61 onat is Deal G;HOve model a idation ?

curat uc
Iineon and panboc ate coeBcients coln ejeence
to oidation pDces ? mahertical m0elthot
model s a
Ans. he Deal 6oye oxidation a silion.
descibes e themal
moocules
Oido Oxide Sfécon

COncondatiOn

ox+dont chemkol
deOctio dirfusion

Septe sieaction ey suOUNdig atephe

Paoces D: Stoeam mus be
specistrom the
The odixing
oansfeONd to h e
oDgn esting oicdo tods
foDOss : DUSim proess
sícon ard sdicon doxide.
betoeon
the Arece pecias hove ached the gas
nce these odixing eOA coth slDn, it
must
ntonftace,if ctey cont to
dise throougn ethe existiY oxfde (ayer.
POCess nomal eactio slon and oyge.
the sfcon -sülton oxde &htouoce,
oneo thQy neach
thee.
he sçion
t must deact aith

f2 ’ fux 70cira at the Si-STOa iufR.

 At teody gate ? Fi =F2 -F )

Co>conordation o xîOsa pecies ßn te qu

grs
Cs ’ concertotion o odisrg specis next t0 the
mas toanateo cseACiornt
boisphae
=nKT
By ps aws , pV

(-Ps)
F= bo- KT
HPs
Accosding to Henmy's law, Co - t thg Outo
Oxdo

Co concerivatioo idibing pecis

H’Heny's(Qw constant
gas phase

by Henoy's lau, c* = HPo

Atso, oidigpecis inthe
ctqçioium concontoation
n de.
>O
Co =H (Poi-Ps)
Fi [Link] c-Co)
hoHKT ’ F = b(-Co)
b
(w,
Ffcx's Fa - p(Co - Ci)x
By
Constant
D’ oijuion
odo hickness
()
F3 a ci ’ Fz = Ks Ci
Heachon ote contat
Ks
EOdy sote, sovng ard , e get,
Ksci- D( (e-(i)
 /(1+ Ks /D) >(19
Fl F3 - Ks CÉ = Ks. Co
equahng F ond fa
x/D)
c- c* (1+ Ks 2|D) 4(ks.
and

otooling the oicotion (ditusion mitbd ).

DRtusion ü
,t>
, t s and t > A4B,
times
fa tong oxidotion poPabOUc qoth ate coin
daion touUs a
9Oto cntant.
x´-Bt , and B is the poobo
Fos Shom idotion 4fnes
oate
ussa inea gruoth
Constont
’ line0n 9oto

Ohoe)

A 20[4|Ks + 1|lh]
B= 2Dc*/NI
S o s dOon

dron
A+2Xox
dt thickness.

2
VLSI faicatiou ?
0orm is csüticCl becOLse
Any To VLSI hbotUOn ,a cloan
in micorductoy
Qven a ny pCeticle E dust an
deices at Ononetei sCales.
 * learniness gondo

rdr s
by isO |4644 1
hon io posticles pe cub fo
an i00 paicles pet Cubc fbot:
cass 1O0’No more
qUualíty ond eaion
*A Poitu0l0 A) o ULPA
HEPAHfh tHcony
Use a Pernotnaon Aia]fies.
(Ut a Low
at cèAlaion to Qp lace aa 30O-600 tines
Consta
pe hO.
TerrpeAOtuse conot
(+ypicalw 22)
Psecrse cnto betueon 21c to 25c
mirinixes homal expanson ssues Owales.

Humidity ond
Relatíve Hunidihy (RH) Kept betueen
dischge (eSD).
Reduce he sk a eloatit cortanmiront.
a i pesHe to psven emy q
Postive
Viboion corol
pevert
o miiimiie vYatiom to

domage dagects cuu photottho qpaphy and etchig

pocCsses.

GAc conthols over chomicals to od even coor(UPw

COato).

The ensues hih feld, martains

deñce slability and rabes advOnod tecnoDQY
nodes.
Q9 Dscuss tbe aChite ctUMe a fLASH EPROm.
A0sh ¬PROm commonly KnoDO Os AOsh memoy
Ans
tectne
Ps a tupe d non volalile memoy. ts och
conbines the poincipls ¬pROM nd eEPROm.

HS ChitoctuNQ mainy consists :

sectos made
o0y - Ooansd intb bIOCKS
* merOy sUe
Cols. ¬ach col can
mOsFET

inqe bit a data

cotunn decOdog - Seloc the specife 0 s
* ROCO and ndividuar
(oood tíu) and columns (bit ines) tb acoss
memoy colls.
the smal CUSYt
*Sense ampi7usus - Detect and amplity the a col stoes
qpeatien to deteumine
duog
ao' 1'.

sead psogaam (cone) and ease

(ontol loric -manaes sauncing and timing
opations . t ortools -the
signals.
qerosotoa - paockic03 ne hgn vottoge
4 Hahtoqe
to paogammig and
sOquiRd
FOl -NRdhem tunneling.

momory cou Ps a
ftoatir qate ranjo
¬ach

conDUled by extea CIS.

gae’
’ cordD chage
foating qatt ’ gtoes the eQctsical
STOndad moSfET
geniau
doain
’ gauACO and
’ ng0oueoating gate
od (ayes
S4 Explain he cooMir , sense ampifosu tn memTy

Ans Sernse amptou 0 essential CCuLts in memony

Ond fOsh memoñes. thoi
Úne SRAM, DRAM
deicos ompythe ttny
tinction is to dotect Grd
poino Arom memoy cells
dsinq
YOtOge dlonces (blu ard
Oned dota acco3s
maKra the
eiabe.

DRiecrooqi? BL ONe
Beye any e0d oth bu uñs BL and
to a aoyeoonce vOtge (VDD|2).
paechosqec
Od tine adivain g acivosed, conneing the
(ine nL is
the Bft (ine.
selected memyny cou to
d'ßeoere ppeas betoeon BL Od
A sral vOtge foonhe m e y eoll.
chooe
BL due to the

Sersig and smau

The Sense
ampli0i dote cts the to ffU

6IND). ne stole the omptt

Loe Ierels (Vdod o
ibbcirg the
ctho to bND,
ouls to Vdd , he
Vale.

DRAm
() Reyina dta (o
back jto
the Sene ompHOI also etoeS the dta
 Sense amp 0ss speod up the yeod peo oss bemuse
thoy aiCkly sOsODE nd ampity s-als. hey erable
pooE and hign donsty memomy olesQns by
LO OdObubey
ad manig them
bardliig -tny siqras
eral cicuits

(F6MOS) s a type q mos

moSFET
Afloating qate
Ans tnsisto cnmoonly usd vaoile mery

doicos
Stooe eltons nthe Aoatn gte.
dota
cooiting bto the corol qate and
NOtage
Appy a ni¡h ommen used mehods
Teoo
SOUNCO droain temirals.
etechon Injecçon
+ Hot cOOt3 a Sroong
-to- souHCe VOltge
A high doan
eLLtC feld.
nough nog4 to ump trough the
oin
etectons qan
thinode ayer onto the ootig pte
-NOodheim tunnellng
+ Foloa foLd appted betcoeon the
elci
AVey nih
qate ad he ubstate
|Contel
cees the
on e -Aootirg te
he negctive orae
(Vt).
heshod votge
qte
dota; RennoNe ele ctong Roon the Aatirg
ecairg
appliod
Angh postive voHge u
causrg eloons to tmol o O the k Aomig
te to e subsrate Ate.
 ArOd NOltOge oppAtO coho qato.
Reodíng dota

codcC13 0 4.
If not crongpd -ytonsto
ne toating qato
BeCOuse the is compotoly
soÕng chage appd on t eOpe cndor
cannot
Psote elochons
nomal Corditiony.
coKI by toHng chooR on an
The F61mOS oans iston's theshdd
he
Bolated qate atong
Otage to opeSent data.

pisUS ne OAChitecOe a any one the Ceodg

indutny t o donensiona
field 00nmablo bate Aoay is a eloñally
docks nd ftep ftops cotth
bocrs.
paogamrablo ntox cnnecion bto ogic

xín Zyna-H000 sLOs FP6A, One

AsIchitctte C
mOst ppulo ord adoly ued fpt plortm
the
the industy
FPoA chich eonbis a pouoOSira
T B a soc Bc (PL).
peogeanrable
Susierm (Ps)etn
PoDcOssrg Systenm -Ps

-Dual coe
(aches (L) L2)
memey intestOces (pDR3) DDR2 ) LP DPR2)
(Use,ethnet )UART, SPT2C)
-poipheal intepces (Use,
-beroxal Puspose I|0
Pogooammable loic -pL
contans
The FPIA poon contain LUTS,flip flops
-
-Centquable Lofc BDCKI
ord muttiplarou
Blork RAm embddod momoy bocks.
-lock monagemot Tles
connication
-Handle tena
ID BDCs

IntOHCOnnect betweRn Ps and PL

intoonnets.
Hfah pegnane AXI
masoe Slave ports
AXI
breneOl ppse podts

-Higb palne poots

AcceLONdO Cohoseny Po.
-

HenaenOus syne
-poae! pocosina
FIeib customiation