Compound Semiconductor Devices
Progress Report
MESFET using GaN
Submitted as a part of the coursework for the Compound Semiconductor Devices
Bachelor of Technology
in
Electronics and Communication Engineering
Submitted by
Roll No Names of Students
B220402EC Mohammed Razeen R
B220412EC Muhammed Jasim M
B220644EC Adithyadev S S
B221089EC P Pavithran
B221325EC Nadheem Roshan
Under the guidance of
Dr Arjunan M S
Department of Electronics and Communication Engineering
National Institute of Technology Calicut
Calicut, Kerala, India – 673 601
Winter Semester 2025
EDA Tool Used
Silvaco ATLAS was chosen for its accurate modeling of GaN device physics, including trapping effects
and high-field behavior. Its industry-standard reliability, precise parameter control, and integrated
visualization tools make it ideal for our MESFET simulation.
Device Dimensions
Table 1: MESFET Parameters and Descriptions
Parameter Value Description
Substrate Sapphire Semi-insulating substrate
Channel Material GaN (n-doped) Doping: 1 × 1017 cm−3 (Silicon)
Gate Metal Gold (Au) Schottky contact (Work function: 5.1 eV)
Source/Drain n+ GaN Doping: 5 × 1020 cm−3 (Ohmic contacts)
Gate Length (Lg) 0.5 µm Schottky gate length
Channel Thickness 0.2 µm Doped GaN layer
Breakdown Field 3.3 MV/cm GaN critical field
1 Models and Parameters Used in the Simulation
The following models, doping profiles, and meshing configurations were used in the GaN MESFET
simulation:
Doping Profiles
• Ohmic Doping:
– Source/Drain: Silicon (Si) active concentration of 5 × 1020 cm−3 (n+ GaN).
• Constant Doping:
– GaN Channel: Uniform 1 × 1017 cm−3 (Si).
– Sapphire Substrate: Intrinsic (undoped).
Material Models
• Mobility:
– Field-Dependent Mobility (albrct.n) for GaN.
• Trapping:
– SRH (Shockley-Read-Hall) Recombination with:
∗ Electron lifetime (τn ) = 1 × 10−7 s.
∗ Hole lifetime (τp ) = 1 × 10−7 s.
• Contacts:
– Gate: Schottky contact (Au, work function = 5.1 eV).
– Source/Drain: Ohmic contacts (work function = 4.1 eV).
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Meshing Refinements
• GaN Channel:
– x-direction: 0.05 µm near gate, 0.25 µm elsewhere.
– y-direction: 0.001 µm refinement at interfaces.
• Substrate (Sapphire):
– Coarse mesh: 0.1 µm refinement.
Simulation Setup
• Voltage Sweeps:
– Drain voltage (Vd ): 0 → 20 V (step = 0.1 V).
– Gate voltage (Vg ): 0 → -5 V (step = -0.5 V).
Experimental Results
Figure 1: Structure of GaN MESFET
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