Spirit®
High Power Femtosecond Lasers:
The New Standard for
High-Precision Micromachining
The Spirit family sets new standards for femtosecond lasers in high-precision industrial
manufacturing for micromachining of polymers, thin metals, sapphire, polycrystalline
diamond, and many other materials. These lasers deliver high average power, high pulse
energy, and high repetition rates for increased throughput. Customers benefit from the
shortest industrially available pulse duration and superior beam quality that in turn enables
machining complex and challenging parts with highest precision and quality with literally no
heat affected zone (HAZ) at the highest throughput. Spirit lasers are designed for industrial
use and offer reliable and robust 24/7 operation with lowest cost of ownership. The Spirit
lasers also provide unprecedented performance for pumping of non-linear OPAs for
3-photon microscopy and spectroscopy applications.
Highest-Precision Machining of the Finest Features with Highest Throughput
Our new additions to the industry-proven Spirit platform offers impressive versatility
and performance, enabling a variety of applications. High average power (>140 W) and
high pulse energy (>600 µJ) combined with high repetition rates push femtosecond
micromachining applications to highest levels of throughput at lowest cost-of-ownership.
The user-configurable burst mode enables processing with increased ablation efficiency, and
thus increased throughput and quality for certain materials. Pulse energy and repetition rate
adjustability (single shot – 30 MHz) make the Spirit 1030-140 the ideal source for ablation
and cutting. The integrated pulse picker offers full control of the laser output with single pulse
selection and fast power control via an analog input signal.
The Spirit Advantage
• High average power up to >140 W at 1030 nm
and >50 W at 515 nm
Applications
• Same footprint for all Spirit models
• OLED display manufacturing
• Adjustable repetition rate from single shot up to 30 MHz
• Semiconductor wafer dicing
for processing at highest throughput
• Polymer cutting
• <400 fs pulse duration for smallest heat affected zone (HAZ) • Metal drilling and cutting
• User-configurable burst mode for processing with • Precision machining of hard
highest ablation efficiency and brittle materials
• Near diffraction-limited beam quality (typ. M2<1.1) for • Polycrystalline diamond (PCD)
highest resolution and finest features cutting and ablation
• Sapphire cutting and drilling
• Integrated pulse-picker for advanced triggering
• 3-photon microscopy
• 24/7 industrial reliability
• Optical parametric amplifier pumping
• Lowest cost-of-ownership
Spirit
Spirit 515-50 offers an output power of >50 W and a typical pulse width of <300 fs at
a wavelength of 515 nm. At this shorter wavelength, machining of the finest features is
possible, depending on the material, at equal or even higher speeds compared to those
obtained with other technologies.
24/7 Industrial Reliability
The Spirit lasers are designed and tested to rigorous quality standards for reliable 24/7
operation. The built-in data logging and analysis capability allows monitoring of all relevant
laser parameters over the life time of the system. As such, this represents an indispensable
diagnostics tool for service and preventive maintenance which significantly enhances
uptime and thus productivity of the tool.
14.5 39.5
(369) (1003.68)
8.08
(205.4)
5.0
(127)
2.94
(74.75)
5.79
(147.25)
Front View Top View
Dimensions in inch (mm)
Spirit Laser Dimensions
21.7
(553)
31.5 43.4
(800) (1103)
Top View Front View
Dimensions in inch (mm)
Spirit Laser Rack with Power Supply and Chiller Dimensions
Spirit Specifications1, 7
Spirit 1030-140 Spirit 1030-100 Spirit 1030-70 Spirit 515-50
Output Characteristics
Wavelength 1030 nm ±5 nm 515 nm ±3 nm
Output Power >140 W >100 W >70 W >50 W³
Pulse Energy >600 µJ² >100 µJ >70 µJ >50 µJ³
Repetition Rates4 0.1–30 MHz 1–30 MHz
Pulse Selection Single shot to 2 MHz using Integrated Pulse Picker (AOM)
Pulse Width <400 fs
Power Stability <1% rms over 100 hours
Pulse-to-Pulse Stability <2% rms
Spatial Mode TEM00(M2 <1.2)
Beam Diameter 2.5 mm ±0.5 mm
Beam Divergence, full angle <1 mrad <0.5 mrad
Burst Mode 5,6
>600 µJ/burst >100 µJ/burst >70 µJ/burst N/A
Pre-Pulse Contrast Ratio >250:1
Polarization Horizontal
Cold Start Time <30 min.
Warm Start Time <15 min.
Environmental specifications
Operating Temperature 15–35°C (59–95°F)
Relative Humidity <65%, non-condensing
Cooling Requirements
Laser Head Water cooled
Power Supply Water cooled
Utility Requirements
Voltage 208–230 V, 50/60 Hz
Current <16 A
Laser Head Physical Characteristics
Dimensions (L x W x H) 39.5 x 14.5 x 8.1 in (1003 x 369 x 205 mm)
Weight 155 lbs (70 kg)
Rack with Power Supply and Chiller Phys ical Characteristics
Dimensions (L x W x H) 31.5 x 21.8 x 43.4 in ( 800 x 553 x 1102 mm)
Weight 220 lbs (100 kg)
1. Due to our continuous product improvement program, specifications may change without notice.
2. Pulse energy of >600µJ at 100 kHz
3. Maximum conversion efficiency for SHG at 1 MHz.
4. Specific pre-calibrated repetition rates are available; please contact Spectra-Physics.
5. Burst mode operation is optional; if implemented the number of pulses per burst (<12 pulses) can be selected in GUI.
6. Repetition rates are limited to ≤2 MHz for Spirit 1030 lasers with the burst mode option.
7. Spirit lasers are Class IV - High Power Lasers, whose beam are, by definition, a safety and fire hazard. Take precautions to prevent exposure to the direct and reflected beams. Diffuse as well as specular reflections can
cause severe skin or eye damage.
1565 Barber Lane, Milpitas, CA 95035 USA
PHONE: 1-800-775-5273 1-408-980-4300 FAX: 1-408-980-6921 EMAIL:
[email protected] China +86-10-6267-0065
[email protected] Netherlands +31-(0)30 6592111
[email protected]www.spectra-physics.com France +33-(0)1-60-91-68-68
[email protected] Singapore +65-6664-0040
[email protected] Germany / Austria / Switzerland Taiwan +886-3-575-3040
[email protected] +49-(0)6151-708-0
[email protected] United Kingdom +44-1235-432-710
[email protected] Japan +81-3-3794-5511
[email protected]© 2021 Newport Corporation. All Rights Reserved. Spirit, Spectra-Physics, the Spectra-Physics logo and the Newport logo are registered trademarks of Newport Corporation. Spectra-Physics Santa Clara, California, Stahnsdorf, Germany,
Rankweil, Austria and Rehovot, Israel have all been certified compliant with ISO 9001.
DS-20210521
