 9
1.1 SCOPE ............................................................................................................................................... 9
1.2 SUPPLEMENTAL DOCUMENTS ..........................................................................................................10
1.3 DEFINITIONS OF ACRONYMS ............................................................................................................10
1.4 GP SOFTWARE INSTALLATION .........................................................................................................11
1.5 REGARDING GP CSV FILES .............................................................................................................11
1.6 SOFTWARE REQUESTS (SR) .............................................................................................................12
2 KNOWN PROBLEMS AND WORKAROUNDS ............................................................................13
2.1 WARNINGS .......................................................................................................................................13
2.2 KNOWN PROBLEMS FOUND DURING TEST .......................................................................................15
2.3 KNOWN PROBLEMS FOUND DURING DEVELOPMENT .......................................................................15
3 FEATURES AND ENHANCEMENTS .............................................................................................16
3.1 KEY FEATURES ................................................................................................................................16
3.1.1 ATD SR7358: NEED THE ADDITIONAL LOG FILE FOR S2F23 ...................................16
3.1.2 ATD SR8200: ADD FA SUPPORT FOR NEW BASELINE MOIRA .................................16
3.1.3 ATD SR8524: CREATE A NEW GP VERSION THAT SUPPORTS E90 ONLY ..............16
3.1.4 ATD SR8839: STATE MACHINE ENHANCEMENT IN GP .............................................16
3.2 FEATURES AND ENHANCEMENTS TABLE ..........................................................................................17
3.2.1 ATD SR7821: NEW ETCH PRODUCT CDR ......................................................................17
3.2.2 ATD SR8025: SUPPORT E30 FOR NEON .........................................................................17
3.2.3 ATD SR8038: DO NOT ALLOW COMMUNICATIONS WITH HOST ON GP STARTUP
UNTIL ALL GP COMPONENTS HAVE COMPLETED INITIALIZATION ....................................17
3.2.4 ATD SR8083: PRODUCERETCH: IMPLEMENT S7FX FOR OFFSET TABLE ..............17
3.2.5 ATD SR8091: IMPROVE GP CPU USAGE ON FEPC2 HARDWARE BY OPTIMIZING
MEMORY ALLOCATION ..................................................................................................................18
3.2.6 ATD SR8266: SUPPORT PASSTHRU FORMATTED PROCESS PROGRAM
REQUESTS FOR MILLENIUM BASELINES ....................................................................................18
3.2.7 ATD SR8279: SUPPORT NEW PPTYPE FOR TETRAX CHAMBER TYPE FOR
MILLENIUM BASELINE ....................................................................................................................18
3.2.8 ATD SR8302: ADD SUPPORT FOR HOST TO UPLOAD / DOWNLOAD NEW
REFLEXIONGT (SYCAMORE) METROLOGY RECIPE TYPE ......................................................18
3.2.9 ATD SR8504: SUPPORT NEW PPTYPE FOR OFFSET TABLES FOR ALL CHAMBER
TYPES FOR MILLENNIUM BASELINE ...........................................................................................19
3.2.10 ATD SR8579: RF3 SUPPORT TS BI-DIRECTIONAL LP..................................................19
3.2.11 ATD SR8626: MILLENIUM: PROVIDE SUPPORT FOR THE NEW ETCH CHAMBER
TYPE PCAR..........................................................................................................................................19
3.2.12 ATD SR8679: SOKUDO::TOOL STATION SUPPORT DUAL CRANE ...........................19
3.2.13 ATD SR8704: PROVIDE A UNIQUE, READABLE SVNAME AND ECNAME .............19
3.2.14 ATD SR8898: GP SHOULD RETURN SV ONLY FROM S1F3, S1F11 ............................20
3.2.15 ATD SR9102: INCREASE THE MAXIMUM SIZE FOR PPID REQUESTS .....................20
3.2.16 ATD SR9159: DEFAULT VALUE CHANGE FOR AMATRTSM64BITSUPPORT
ENVIRONMENT VARIABLE .............................................................................................................20
3.2.17 ATD SR9211: MILLENNIUM: PROVIDE SUPPORT FOR ADDITIONAL PPTYPES ....20
3.2.18 ATD SR9037: NEW E157 EVENT DESCRIPTIONS NON UNIQUE ................................21
3.2.19 ATD SR9243: ENHANCEMENT FOR UNIQUE SVNAME ..............................................21
3.2.20 ATD SR9246: ENHANCE N2 PURGE LOADPORT CAPABILITY REPORTING ..........21
4 BUGS RESOLVED .............................................................................................................................22

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Title: GP Software Release Notes Version 7.50_55

4.1 BUGS RESOLVED TABLE ..................................................................................................................22

4.1.1 ATD SR8049: S10F1 MESSAGE WITH THE W-BIT ENABLED .....................................22
4.1.2 ATD SR8347: SR 8279 FAIL: EC 190 CANNOT BE SET TO 94 (ALG-TRAX) ..............22
4.1.3 ATD SR8379: INCREASE THE SIZE OF PPTYPE NAME ...............................................22
4.1.4 ATD SR8462: INVESTIGATE [Link] FILE CORRUPTION ..............................23
4.1.5 ATD SR8482: SUPPORT NEW “CARRIER DELETED” EVENT FOR IEYASU
TOOLSTATION TO RESOLVE TIMING ISSUE ...............................................................................24
4.1.6 ATD SR8677: ENUMERATED TYPE DESCRIPTION BUFFER IS TOO SMALL WHEN
DUPLICATE DESCRIPTIONS EXCEED 999 ....................................................................................24
4.1.7 ATD SR8104: GP SENT INCORRECT DATA IN EVENT REPORT TO HOST ..............24
4.1.8 ATD SR8781: FIX ISSUE WITH EVENT REPORTS CONTAINING U8 VID .................24
4.1.9 ATD SR8793: ADD SUPPORT FOR U8 FORMAT WITH CONDOR CGAFE .................25
4.1.10 ATD SR8843: INCOMPLETE MESSAGE HANDLING IN THE BACKLINK .................25
4.1.11 ATD SR8995: FIX EAC VALUE RETURNED IN S2F16 WHEN HOST USES WRONG
SECS TYPE IN SETTING AN EC VALUE.........................................................................................25
4.1.12 ATD SR9002: „DISABLE ALL EVENTS‟ DOES NOT DISABLE THE STATE
MACHINE EVENTS ............................................................................................................................25
4.1.13 ATD SR9029: GP CANNOT HANDLE RT‟S EC WITH DATA TYPE ARRAY OF F8
AND NEWLY CREATED CEIDS BY CGA IN 2301070201002 RANGE .........................................25
4.1.14 ATD SR9075: FIX 2 MEMORY ISSUES (1) “POD SIZE = 0” CAUSED BY MEMORY
OVERWRITTEN CAUSED BY START_MIDS; (2) CRASH CAUSED BY MEMORY LEAK .......25
4.1.15 ATD SR9062: FIC INITIALIZED SVID HANDLING IMPROVEMENT ..........................25
4.1.16 ATD SR9199: DOWNLOADING A LARGE RECIPE (GREATER THAN 1 MB) WILL
CAUSE GP TO CRASH .......................................................................................................................25
5 EDA FEATURES AND ENHANCEMENTS ....................................................................................27
5.1.1 ATD SR8000: EXPOSE THE THOUSANDTH DIGIT IN TIMESTAMP TO EDA CLIENT
27
5.1.2 ATD SR8167: SET THE ISTRANSIENT TO TRUE FOR THE SEMI OBJECT TYPE
DVIDS 27
5.1.3 ATD SR8214: RE-MODIFY EDA PARAMETER NAMES ................................................27
5.1.4 ATD SR8270: WINGP LOGFILESETTING OPTION FOR EDA LINK ............................28
5.1.5 ATD SR8308: GP B7.30_28 CRASH ...................................................................................28
5.1.6 ATD SR8235: ADD EDA SUPPORT FOR THE IEYASU BASELINE ..............................28
5.1.7 ATD SR7976: EDA SUPPORT FOR CMP REFLEXION GT (SYCAMORE X) ...............28
5.1.8 ATD SR8442: EDA: CLIENT SHOWS INVALID SUBSYSTEM COMPONENTS LIKE
LOADPORT.7 .......................................................................................................................................28
5.1.9 ATD SR8511: GP NEEDS TO GENERATE EDA EQUIPMENT STRUCTURE DATA
BASED ON [Link] .............................................................................................................28
5.1.10 ATD SR8692: EDA – CARRIER LOCATION PARTITION 31, 32, AND 33 NOT VALID
29
5.1.11 ATD SR8823: GP SHOULD NOT USE S105F37 ON ETCH AMS BASELINES TO
ENABLE EDA STATE MACHINE EVENTS .....................................................................................29
5.1.12 ATD SR8921: SR8882: "EXPOSE REALTIME STATE TRANSITION EVENTS TO
HOST" NEEDS TO BE REWORKED .................................................................................................29
5.1.13 ATD SR8930: BUFFER CHAMBER DOES NOT HAVE SUBSTRATE LOCATION
STATE 30
5.1.14 ATD SR8971: MEMORY LEAK ON SOKUDO WITH BUILD 7.50_41 ...........................30
5.1.15 ATD SR8952: SYCAMORE EDA MATERIAL LOCATION ISSUE .................................30
5.1.16 ATD SR9025: SUPPORT MULTIPLE STATE MACHINES THAT BELONG TO THE
SAME OBJECT SOURCE ....................................................................................................................30
5.1.17 ATD SR9125: INVESTIGATE PROBLEM WITH GP HANDLING EDA TRIGGER
EVENTS WHEN THESE EVENTS OCCUR SIMULTANEOUSLY .................................................30
5.1.18 ATD SR9050: RELATIVE REFERENCE SHOULD BE BLANK ......................................31

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Title: GP Software Release Notes Version 7.50_55

6 BDS FEATURES AND ENHANCEMENTS ....................................................................................32

7 E40 / E94 (PROCESS JOB / CONTROL JOB) RELATED SRS ................................................33
7.1.1 ATD SR8021: PROVIDE E94 SVID WHICH CAN BE ASSOCIATED WITH E90 T12 ..33
7.1.2 ATD SR8125: NOT ENOUGH MEMORY ALLOCATED FOR GP TO BUILDS REPLY
MESSAGE S16F14 ON 100 PJS WITH 80 CHAR LONG ..................................................................34
7.1.3 ATD SR8219: CJSTOP IN E40-0705 MODEL ....................................................................34
7.1.4 ATD SR8341: NEED TO DESTROY CJ WHEN THE CARRIER IS REMOVED .............34
7.1.5 ATD SR8375: INCORRECT ERROR TEXT USED IN RESPONSE TO CJ ABORT/STOP
34
7.1.6 ATD SR8385: SUPPORT PRIORITY AND WAFER PAIRING .........................................34
7.1.7 ATD SR8525: CJ ABORT AND PJ ABORT DOESN'T WORK PROPERLY WHEN
MANUAL LOT START IS DISABLED ..............................................................................................35
7.1.8 ATD SR8644: DO NOT DESELECT WHEN ABORTING PJ IN RTS DETERMINES PJ
ORDER 35
7.1.9 ATD SR8380: S14F10 MESSAGE GENERATION.............................................................35
7.1.10 ATD SR8702: GP CRASHES WITH ACCESS VIOLATION WHEN ATTEMPTING TO
CREATE PJ WITH 255 RECIPE TUNING PARAMETERS ..............................................................35
7.1.11 ATD SR8718: CJ CAN NOT BE CREATED BY THE HOST IN SYSTEM WITH TOOL
STATION ..............................................................................................................................................35
7.1.12 ATD SR8848: MAXIMUM NUMBER OF PJS ENHANCEMENT ....................................35
7.1.13 ATD SR8891: GP CRASHES IF 100 CJS ARE QUEUED ..................................................35
7.1.14 ATD SR9041: S14F10 MESSAGE FORMAT IS BROKEN WHEN EDA PLAN WHICH
USES EVENTS OR PARAMETERS RELATED TO CJ IS ACTIVE .................................................36
7.1.15 ATD SR9040: EXCLUDE CHAMBER RECIPE NAME FROM PJ RECIPE TUNING .....36
8 E87 (CARRIER MANAGEMENT) RELATED SRS .......................................................................37
8.1.1 ATD SR7962: GP REJECTS CANCELBIND IF PORT IS NOT INCLUDED ...................37
8.1.2 ATD SR8304: ALLOW CONTENTMAP ATTRIBUTE IN 2ND
PROCEEDWITHCARRIER PROVIDED FROM HOST .....................................................................37
8.1.3 ATD SR8376: ENHANCEMENT DUMMY USAGE BEHAVIOR ....................................37
8.1.4 ATD SR3038: THE FUNCTIONAL ADDITION OF USAGE IN PROCEED WITH
CARRIER ..............................................................................................................................................38
8.1.5 ATD SR8705: S3F27 ACCESS MODE CHANGE SUPPORT FOR IEYASU
TOOLSTATION ...................................................................................................................................38
8.1.6 ATD SR8785: MAKE LOCATION ID AVAILABLE AS DV FOR COSM .......................38
8.1.7 ATD SR8805: GP CRASHES WHEN 32 LOADPORT LOCATIONS ARE CONFIGURED
38
8.1.8 ATD SR8842: FA: SLOTMAP WAITING FOR HOST EVENT (CEID:3030607) WAS
PUBLISHED EVEN IF THE CARRIER IS ALREADY CANCELED ...............................................39
8.1.9 ATD SR8870: GP SHOULD NOT USE TSBIND ON FIMS/LP IN OPERATOR ACCESS
39
8.1.10 ATD SR8899: SUPPORT TS/LP IN/OUT SERVICE MODE..............................................39
8.1.11 ATD SR9030: BIND SERVICE S3F17 WITH 121-CHARACTER CARRIER ID
CRASHES GP .......................................................................................................................................39
8.1.12 ATD SR8999: SUPPORT SOKUDO ADDITIONAL SPEC FOR LITHO BUFFER ..........39
8.1.13 ATD SR9048: S3F17 MESSAGE WITH ZERO-LENGTH DATAID SHOULD BE
ALLOWED ...........................................................................................................................................39
8.1.14 ATD SR 9076: S3F17 CANCELCARRIERATPORT DOES NOT WORK IF AN EMPTY
CARRIER ID STRING IS PROVIDED ................................................................................................39
8.1.15 ATD SR9061: SOKUDO REPORTS MULTIPLE INSTANCES OF S3F28 NOT BEING
SENT IN RESPONSE TO S3F27 .........................................................................................................39
8.1.16 ATD SR9215: HANDLE THE „UNKNOWN MAP INFO‟ DATA FROM THE REALTIME
39

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8.1.17 ATD SR9316: PROCEED WITH CARRIER ISSUE ...........................................................39

9 E90 (SUBSTRATES) RELATED SRS .................................................................................................40
9.1.1 ATD SR8688: CREATE A NEW GP VERSION THAT SUPORTS E90 ONLY FOR ETCH
MILLENIUM BASELINES ..................................................................................................................40
9.1.2 ATD SR9193: NEED TO ADD THE SUBSTRATE LOCATION FOR FI SIDE STORAGE
CHAMBER ...........................................................................................................................................40
10 BETA UP-REVS............................................................................................................................41
11 SOFTWARE PROBLEM REPORTING PROCEDURE................................................................44
11.1 HOW TO SUBMIT AN SR (SOFTWARE REQUEST) .............................................................44

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Title: GP Software Release Notes Version 7.50_55

List of Tables

Table 1: Acronyms .....................................................................................................................................10

Table 2: Known Problems Found During Development ..............................................................................15
Table 3: Features, Enhancements .................................................................................................................17
Table 4: Bugs Resolved ................................................................................................................................22
Table 5: List of BDS Related SRs ................................................................................................................32
Table 6: List of E40 / E94 Related SRs ........................................................................................................33
Table 7: List of E87 Related SRs .................................................................................................................37
Table 8: List of E90 Related SRs .................................................................................................................40

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 APPLIED MATERIALS SANTA CLARA: Factory Automation Software Group
Effective Date: July 2012
Title: GP Software Release Notes Version 7.50_55

1 Introduction
The Release Notes can also be obtained by navigating through the FA section in
the GSS website:
[Link]

1.1 Scope

This Release Notes document covers the enhancements and problem fixes that would
affect Applied Materials customers whose equipment has been configured to run with
the GP software.

The Release Notes document will cover all Software Requests (SRs) submitted for the
GEM Process (GP) release branch. See Appendix A: Software Problem Reporting
Procedure for details on how to create an SR.

ATTENTION!
Some SRs have been grouped into the following categories:
BDS Features and Enhancements
E40 / E94 (Process Job / Control Job) Related SRs
E87 (Carrier Management) Related SRs
E90 (Substrates) Related SRs

Please refer to these categories after the Features and Enhancements and the Bugs
Resolved sections.

This GP supports the following E-Standards:

 E5 SEMI Equipment Communications Standard II (SECS II)
 E30 Generic Equipment Model (GEM)
 E39 Object Services (to provide support for other E-Standards)
 E40 Process Job Management
 E87 Carrier Management
 E90 Substrate Tracking
 E94 Control Job Management
 E116 Equipment Performance Tracking

E-Standard support for the real-time software is PBG-dependent. Please contact the
specific PBG to confirm whether your real-time baseline has these standards
implemented.

NOTE: This software has been built on a system whose antivirus utility is enabled. The
software has been posted on a server that also has its antivirus utility enabled.

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Title: GP Software Release Notes Version 7.50_55

1.2 Supplemental Documents

Use the Release Notes document as a supplement to any of the following manuals:

300mm systems:
Common Systems Software 300mm Host Communications Manual
E40 / E94 User Manual
E87 Carrier Management User Manual
E90 Substrate Tracking User Manual

1.3 Definitions of Acronyms

The following is a list of acronyms used throughout the document.

Table 1: Acronyms
AGV Automated Guided Vehicle
AMHS Automated Material Handling System
AMSM Access Mode State Model
BDS Bay Distributed Stocker
CAS Carrier Access Status
CEID Collection Event ID (alarms, events)
CID Carrier ID
CIS Carrier ID Status
CJ Control Job
CJSM Control Job State Model
COSM Carrier Object State Model
CSMS Carrier Slot Map Status
DVID Variable that is valid only on certain events
ECID Equipment Constant ID
FI Factory Interface
FIMS Front-Opening Interface Mechanical Standard
FOUP Front-Opening Unified Pod
GP GEM Process software
LPCASM Load Port Carrier Association State Model
LPTSM Load Port Transfer State Model
NT-FE NT front-end computer
OHT Overhead Hoist Transport
PBG Product Business Group
PGV Person Guided Vehicle
PIO Parallel Input/Output Interface
PJ Process Job
PJSM Process Job State Model
PWC Proceed With Carrier
RGV Rail Guided Vehicle
RSM Reservation State Model
RTS / RT Real-Time Software / Real-Time
SDR SECS (Semiconductor Equipment Communications Standard) Driver
SLSM Substrate Location State Model

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Title: GP Software Release Notes Version 7.50_55

Table 1: Acronyms
SOSM Substrate Object State Model
SVID Status Variable ID
VID Variable ID (ECID, SVID, DVID)

1.4 GP Software Installation

GP software installation is described in GP_Inst.pdf, which is found in Disk1 of the GP

software install kit.

1.5 Regarding GP CSV Files

The GP CSV files (vids_sv*.csv, vids_ec*.csv, and ceids*.csv, where „*‟ is the real-
time version information and GP version information) describe the SVIDs, ECIDs, and
CEIDs supported by the GP for a specific baseline. These files can be found in
C:\AMAT\Documentation\gp\[PBG-specific folder].

Note: After a new installation, GP needs to be started at least once prior to the access of
these files, since the contents will dynamically change based on the baseline‟s chamber
configuration.

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1.6 Software Requests (SR)

All changes and new features are indexed with a software request (SR) number and a
title. The SR number is the tracking identifier used by the Applied Materials Factory
Automation Software Engineering group. If a problem occurs with the GP software,
customer engineers (CEs) are required to submit an SR in the specific PBG‟s software
database. The PBG‟s test and support group will then determine whether the problem
belongs to the PBG, or needs to be addressed by the Factory Automation Software
Engineering group. If FA support is necessary, the FA Support Manager will be notified.
See Appendix A: Software Problem Reporting Procedure for details on how to create an
SR.
How the Problem Reporting Process Generally Works:

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2 Known Problems and Workarounds

There are three types of Known Problems: 1) issues that have been identified during
development, 2) issues found during the testing of the GP build, and 3) issues that have
been identified in the field. Table 2 shows the SR title of the known problem and the SR
number (left-hand column) in which the problem is to be resolved. Details are provided
after the table.

2.1 Warnings

1. Customers with systems that support Interface A and the EDA server.
a. Any major GP, EDA, or real-time software upgrades may result in
changes to the equipment‟s tool structure so it is highly recommended
that the customer rediscover the tool structure. See SEMI E125-00-1105
Section [Link] MetadataRevised, Section [Link]
GetEquipmentStructure, Section [Link] GetEquipmentNodeDescriptions,
and Section 10.1 Management of Equipment Metadata.
b. Customers whose tools run real-time software with E157 support must
use GP 7.50_40+. Otherwise GP will fail to start. See SR 8839.
c. Customers who use EDA 1.1_44+ must also use GP 7.50_42+ and vice
versa. See SR 8921.
d. GP 7.30_27 and later must be bundled with EDA 1.1_33 and later (for
customers who are running with EDA software). Support in GP was
added so that the timestamp of the event or exception trigger for a data
collection report would be properly sent to the EDA client, but this
requires GP and EDA to be coupled at these versions. An upgrade to GP
7.30_27 and later requires an upgrade to EDA 1.1_33 and later, and vice
versa. Otherwise, the EDA server may crash. This change will not affect
customers who do not have EDA installed.

2. This GP is compatible with the bundled real-time software package.

References are also made in the GSS website.

3. [Link] is no longer used by the GP to configure the host-link.

Instead, all port configurations are stored in C:\AMAT\GP\Data\[Link].
Please contact Applied Materials Global Software Support for assistance related
to this file.

4. VME and cPCI-based systems are not supported

5. Downgrading GP versions on BDS systems: When GP is downgraded from

this version to an older version (i.e., pre-6.00 GP versions), delete
c:\amat\gp\data\[Link] before restarting GP because the [Link] file
format has been changed and older versions of GP cannot read it. No carrier
reconciliation will be performed in this situation.

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6. Limitations with PJ Create messages: This warning is based on the number

of jobs being created in a single SECS message and the number of tuning
parameters each job has. When using a single SECS message to create
multiple process jobs which each make use of multiple recipe tuning parameters,
it is possible that this message will timeout and the process job creation may fail.
In order to minimize the chance of these failures, it is recommended that if the
host is creating process jobs which make use of multiple recipe tuning
parameters, then a separate SECS message should be used for each process
job separately. If a very large number of parameters are being provided, even a
message for a single process job may timeout depending on the speed of the
tool's controller and how busy the controller is during this create attempt.

7. The “AMat GEM Process” shortcut has been removed from the system
Startup folder. The icon which launches the GP is still available on the desktop.
For systems that support AMAT Panel as well as Etch systems, the GP must be
manually launched if the front-end computer is rebooted. For systems that
support CFE, GP is auto-launched based on the batch file implemented by each
baseline.

8. The real-time event text (VID 601) should be used at the customer‟s
discretion. There is no requirement in SEMI for event text to remain constant,
so it is possible that the text may be changed from build to build. Please refer to
each real-time release notes for any event text changes.

9. GP is no longer a DOS command window; it is now a Windows application

(“WinGP”).

10. BSL (Binary SECS Log) file format has changed. This affects any
downgrades to versions earlier than GP 7.20. Either delete the current *.bsl
files, or save them to different filenames. Then start the GP. Reboot the system
after a downgrade to flush the system‟s memory. Upgrades versions earlier than
GP 7.20 are okay. When downgrading to GP 7.10 and then upgrading back to
GP 7.20, the c:\amat\gp\data\*[Link] needs to be regenerated. Delete this
file and restart GP to force the regeneration. See the SRs related to BSL in the
Key Features section of the GP 7.20 release notes.

11. Downgrades from GP 7.30 to earlier versions require the deletion of

*[Link], *[Link] and *[Link]. Otherwise, the downgraded version will not
start properly. These files are found in c:\amat\gp\data. All GP ECs (IDs are
designated as 10000 or less, such as 9987 for GP logging capability) will be set
back to default values. There is no need to delete the logs if downgrading from
GP 7.40 and later to GP 7.30.

12. During a configuration change, certain variables or events which had

previously been valid may no longer be valid. These variables and/or events
may have been used in event reports or have been enabled, but these reports
will no longer be fully valid and the events will not be enabled. In this situation,
GP logs the invalid VIDs/CEIDs and the following message in [Link] at
startup, WARNING: Event report definitions UNDETERMINED!

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The host can run its initialization routine to re-define the necessary reports and
linkages, which ensures that the host is aware of any attempts to use invalid
variables or events will result in the rejection of these messages. Reference SR
#7301.

13. The default to EC 1788 (to allow ECIDs in S1F3 and S1F11) is „1‟ after GP
7.50_42. This EC was introduced in SR 8898 (see specific SR details below),
but it was initially set to „0‟, which returns empty values for ECIDs in S1F4 and
S1F12. The default was changed to „1‟ in SR 8921 (see specific SR details
below). To correct the problem with GP 7.50_39, the user can change EC 1788
to 1. Or, the user can install GP 7.50_43 and delete c:\amat\gp\data\*[Link]
before starting GP.

2.2 Known Problems Found During Test

None to report

2.3 Known Problems Found During Development

Table 2: Known Problems Found During Development

Open SR Number Status (Version) Reported SR Reported Build

None to report

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Title: GP Software Release Notes Version 7.50_55

3 Features and Enhancements

This chapter details the software enhancements implemented. The Key Features
section describes the main features that have been implemented in this GP version.
Table 3 lists the SR numbers and titles of general features and enhancements. Any
enhancements related to specific standards have been documented under that particular
E-Standard section, and can be quickly accessed from the Table of Contents. Refer to
the text following the table for descriptions of each SR.

3.1 Key Features

SR # BLD SR TITLE
7358 1 NEED THE ADDITIONAL LOG FILE FOR S2F23
8200 7 ADD FA SUPPORT FOR NEW BASELINE MOIRA
8524 26 CREATE A NEW GP VERSION THAT SUPPORTS E90 ONLY
8839 40 STATE MACHINE ENHANCEMENT IN GP

3.1.1 ATD SR7358: NEED THE ADDITIONAL LOG FILE FOR S2F23
To facilitate the debugging of a trace-related problem, a separate SECS log file, [Link],
has been created to log all the S2F23 and S2F24 messages from the host. A backup file will be
created after its size reaches 10 MB. The maximum number of backup files to keep is 4.

3.1.2 ATD SR8200: ADD FA SUPPORT FOR NEW BASELINE MOIRA

GP now supports the new Moira baseline.

3.1.3 ATD SR8524: CREATE A NEW GP VERSION THAT SUPPORTS E90 ONLY
This SR supports a particular configuration for CGA baselines where the AMAT FIC is not
installed. For E300 SEMI standards, it only supports E90. All E87 and E40/E94 messages will be
rejected with S9F3, S9F5 or S9F7 reply. Please refer to the real-time release documentation for
additional information.

3.1.4 ATD SR8839: STATE MACHINE ENHANCEMENT IN GP

The E157 State Machine for Module Process Tracking is fully supported (if the real-time software
has implemented the required changes).

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3.2 Features and Enhancements Table

Table 3: Features, Enhancements

SR # BLD SR TITLE
7821 1 NEW ETCH PRODUCT CDR
8025 1 SUPPORT E30 FOR NEON
8038 1 DO NOT ALLOW COMMUNICATIONS WITH HOST ON GP STARTUP UNTIL...
8083 3 PRODUCERETCH: IMPLEMENT S7FX FOR OFFSET TABLE
8091 3 IMPROVE GP CPU USAGE ON FEPC2 HARDWARE BY OPTIMIZING MEMO...
SUPPORT PASSTHRU FORMATTED PROCESS PROGRAM REQUESTS FOR
8266 10
MILLENIUM BASELINES
SUPPORT NEW PPTYPE FOR TETRAX CHAMBER TYPE FOR MILLENIUM
8279 11
BASELINE
ADD SUPPORT FOR HOST TO UPLOAD / DOWNLOAD NEW REFLEXIONGT
8302 11
(SYCAMORE) METROLOGY RECIPE TYPE
ND
ALLOW CONTENTMAP ATTRIBUTE IN 2 PROCEEDWITHCARRIER PROVIDED
8304 11
FROM HOST
SUPPORT NEW PPTYPE FOR OFFSET TABLES FOR ALL CHAMBER TYPES FOR
8504 18
MILLENNIUM BASELINE
8579 22 RF3 SUPPORT TS BI-DIRECTIONAL LP
8626 23 MILLENIUM: PROVIDE SUPPORT FOR THE NEW ETCH CHAMBER TYPE PCAR
8679 25 SOKUDO::TOOL STATION SUPPORT DUAL CRANE
8704 36 PROVIDE A UNIQUE, READABLE SVNAME AND ECNAME
8898 39 GP SHOULD RETURN SV ONLY FROM S1F3, S1F11
9102 52 INCREASE THE MAXIMUM SIZE FOR PPID REQUESTS
DEFAULT VALUE CHANGE FOR AMATRTSM64BITSUPPORT ENVIRONMENT
9159 52
VARIABLE
9211 54 MILLENIUM: PROVIDE SUPPORT FOR ADDITIONAL PPTYPES
9037 55 NEW E157 EVENT DESCRIPTIONS NON UNIQUE
9243 55 ENHANCEMENT FOR UNIQUE SVNAME
9246 55 ENHANCE N2 PURGE LOADPORT CAPABILITY REPORTING

3.2.1 ATD SR7821: NEW ETCH PRODUCT CDR

GP now supports the new Condor baseline with the same E-standard (E87, E90, and E40/E94)
functionality as the other CGA baselines.

3.2.2 ATD SR8025: SUPPORT E30 FOR NEON

GP now supports the new NEON baseline.

3.2.3 ATD SR8038: DO NOT ALLOW COMMUNICATIONS WITH HOST ON GP STARTUP

UNTIL ALL GP COMPONENTS HAVE COMPLETED INITIALIZATION
Previously, GP made the connection to the host right after the backlink (to RTS) initialization was
completed but before E300 (E87, E40/E94 and E90) threads were initialized. As a result, the
default values of E300 related SVs, which might not be correct at the moment, would be replied to
the host if the host queried them before the E300 initialization was completed. This SR makes the
change to only make the connection to the host after GP is fully initialized so that correct E300
SVs values will be available.

3.2.4 ATD SR8083: PRODUCERETCH: IMPLEMENT S7FX FOR OFFSET TABLE

GP now supports uploading, downloading, and directory query of the offset tables for the
Producer Etch baseline. EC 190 (Process Program Type) must be set to 92 (OFF-PE) when
uploading or downloading the offset tables.

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3.2.5 ATD SR8091: IMPROVE GP CPU USAGE ON FEPC2 HARDWARE BY OPTIMIZING

MEMORY ALLOCATION
This enhancement improves the GP CPU usage on FEPC2 hardware by optimizing how internal
memory allocations are handled.

3.2.6 ATD SR8266: SUPPORT PASSTHRU FORMATTED PROCESS PROGRAM

REQUESTS FOR MILLENIUM BASELINES
Etch SR10953 supports the formatted process program capability along with the partial recipe
download feature from the host. In order for Etch and Etch-Producer baselines to support FPP
and partial recipe downloading, this SR enhances the GP to allow formatted process program
messages as pass-through messages to the RT.
 Etch SR10953 has been integrated into version 2.8 and has to be run with at least GP
7.50_10 for FPP capability.
 If using GP 7.50_9 or earlier with Etch 2.8 (or later), the following steps need to taken in
order for GP to support FPP:
o Edit [Link], located in the folder \amat\gp\data
o Change the field RECIPE_TYPE = ASCII to RECIPE_TYPE = XML
o Restart GP
 If GP 7.50_10 (or later) is running with an Etch version that is earlier than 2.8, repeat the
above steps but change the field RECIPE_TYPE = XML to RECIPE_TYPE = ASCII to
use FPP.

3.2.7 ATD SR8279: SUPPORT NEW PPTYPE FOR TETRAX CHAMBER TYPE FOR
MILLENIUM BASELINE
GP now supports the TetraX recipe and algorithm download/upload capability for the Etch
300mm baseline. When uploading or downloading a recipe/algorithm, EC 190 (Process Program
Type) must be set to the following: 93 = RCP-TRAX, or 94 = ALG-TRAX.

3.2.8 ATD SR8302: ADD SUPPORT FOR HOST TO UPLOAD / DOWNLOAD NEW
REFLEXIONGT (SYCAMORE) METROLOGY RECIPE TYPE
GP now supports recipe and algorithm download/upload capability for the metrology chambers on
the Sycamore (Reflexion GT) baseline. For more details regarding the metrology chambers,
please refer to the Sycamore baseline's release notes. When uploading or downloading a
recipe/algorithm, EC 190 (Process Program Type) must be set according to the following table:
0 = RECIPE
1 = SEQUENCE
53 = RCP-DRYMET
54 = ALG-IMAP
55 = ALG-ISRM
56 = ALG-RTPC-P1A
57 = ALG-RTPC-P1B
58 = ALG-RTPC-P2A
59 = ALG-RTPC-P2B
62 = ALG-WL-P1A
63 = ALG-WL-P1B
64 = ALG-WL-P2A
65 = ALG-WL-P2B

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3.2.9 ATD SR8504: SUPPORT NEW PPTYPE FOR OFFSET TABLES FOR ALL CHAMBER
TYPES FOR MILLENNIUM BASELINE
GP now supports the following offset table download/upload capability for the Etch 300mm
baseline. When uploading or downloading an offset table, EC 190 (Process Program Type) must
be set according to the following table.
95 = OFF-MXP
96 = OFF-DPS2
97 = OFF-DPS
98 = OFF-EMAX
99 = OFF-HART
100 = OFF-AXML
101 = OFF-P2K
102 = OFF-ENAB
103 = OFF-TRA
104 = OFF-SGMA
105 = OFF-CHRCH
106 = OFF-TRA3
107 = OFF-TSV
108 = OFF-TRAX

3.2.10 ATD SR8579: RF3 SUPPORT TS BI-DIRECTIONAL LP

E87 now supports bi-directional load port for Tool Station Ieyasu baseline. Carriers can now be
configured to be loaded and removed from the same load port.

3.2.11 ATD SR8626: MILLENIUM: PROVIDE SUPPORT FOR THE NEW ETCH CHAMBER
TYPE PCAR
GP now supports recipe, algorithm, and offset table download/upload capability for the PCAR
chamber on the Etch Millennium baseline. For more details regarding the PCAR chamber. Please
refer to the Etch baseline‟s release notes.

When uploading or downloading a recipe/algorithm, EC 190 (Process Program Type) must be set
according to the following table:

109 = “RCP-PCAR”
110 = “ALG-PCAR”
111 = “OFF-PCAR”

3.2.12 ATD SR8679: SOKUDO::TOOL STATION SUPPORT DUAL CRANE

GP now supports the two-crane configuration for the Tool Station on the Ieyasu baseline.

3.2.13 ATD SR8704: PROVIDE A UNIQUE, READABLE SVNAME AND ECNAME

A new GP owned EC 1760 has been added with the following definitions:

ECID: 1760
Type: U1
Description: Include RT's software path in SVNAME and ECNAME
Value 0: Do not include RT's software path in SVNAME and ECNAME
Value 1: Include RT's software path in SVNAME and ECNAME
Default Value: 0

If EC 1760 is set to 1, the SVNAMEs and ECNAMEs reported to the host in the SECS messages
S1F12 and S2F30 will contain the RT's software path definitions, which will provide the unique
SVNAME and ECNAME to the host.

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3.2.14 ATD SR8898: GP SHOULD RETURN SV ONLY FROM S1F3, S1F11

A new GP owned EC has been added with the following definitions:
ECID: 1788
Type: U1
Description: Allow ECIDs in S1F3 and S1F11
Value 0: Do not allow ECIDs in S1F3 and S1F11
Value 1: Allow ECIDs in S1F3 and S1F11.

‘1’ IS THE DEFAULT VALUE after GP 7.50_43. The user must delete the
c:\amat\gp\data\*[Link] files before starting GP if the previously installed GP version is
7.50_39, 7.50_40, or 7.50_41.

 If EC 1788 is set to 0, then any ECID that is in S1F3 or S1F11, will have an empty list
returned in S1F4/S1F12 for the ECID, just like how an invalid SVID is handled.
 If EC 1788 is set to 1, then S1F3 and S1F11 will accept ECIDs in the request list, which is the
same behavior before this SR.
 No GP reboot is required.

3.2.15 ATD SR9102: INCREASE THE MAXIMUM SIZE FOR PPID REQUESTS
GP now supports the upload and download of large recipes, with a maximum size of up to 4 MB.
If the recipe exceeds the maximum size then the the following error is logged in [Link]:

"Warning:PPBODY in S7F106 from RTS format wrong!"

Additionally, GP will log the expected message size, the actual size received, and the maximum
size allowed, to clarify the error.

3.2.16 ATD SR9159: DEFAULT VALUE CHANGE FOR AMATRTSM64BITSUPPORT

ENVIRONMENT VARIABLE
The default setting of the environment variable AMATRTSM64BITSUPPORT has been changed
from 1 to 0 which means E157 state machine transition events to the host will not be supported. If
customers plan to use this feature, they need to manually change the setting to 1 and then restart
GP. For existing systems, the current setting for AMATRTSM64BITSUPPORT will be preserved.

3.2.17 ATD SR9211: MILLENNIUM: PROVIDE SUPPORT FOR ADDITIONAL PPTYPES

For the Etch Millennium baseline only: GP now supports Preventive Maintenance Macro
download/upload. It also supports recipe, algorithm, and offset table download/upload for the
AFFI, D232, HRT3, HRT4 chambers on the Etch Millennium baseline. For more details regarding
these chambers, please refer to the Etch baseline's release notes.

When uploading or downloading a recipe/algorithm/offset table, EC 190 (Process Program Type)

must be set according to the following table:

112 "RCP-AFFI"
113 "ALG-AFFI"
114 "OFF-AFFI"
49 "RCP-D232"
115 "ALG-D232"
116 "OFF-D232"
50 "RCP-HRT3"
117 "ALG-HRT3"
118 "OFF-HRT3"
119 "RCP-HRT4"
120 "ALG-HRT4"

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121 "OFF-HRT4"
122 "PM-MACRO"

3.2.18 ATD SR9037: NEW E157 EVENT DESCRIPTIONS NON UNIQUE

The description within S1F11 and S2F29 are now unique for the newly added E157 parameters.

3.2.19 ATD SR9243: ENHANCEMENT FOR UNIQUE SVNAME

The GP owned EC 1760 has been modified with the following definitions:

ECID: 1760
Type: U1
Description: Select enhancement method applied to SVNAME and ECNAME
Value 0: Do not enhance SVNAME and ECNAME
Value 1: Enhance SVNAME and ECNAME by include RT's software path
Value 2: Do not enhance SVNAME and ECNAME (Reserved for future use)
Value 3: Enhance SVNAME and ECNAME by including RT's software path and possible ID to
ensure uniqueness
Default Value: 0

Note: With the exception below, Value 0 and 1 functionally has not changed. Value 2 should not
be used, as the functionally might change in future releases. Value 3 ensures that all SVNAME
and ECNAME names are unique.

If EC 1760 is set to 3, the SVNAMEs and ECNAMEs reported to the host in the SECS messages
S1F12 and S2F30 will contain the RT's software path definitions. If it is detected that the names
are not unique, the ID is also added, thereby providing the unique SVNAME and ECNAME to the
host.

WARNING: As reported in [Link], if the value of ECID 1760 is changed, it will not take
effect until after the GP has been restarted.

3.2.20 ATD SR9246: ENHANCE N2 PURGE LOADPORT CAPABILITY REPORTING

GP now re-reads N2-purge related SVIDs when backlink restarts.

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4 Bugs Resolved
This chapter details the bugs that were resolved in this release. The chapter is divided
by E-Standard sections. Check each section for details specific to an E-Standard.
Table 4 lists details of general bugs fixed. Refer to the text following the table for
descriptions of each SR.

4.1 Bugs Resolved Table

Table 4: Bugs Resolved

SR # BLD SR TITLE
8049 1 S10F1 MESSAGE WITH THE W-BIT ENABLED
8347 12 SR 8279 FAIL: EC 190 CANNOT BE SET TO 94 (ALG-TRAX)
8379 13 INCREASE THE SIZE OF PPTYPE NAME
8462 15 INVESTIGATE [Link] FILE CORRUPTION
SUPPORT NEW “CARRIER DELETED” EVENT FOR IEYASU TOOLSTATION TO
8482 15
RESOLVE TIMING ISSUE
ENUMERATED TYPE DESCRIPTION BUFFER IS TOO SMALL WHEN DUPLICATE
8677 24
DESCRIPTIONS EXCEED 999
8104 28 GP SENT INCORRECT DATA IN EVENT REPORT TO HOST
8781 33 FIX ISSUE WITH EVENT REPORTS CONTAINING U8 VID
8793 35 ADD SUPPORT FOR U8 FORMAT WITH CONDOR CGAFE
8843 41 INCOMPLETE MESSAGE HANDLING IN THE BACKLINK
FIX EAC VALUE RETURNED IN S2F16 WHEN HOST USES WRONG SECS TYPE IN
8995 44
SETTING AN EC VALUE
9002 44 „DISABLE ALL EVENTS‟ DOES NOT DISABLE THE STATE MACHINE EVENTS
GP CANNOT HANDLE RT‟S EC WITH DATA TYPE ARRAY OF F8 AND NEWLY
9029 45
CREATED CEIDS BY CGA IN 2301070201002 RANGE
FIX 2 MEMORY ISSUES (1) “POD SIZE = 0” CAUSED BY MEMORY OVERWRITTEN
9075 47
CAUSED BY START_MIDS; (2) CRASH CAUSED BY MEMORY LEAK
9062 48 FIC INITIALIZED SVID HANDLING IMPROVEMENT
DOWNLOADING A LARGE RECIPE (GREATER THAN 1MB) WILL CAUSE GP TO
9199 53
CRASH

4.1.1 ATD SR8049: S10F1 MESSAGE WITH THE W-BIT ENABLED

S10F1 terminal message from the tool does not show the W-bit despite enabling the W-bit from
the GEM Configuration Screen from a CGA baseline. This problem is now fixed.

4.1.2 ATD SR8347: SR 8279 FAIL: EC 190 CANNOT BE SET TO 94 (ALG-TRAX)

Previously on the Etch Millenium baseline, EC 190 (PPType) could not be set to 94 (TetraX
Algorithm). This problem has been fixed.

4.1.3 ATD SR8379: INCREASE THE SIZE OF PPTYPE NAME

This SR is for the SycamoreX (Reflexion GT) baseline only. Recipe/algorithm upload/download
worked for Sycamore's recipe/algorithm types "ALG-IMAP" and "ALG-ISRM" but did not work for:
"RCP-DRYMET"
"ALG-RTPC-P1A"
"ALG-RTPC-P1B"
"ALG-RTPC-P2A"

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"ALG-RTPC-P2B"
"ALG-WL-P1A"
"ALG-WL-P1B"
"ALG-WL-P2A"
"ALG-WL-P2B"

This problem has been fixed.

4.1.4 ATD SR8462: INVESTIGATE [Link] FILE CORRUPTION

In some cases, the size of the GP log file cannot be checked due to a system file operation failure.
As a result, the GP log file will grow unlimitedly. This SR fixes the problem by implementing the
following behaviors:
 When the log file size cannot be checked due to a file operation system call failure, GP
will save and rename the original log file. The newly saved log file name consists of the
original file name, timestamp, and '[Link]' (ex. [Link]). In
this case, GP will continue running with the new log file.
 If the above operation fails, GP can no longer function properly. In this case, GP will
shutdown automatically. The shutdown reason will be written to the system's
EventViewer log. The user then needs to manually restart GP after checking the possible
problem in the GP logs.

GP will automatically shut down if the corrupted file cannot be renamed or saved:

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EventViewer Log info:

4.1.5 ATD SR8482: SUPPORT NEW “CARRIER DELETED” EVENT FOR IEYASU
TOOLSTATION TO RESOLVE TIMING ISSUE
On an Ieyasu tool with Tool Station configured, in the case where a carrier is present on a port
configured as OPA (Operator Access) and a deferred command to switch to TSA (Tool Station
Access) is "queued", timing issues may arise where the carrier removed event (the true source of
this event is from the FI) may arrive at the GP after the mode change event (which is generated
by the sequencer), even though these events occur in the opposite order in absolute time. At this
point, E87 is "out of sync" with the sequencer and Tool Station. This SR fixed the problem so that
the carrier removed event is sent before the port mode changed event.

4.1.6 ATD SR8677: ENUMERATED TYPE DESCRIPTION BUFFER IS TOO SMALL WHEN
DUPLICATE DESCRIPTIONS EXCEED 999
Previously, GP crashed when the number of duplicate enumeration types for ECIDs exceeded a
certain limit. This issue has been fixed.

4.1.7 ATD SR8104: GP SENT INCORRECT DATA IN EVENT REPORT TO HOST

This SR fixes a rare, intermittent issue. Previously, when GP received a host-defined event report
(S6F11) from the RT, the data values defined in the event report will be updated in the GP's
database. It is possible for the values to be updated when GP receives S1F4 from the RT at the
same time, causing the event report to have incorrect values for identical SVIDs referenced in
S1F4 and S6F11. This is because the RT sends S6F11 and S1F4 at the same time but with
different values, so the values in S6F11 may be overwritten by the values in the S1F4.

Now, the SVID values in an event report will be set to the value from the corresponding real time
event and not the value from GP's database.

4.1.8 ATD SR8781: FIX ISSUE WITH EVENT REPORTS CONTAINING U8 VID
This issue was first found on a system that supported U8 event IDs, where the event report would
contain empty values. The event report issue is fixed by correctly reading the RT event report in
the case of U8 type CEIDs.

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4.1.9 ATD SR8793: ADD SUPPORT FOR U8 FORMAT WITH CONDOR CGAFE
The baseline Condor (Centris) now supports the U8 data type for CEID, SVID and ECID.

4.1.10 ATD SR8843: INCOMPLETE MESSAGE HANDLING IN THE BACKLINK

Previously, if an incomplete SECS message is received from the host, GP would close the SECS
link. However, the incomplete message would still be processed by GP. This SR makes the fix to
discard the incomplete message.

4.1.11 ATD SR8995: FIX EAC VALUE RETURNED IN S2F16 WHEN HOST USES WRONG
SECS TYPE IN SETTING AN EC VALUE
Previously, if the host sent an incorrect SECS data item in an S2F15 message, GP would send
the wrong return code to the host. The problem is fixed by returning the error code for "internal
error", 0x7F, in the S2F16 message. Details which include the SECS data type and ECID
information are also logged in the [Link].

4.1.12 ATD SR9002: „DISABLE ALL EVENTS‟ DOES NOT DISABLE THE STATE MACHINE
EVENTS
Previously, state machine events won't be disabled if the host sends S2F37 to disable all events.
The problem is now fixed.

4.1.13 ATD SR9029: GP CANNOT HANDLE RT‟S EC WITH DATA TYPE ARRAY OF F8 AND
NEWLY CREATED CEIDS BY CGA IN 2301070201002 RANGE
For baselines LinearSputter, Poplar, ProducerSE, Sycamore, TAZ, TCG-Centura, TCG-Vantage,
and Versailles, the type for SVIDs 23, 30, 34, and 58 have been changed from U4 to U8 to
support CEIDs beyond the U4 range:

VID FORMAT DESCRIPTION

23 U8 ALID of alarm causing latest transition
30 U8 Record message information
34 U8 History of last event
58 U8 Record VID of transitioning variable

4.1.14 ATD SR9075: FIX 2 MEMORY ISSUES (1) “POD SIZE = 0” CAUSED BY MEMORY
OVERWRITTEN CAUSED BY START_MIDS; (2) CRASH CAUSED BY MEMORY
LEAK
This SR fixes two problems:
 Previously when Wafer Grouping was enabled and the system is in MID mode, after
processing one process job GP would reject all process job creations with the reason
"PRMtlNameList exceeds Pod size" even though the error was not true.
 An active EDA DCP plan with any E300 object attribute as a parameter caused a
memory leak and eventually crashed GP.

4.1.15 ATD SR9062: FIC INITIALIZED SVID HANDLING IMPROVEMENT

Previously the host communications state would sometimes be locked in the "Attempting-to-
Synchronize" state, which would prevent it from going to the "Communicating" state. This problem
has been fixed.

4.1.16 ATD SR9199: DOWNLOADING A LARGE RECIPE (GREATER THAN 1 MB) WILL
CAUSE GP TO CRASH
GP now supports recipe upload/download for recipe files up to 4 MB. If the recipe is too large
during an upload, GP will log "PPBODY in S7F106 from RTS format is wrong!" in the [Link]
file. If the recipe is too large during a download, the host will receive NAK 0x02 (length error), and
GP logs "Error: decoding S7F3, PPBody length exceed the limit:[size]".

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5 EDA Features and Enhancements

This chapter describes the SRs implemented in the GEM Process software to support
changes in the EDA software. „SR‟ indicates the GP SR ID. „BLD‟ lists the GP build
number. „TYPE‟ lists the type of change made (b = „bug‟, e = „enhancement‟). This
section only applies to customers who have purchased the EDA Feature.

SR BLD TYPE
8000 1 B EXPOSE THE THOUSANDTH DIGIT IN TIMESTAMP TO EDA CLIENT
8167 5 B SET THE ISTRANSIENT TO TRUE FOR THE SEMI OBJECT TYPE DVIDS
8214 7 E RE-MODIFY EDA PARAMETER NAMES
8270 10 E WINGP LOGFILESETTING OPTION FOR EDA LINK
8308 11 B GP B7.30_28 CRASH
8235 12 E ADD EDA SUPPORT FOR THE IEYASU BASELINE
7976 13 E EDA SUPPORT FOR CMP REFLEXION GT (SYCAMORE X)
EDA: CLIENT SHOWS INVALID SUBSYSTEM COMPONENTS LIKE
8442 14 B
LOADPORT.7
GP NEEDS TO GENERATE EDA EQUIPMENT STRUCTURE DATA BASED
8511 19 B
ON [Link]
8692 27 B EDA – CARRIER LOCATION PARTITION 31, 32, AND 33 NOT VALID
GP SHOULD NOT USE S105F37 ON ETCH AMS BASELINES TO ENABLE
8823 36 B
EDA STATE MACHINE EVENTS
SR8882: "EXPOSE REALTIME STATE TRANSITION EVENTS TO HOST"
8921 42 B
NEEDS TO BE REWORKED
8930 43 B BUFFER CHAMBER DOES NOT HAVE SUBSTRATE LOCATION STATE
8971 43 B MEMORY LEAK ON SOKUDO WITH BUILD 7.50_41
8952 44 B SYCAMORE EDA MATERIAL LOCATION ISSUE
SUPPORT MULTIPLE STATE MACHINES THAT BELONG TO THE SAME
9025 46 E
OBJECT SOURCE
INVESTIGATE PROBLEM WITH GP HANDLING EDA TRIGGER EVENTS
9125 51 B
WHEN THESE EVENTS OCCUR SIMULTANEOUSLY
9050 52 B RELATIVE REFERENCE SHOULD BE BLANK

5.1.1 ATD SR8000: EXPOSE THE THOUSANDTH DIGIT IN TIMESTAMP TO EDA CLIENT
Previously, the tenths and hundredths position in the milliseconds part of the collection timestamp
was exposed to the EDA client. This implementation also exposes the thousandths position.

5.1.2 ATD SR8167: SET THE ISTRANSIENT TO TRUE FOR THE SEMI OBJECT TYPE
DVIDS
This SR affects customers whose baselines support the EDA interface. Previously, the attributes
of SEMI Object Type variables are incorrectly set as non-transient parameters when they should
be transient. This SR fixes the problem.

5.1.3 ATD SR8214: RE-MODIFY EDA PARAMETER NAMES

Previously, in the GP-generated CSV files, the EDA name of each ECID, SVID or CEID were the
original EDA name appended with suffix _ECxxxxx, _SVxxxx, or _CExxxx, where xxxx is the
SVID, ECID or CEID number. This SR removes suffix from each EC, SV, and CE. However, if an
SV EDA name is duplicated with an existing EC EDA name, we append "_SV" to the original EDA
name.

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5.1.4 ATD SR8270: WINGP LOGFILESETTING OPTION FOR EDA LINK

Two new options "EDAlinkOn" and "EDAlinkOff" have been added to the WinGP window under
the menu item "LogFileSetting". These two options are disabled by default and will be enabled if
the tool supports EDA capability. These settings will allow the user to enable or disable the SECS
log between the GP and EDA applications. Note, the "BothOn" option will enable the host-link and
back-link logs (current behavior), and does not affect EDA message logging.

5.1.5 ATD SR8308: GP B7.30_28 CRASH

Usually, when the ping message between the EDA server and a customer's EDA Client Service
has timed out (such as when a network connection is lost), the client session would be closed
and all of its DCPs would be deactivated. In some rare cases, the GP would crash in this scenario.
This SR fixes the crash issue.

5.1.6 ATD SR8235: ADD EDA SUPPORT FOR THE IEYASU BASELINE
EDA support has been implemented for the Ieyasu baseline.

5.1.7 ATD SR7976: EDA SUPPORT FOR CMP REFLEXION GT (SYCAMORE X)

EDA support has been implemented for the Reflexion GT (Sycamore X) baseline.

5.1.8 ATD SR8442: EDA: CLIENT SHOWS INVALID SUBSYSTEM COMPONENTS LIKE
LOADPORT.7
In earlier versions of GP, an EDA client would have access to data for load ports that have not
been configured on the tool, typically displayed in the equipment structure. This SR fixes the
problem.

5.1.9 ATD SR8511: GP NEEDS TO GENERATE EDA EQUIPMENT STRUCTURE DATA

BASED ON [Link]
This SR was developed in conjunction with CGA SRs:
 8066 RTS NEEDS TO CLEANUP THE CSV FILES TO EXCLUDE THE
UNCONFIGURED LOADPORT DATA
 8439 FIX EXPOSURE OF NON-CONFIGURED NODES TO EDA INTERFACE

Data related to components that have not been configured on the system will not be exposed in
the equipment structure available to an EDA client. Specifically:
1. Data for de-configured load ports will not be exposed
2. Data related to BDS (Bay Distributed Stocker) are removed
3. EDA locators for CHx/Slot1 and CHx/Slot2 are correctly converted to Chamber.x/Slot.1
and Chamber.x/Slot.2
4. Only 25 slots are shown for each load port (it previously had 30 slots)

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5.1.10 ATD SR8692: EDA – CARRIER LOCATION PARTITION 31, 32, AND 33 NOT VALID
Data related to components that have not been configured on the system will not be exposed in
the equipment structure available to an EDA client. Specifically:
1. "Carrier Location 31", "Carrier Location 32", and "Carrier Location 33" if they are not
configured
2. Data related to BDS (Bay Distributed Stocker) are removed

5.1.11 ATD SR8823: GP SHOULD NOT USE S105F37 ON ETCH AMS BASELINES TO
ENABLE EDA STATE MACHINE EVENTS
On the Etch and Producer Etch platforms, an EDA client with an activated DCP plan using State
Machines will continue to operate after the link between GP and the real-time recovers.

5.1.12 ATD SR8921: SR8882: "EXPOSE REALTIME STATE TRANSITION EVENTS TO

HOST" NEEDS TO BE REWORKED
This SR affects all CGA platforms. All the existing real-time generated State Machines are now
available to the host via E30. In previous software versions these State Machines were only
available via the EDA interface. The VIDs and CEIDs used to report the State Machine states and
transitions are in a SECS U8 window: 4300000000000000 through 434299999999999999.

This SR implements the environment variable AMATRTSM64BITSUPPORT, which allows the

exposure of the state machine data as U8 to the host.
0 = DISABLED
1 = ENABLED (default)

The environment variable will be available through GP 7.50_42. If the customer is using GP
7.50_42+, they must also install EDA 1.1_44+ for the tools that support EDA. This will give them
access to E157 and other state machines. This will also require them to rediscover the tool
structure through an EDA client and redefine data collection plans (DCPs).

The environment variable is only relevant for state machines to provide data in the U8 format.
Regardless of this variable setting, the real-time software can still generate U8 data which will be
forwarded to the host.

A. FOR CUSTOMERS WHO DO NOT SUPPORT U8

1. Set AMATRTSM64BITSUPPORT to 0 to disable this feature. Also delete the
c:\amat\gp\data\*[Link] to force the system to regenerate the database. Then restart
the GP.
2. Functionality will be the same as prior to the implementation of this SR.
3. E157 state machine data will be unavailable.
4. If this variable is enabled, then U8 support is required on the host side for SECS
messages that may provide U8 data (examples: S1F3 query to get all SVIDs, or to get all
events).

B. FOR CUSTOMERS WHO SUPPORT U8

1. There is no impact, due to the variable's default setting.
2. Access to the E157 state machine is now available.
3. If the environment variable is disabled, then functionality is the same as prior to the
implementation of this SR.

Additionally, this SR corrected the initial value of EC 1788, which was introduced in GP 7.50_39
in SR 8898. The default value is now set to „1‟ (see details in SR 8898). Previously it had been

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set to „0‟. To fix the problem in the existing install, the user can either change EC 1788 from the
host if running GP 7.50_39, or install GP 7.50_43 and delete c:\amat\gp\data\*[Link] files
before starting GP.

5.1.13 ATD SR8930: BUFFER CHAMBER DOES NOT HAVE SUBSTRATE LOCATION
STATE
This SR changes the EDA equipment structure data. Previously, the material locations for Buffer
Chamber did not present in EDA equipment structure data. As a result, no material location state
machine can be used in the EDA data collection plan. This SR fixes the problem by adding the
material locations to Buffer Chamber under the nodes "Buffer Chamber/Slot.1" and "Buffer
Chamber/Slot.2". By doing this, the previous node "Buffer Chamber/Robot" will be gone.

5.1.14 ATD SR8971: MEMORY LEAK ON SOKUDO WITH BUILD 7.50_41

Previously, if EDA is not installed, GP would have a memory leak issue. Now this problem is
fixed.

5.1.15 ATD SR8952: SYCAMORE EDA MATERIAL LOCATION ISSUE

For the Sycamore X (Reflexion GT) baseline, material locations were not exposed to the EDA
client. This problem has been fixed.

For the following baselines:

Sycamore X (Reflextion GT)
Producer SE
FEP Vantage CGA
FEP Centura CGA
Versailles (Opus)
Endura CGA

... Cassette.A/B/C/D/E nodes were found under the root node and the FI node. They should be
under the FI node only. This problem has been fixed.

5.1.16 ATD SR9025: SUPPORT MULTIPLE STATE MACHINES THAT BELONG TO THE
SAME OBJECT SOURCE
The software now allows multiple State Machines within a single EDA Node. To support this
change, the EDA attribute names for all real-time (not SEMI) State Machine Current, Previous
and Real-time State variables have changed.

For example, in Chamber B's process Node:

process_SMPrevState -> process_SMChamberRecipePrevState
process_SMCurrState -> process_SMChamberRecipeCurrState
process_SMRTSState -> process_SMRTSChamberRecipeState

This also applies to the descriptions:

Chamber.B/cpu/chamber/process.x-SM Previous State ->
Chamber.B/cpu/chamber/process.x-SM ChamberRecipe Previous State
Chamber.B/cpu/chamber/process.x-SM Current State ->
Chamber.B/cpu/chamber/process.x-SM ChamberRecipe Current State
Chamber.B/cpu/chamber/process.x-SM RTS Current State ->
Chamber.B/cpu/chamber/process.x-SM ChamberRecipe RTS Current State

5.1.17 ATD SR9125: INVESTIGATE PROBLEM WITH GP HANDLING EDA TRIGGER

EVENTS WHEN THESE EVENTS OCCUR SIMULTANEOUSLY
For tools that support EDA, if start/stop triggers of traces are based on the E90
SubstrateLocationState transition events "Unoccupied to Occupied" and "Occupied to

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Unoccupied", the stop trigger would never be generated in some cases. As a result, the trace
would continue. The problem is now fixed.

5.1.18 ATD SR9050: RELATIVE REFERENCE SHOULD BE BLANK

This SR is EDA related. The equipment node (top node) name was missing in the state machine
attributes CurrentStateName and PreviousStateName in the previous implementation. This SR
fixes the problem by adding the equipment node to the source name of CurrentStateName and
PreviousStateName.

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6 BDS Features and Enhancements

This section covers the following BDS-related SRs:

Table 5: List of BDS Related SRs

SR # TYPE BUILD SR TITLE

None reported in this release.

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7 E40 / E94 (Process Job / Control Job)

Related SRs
The following table lists all SRs related to E40 (Process Job Management) and E94
(Control Job Management) that have been implemented in this release.

Table 6: List of E40 / E94 Related SRs

SR # TYPE BLD SR TITLE

8021 ENH 3 PROVIDE E94 SVID WHICH CAN BE ASSOCIATED WITH E90 T12
NOT ENOUGH MEMORY ALLOCATED FOR GP TO BUILDS REPLY
8125 BUG 4
MESSAG...
8219 BUG 8 CJSTOP IN E40-0705 MODEL
8341 ENH 11 NEED TO DESTROY CJ WHEN THE CARRIER IS REMOVED
8375 BUG 13 INCORRECT ERROR TEXT USED IN RESPONSE TO CJ ABORT/STOP
8385 ENH 17 SUPPORT PRIORITY AND WAFER PAIRING
CJ ABORT AND PJ ABORT DOESN'T WORK PROPERLY WHEN MANUAL LOT
8525 BUG 21
START IS DISABLED
8644 BUG 23 DO NOT DESELECT WHEN ABORTING PJ IN RTS DETERMINES PJ ORDERS
8380 BUG 30 S14F10 MESSAGE GENERATION
GP CRASHES WITH ACCESS VIOLATION WHEN ATTEMPTING TO CREATE PJ
8702 BUG 30
WITH 255 RECIPE TUNING PARAMETERS
8717 BUG 30 CJ CAN NOT BE CREATED BY THE HOST IN SYSTEM WITH TOOL STATION
8848 ENH 37 MAXIMUM NUMBER OF PJS ENHANCEMENT
8891 BUG 38 GP CRASHES IF 100 CJS ARE QUEUED
S14F10 MESSAGE FORMAT IS BROKEN WHEN EDA PLAN WHICH USES
9041 BUG 46
EVENTS OR PARAMETERS RELATED TO CJ IS ACTIVE
9040 ENH 46 EXCLUDE CHAMBER RECIPE NAME FROM PJ RECIPE TUNING

7.1.1 ATD SR8021: PROVIDE E94 SVID WHICH CAN BE ASSOCIATED WITH E90 T12
This SR provides new DVs (Process Job ID, Control Job ID, and Carrier ID) for E90 Substrate
Object State transitions, and DVs Control Job ID and Carrier ID for E40 Process Job State
transitions.

New DVs are:

1877 "Process Job ID of current substrate"
1878 "Control Job ID of current substrate"
1879 "Carrier ID of current substrate"
1880 "Control Job ID of current process job"
1881 "Carrier ID of current process job"

1877-1879 are available for Substrate Object State Model (SOSM) transitions.
1880-1881 are avaiable for Process Job State Model (PJSM) transitions.

When a substrate is created (SOSM T1/19), DVs 1877 and 1878 are empty. If the substrate is not
specified in any process job, these two DVs remain empty when the carrier is removed (SOSM

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T9). DV 1879 has the substrate source carrier. Similarly, when a process job is created (PJSM
T1), DV 1880 is empty. DV 1881 has the carrier for the process job.

7.1.2 ATD SR8125: NOT ENOUGH MEMORY ALLOCATED FOR GP TO BUILDS REPLY
MESSAGE S16F14 ON 100 PJS WITH 80 CHAR LONG
Previously, GP would sometimes not respond to host-related messages because the reply buffer
was too small. For example, during the dequeue of 100 unknown process jobs with 80-byte
process job IDs, the host would not get a reply from GP since GP's reply buffer was too small to
fit 100 length-error texts. The problem has now been fixed.

7.1.3 ATD SR8219: CJSTOP IN E40-0705 MODEL

The CJStop / CJAbort command was rejected with ERRCODE 22 and ERRTEXT 'Failed during
processing' if any of the process jobs belonging to the control job was in the Stopping (applies
only to CJStop), Aborting, Stopped, Aborted, or Process Complete state. This problem has been
fixed.

7.1.4 ATD SR8341: NEED TO DESTROY CJ WHEN THE CARRIER IS REMOVED

Previously, a control job in the WaitingForStart state was processed manually (the host did not
send S16F27 CJStart message). Later when its carrier was removed, the control job was not
deleted. This problem has been fixed in the following way:
 When the carrier of a control job that is in the WaitingForStart, Executing, Paused, or
Completed state has been removed, the control job will be deleted.
 When EC 1723 (the EC to save or remove the control jobs referring to an unverified
carrier being removed) is set to TRUE and the carrier of a Queued or Selected control job
is removed, the control job will be deleted. If the EC is FALSE, the control job will not be
deleted.

7.1.5 ATD SR8375: INCORRECT ERROR TEXT USED IN RESPONSE TO CJ ABORT/STOP

Previous to GP7.50_8(SR 8219), if a CJ is in the COMPLETED state and the host sends a CJ
ABORT or STOP command, the message would be rejected with ERRCODE 17 and ERRTEXT
"CJ is in COMPLETE". This would be true regardless of how many times the host would send the
abort or stop commands.

With SR 8219 implemented, if the host sends the CJ ABORT while the CJ is in the COMPLETED
state, it is rejected properly the first time, but if the ABORT command is sent again, the
ERRTEXT now states "Control Job Abort has already been initiated and cannot be aborted again".
The message is correctly rejected, but the ERRTEXT is misleading and inaccurate.

This problem is now fixed. If the CJ is in the COMPLETED state, any abort or stop command
should be rejected, and even if repeated, these commands continue to be rejected for the reason
of the job already being in the completed state.

7.1.6 ATD SR8385: SUPPORT PRIORITY AND WAFER PAIRING

This SR provides the following capabilities:
 wafer pairing for dual processing in the one wafer per process job scenario
 process job priority at the job level cut-in (interruption)

See baseline release notes for a full description of these capabilities.

In the wafer pairing mode, if a control job's Process Order Management attribute is Optimize or
Arrival (not List), all of its process jobs will go to the SETTING UP state at the same time. If it is
List order, process jobs will setup individually according to the order in the list.

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To assign priority to a process job, specify control rule 'PRIORITY' in the Processing Control
Spec in the control job creation message. A valid value is a U1 0-255 (with 255 = highest priority).
If the Process Order Management of the control job is List and the priority is not consistent with
the process job order, the message is rejected.

7.1.7 ATD SR8525: CJ ABORT AND PJ ABORT DOESN'T WORK PROPERLY WHEN
MANUAL LOT START IS DISABLED
When manual lot start mode was disabled, the process job remained in the Aborting/Stopping
state and the control job remained in Executing state after all wafers had returned to the cassette
because either the process job or the control job had been aborted or stopped. When the abort
process completed, the process job should have been deleted (E40-0304), or transitioned to the
Aborted/Stopped state (E40-0705); and the control job should have transitioned to the Completed
state. This problem has been fixed.

7.1.8 ATD SR8644: DO NOT DESELECT WHEN ABORTING PJ IN RTS DETERMINES PJ

ORDER

Previously, the software behavior was this:

1. In the RTS-determine-process-job-order mode, process a process job with
PRProcessStart set to FALSE. While the job is in the Waiting For Start state, abort it. It
fails to abort.
2. In RTS-determine-process-job-order mode, if a process job fails to start for any reason
(e.g. sequencer not in auto-running), the process job does not auto-abort properly.
These problems have been fixed.

7.1.9 ATD SR8380: S14F10 MESSAGE GENERATION

Previously, the S14F10 message was not generated until the process job in the control job
completed setting up. This sometimes resulted in an S14F9 timeout. This problem has been fixed
by generating S14F10 before the control job transitions to the Selected state.

7.1.10 ATD SR8702: GP CRASHES WITH ACCESS VIOLATION WHEN ATTEMPTING TO

CREATE PJ WITH 255 RECIPE TUNING PARAMETERS
Previously, GP crashed when attempting to create a process job with 255 recipe tuning
parameters, which is the maximum supported. This problem has been fixed.

7.1.11 ATD SR8718: CJ CAN NOT BE CREATED BY THE HOST IN SYSTEM WITH TOOL
STATION
Previously, in system with Tool Station configured, if all FIMS ports had been switched from TSA
(Tool Station Accessed) to OPA (OPerator Accessed), a control job could not be created from the
host. GP rejected the creation message with 'Invalid attribute value' for the attribute
'CarrierInputSpec'. This problem has been fixed.

7.1.12 ATD SR8848: MAXIMUM NUMBER OF PJS ENHANCEMENT

GP now supports up to 500 process jobs for the Ieyasu baseline. For other baselines, up to 100
process jobs are supported.

7.1.13 ATD SR8891: GP CRASHES IF 100 CJS ARE QUEUED

Previously, GP crashed if 100 control jobs were created and all in the queued state. This problem
is fixed.

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7.1.14 ATD SR9041: S14F10 MESSAGE FORMAT IS BROKEN WHEN EDA PLAN WHICH
USES EVENTS OR PARAMETERS RELATED TO CJ IS ACTIVE
The host created a CJ using S14F9. GP returned an invalid S14F10 as:
S14F10
<L,2
:
>

The correct message should be:

S14F10
<L,3
:
>

It happened only when an EDA data collection plan, with CJSM T1 as one of the event requests
and with any SEMI object attribute as one of the parameters, was active. This problem has been
fixed.

7.1.15 ATD SR9040: EXCLUDE CHAMBER RECIPE NAME FROM PJ RECIPE TUNING
GP now supports "Special Tuning Methodology 1" recipe tuning for Reflexion GT. The host does
not need to specify the recipe name in RCPPARNM in S16F11/15/23. The format is
"SpecialTM1/SequenceStep/RecipeStep/ParameterName". The first item in RCPPARNM must be
the keyword "SpecialTM1", follow by the sequence step, recipe step, and parameter name.

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8 E87 (Carrier Management) Related SRs

The following table lists all SRs related to E87 (Carrier Management) that were been
implemented in this release.

Table 7: List of E87 Related SRs

SR # TYPE BLD SR TITLE

7962 BUG 1 GP REJECTS CANCELBIND IF PORT IS NOT INCLUDED
ND
ALLOW CONTENTMAP ATTRIBUTE IN 2 PROCEEDWITHCARRIER
8304 ENH 11
PROVIDED FROM HOST
8376 ENH 14 ENHANCEMENT DUMMY USAGE BEHAVIOR
3038 ENH 17 THE FUNCTIONAL ADDITION OF USAGE IN PROCEED WITH CARRIER
8705 ENH 29 S3F27 ACCESS MODE CHANGE SUPPORT FOR IEYASU TOOLSTATION
8785 ENH 34 MAKE LOCATION ID AVAILABLE AS DV FOR COSM
8805 BUG 35 GP CRASHES WHEN 32 LOADPORT LOCATIONS ARE CONFIGURED
FA: SLOTMAP WAITING FOR HOST EVENT (CEID:3030607) WAS
8842 ENH 37
PUBLISHED EVEN IF THE CARRIER IS ALREADY CANCELED
8870 BUG 38 GP SHOULD NOT USE TSBIND ON FIMS/LP IN OPERATOR ACCESS
8899 ENH 41 SUPPORT TS/LP IN/OUT SERVICE MODE
9030 BUG 45 BIND SERVICE S3F17 WITH 121-CHARACTER CARRIER ID CRASHES GP
8999 ENH 45 SUPPORT SOKUDO ADDITIONAL SPEC FOR LITHO BUFFER
9048 BUG 46 S3F17 MESSAGE WITH ZERO-LENGTH DATAID SHOULD BE ALLOWED
S3F17 CANCELCARRIERATPORT DOES NOT WORK IF AN EMPTY
9076 BUG 47
CARRIER ID STRING IS PROVIDED
SOKUDO REPORTS MULTIPLE INSTANCES OF S3F28 NOT BEING SENT
9061 BUG 48
IN RESPONSE TO S3F27
9215 ENH 54 HANDLE THE „UNKNOWN MAP INFO‟ DATA FROM THE REALTIME
9316 BUG 55 PROCEED WITH CARRIER ISSUE

8.1.1 ATD SR7962: GP REJECTS CANCELBIND IF PORT IS NOT INCLUDED

The CancelBind service is supposed to work by either providing the Carrier ID or the port where
the carrier is bound, or both can be provided. However, the CancelBind service is rejected unless
the associated port ID is provided. Using only the carrier ID with a port reference of 0 is rejected
with an invalid load port ID error. This problem has been fixed.

ND
8.1.2 ATD SR8304: ALLOW CONTENTMAP ATTRIBUTE IN 2 PROCEEDWITHCARRIER
PROVIDED FROM HOST
Previously, S3F17 ProceedWithCarrier for the carrier slot map verification cannot contain carrier
attributes. This SR removes the restriction. As long as carrier attributes pass consistency checks,
ProceedWithCarrier for the carrier slot map verification can have carrier attributes.

8.1.3 ATD SR8376: ENHANCEMENT DUMMY USAGE BEHAVIOR

This SR implements the Auto Dummy Wafer Exchange capability for Etch and Etch-Producer
baselines. When RT EC 287309870 is set to 1 (Full Auto Exchange Mode), and a carrier with
"DUMMY' usage is loaded and passes Carrier ID and Slot Map verifications, wafers in the carrier
will be moved to the dummy storage automatically without the host's intervention. Modifying RT

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EC 287309870 will not require a GP reboot. EC 287309870 is implemented in Etch F2.8 and later;
the user must ensure that the GP and RT software versions contain the matching implementation
to utilize Auto Dummy Wafer Exchange.

8.1.4 ATD SR3038: THE FUNCTIONAL ADDITION OF USAGE IN PROCEED WITH

CARRIER
 A New GEM EC 1710 is defined to enable/disable the carrier usage check, where 0 =
disable (default), 1 = enable. This EC can be change on the fly; no GP reboot required.
The RT also defines a new EC 2102620067 to enable the carrier for non-product wafers
(EnableNPW): TRUE = enable, FALSE = disable (default).

 If the RT does not support EC EnableNPW or DummyLoadPort EC, or GEM EC 1710 is

set to FALSE, then there is no behavior change in E87.

 If GEM EC 1710 is TRUE and EnableNPW is TRUE, and the RT supports the
DummyLoadPort EC, then the following rules will apply:

If S3F17 command includes carrier usage

- Dummy Port cannot accept carrier with "PRODUCT" usage.
- Product Port cannot accept carrier with "DUMMY" usage.

If S3F17 command does not include carrier usage –

- Dummy Port will have "DUMMY" as Carrier Usage.
- Product Port will have "PRODUCT" as Carrier Usage.

 If GEM EC usage is disabled or the RT does not support the DummyLoadPort EC, then
no usage check is performed if the usage is specified in the Bind or ProceedWithCarrier
services, and "Product" will be the default carrier usage if the carrier usage is not
specified in Bind or ProceedWithCarrier.

 If the carrier usage in the Bind or ProceedWithCarrier conflicts with the port configuration
setting (Dummy or Product), then the command is rejected with error code 133.

8.1.5 ATD SR8705: S3F27 ACCESS MODE CHANGE SUPPORT FOR IEYASU
TOOLSTATION
S3F27 access mode change is now supported for the Ieyasu Tool Station baseline.
 If S3F27 is to toggle the access mode, the ACK code in S3F28 is 4.
 If S3F27 is to switch to the same access mode, the ACK code in S3F28 is 0, but no
action is performed.

8.1.6 ATD SR8785: MAKE LOCATION ID AVAILABLE AS DV FOR COSM

Previously, GP DV 1570 (carrier location) was not updated properly during Carrier State Model
Transition 5 (No State to ID Verification Failure). This SR fixed the problem.

8.1.7 ATD SR8805: GP CRASHES WHEN 32 LOADPORT LOCATIONS ARE CONFIGURED

The Ieyasu ToolStation baseline now supports up to 35 buffers. The following VIDs are added to
the Ieyasu ToolStation baseline for additional buffers:
 24 SVIDs are added to the CarrierId group: 1981 - 2004 for 34th location - 57th locations.
 24 SVIDs are added to the LocationId group: 2011 - 2034 for 34th location - 57th
locations.

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8.1.8 ATD SR8842: FA: SLOTMAP WAITING FOR HOST EVENT (CEID:3030607) WAS
PUBLISHED EVEN IF THE CARRIER IS ALREADY CANCELED
If the host issues S3F17 CancelCarrier immediately after the carrier ID is verified and before the
wafer mapping is done, E87 will prevent any carrier object state transtion except destroying the
carrier object (carrier object state transition 21).

8.1.9 ATD SR8870: GP SHOULD NOT USE TSBIND ON FIMS/LP IN OPERATOR ACCESS
Previously, S3F17 Bind command does not cause Reservation Status transition on a
FIMSLP/OPA port. This SR fixes the problem.

8.1.10 ATD SR8899: SUPPORT TS/LP IN/OUT SERVICE MODE

S3F25 IN_SERVICE and OUT_OF_SERVICE service load port commands are now supported for
the Ieyasu ToolStation baseline.

8.1.11 ATD SR9030: BIND SERVICE S3F17 WITH 121-CHARACTER CARRIER ID

CRASHES GP
The Carrier ID in S3F17 commands cannot be longer than 80 bytes in length, or the command
will be rejected.

8.1.12 ATD SR8999: SUPPORT SOKUDO ADDITIONAL SPEC FOR LITHO BUFFER
If a carrier is found on a buffer which is unknown to the system, then Ieyasu will generate the
UnknownCarrierDetected event, with a default Carrier ID. Then a carrier object is instantiated,
and the CarrierLocationMatrix (VID = 1589), which lists Carrier IDs for the locations, is updated
accordingly.

8.1.13 ATD SR9048: S3F17 MESSAGE WITH ZERO-LENGTH DATAID SHOULD BE

ALLOWED
Previously, S3F17 with a zero-length DATAID was rejected. This SR fixed the problem.

8.1.14 ATD SR 9076: S3F17 CANCELCARRIERATPORT DOES NOT WORK IF AN EMPTY

CARRIER ID STRING IS PROVIDED
S3F17 CancelCarrierAtPort does not require the "CarrierId" to be specified as a parameter.

8.1.15 ATD SR9061: SOKUDO REPORTS MULTIPLE INSTANCES OF S3F28 NOT BEING
SENT IN RESPONSE TO S3F27
In some rare cases, there was no reply to the S3F27 message sent to the host even though the
host set the W-bit to on. The problem is now fixed.

8.1.16 ATD SR9215: HANDLE THE „UNKNOWN MAP INFO‟ DATA FROM THE REALTIME
Previously, if the content of the slot map info from the RT software contained unknown slot (value
"4") during wafer mapping, then E87 would not update SVID 1598 along with the COSM_T14
event. This SR fixed the problem. The unknown slot (value “4”) from the RT is now converted to
an E87-defined value UNDEFINED (value “0”) in the corresponding slot of SVID 1598.

8.1.17 ATD SR9316: PROCEED WITH CARRIER ISSUE

In some rare cases, there was no reply to the S3F17 message sent to the host even though the
host set the W-bit on. The problem is now fixed.

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Title: GP Software Release Notes Version 7.50_55

9 E90 (Substrates) Related SRs

The following table lists all SRs related to E90 (Substrates) that have been implemented
in this release.

Table 8: List of E90 Related SRs

SR # TYPE BUILD SR TITLE

CREATE A NEW GP VERSION THAT SUPORTS E90 ONLY FOR
8688 ENH 30
ETCH MILLENIUM BASELINES
NEED TO ADD THE SUBSTRATE LOCATION FOR FI SIDE
9193 ENH 53
STORAGE CHAMBER

9.1.1 ATD SR8688: CREATE A NEW GP VERSION THAT SUPORTS E90 ONLY FOR ETCH
MILLENIUM BASELINES
This SR supports a particular configuration for Etch Millennium baselines where the AMAT FIC is
not installed. For E300 SEMI standards related messages, this SR allows GP to only support
E90. All E87 and E40/E94 messages will be rejected with S9F3, S9F5 or S9F7 reply. Please
refer to the real-time release documentation for additional information.

9.1.2 ATD SR9193: NEED TO ADD THE SUBSTRATE LOCATION FOR FI SIDE STORAGE
CHAMBER
For the Centura CGA baseline, the new E90 Substrate locations identifier "FI Storage A" and "FI
Storage B" are now supported.

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Title: GP Software Release Notes Version 7.50_55

10 Beta Up-revs
The following table lists SRs that are in each Beta Up-rev build. Page and build
numbers are included for easy look-up. Or, just click on the page number to take you
directly to the Release Notes data.

SR Build Page Title

8200 7 16 ADD FA SUPPORT FOR NEW BASELINE MOIRA
8214 7 27 RE-MODIFY EDA PARAMETER NAMES
8219 8 34 CJSTOP IN E40-0705 MODEL
* 9 * *** Internal build only ***
SUPPORT PASSTHRU FORMATTED PROCESS PROGRAM REQUESTS
8266 10 18
FOR MILLENIUM BASELINES
8270 10 28 WINGP LOGFILESETTING OPTION FOR EDA LINK
SUPPORT NEW PPTYPE FOR TETRAX CHAMBER TYPE FOR MILLENIUM
8279 11 18
BASELINE
ADD SUPOPRT FOR HOST TO UPLOAD / DOWNLOAD NEW
8302 11 18
REFLEXIONGT (SYCAMORE) METROLOGY RECIPE TYPE
ND
ALLOW CONTENTMAP ATTRIBUTE IN 2 PROCEEDWITHCARRIER
8304 11 37
PROVIDED FROM HOST
8308 11 28 GP B7.30_28 CRASH
8235 12 28 ADD EDA SUPPORT FOR THE IEYASU BASELINE
8341 12 34 NEED TO DESTROY CJ WHEN THE CARRIER IS REMOVED
8347 12 22 SR 8279 FAIL: EC 190 CANNOT BE SET TO 94 (ALG-TRAX)
8375 13 34 INCORRECT ERROR TEXT USED IN RESPONSE TO CJ ABORT/STOP
8379 13 22 INCREASE THE SIZE OF PPTYPE NAME
7976 13 28 EDA SUPPORT FOR CMP REFLEXION GT (SYCAMORE X)
8442 14 28 EDA: CLIENT SHOWS INVALID SUBSYSTEM COMPONENTS…
8376 14 37 ENHANCEMENT DUMMY USAGE BEHAVIOR
8462 15 23 INVESTIGATE [Link] FILE CORRUPTION
SUPPORT NEW “CARRIER DELETED” EVENT FOR IEYASU
8482 15 24
TOOLSTATION TO RESOLVE TIMING ISSUE
* 16 * *** Internal build only ***
3038 17 38 THE FUNCTIONAL ADDITION OF USAGE IN PROCEED WITH CARRIER
8385 17 34 SUPPORT PRIORITY AND WAFER PAIRING
SUPPORT NEW PPTYPE FOR OFFSET TABLES OFR ALL CHAMBER
8504 18 19
TYPES FOR MILLENNIUM BASELINE
GP NEEDS TO GENERATE EDA EQUIPMENT STRUCTURE DATA BASED
8511 19 28
ON [Link]
* 20 * *** Internal build only ***
CJ ABORT AND PJ ABORT DOESN'T WORK PROPERLY WHEN MANUAL
8525 21 35
LOT START IS DISABLED
8579 22 19 RF3 SUPPORT TS BI-DIRECTIONAL LP
MILLENIUM: PROVIDE SUPPORT FOR THE NEW ETCH CHAMBER TYPE
8626 23 19
PCAR
DO NOT DESELECT WHEN ABORTING PJ IN RTS DETERMINES PJ
8644 23 35
ORDERS
ENUMERATED TYPE DESCRIPTION BUFFER IS TOO SMALL WHEN
8677 24 24
DUPLICATE DESCRIPTIONS EXCEED 999

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SR Build Page Title

8679 25 19 SOKUDO::TOOL STATION SUPPORT DUAL CRANE
8524 26 16 CREATE A NEW GP VERSION THAT SUPPORTS E90 ONLY
8692 27 22 EDA – CARRIER LOCATION PARTITION 31, 32, AND 33 NOT VALID
8104 28 24 GP SENT INCORRECT DATA IN EVENT REPORT TO HOST
8705 29 38 S3F27 ACCESS MODE CHANGE SUPPORT FOR IEYASU TOOLSTATION
8380 30 35 S14F10 MESSAGE GENERATION
GP CRASHES WITH ACCESS VIOLATION WHEN ATTEMPTING TO
8702 30 35
CREATE PJ WIT 255 RECIPE TUNING PARAMETERS
CJ CAN NOT BE CREATED BY THE HOST IN SYSTEM WITH TOOL
8718 30 35
STATION
CREATE A NEW GP VERSION THAT SUPOPRTS E90 ONLY FOR ETCH
8688 30 40
MILLENIUM BASELINES
* 31 * *** Internal build only ***
* 32 * *** Internal build only ***
8781 33 24 FIX ISSUE WITH EVENT REPORTS CONTAINING U8 VID
8785 34 38 MAKE LOCATION ID AVAILABLE AS DV FOR COSM
8793 35 25 ADD SUPPORT FOR U8 FORMAT WITH CONDOR CGAFE
8805 35 38 GP CRASHES WHEN 32 LOADPORT LOCATIONS ARE CONFIGURED
GP SHOULD NOT USE S105F37 ON ETCH AMS BASELINES TO ENABLE
8823 36 29
EDA STATE MACHINE EVENTS
8704 36 19 PROVIDE A UNIQUE, READABLE SVNAME AND ECNAME
FA: SLOTMAP WAITING FOR HOST EVENT(CEID:3030607) WAS
8842 37 39
PUBLISHED EVEN IF THE CARRIER IS ALREADY CANCELED
8848 37 35 MAXIMUM NUMBER OF PJS ENHANCEMENT
8870 38 39 GP SHOULD NOT USETSBIND ON FIMS/LP IN OPERATOR ACCESS
8891 38 35 GP CRASHES IF 100 CJS ARE QUEUED
8898 39 20 GP SHOULD RETURN SV ONLY FROM S1F3, S1F11
8839 40 16 STATE MACHINE ENHANCEMENT IN GP
8843 41 25 INCOMPLETE MESSAGE HANDLING IN THE BACKLINK
8899 41 20 SUPPORT TS/LP IN/OUT SERVICE MODE
SR882: “EXPOSE REALTIME STATE TRANSITION EVENTS TO HOST”
8921 42 29
NEEDS TO BE REWORKED
8930 43 30 BUFFER CHAMBER DOES NOT HAVE SUBSTRATE LOCATION STATE
8971 43 30 MEMORY LEAK ON SOKUDO WITH BUILD 7.50_41
8952 44 30 SYCAMORE EDA MATERIAL LOCATION ISSUE
FIX EAC VALUE RETURNED IN S2F16 WHEN HOST USES WRONG SECS
8995 44 25
TYPE IN SETTING AN EC VALUE
„DISABLE ALL EVENTS‟ DOES NOT DISABLE THE STATE MACHINE
9002 44 25
EVENTS
GP CANNOT HANDLE RT‟S EC WITH DATA TYPE ARRAY OF F8 AND
9029 45 25
NEWLY CREATED CEIDS BY CGA IN 2301070201002 RANGE
9030 45 39 BIND SERVICE S3F17 WITH 121-CHARACTER CARRIER ID CRASHES GP
8999 45 39 SUPPORT SOKUDO ADDITIONAL SPEC FOR LITHO BUFFER
S14F10 MESSAGE FORMAT IS BROKEN WHEN EDA PLAN WHICH USES
9041 46 36
EVENTS OR PARAMETERS RELATED TO CJ IS ACTIVE
9048 46 39 S3F17 MESSAGE WITH ZERO-LENGTH DATAID SHOULD BE ALLOWED
SUPPORT MULTIPLE STATE MACHINES THAT BELONG TO THE SAME
9025 46 30
OBJECT SOURCE
9040 46 36 EXCLUDE CHAMBER RECIPE NAME FROM PJ RECIPE TUNING

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SR Build Page Title

FIX 2 MEMORY LEAK ISSUES: (1) “POD SIZE = 0” CAUSED BY MEMORY
9075 47 25 OVERWRITTEN CAUSED BY START_MIDS; (2) CRASH CAUSED BY
MEMORY LEAK
S3F17 CANCELCARRIERATPORT DOES NOT WORK IF AN EMPTY
9076 47 39
CARRIER ID STRING IS PROVIDED
SOKUDO REPORTS MULTIPLE INSTANCES OF S3F28 NOT BEING SENT
9061 48 39
IN RESPONSE TO S3F27
9062 48 25 FIC INITIALIZED SVID HANDLING IMPROVEMENT
* 49 * *** Internal build only ***
* 50 * *** Internal build only ***
INVESTIGATE PROBLEM WITH GP HANDLING EDA TRIGGER EVENTS
9125 51 30
WHEN THESE EVENTS OCCUR SIMULTANEOUSLY
9050 52 31 RELATIVE REFERENCE SHOULD BE BLANK
9102 52 20 INCREASE THE MAXIMUM SIZE FOR PPID REQUESTS
DEFAULT VALUE CHANGE FOR AMATRTSM64BITSUPPORT
9159 52 20
ENVIRONMENT VARIABLE
NEED TO ADD THE SUBSTRATE LOCATION FOR FI SIDE STORAGE
9193 53 40
CHAMBER
DOWNLOADING A LARGE RECIPE (GREATER THAN 1MB) WILL CAUSE
9199 53 25
GP TO CRASH
9211 54 20 MILLENIUM: PROVIDE SUPPORT FOR ADDITIONAL PPTYPES
9215 54 39 HANDLE THE „UNKNOWN MAP INFO‟ DATA FROM THE REALTIME
9316 55 39 PROCEED WITH CARRIER ISSUE
9037 55 21 NEW E157 EVENT DESCRIPTIONS NON UNIQUE
9243 55 21 ENHANCEMENT FOR UNIQUE SVNAME
9246 55 21 ENHANCE N2 PURGE LOADPORT CAPABILITY REPORTING

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 APPLIED MATERIALS SANTA CLARA: Factory Automation Software Group
Effective Date: July 2012
Title: GP Software Release Notes Version 7.50_55

11 Software Problem Reporting Procedure

All software related problems (bug reports, enhancement requests) should be submitted to the
appropriate PBG‟s Software Request Database. If the problem requires Factory Automation
support, then the PBG‟s support and test group will contact the FA Support Manager.

11.1 HOW TO SUBMIT AN SR (SOFTWARE REQUEST)

1. Make sure you have a link to the CSS QMS database. If not, ask Global Software
Support (GSS) to email the link emailed to you.

2. Double-click on the icon. This will take you to the Central Navigator:

3. Click on CSS Records. You will get the following:

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A drop-down menu will appear if you double-

click on the Software Database field. Select
Software Request Databases to get access to
the SR database link.

4. Select any of the following Product Business Groups (PBGs):

 CPI
 DSM
 ETCH
 TCG

5. Double-click on Software Database, and select Software Request Databases.

6. Click on the link of the correct product‟s SR database.
7. From the menu bar, select Create, then 1. Software Request.

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8. Fill in all details of the SR page. Fields in red are required. When finished, click the
Submit icon (near the top) to place the SR in the submit queue:

9. The SR will be assigned an SR number and the reporter will be notified by e-mail. Once
the reporter receives this number, the SR should always be referred to by its SR number.
10. If you have questions with a PBG‟s SR database, please contact Global Software
Support (GSS).

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