GUJARAT TECHNOLOGICAL UNIVERSITY
BRANCH NAME: Biomedical Engineering (03)
SUBJECT NAME: BIOMEDICAL MICROSYSTEMS
SUBJECT CODE: 2170311
B.E. 7th SEMESTER
Type of course: Department Elective
Prerequisite: Basic Physics, Mechanics, Basic principles of different sensors, Basics of Material science.
Rationale:
To impart in students detailed knowledge about Principle and working of Micro electro mechanical
system (MEMS),
To give brief knowledge about Fabrication process of MEMS.
To give brief knowledge about applications of Bio Microelectromechanical System (Bio-MEMS)
technology for therapeutic, diagnosis etc.
Teaching and Examination Scheme:
Teaching Scheme Credits Examination Marks Total
Theory Marks Practical Marks Marks
L T P C ESE PA (M) PA (V) PA
(E) PA ALA ESE OEP (I)
3 0 2 5 70 20 10 30 0 20 150
L- Lectures; T- Tutorial/Teacher Guided Student Activity; P- Practical; C- Credit; ESE- End Semester
Examination; PA- Progressive Assessment; OEP-Open Ended problem; AL-Active learning.
Content:
Sr. Content Total %
No. Hrs
Introduction to Microelectromechanical (MEMS) Technology:
Historical perspective,
Development of MEMS Technology,
1 8 20
MEMS Technology: Present, Future and Challenges
MEMS Applications
Comparison of MEMS and Microelectronics
Fabrication Processes:
Different Materials, Substrates,
Physical Vapor Deposition (PVD),
Chemical Vapor Deposition (CVD),
2 8 20
Etching Processes, Patterning,
Wafer Bonding, Annealing,
Chemical Mechanical Polishing (CMP),
Material Doping.
MEMS Technologies:
Bulk Micromachining,
3 LIGA (Lithographie, Galvanoformung, Abformung), 8 15
Sacrificial Surface Micromachining,
MEMS Sensors and Actuators:
4 MEMS Actuators, MEMS Sensing, Electron Tunneling, 7 10
Sensor Noise, MEMS Physical Sensors, Chemical Sensors.
MICRO/NANO BIOSENSORS:
Classification of physical sensors, Integrated, Intelligent or Smart sensors,
5 7 15
Bio sensing Principles and sensing methods,
Biosensors arrays and Implantable devices.
Introduction to different Biomedical Applications of Microsystems:
Delivery of Diagnostic and Therapeutic Agents to Vascular Targets,
6 Real-Time Biological Imaging and Detection, 8 20
Diagnostic and Therapeutic Applications of Metal Nano shells,
Micro devices for Oral Drug Delivery etc.
Total 46 100
Text Books:
1. Senturia, Stephen, D., “Microsystem Design”, Kluwer Academic Publishers, 2001
2. Microelectromechanical system design, James j. allen. Taylor & Francis 2nd edition.
3. BioMEMS and Biomedical Nanotechnology, volume III Tejal desai, sangetha Bhatia.
4. Biomedical Nanotechnology. Neelina H Malsch , Taylor & Francis
References:
1. Manz, A., & Becker, H.(Eds.), “Microsystem Technology in Chemistry and Life Sciences”,
2. Springer-Verlag, New York, 1999. ISBN: 3-540-65555-7.
3. Bao, M., H., “Micromechanical Transducers: Pressure sensors, accelerometers, and
4. gyroscopes”, Elsevier Publications, New York, 2000.
5. Lambrechts, M., “Biosensors: Microelectrochemical Devices”, CRC Press, 1992.
6. Buerk, Donald, G., “Biosensors: Theory and Applications”, CRC Press, 1995.
7. Madon, Marc, “Fundamentals of Micro fabrication”, CRC Press, 1997.
8. Kovacs, Gregory, “Micro machined Transducers Sourcebook”, WCB McGraw-Hill, Boston, 1998.
9. Saliterman Steven, S., “Fundamentals of BioMEMS and Medical Microdevices”, Wiley
10. Interscience, SPIE Press Monograph Vol. PM153.
Suggested Specification table with Marks (Theory):
Distribution of Theory Marks
R Level U Level A Level N Level E Level
25% 30% 25% 10% 10%
Legends: R: Remembrance; U: Understanding; A: Application, N: Analyze and E: Evaluate and
above Levels (Revised Bloom’s Taxonomy)
Note: This specification table shall be treated as a general guideline for students and teachers. The actual
distribution of marks in the question paper may vary slightly from above table.
Course Outcome:
After learning the course the students should be able to:
1. Understand the MEMS Technology and its biomedical application.
2. Learn the Fabrication process of Micro electro mechanical systems.
3. Learn MEMS Sensors and Actuators, biosensors, smart sensors
4. Understand different challenges to design Biomedical Microsystems.
5. Understand the various applications for curing different diseases accurately by using BioMEMS
Technology.
List of Experiments: (Outlines)
1. Introduction to MEMS Technology.
2. To study different Fabrication processes of MEMS.
3. To study different MEMS Technologies.
4. To study various types of MEMS Sensors and Actuators.
5. To study various types of Micro/Nano Biosensors.
6. To study the application of Vascular Zip Codes and Nanoparticle Targeting.
7. To study the application of Real-Time Biological Imaging and Detection.
8. To study the application of Diagnostic and Therapeutic Applications of Metal Nano shells.
9. To study the application of Micro devices for Oral Drug Delivery.
Active Learning Assignments: Preparation of power-point slides, which include videos, animations,
pictures, graphics for better understanding of theory and practical work. The faculty will assign topics
from which students can grasp knowledge about current scenario of the Medical Optics. The power-point
slides should be put up on the web-site of the College/ Institute, along with the names of the students of
the group, the name of the faculty, Department and College on the first slide. The best three works should
submit to GTU.
