Letter

Cite This: Nano Lett. 2018, 18, 6961−6966 pubs.acs.org/NanoLett

Ultrathin van der Waals Metalenses

Chang-Hua Liu,*,†,‡ Jiajiu Zheng,§,⊥ Shane Colburn,§,⊥ Taylor K. Fryett,§ Yueyang Chen,§
Xiaodong Xu,†,∥ and Arka Majumdar*,†,§
†
Department of Physics, University of Washington, Seattle, Washington 98195, United States
‡
Institute of Photonics Technologies, National Tsing Hua University, Hsinchu 30013, Taiwan
§
Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
∥
Department of Materials Science and Engineering, University of Washington, Seattle, Washington 98195, United States
*
S Supporting Information
Downloaded from pubs.acs.org by OPEN UNIV OF HONG KONG on 01/25/19. For personal use only.

ABSTRACT: Ultrathin and flat optical lenses are essential for

modern optical imaging, spectroscopy, and energy harvesting.
Dielectric metasurfaces comprising nanoscale quasi-periodic
resonator arrays are promising for such applications, as they
can tailor the phase, amplitude, and polarization of light at
subwavelength resolution, enabling multifunctional optical
elements. To achieve 2π phase coverage, however, most
dielectric metalenses need a thickness comparable to the
wavelength, requiring the fabrication of high-aspect-ratio
Nano Lett. 2018.18:6961-6966.

scattering elements. We report ultrathin dielectric metalenses

made of van der Waals (vdW) materials, leveraging their high refractive indices and the incomplete phase design approach to
achieve device thicknesses down to ∼λ/10, operating at infrared and visible wavelengths. These materials have generated strong
interest in recent years due to their advantageous optoelectronic properties. Using vdW metalenses, we demonstrate near-
diffraction-limited focusing and imaging and exploit their layered nature to transfer the fabricated metalenses onto flexible
substrates to show strain-induced tunable focusing. Our work enables further downscaling of optical elements and opportunities
for the integration of metasurface optics in ultraminiature optoelectronic systems.
KEYWORDS: van der Waals nanophotonics, ultrathin dielectric metalens, integrable metalens, tunable metalens,
incomplete phase design

S ubwavelength diffractive optical elements, also known as

metasurfaces, have fostered considerable interest in the
photonics community in recent years.1−6 A subwavelength
applications of metalenses. Although thinner and efficient
dielectric metasurfaces can be ideally realized at near-infrared
wavelengths using high-index materials with low absorption
scatterer can provide different phase shifts to incident light by loss, such as group III−V compounds like AlGaAs (n ≈ 3.8) or
virtue of their lateral geometry while having the same GaP (n ≈ 3.4), it is challenging to directly grow these materials
thickness. A metasurface exploits this effect to realize ultrathin on different substrates.
and flat optical elements, with uniform thickness, which can be Layered van der Waals (vdW) materials exhibit diverse
fabricated by a single-stage lithography. Although several works optoelectronic properties, ranging from wide-band-gap hex-
in this field have successfully demonstrated metalenses7,8 and agonal boron nitride (h-BN) and excitonic transition-metal
other optical components2,3,9 using deep sub-wavelength-thick dichalcogenides (TMDCs) to semimetallic graphene.14,15
metallic nanoantennas, these devices usually suffer from high These materials can be transferred onto any substrate without
absorption loss and strong polarization sensitivity. An requiring explicit lattice matching. This presents new
alternative approach is to exploit arrays of dielectric
opportunities for creating hybrid nanostructures that can
resonators.4,5,10−13 Thus far, a diverse set of low-loss dielectric
simultaneously take advantage of industrial semiconductor
metasurface optical elements operating in the infrared and
visible wavelength ranges have been reported. However, these manufacturing technologies and benefit from the unique
dielectric elements are much thicker (on the order of the properties of vdW materials.15−17 In recent years, these
wavelength) to achieve a full 2π phase shift. At the same time, materials have been used in conjunction with integrated
to impart small phase shifts, the resonators need to have nanophotonic structures to demonstrate various active devices
narrower lateral dimensions. Because the thickness is uniform for short-distance optical communication and energy-harvest-
for all of the scatterers, some pillars can end up having a high
aspect ratio (typically >5). Fabricating these delicate structures Received: July 14, 2018
while simultaneously keeping a low sidewall roughness is a Revised: September 30, 2018
challenging nanofabrication task and may limit the practical Published: October 8, 2018

© 2018 American Chemical Society 6961 DOI: 10.1021/acs.nanolett.8b02875

Nano Lett. 2018, 18, 6961−6966
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Figure 1. Process of transferring vdW materials and numerical simulations. (a) Schematic diagram shows the nanostructured vdW materials can be
transferred onto different substrates using a polycarbonate (PC) film. (b) Schematic illustration of arrays of vdW nanopillars, composed of h-BN
and spaced apart by p = 260 nm. Varying the diameter (D) and thickness (t) of the pillars affects the transmission properties of incident light. (c,d)
The color maps show RCWA providing the change in the (c) amplitude and (d) phase of a wavefront after passing through the array when varying
the dimensions of the nanopillars. (e) Left to right: Pillar diameter versus the change in amplitude (black) and phase (red) of a transmitted
wavefront with the thickness of the nanopillars fixed at 300, 400, and 500 nm, respectively. These simulated results are extracted from panels c and
d.

ing applications.14,18−21 Recently, photonic crystal resonators neering in the far-field has not been demonstrated. Addition-
in the visible frequency22 and nanopatterned periodic ally, ultrathin Fresnel lenses made of molybdenum disulfide
subwavelength gratings made of vdW materials at mid-infrared and graphene have been demonstrated.24,25 These lenses,
frequencies have been reported,23 although wavefront engi- however, do not exploit nanometer-scale patterning and either
6962 DOI: 10.1021/acs.nanolett.8b02875
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Figure 2. Design principle and characterizations of vdW metalenses. (a) Simulated change in the amplitude (black) and phase (red) of a wavefront
passing through a 245 nm thick hBN pillar array. The operating wavelength is 450 nm and the refractive index of hBN is ∼2.17. (b,c) The
implemented phase versus the addressed phase is correlated with linear (blue) and saturated (green) mismatched models. The range of
implemented phase is (b) 0.22π to 0.72π (diameters ranging from 117 to 195 nm), a total change of 0.5π, and (c) 0.12 to 0.82π (diameters ranging
from 90 to 210 nm), a total change of 0.7π. (d) Optical image of the fabricated hBN metalenses captured using the Olympus BX51 microscope.
Device A: 0.7π phase modulation and the saturated mismatched model. Device B: 0.5π phase modulation and the saturated mismatched model.
Device C: 0.7π phase modulation and the linear mismatched model. Device D: 0.5π phase modulation and the linear mismatched model. Scale bar:
30 μm. (e) Intensity distributions in the focal plane of four metalenses. (f) Line cuts of the intensity distributions along the four focal spots shown
in panel e. Their field profiles are fitted to a Gaussian function. The data are normalized with respect to the peak intensity of Device A. (g)
Simulated change in the amplitude (black) and phase (red) of a wavefront passing through an array of 190 nm thick MoS2 pillars with a periodicity
of 540 nm. The operating wavelength is 1310 nm and the refractive index of MoS2 is ∼4.2.31 Inset: Scanning electron micrograph (SEM) of the
portion of ultrathin MoS2 pillars. The sample was covered with 5 nm thick gold to minimize charging. Scale bar: 500 nm. (h) Intensity profile
measured along the axial plane of the MoS2 metalens with an incident wavelength of 1310 nm. (i) Normalized intensity profile measured along the
focal plane at 300 μm in panel h and its corresponding Gaussian fit.

rely on phase accumulation from the variable thickness or the fabrication and characterization of metalenses at visible and
provide binary phase shifts. Varying the thickness in this near-infrared wavelengths. Because of the nature of vdW
manner necessitates the use of low-throughput fabrication interactions, our proposed metalenses can be readily trans-
technology, such as focused ion-beam milling. Lenses with ferred onto diverse material platforms (Figure 1a), distinct
binary phase shift are also less efficient. from typical dielectric metasurfaces, limited by bottom-up
In this paper, we design and fabricate the first vdW material growth.
metalenses, with significantly reduced thickness (∼0.1λ to To design the metalenses, we first compute the transmission
0.5λ) compared with the optical wavelength, by exploiting the properties of periodic arrays of cylindrical vdW nanopillars
incomplete phase-based design approach26,27 and the high using rigorous coupled-wave analysis (RCWA).28 The pillars
refractive indices of vdW materials. We validate our design via are made of wide-band-gap h-BN (Eg ≈ 5.2 eV, refractive index
6963 DOI: 10.1021/acs.nanolett.8b02875
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Figure 3. Integrable and tunable metalenses based on vdW materials. (a) Three representative intensity profiles measured along the axial plane of
h-BN metalens integrated onto a PDMS substrate. Left to right: The strain applied to the PDMS substrate is 0, 9.5, and 25.6%, respectively. (b)
Measured (round symbols) and analytically predicted (solid line) focal lengths under different strain values.

n ≈ 2.17)29 and rest on a quartz substrate with a lattice whereas A and B are developed with the saturated mismatched
periodicity of p ≈ 260 nm (Figure 1b). The wavelength of model (following Figure 2b,c, green curves). We measure the
incident light is λ = 450 nm. By varying the dimensions of the focusing performance of the metalenses using the experimental
pillars (thickness, t, and diameter, D), the transmitted light’s setup schematically illustrated in Figure S1. Figure 2e,f shows
phase and amplitude can be tuned (Figure 1c−e). This optical the intensity profile measured in the designed focal plane.
response can be explained by considering each pillar as a low- Despite the limited range of the implemented phase, all four
quality-factor Fabry−Perot resonator. The propagation phase lenses exhibit focusing. The corresponding intensity cuts
increases with the dimensions of the resonator and varies through the center of their focal spots show that the full width
rapidly near the supported resonant modes. On the basis of the at half-maximum (fwhm) for all of the metalenses is ∼2.8 μm,
selected dielectrics and designed parameters, the pillars should close to the diffraction-limited fwhm of 2.3 μm. Moreover, the
be thicker than 450 nm to achieve a complete 2π phase focusing from metalenses B and C indicates that metalenses
control. developed with the saturated mismatched model (lens B) with
To reduce the thickness of the scatterers while mitigating smaller phase modulation can have higher focal intensity than a
their drop in performance, we adopt the theory of incomplete lens (lens C) developed using the linear interpolation model,
phase modulation, originally developed for creating efficient even with a larger phase modulation depth (Figure 2f).
liquid-crystal Fresnel optics.26,27 For a spherical singlet lens, Specifically, we found that in using the saturated mismatched
the addressed phase (φ) profile should follow model, the focusing efficiency could be increased by ∼1.5
times while having the same phase modulation. We note that
πr 2 these results not only agree with our numerical simulations but
φ (r ) = −
λF (1) also indicate the possibility of creating thin and efficient
dielectric lenses with limited phase coverage (see Figure S2
where r, λ, and F are the radial coordinate, optical wavelength,
and Table S1). Thus with this design principle we can relax the
and focal length of the designed lens, respectively. With limited
phase coverage, that is, the maximum phase shift being less stringent requirements on the scatterers to reach a full 2π
than 2π (Figure 2a), the implemented phase functions can be phase shift. This, in turn, avoids the necessity of fabricating
correlated with the addressed 0−2π phase (φ) via a saturated high-aspect-ratio structures and provides better tolerance to
mismatched model (Figure 2b,c, green curves, see the fabrication and simulation errors.
Supporting Information). This model is derived from the To extend the metalenses to a longer wavelength regime, we
minimum Euclidean distance principle and should lead to use TMDC, specifically molybdenum disulfide (MoS2), to
higher focusing efficiency27,30 compared with a simple linear make metalenses. MoS2 has a high refractive index31 that in
interpolation (Figure 2b,c, blue curves; see the Supporting combination with incomplete phase design can potentially
Information). push the thickness of dielectric metalenses to far below the
To experimentally demonstrate this concept, we design operating wavelength. To verify this concept, we fabricated a
multiple metalenses with their D/f ranging from 0.3 to 0.4, metalens based on 190 nm thick (∼0.14 λ) MoS2 pillars with a
where D and f are the diameter and focal length of the lens, designed focal length of 300 μm and a lens diameter of 100
respectively. To begin with, a 245 nm thick (∼0.54 λ) μm. The simulated optical response of arrays of MoS2 pillars at
exfoliated h-BN flake was transferred onto a quartz substrate λ = 1310 nm is shown in Figure 2g, and the phase profile of the
and then patterned into an array of pillars to form four lens was developed using the saturated mismatch model with
different metalenses with a focal length of F = 160 μm at λ = the implemented phase shift ranging from 0 to 0.7π. By using
450 nm (see the Supporting Information) and a lens diameter the characterization setup shown in Figure S1, we can examine
of 60 μm. Among them, lenses A and C comprise pillars that the intensity profile of this designed lens and resolve a near-
can only implement a phase shift range of 0.7π, whereas lenses diffraction-limited focal spot (fwhm ∼5 μm) at F = 300 μm
B and D have a more limited phase modulation depth, a range (Figure 2h,i), which agrees with our design parameters,
of 0.5π (Figure 2d). Metalenses C and D are designed using showing the promise for achieving a compact infrared imaging
linear interpolation (following Figure 2b,c, blue curves), system.
6964 DOI: 10.1021/acs.nanolett.8b02875
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Nano Letters Letter

Figure 4. vdW metalenses for optical imaging application. (a) Images formed by metalens A (bottom), B (top left), and C (top right),
simultaneously captured using a CMOS imaging sensor. (b) Same images shown in panel a after computational postprocessing. The “W” in the
images is used with permission from the University of Washington.

With the success of our as-fabricated devices for focusing, we aperture metalenses can theoretically be realized by using high-
next explore the integrability of vdW metalenses in systems. In index TMDCs35,36 and perform better than typical Si, TiO2, or
this experiment, a 120 nm thick exfoliated h-BN flake was Si3N4 metalenses.11 However, it is notable that high-index
patterned into a metalens with focal length F = 250 μm on a materials would have a smaller band gap and thus higher
quartz substrate (see Figure S6). This prepatterned device was absorption losses, resulting in limited applicable wavelength
subsequently transferred onto a stretchable polydimethylsilox- range. Additionally, we show that utilizing vdW materials
ane (PDMS) substrate using the dry-transfer pick-up would offer a unique opportunity to realize metalenses that are
technique.15,16 To characterize the optical properties and integrable with other substrates, including flexible polymers. It
tunability of the transferred device, we resolve the transmitted is also noteworthy that many emerging layered materials
light intensity profiles along the axial plane as a function of exhibit diverse optical properties, such as anisotropy, phase-
radial strain applied to the PDMS (Figure 3a). In the absence change, or nonlinear behaviors, and such materials could be
of strain, the focal length of the lens is at the designed 250 μm, further stacked together to form more complicated vdW
suggesting that the metalens remains intact after the transfer heterostructures with the ability to tailor material properties
procedure. In addition to the focal spot at F, multiple high- with atomic precision.15 These new material properties, along
intensity spots can be observed at F/N, where N is an integer. with the large area growth of vdW materials37,38 and patterning
This behavior originates from the incomplete phase via stepper photolithography,39,40 thus present a tremendous
implementation (see Figures S3 and S4). In applying the potential for creating vdW metasurfaces with novel function-
radial strain (ϵ), the measured focal spot shifts away from the alities for applications in optical sensing, imaging, polarimetry,
initial focal plane of the metalens (see the Supporting focal length tuning, and energy harvesting.
Information). This tuning behavior is linearly proportional to
(1 + ϵ)2 (Figure 3b), which not only agrees with the
theoretical prediction32,33 but also highlights the opportunities
■
*
ASSOCIATED CONTENT
S Supporting Information
of utilizing vdW materials for making tunable metasurfaces.
The Supporting Information is available free of charge on the
Finally, we examine the efficacy of the design and fabrication ACS Publications website at DOI: 10.1021/acs.nano-
process by capturing images with the h-BN metalenses in lett.8b02875.
Figure 2d using a custom-built imaging system (Figure S1).
The scattered light from a printed University of Washington Detailed measurement setup and procedure, device
logo (“W”) is captured using metalenses A, B, and C, which fabrication, design parameters of metalenses, modeling
were imaged by a CMOS camera (Figure 4a). Critically, these of incomplete phase design, focusing efficiency, stretch-
results demonstrate that our proof-of-concept devices can form able metalens, improving the quality of optical imaging.
images. Metalens A, designed via the saturated mismatched (PDF)

■
model, exhibits superior performance relative to the other two,
evidenced by its greater luminance and sharpness. This is
consistent with the fact that the saturated mismatched model is AUTHOR INFORMATION
more efficient compared with the linear mismatched model, Corresponding Authors
which generates a lower intensity image. We note that this *C.-H.L.: E-mail: [email protected].
imaging quality can be further improved by using computa- *A.M.: E-mail: [email protected].
tional postprocessing34 (Figure 4b; see Figure S5) or by ORCID
increasing the numerical aperture of the metalenses (Figure
Jiajiu Zheng: 0000-0003-1527-201X
S8), making our developed thin metalenses more attractive for
imaging applications. Yueyang Chen: 0000-0002-4390-550X
In summary, we demonstrated a viable route to realize Arka Majumdar: 0000-0003-0917-590X
ultrathin dielectric metalenses based on vdW materials. This Author Contributions
⊥
adapted design principle can be applied to different spectral J.Z. and S.C. contributed equally. C.-H.L. and A.M. conceived
regions, a broad class of dielectric materials, and circumvents the idea. C.-H.L. and S.C. performed the design and
the current fabrication challenge of making high-aspect-ratio simulation. J.Z. fabricated all of the devices. T.K.F. and Y.C.
nanoscale scatters. In particular, ultrathin and high-numerical- helped with material search and AFM characterization. C.-H.L.
6965 DOI: 10.1021/acs.nanolett.8b02875
Nano Lett. 2018, 18, 6961−6966
Nano Letters Letter

performed the measurement and data analysis with help from (24) Yang, J.; Wang, Z.; Wang, F.; Xu, R. J.; Tao, J.; Zhang, S.; Qin,
S.C. X.X. and A.M. supervised the whole project. Q. H.; Luther-Davies, B.; Jagadish, C.; Yu, Z. F.; Lu, Y. R. Light: Sci.
Appl. 2016, 5, e16046.
Notes (25) Kong, X. T.; Khan, A. A.; Kidambi, P. R.; Deng, S.; Yetisen, A.
The authors declare no competing financial interest. K.; Dlubak, B.; Hiralal, P.; Montelongo, Y.; Bowen, J.; Xavier, S.;

■ ACKNOWLEDGMENTS
We acknowledge Mr. Alan Zhan for input on fabrication. This
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6966 DOI: 10.1021/acs.nanolett.8b02875

Nano Lett. 2018, 18, 6961−6966