1

Rotary Table
Rack & Pinion Style

Series MSQ
Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200

CRB2
CRBU2
CRB1
MSU
CRJ
CRA1
CRQ2
MSQ
MRQ
D-
20-

Series MSQ now includes smaller sizes 1, 2, 3 and 7

11-9-1
 2

Compact rotary table with Low Table Height

Large rolling element
Easy mounting of workpiece bearing

Table I.D/O.D tolerances
Table inside and outside diameters
3 to 4 times higher axial load
(compared with series CRQ)
Basic type: MSQB H9/h9 For alignment of rotation center and workpiece
High precision type: MSQA H8/h8

Positioning pin hole Positioning
pin hole Rolling bearing

Hollow axis
Accommodates wiring and piping For position of
rotation direction
for equipment mounted on the table

Hollow axis
Size 1 2 3 7
Hollow axis ø3.5 ø3.8 ø5 ø6 Basic type
Size 10 20 30 50 70 100 200 MSQB
Hollow axis ø5 ø9 ø9 ø10 ø16 ø19 ø24

0 to 190

Pivoting angle
adjustment range:
With internal
shock absorber
2 to 5 times more kinetic energy
(compared with an adjustment bolt)

Easy mounting of body Movement in direction of table's

Reference dia: Boss, Hole

Positioning pin hole

Mounting from 2 directions
radial thrust: 0.01 mm or less
By using high precision bearing, the movement in the
Pin hole direction of table’s radial thrust is reduced.

High precision type

High precision type
MSQA High precision
bearing

Reference diameter
(boss)

Reference diameter
(hole) Pin hole

Piping from 2 directions (front and side) is possible.

Piping position can be selected
po ion

accommodate mounting conditions

A irect
rt
d
de
Si

n
tio
dir t
de r
ec
Si po
rt

B
po

rt
po
A

Front dir
B

ection
11-9-2
 3

Rotary Table
Series MSQ
Rack & Pinion Style

Small sizes 1, 2, 3,
3 and 7
Small size and lightweight
A CRB2
CRBU2
CRB1
B
MSU
CRJ
CRA1
CRQ2
C MSQ
D
MRQ
(Picture of MSQB1A) D-
Measurements mm 20-
Size Model A B C D Mass (g)
1 MSQB1A 50.5 28 25 16 70
2 MSQB2A 56 30 28 18 105
3 MSQB3A 60 34.5 30.5 20.5 150
7 MSQB7A 73.5 41 34.5 23 250

Variety of installation options for space-saving

Offers maximum space-saving installation by taking advantage of the compact body, space-saving wiring and piping.
Free mounting
Top mounting Bottom mounting Side mounting

Wiring and piping can be selected according

Easy center alignment at mounting to mounting conditions
Reference dia (Hole) Example of auto switch and speed controller mounting
Reference dia (Boss) Pin hole
Pin hole

11-9-3
 4

External shock absorber types

4 to 10 times more allowable kinetic energy
(Compared with internal shock absorber)
2 types of shock absorbers are available, for low energy and high energy.
Allowable Kinetic Energy Comparison (For size 30)
1

With external shock absorber

0.1 ergy
igh en
For h
n ergy
Inertial moment (kg·m2)

ow e
For l
0.01
With internal shock absorber

With adjustment bolt

0.001

0.0001
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
Rotation time (s/90°)

Total length shortened Rotating angle: 90°, 180°

Longitudinal mounting spare is reduced because
there is no protrusion from adjustment bolts or 90° 180°
internal shock absorbers.

Symmetric type

A port
Basic type Symmetric type
B port

Table height is the same for both types with

adjustment bolts or internal shock absorbers.
B port A port

Basic: MSQB : Additional series High precision: MSQA : Additional series

With adjustment bolt With internal shock absorber With external With adjustment bolt With internal shock absorber With external
Size shock Size shock
Clean Clean absorber Clean Clean absorber
1 쎲 쎲 Ҁ Ҁ Ҁ 1 쎲 쎲 Ҁ Ҁ Ҁ
2 쎲 쎲 Ҁ Ҁ Ҁ 2 쎲 쎲 Ҁ Ҁ Ҁ
3 쎲 쎲 Ҁ Ҁ Ҁ 3 쎲 쎲 Ҁ Ҁ Ҁ
7 쎲 쎲 Ҁ Ҁ Ҁ 7 쎲 쎲 Ҁ Ҁ Ҁ
10 쎲 쎲 쎲 쎲 쎲 10 쎲 쎲 쎲 쎲 쎲
20 쎲 쎲 쎲 쎲 쎲 20 쎲 쎲 쎲 쎲 쎲
30 쎲 쎲 쎲 쎲 쎲 30 쎲 쎲 쎲 쎲 쎲
50 쎲 쎲 쎲 쎲 쎲 50 쎲 쎲 쎲 쎲 쎲
70 쎲 Ҁ 쎲 Ҁ Ҁ
100 쎲 Ҁ 쎲 Ҁ Ҁ
200 쎲 Ҁ 쎲 Ҁ Ҁ

11-9-4
 5

Series MSQ
Model Selection
Model Selection Procedure Formula Selection Example
Operating conditions
1
Enumerate the operating conditions
H
CRB2
according to the mounting position.
. Model used
H . Operating pressure CRBU2
G . Mounting orientation
. Load type G CRB1
FS
Ts (N⋅m)
M=FS⋅H a MSU
Tf (N⋅m)
b
Vertical Mounting Ta (N⋅m) CRJ
L . Load configuration
. Rotation time t (s)
CRA1
. Rotation angle θ (rad) Rotary table: MSQB50A, Pressure: 0.5 MPa
Mounting orientation: Vertical
G . Load mass m (kg) Load type: Inertial load Ta CRQ2
. Distance between central axis and Load configuration: 100 mm x 60 mm (Rectangular plate)
Rotation time t: 0.3s, Rotation angle: 90

Fr
center of gravity H (mm)
Load mass m: 0.4 kg MSQ
. Mass point distance L (mm) Distance between central
M=Fr⋅L
axis and center of gravity H: 40 mm
Horizontal Mounting MRQ
Required torque
2 D-
Confirm the type of load as shown
Effective torque  Ts
below, and select an actuator that Inertial load
. 20-
satisfies the required torque. Effective torque  (3 to 5) ⋅ Tf 10 x Ta = 10 x Ι x ω
. Static load: Ts
Effective torque 10 ⋅ Ta = 10 x 0.00109 x (2 x ( / 2) / 0.32)
. Resistance load: Tf Load types
. Inertial load: Ta Effective torque = 0.380 N⋅m  Effective torque OK
Note) I substitutes for t the value for inertial moment.

Rotation time
3
Confirm that it is within the
0.2 to 1.0 s / 90
0.3 s / 90
OK
adjustable range of rotation time.

Allowable load
4
Confirm that the radial load, thrust Thrust load: m x 9.8  Allowable load 0.4 x 9.8 = 3.92 N < Allowable load OK
load and moment are within the
allowable ranges. Moment: m x 9.8 x H  Allowable moment 0.4 x 9.8 x 0.04 = 0.157 N⋅m
Allowable load 0.157 N⋅m < Allowable moment OK

Inertial moment
5
Find the load's inertial moment Ι = m x (a2 + b2) / 12 + m x H2 Ι = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042
"Ι" for the energy calculation.
Inertial moment = 0.00109 kg⋅m2

Kinetic energy
6
Confirm that the load's kinetic
energy is within the allowable value. 1 / 2 x Ι x ω2  allowable energy 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2
ω = 2θ / t (ω: Terminal angular velocity) = 60 mJ  Allowable energy OK
θ: Rotation angle (rad)
t : Rotation time (s)
Allowable kinetic energy/Rotation time

11-9-5
 6

Series MSQ
Effective Torque Load Type
Unit: N⋅m
Static load: Ts
Operating pressure (MPa)
Size A load as represented by the clamp which requires
0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 pressing force only
0.017 0.035 0.052 0.070 0.087 0.10 0.12   
1
2
3
0.035
0.058
0.071 0.11
0.12 0.17
0.14
0.23
0.18
0.29
0.21
0.35
0.25
0.41






( During examination if it is decided to consider the mass of
the clamp itself in the drawing below, it should be regarded
as an inertial load. )
(Example)
7 0.11 0.22 0.33 0.45 0.56 0.67 0.78   
10 0.18 0.36 0.53 0.71 0.89 1.07 1.25 1.42 1.60 1.78 Clamp
20 0.37 0.73 1.10 1.47 1.84 2.20 2.57 2.93 3.29 3.66 F: Pressing force (N)
30 0.55 1.09 1.64 2.18 2.73 3.19 3.82 4.37 4.91 5.45
l Static torque calculation
50 0.9 1.85 2.78 3.71 4.64 5.57 6.50 7.43 8.35 9.28 Ts = F x l (N⋅m)
70 1.36 2.72 4.07 5.43 6.79 8.15 9.50 10.9 12.2 13.6
100 2.03 4.05 6.08 8.11 10.1 12.2 14.2 16.2 18.2 20.3 Shaft
center
200 3.96 7.92 11.9 15.8 19.8 23.8 27.7 31.7 35.6 39.6
Note) Effective torque values are representative values and not to be considered as guaranteed values.
Use them as a guide.
Resistance load: Tf
Size: 1 to 7 Size: 10 to 50 Size: 70 to 200 A load that is affected by external forces such as
friction or gravity
0.8 7 10 40 200
50 Since the object is to move the load, and speed
Effective torque (N⋅m)

Effective torque (N⋅m)

Effective torque (N⋅m)

8 adjustment is necessary, allow an extra margin of 3

0.6 30 to 5 times in the effective torque.
6
30 ∗Actuator effective torque  (3 to 5) Tf
0.4 3 20 100

( )
During examination if it is decided to consider the mass of
4 20 the lever itself in the drawing below, it should be regarded
2 70
0.2 10 as an inertial load.
2 10
1 Friction coefficient µ
0 0 0 (Example)
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.2 0.4 0.6 0.8 1 0 0.2 0.4 0.6 0.8 1 F = µ mg
Operating pressure (MPa) Operating pressure (MPa) Operating pressure (MPa) Mass m
Movement
Static torque calculation
Load Tf = F x l (N⋅m)
Allowable Load g = 9.8 m/s2
Lever
l
Do not allow the load and moment applied to the table to exceed the
allowable values shown in the table below. Shaft
(Operation beyond the allowable values can cause adverse effects on center

service life, such as play in the table and loss of accuracy.)

Inertial load: Ta
A load that must be rotated by the actuator
(a) (b) Since the object is to rotate the inertial load, and
speed adjustment is necessary, allow an extra
margin of 10 times or more in the effective
torque.
∗Actuator effective torque  S . Ta
(S is 10 times or more)
Allowable Allowable thrust load (N) Allowable .
Ta = I ⋅  (N⋅m)
radial load (N) (a) (b) moment (N⋅m)
Size I: Inertial moment
High precision High precision High precision High precision
Basic type Basic type Basic type Basic type Refer to page 11-9-7.
type type type type .
: Angular acceleration
1 31 31 41 41 41 41 0.56 0.84 .
Load  = 2θ2 (rad/s2)
2 32 32 45 45 45 45 0.82 1.2 t
3 33 33 48 48 48 48 1.1 1.6 θ: Rotation angle (rad)
7 54 54 71 71 71 71 1.5 2.2 t: Rotation time (s)

10 78 86 74 74 78 107 2.4 2.9

Rotary actuator
20 147 166 137 137 137 197 4.0 4.8
30 196 233 197 197 363 398 5.3 6.4
50 314 378 296 296 451 517 9.7 12.0
70 333 296 476 12.0
100 390  493  708  18.0 
200 543 740 1009 25.0

11-9-6
 7

Model Selection Series MSQ

Inertial Moment Formula (Calculation of Inertial Moment Ι) Ι: Inertial moment kg⋅m2 m: Load mass kg

1. Thin shaft 2. Thin shaft 3. Thin rectangular plate 4. Thin rectangular plate
Position of rotational axis: Position of rotational axis: (Rectangular parallelepiped) (Rectangular parallelepiped)
Perpendicular to the shaft Through the shaft's center of Position of rotational axis: Position of rotational axis:
through one end gravity Through the plate's center of Perpendicular to the plate
gravity through one of its points (also
the same in case of a thicker
plate)

Ι = m1 ⋅ a12
3
+m2 ⋅
a22
3 Ι=m⋅ a2 Ι=m⋅ a2
12
CRB2
4a12 + b2
12 Ι = m1 ⋅ 12
4a22 + b2
CRBU2
+ m2 ⋅
12
CRB1
5. Thin rectangular plate 6. Cylinder 7. Solid sphere 8. Thin round plate
(Rectangular parallelepiped) (Including thin round plate) Position of rotational axis: Position of rotational axis: Diameter MSU
Diameter
Position of rotational axis: Position of rotational axis:
Through the center of gravity and
perpendicular to the plate (also
Center axis CRJ
the same in case of a thicker
plate) CRA1
2 2
2r r
Ι=m⋅ r2 Ι=m⋅ 5
Ι=m⋅ 4 CRQ2
2
a 2 + b2
Ι=m⋅ 12 MSQ
MRQ
9. Load at lever end 10. Gear transmission
Number of teeth
D-
=a

20-
Ι
2
= m1 ⋅ a1 + m2 ⋅ a22 + K 1. Find the inertial moment ΙB for the
3 rotation of shaft (B).
(Example) When shape of m2 is a sphere,
2 2. Next, ΙB is entered to find ΙA the inertial
refer to 7, and K = m2 ⋅ 2r moment for the rotation of shaft (A) as
5
ΙA = ( a )2 ⋅ ΙB
b
Number of teeth
=b
Kinetic Energy/Rotation Time
Even in cases where the torque required for rotation of the load is small, damage to internal parts may result from the
inertial force of the load.
Select models giving consideration to the load's inertial moment and rotation time during operation.
(The inertial moment and rotation time charts can be used for your convenience in making model selections on page 8.)
qAllowable kinetic energy and rotation time adjustment range
From the table below, set the rotation time within the adjustment range for stable operation. Note that operation exceeding the
rotation time adjustment range, may lead to sticking or stopping of operation.
Allowable kinetic energy (mJ) Rotation time adjustment range for stable operation s/90

Size With With internal With external shock absorber With With internal With external
adjustment bolt shock absorber For low energy For high energy adjustment bolt shock absorber shock absorber
1 1
2 1.5 0.2 to 0.7
    
3 2
7 6
10 7 39 161 231
20 25 116 574 1060 0.2 to 1.0 Note)
0.2 to 0.7 0.2 to 1.0
30 48 116 805 1210
50 81 294 1310 1820
70 240 1100 0.2 to 1.5
100 320 1600   0.2 to 2.0 0.2 to 1.0 
200 560 2900 0.2 to 2.5
Note) Refer to the note regarding the rotation time adjustment range on page 11-9-24.

wInertial moment calculation

Since the formula for inertial moment differ depending on the configuration of the load, refer to the inertial moment calculation
formula on this page.

11-9-7
 8

Series MSQ
Kinetic Energy/Rotation Time
eModel selection Select models by applying the inertial moment and rotation time which have been found to the charts below.
With adjustment bolt With internal shock absorber
1 1
MSQB200A
MSQB100A MSQB200R
0.1 MSQB70A MSQB100R

0.1
MSQB70R
MSQ50A
0.01 MSQ30A

Inertial moment (kg⋅m2)

Inertial moment (kg⋅m2)

MSQ20A MSQ50R

MSQ10A
0.001 0.01
MSQ7A
MSQ3A MSQ10R
0.0001
MSQ2A
0.001 MSQ20R·MSQ30R
MSQ1A
0.00001

0.000001 0.0001
0.2 0.3 0.5 0.7 1.0 2.0 3.0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
Rotation time (s/90
) Rotation time (s/90
)

With external shock absorber

q<Viewing the charts>
1
⋅ Inertial moment  0.015 kg⋅m2
MSQ50H ⋅ Rotation time 0.45 s/90

MSQ50L MSQ20L is selected for the above.
MSQ30H w<Example>
MSQ20H Load configuration: A cylinder of radius 0.5 m and mass 0.4 kg
0.1 MSQ30L Rotation time: 0.7 s/90

Inertial moment (kg⋅m2)

MSQ20L 0.52
Ι = 0.4 x
= 0.05 kg⋅m2
0.05 w 2
In the inertial moment and rotation time chart, find the intersection of
the lines extended from the points corresponding to 0.05 kg⋅m2 on the
vertical axis (inertial moment) and 0.7 s/90
on the horizontal axis
0.015 q (rotation time). Since the resulting intersection point lines within the
MSQ20L selection range, MSQ20L can be selected.
0.01 MSQ10H
MSQ10L

0.001
0.2 0.3 0.4 0.45 0.5 0.6 0.7 0.8 0.9 1.0
Rotation time (s/90
)

Rotation Accuracy: Displacement Values at 180° (Reference values)

Rotating amount of table top

Rotating amount of table side mm

Measuring plate MSQA MSQB
Rotating amount of table top 0.03 0.1
Rotating amount of table side 0.03 0.1
Values in the table are actual values and not guaranteed values.

11-9-8
 9

Model Selection Series MSQ

Table Displacement (Reference values)
100
• The following graphs show the displacement
at point A, which is 100 mm apart from the Load
center of rotation, where the load is applied. A

Displace-
ment
MSQ1A MSQ10

e) e) CRB2
typ typ
100 c ic
B asi Ba
s
A( (
Displacement µm

0

Displacement µm
80 QB
1 400
B1
CRBU2
MS Q
pe) MS
60 io n ty CRB1
p recis
(H igh 350
40
A 1A 40
)
MSU
M SQ 30 ion type
precis
20 20  (High
10 M SQA10 CRJ
0 1 2 3 4 5 6 7 8 9 0 5 10 15 20 25 30
Load N Load N CRA1
MSQ2A MSQ20 CRQ2
300
e) MSQ
100 e) t yp
typ sic
ic
(Ba
Displacement µm

Displacement µm

as MRQ
80 A
(B 0 
Q B2 250
Q B2
60 MS MS D-
pe) 200
40
ision ty 190 20-
prec
(High 40 e)
MS QA2A 30 cision typ
20  (High pre
MSQA20
20
10
0 2 4 6 8 10 12 0 10 20 30 40 50
Load N Load N

MSQ3A MSQ30
e)
yp
pe)
300
ict
ty as
100 sic (B
Ba 
A( 250
30
Displacement µm

B3
Displacement µm

Q B
80 MS SQ
200
M
60
pe)
ion ty 150
40 recis
(H igh p 130
A3A
MSQ 50
ion type)
20
 (H igh precis
MSQA30
0 2 4 6 8 10 12 14 16 18 0 10 20 30 40 50 60 70
Load N Load N

MSQ7A MSQ50
)
pe
ty

pe)
ic

ic ty
as

100
as 200
A (B
(B

B7
Displacement µm


Displacement µm

Q
MS
50

80
pe)
B

n ty
SQ

sio
eci 150
M

60 pr
Hi gh
7 A(
40 QA 120
MS 50
n type)
20 (High precisio
MSQ A50 

0 2 4 6 8 10 12 14 16 18 20 22 24 0 20 40 60 80 100 120
Load N Load N

11-9-9
 10

11-9-10
 11

Rotary Table: Basic Type/High Precision Type

Rack & Pinion Style

Series
Size: 1, 2, 3, 7
MSQ
How to Order CRB2
CRBU2
High precision type MSQA 1 A M9B CRB1
Basic type MSQB 1 A M9B MSU
Number of auto switches
Size Nil 2 pcs.
CRJ
1 S 1 pc.
2 n n pcs. CRA1
3 Auto switch
7
Nil Without auto switch (Built-in magnet)
CRQ2
∗ For the applicable auto switch model, refer to the table below.
∗ Auto switches are shipped together, (but not assembled). MSQ
A With adjustment bolt

MRQ
Port location
Side ported
D-
20-
Nil

Front ported

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.
Auto switch type Lead wire length (m)∗
Indicator

Load voltage
Type

Special Electrical Wiring

light

Electrical entry direction 0.5 3 5 Applicable load

function entry (Output) DC AC (Nil) (L) (Z)
Perpendicular In-line
3-wire (NPN) F8N M9N   
IC circuit
Solid state switch

— 3-wire (PNP) F8P M9P   

2-wire F8B M9B    — Relay,

Grommet Yes 24 V 12 V —
3-wire (NPN) — F9NW   
PLC
Diagnostic IC circuit
indication 3-wire (PNP) — F9PW   
(2-color display)
2-wire — F9BW    —
∗ Lead wire length symbols: 0.5 m Nil (Example) M9N
3 m  L (Example) M9NL
5 m  Z (Example) M9NZ
∗ Solid state switches marked "" are produced upon receipt of order.

Made to Order
Please contact SMC.

• –50 Without indicator light
• –61 Flexible lead wire
• Pre-wire connector

11-9-11
 12

Series MSQ
Specifications

Size 1 2 3 7
Fluid Air (non-lube)
Maximum operating pressure 0.7 MPa
Minimum operating pressure 0.1 MPa
Ambient and fluid temperature 0 to 60
C (with no freezing)
Cushion None Rubber bumper
Basic type/MSQB Angle adjustment range 0 to 190

Maximum rotation 190

Cylinder bore size ø6 ø8 ø10 ø12
Port size M3 x 0.5 M5 x 0.8

Allowable Kinetic Energy and

Rotation Time Adjustment Range

High precision type/MSQA Size Allowable kinetic energy (mJ) Rotation time adjustment range for suitable operation (s/90˚)
1 1
2 1.5 0.2 to 0.7
JIS Symbol 3 2
7 6 0.2 to 1.0

Weight (g)

Size 1 2 3 7
Basic type 75 105 150 250
High precision type 80 115 165 265
Note) Excluding the weight of auto switches

Clean Series
Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

How to Order Specifications and Allowable Load

11 MSQ B 1 A E M9B S Particle generation grade

Suction flow rate (example)
Grade 1 Note)
1 l /min (ANR)
Number of 11-MSQA is identical to the high precision type and
Clean Series
auto switches 11-MSQB is identical to the basic type.
Vacuum type
Auto switch
Note) Please refer to “Pneumatic Clean Series”
catalog for further details.
A High precision type
Port location
B Basic type
Nil Side ported
Size E Front ported
1
2
3 A With adjustment bolt
7

Dimensions
Clean series products do not have a hollow axis.

PA
Basic type (Vacuum port)
11-MSQBA
Size BK PA
High precision type 1 5.3 M3 x 0.5
11-MSQAA 2 7.5 M3 x 0.5
3 9.5 M3 x 0.5
7 7 M5 x 0.8
BK

Dimensions other than above are identical to

the basic type and the high precision type.

11-9-12
 13

Rotary Table Series MSQ

Rotation Direction and Rotation Angle
• The rotary table turns in the clockwise direction when the A port is pressurized, and in the counterclockwise direction when the B port is pressurized.
• By adjusting the adjustment bolt, the rotation end can be set within the range shown in the drawing for the desired rotation angle.

Counterclockwise
Positioning pin hole

5


Adjustment bolt A

n t ra n g e 9 5
(For counterclockwise

2 2 .5
rotation end adjustment)
B port
Adjustment bolt B CRB2

(For clockwise
rotation end adjustment) CRBU2

st m e
d a w is e
dju
CRB1

en ck
se

n rclo
A port lo wi
C lock

C
Clockwise
dj ck w

te
B port
un io

a
u s is
Cootat MSU

0

tm e ro
en
t ra
t a ti o n e n d r 19
n g e 9 5
n ge
With adjust bolt, internal shock absorber ra
Adjustment angle per rotation of M a xi m u m r o t a t
io n CRJ
Size
angle adjustment screw
1 8.2
CRA1
2 10.0
Note) • The drawing shows the rotation range of the positioning pin hole.
3 10.9
• The pin hole position in the drawing shows the counterclockwise
CRQ2
7 10.2
rotation end when the adjustment bolts A and B are tightened
equally and the rotation is adjusted 180
.
MSQ
MRQ
Rotation Range Example
• Various rotation ranges are possible as shown in the drawings below using adjustment bolts A and B. D-
(The drawings also show the rotation ranges of the positioning pin hole.)
20-
Adjustment amount by
Positioning pin hole
adjustment bolt A
Adjustment bolt A
(For counterclockwise
rotation end adjustment)
Adjustment bolt B
(For clockwise
rotation end adjustment)

Adjustment amount by
adjustment bolt B

Pin hole rotation range

190
(Maximum) Rotation 180
Rotation

Adjustment amount by Adjustment amount by

adjustment bolt A Adjustment amount by adjustment bolt A
adjustment bolt A

Adjustment amount Adjustment amount Adjustment amount

by adjustment bolt B by adjustment bolt B by adjustment bolt B
90
Rotation 90
Rotation 90
Rotation

11-9-13
 14

Series MSQ
Construction

o i @2 t !0 y !3 !4 !5 @4 @3 w

q !8 !7 @0 u @1 !6 !1 !2
!8 !7

MSQA
A
(High precision type)
r e !9

Component Parts
No. Description Material No. Description Material
q Body Aluminium alloy !5 Piston seal NBR
w Cover Aluminium alloy !6 Deep groove ball bearing Bearing steel
e Plate Aluminium alloy Basic type Deep groove ball bearing
!7 Bearing steel
r Seal NBR High precision type Special bearing
t End cover Aluminium alloy Round head Philips screw No.0 Basic Size: 1 to 3
y Piston Stainless steel !8 Round head Philips screw type Size: 7 Steel wire
u Pinion Chrome molybdenum steel Round head Philips screw High precision type
i Hexagon nut Steel wire !9 Round head Philips screw No.0 Steel wire
o Adjustment bolt Steel wire @0 Hexagon socket head set bolt Stainless steel
!0 Cushion pad Size: 3, 7 Rubber material @1 Parallel pin Carbon steel
!1 Table Aluminium alloy @2 Seal washer NBR
!2 Bearing retainer Aluminium alloy @3 Hexagon socket head set screw Stainless steel
!3 Magnet Magnetic material @4 O-ring NBR
!4 Wear ring Resin
∗ @3 The hexagon socket head set screws are tightened at different positions
depending on the position of the connecting port.

11-9-14
 15

Rotary Table Series MSQ

Dimensions: Size 1, 2, 3, 7
Basic type: MSQBA

High precision type:

BJ
MSQA
A
2-JF depth JG øDI
øDH
øDJ CRB2

WB
BI

effe
CRBU2

HA
8-WD depth WE

FE
ctive
(Circumference: 8 equivalents) 1

(UV)
WA

dep
4-JJ depth JK XA 1 CRB1

th W
2-J through

C
JA depth of counterbore JB
MSU

22.5°
øDL
CRJ
BE

(mm)

XB effective depth XC
WF
Size DH DI DJ DL FE HA UV CRA1
1 27h8 27.5h8 14H8 4.5H8 8.2 13.5 29.5
2 29h8 29.5h8 14H8 5 H8 9.7 15.5 33.5 CRQ2
BD 3 33h8 34h8 17H8 6 H8 9.7 15.5 36

BA 7 39h8 40h8 20H8 7 H8 9.5 16.5 39.5 MSQ

2-JC
MRQ
øDD Effective depth FB 2-P
Depth from bottom Side port
øD
(not including JD) JE
øDE
(Plugged with a hexagon D-
socket head set screw
when front ports are used.)
FD
FA
2-JU
H 20-
AW

(UU)
depth 1.2
Effective

Q
SD

BH
BC
JD

øDF
AY (through)
AX 2-P BG
øDG
Front port
AV (Plugged with a hexagon
AU BB
SF socket head set screw
(Max. approx. SU) S when side ports are used.)
A

(mm)
Size A AU AV AW AX AY BA BB
YA

1 28 2.8 11 8.2 5.5 1.5 35 39.6

2 30 3.6 12.6 9.2 7 2 37 45.1
1

3 34.5 4.4 15.5 10.5 8 2.5 43 46.7

7 41 4.8 18.4 12.2 10 3 50 59.2 YB effective depth YC
(mm)
Size BC BD BE BG BH BI BJ D DD DE DF DG FA FB FD H J JA JB JC JD JE JF JG
1 4.5 32 17 11 8.2 30 4.5 27h9 27.5h9 14H9 3.5 4.5H9 4.8 2 3.7 9 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4
2 5.5 34 18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4
3 5.5 38 23 15.5 10.5 40 4.5 33h9 34 h9 17H9 5 6 H9 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4
7 5.5 45 30 18.4 12.2 50 5 39h9 40 h9 20H9 6 7 H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5

(mm)
Size JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC
1 M3 x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2
2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2
3 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2
7 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5 3H9 3 15.5 3H9 3

11-9-15
 16

Rotary Table: Basic Type/High Precision Type

Rack & Pinion Style

Series MSQ
Size: 10, 20, 30, 50, 70, 100, 200

How to Order

Size
10
20
30
50

High precision type MSQ A 10 A M9B

Basic type MSQ B 10 A M9B
Number of auto switches
Nil 2 pcs.
Size S 1 pc.
10 70 n n pcs.
20 100
30 200
50 Auto switch
Nil Without auto switch (Built-in magnet)
∗ For the applicable auto switch model, refer to the table below.
∗ Auto switches are shipped together, (but not assembled).
A With adjustment bolt
R With internal shock absorber

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.
Load voltage Lead wire length (m)∗
Indicator

Auto switch model

Type

Special Electrical Wiring

light

0.5 3 5 Applicable load

function entry (Output) DC AC (Nil) (L) (Z)
Perpendicular In-line
No 2-wire 24 V 5 V, 12 V 100 V or less A90V A90   — Relay, PLC
Reed switch

3-wire IC circuit
— Grommet — 5V — A96V A96   — —
Yes (NPN equiv.)

2-wire 24 V 12 V 100 V A93V A93   — — Relay, PLC

3-wire (NPN) M9NV M9N   
5 V, 12 V IC circuit
— 3-wire (PNP) M9PV M9P   
Solid state switch

2-wire 12 V M9BV M9B    —

3-wire (NPN) F9NWV F9NW    Relay, PLC
Diagnostic Grommet Yes 24 V 5 V, 12 V — IC circuit
indication 3-wire (PNP) F9PWV F9PW   
(2-color display)
F9BWV F9BW   
Improved —
2-wire 12 V
F9BA∗∗
water —  
resistance —
(2-color display)
∗∗ Though it is possible to mount water resistant auto switch, the rotary table itself is not water resistance type.
∗ Lead wire length symbols: 0.5 m Nil (Example) M9N
3 m  L (Example) M9NL
5 m  Z (Example) M9NZ
∗ Solid state switches marked "" are produced upon receipt of order.

Made to Order
Please contact SMC.

• –50 Without indicator light
• –61 Flexible lead wire
• Pre-wire connector

11-9-16
 17

Rotary Table Series MSQ

Specifications

Size 10 20 30 50 70 100 200

Fluid Air (non-lube)
Maximum With adjustment bolt 1 MPa
operating
Note 1)
pressure With internal shock absorber 0.6 MPa
Minimum Basic type 0.1 MPa
operating
pressure High precision type 0.2 MPa 0.1 MPa 

Ambient and fluid temperature 0 to 60
C (with no freezing) CRB2

With adjustment bolt Rubber bumper
Basic type/MSQB Cushion With internal shock absorber Shock absorber CRBU2
Shock absorber RBA0805 RBA1411 RBA2725
model RBA1006-X692 RBA2015-X821
Angle adjustment range
-X692 -X692
0 to 190

Note 2)
-X821
CRB1
High precision type/MSQA 190

Maximum rotation
MSU
Cylinder bore size ø15 ø18 ø21 ø25 ø28 ø32 ø40

Port size
End ports M5 x 0.8 Rc 1/8 CRJ
Side ports M5 x 0.8
Note 1) The maximum operating pressure of the actuator is restricted by the maximum allowable thrust CRA1
JIS Symbol of the shock absorber.
Note 2) Be careful if the rotation angle of a type with internal shock absorber is set below the value in the
table below, the piston stroke will be smaller than the shock absorber's effective stroke, resulting
CRQ2
in decreased energy absorption ability.
MSQ
Size 10 20 30 50 70 100 200
Minimum rotation angle that will not allow
decrease of energy absorption ability 52
43
40
60
71
62
82
MRQ
End ports Side ports D-
20-

Allowable Kinetic Energy and

Rotation Time Adjustment Range

Allowable kinetic energy (mJ) Rotation time adjustment range for stable operation (s/90
)
Note1)
Size With With With With
adjustment bolt internal shock absorber adjustment bolt internal shock absorber
10 7 39
20 25 116
0.2 to 1.0 0.2 to 0.7
30 48 116
50 81 294
70 240 1100 0.2 to 1.5
100 320 1600 0.2 to 2.0 0.2 to 1.0
200 560 2900 0.2 to 2.5
Note 1) Be careful if a type with internal absorber is used below the minimum speed, the energy
absorption ability will decrease drastically.

Weight (g)

Size 10 20 30 50 70 100 200

With adjustment bolt 530 990 1290 2080 2880 4090 7580
Basic type
With internal shock absorber 540 990 1290 2100 2890 4100 7650
High precision With adjustment bolt 560 1090 1410 2240

type With internal shock absorber 570 1090 1410 2260
Note) Values above do not include auto switch weights.

11-9-17
 18

Series MSQ
Rotation Direction and Rotation Angle
• The rotary table turns in the clockwise direction where the A port is pressurized, and in the counterclockwise direction when the B port
is pressurized.
• By adjusting the adjustment bolt, the rotation end can be set within the ranges shown in the drawing for the desired rotation angle.
• The rotation angle can also be set on a type with internal absorber.
Positioning pin hole
Counterclockwise

5
A port

Adjustment bolt A

stment rang e 9 5
2 2 .5
(For counterclockwise
rotation end adjustment)

Adjustment bolt B
(For clockwise
rotation end adjustment)

is e
a dju
n e ockw
nd
tio rcl
B port
Clockwise

ta t e
ro o u n

0

Cl dj
With adjust bolt, internal shock absorber c ise

C
a

19
o
us kw
tm is e kw
Cloc

e
Adjustment angle per rotation of en rot

ng
Size angle adjustment screw t r a a ti o n ra
nge end on
95
ati
10 10.2° rot
m
20 mu
7.2° Maxi
30 6.5°
50 8.2°
70 7.0° Note) • The drawing shows the rotation range of the positioning pin hole.
100 6.1° • The pin hole position in the drawing shows the counterclockwise
200 4.9° rotation end when the adjustment bolts A and B are tightened
equally and the rotation is adjusted 180
.

Rotation Range Example

• Various rotation ranges are possible as shown in the drawings below using adjustment bolts A and B.
(The drawings also show the rotation ranges of the positioning pin hole.)

• The rotation angle can also be set on a type with inertial absorber.

Adjustment amount by
Positioning pin hole adjustment bolt A

Adjustment bolt A
(For counterclockwise
rotation end adjustment)
Adjustment bolt B
(For clockwise
rotation end adjustment)

Adjustment amount
by adjustment bolt B

Pin hole rotation range

190
(Maximum) Rotation 180
Rotation

Adjustment amount by
adjustment bolt A Adjustment amount by Adjustment amount by
adjustment bolt A adjustment bolt A

Adjustment amount
Adjustment amount by adjustment bolt B
Adjustment amount by adjustment bolt B
90
Rotation
by adjustment bolt B
90
Rotation 90
Rotation

11-9-18
 19

Rotary Table Series MSQ

Clean Series
Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

How to Order Specifications and Allowable Load

11 MSQ B 10 A A90 S Particle generation grade

Suction flow rate (example)
Grade 1 Note)
1 l /min (ANR)
Number of 11-MSQA is identical to the high precision type and
Clean Series
auto switches 11-MSQB is identical to the basic type.
Vacuum type
CRB2
Note) Please refer to “Pneumatic Clean Series”
Auto switch
catalog for further details.
A High precision type
CRBU2
B Basic type
A With adjustment bolt
Size R Shock absorber CRB1
10
20 MSU
30
50 CRJ
CRA1
CRQ2
Dimensions MSQ
Clean series products do not have a hollow axis.
MRQ
Basic type D-
11-MSQBA M5 x 0.8 depth 5
11-MSQBR øDA (Vacuum port) 20-
øDB
(mm)
øDC
Size DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD
10 46 45 20 35 20 5 59
HB

20 61 60 28 40 22 6 65
(HD)
11.5
5.5

30 67 65 32 48 22 6 68
HC

50 77 75 35 54 24 7 77
Dimensions other than above are identical to the basic type.
øDD

High precision type

11-MSQAA
11-MSQAR øDA M5 x 0.8 depth 5
(Vacuum port)
øDB
øDC (mm)
Size DA(h8) DB(h8) DC(H8) DD(h8) HA HB HC HD HE
10
HB

46 45 20 35 15.5 24 5 63 9.5
HA
HE

20 61 60 28 40 19.5 30 6 73 13.5
(HD)

30 67 65 32 48 19.5 30 6 76 13.5
HC

50 77 75 35 54 21.5 34 7 87 15.5
Dimensions other than above are identical to the high precision type.
øDD

11-9-19
 20

Series MSQ
Construction

#1 o i @7 @8 t !0 y !6 !7 !8 !1 @5 e r w@4
MSQ R
(With internal shock absorber)
@0 !3 #0 @9 q @2 @0 @3 u @6 !9 !4 !5 !2 @1

MSQA
(High precision type)

Component Parts
No. Description Material No. Description Material
q Body Aluminium alloy Deep groove ball bearing Size: 10 to 50
!9 Bearing steel
w Cover Aluminium alloy Needle bearing Size: 70 to 200
e Plate Aluminium alloy Deep groove ball bearing Basic type
@0 Bearing steel
r Seal NBR Angular contact ball bearing High precision type
t End cover Aluminium alloy @1 Round head philips screw No.0 Steel wire
y Piston Stainless steel Round head philips screw Size: 10 Stainless steel
u Pinion Chrome molybdenum steel @2 Low head cap screw Size: 20 to 50
Chrome molybdenum steel
Hexagon nut with flange Size: 10 to 50 Hexagon socket head set bolt Size: 70 to 200
i Steel wire
Hexagon nut Size: 70 to 200 @3 Hexagon socket head set bolt Stainless steel
o Adjustment bolt Chrome molybdenum steel Hexagon socket Size: 10 to 50 Stainless steel
@4
!0 Cushion pad Rubber material head set bolt Size: 70 to 200 Carbon steel
!1 Seal retainer Aluminium alloy @5 CS type snap ring Spring steel
!2 Gasket NBR Parallel pin Size: 10 to 50
@6 Carbon steel
!3 Gasket NBR Parallel key Size: 70 to 200
!4 Table Aluminium alloy @7 Seal washer NBR
!5 Bearing retainer Aluminium alloy @8 Plug Brass
!6 Magnet Magnetic material @9 O-ring Size: 70 to 200 only NBR
!7 Wear ring Resin #0 Steel balls Size: 70 to 200 only Stainless steel
!8 Piston seal NBR #1 Shock absorber —

Replacement Parts
Kit no.
Description Note
10 20 30 50 70 100 200
Seal kit P523010-5 P523020-5 P523030-5 P523040-5 P391050-5 P391060-5 P391070-5 A set of above numbers r, !2, !3, !7, !8 and @7

11-9-20
 21

Rotary Table Series MSQ

Dimensions: Size 10, 20, 30, 50

WB
XB epth
Basic type: MSQBA

ef
d

ef X C

fect
8-WD depth WE

fe
ct

ive
iv
2
(Circumference: 8 equivalents)

dep
2
4-JJ depth 8

XA

th W
WA

45
2-J through

JA counterbore

22.5
depth JB

CRB2

BE
CRBU2
2-M5 x 0.8
BD
W
F CRB1
Piping port (Plugged)
MSU

depth FB
øDD

Effective
BB øD

FA
2-P
CA øDE CRJ
Piping port 2-JC depth JD

H
2-JU CRA1

(UU)
FD
CB
SE

BC

CRQ2

Q
AW

depth FC
SD

MSQ

Effective
AY
AX øDF
(Through)
AV MRQ
SF AU BA øDG BA
A (Max. approx. SU) S
AA D-
20-
YB effective
depth YC
YA 2

View
With internal shock absorber High precision type
MSQAR MSQAA: With adjustment bolt
MSQBR MSQAR: With internal shock absorber

øDI
øDH
øDJ
HA
FE

(mm) (mm)
(UV)

Size FU Size DH DI DJ DK DL FE HA UV
10 31.5 10 45h8 46h8 20H8 5 15H8 10 18.5 52.5
20 34.7 20 60h8 61h8 28H8 9 17H8 15.5 26 63
(Max. approx. FU) 30 34.7 30 65h8 67h8 32H8 9 22H8 16.5 27 67
50 51.7 øDK (Through) 50 75h8 77h8 35H8 10 26H8 17.5 30 76
øDL

(mm)
Size AA A AU AV AW AX AY BA BB BC BD BE CA CB D DD DE DF DG FA FB FC FD H J JA JB
10 55.4 50 8.6 20 15.5 12 4 9.5 34.5 27.8 60 27 4.5 28.5 45h9 46h9 20H9 5 15H9 8 4 3 4.5 13 6.8 11 6.5
20 70.8 65 10.6 27.5 16 14 5 12 46 30 76 34 6 30.5 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5
30 75.4 70 10.6 29 18.5 14 5 12 50 32 84 37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5
50 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5

(mm)
Size JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC
10 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5
20 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5
30 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5
50 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5

11-9-21
 22

Series MSQ
Dimensions: Size 70, 100, 200
Basic type: MSQBA

WB
XB
ef

effe
fe
ct
8-WD depth WE

iv

ctiv
e
de
(Circumference: 8 equivalents)

ed
pt
2

ept
4-JJ depth JK

XC
2

hW
2-J through
WA

XA

C
JA counterbore

45


depth JB

22.5


BE
WF
BD

depth FB
øDD

Effective
AB 2-Rc 1/8 2-JC depth JD
øD
9 øDE
BB

FA
Port size 2-M5 x 0.8 (plug)
Port size
2-JU

H
30

FD

(UU)
Q
BC
15

CB
AW
SD

øDF

depth FC
AX AY

Effective
(Through)
AV 8 BA øDG BA
SF
A (Max. approx. SU) S
AA
YB effective
depth YC

YA 2

View
With shock absorber
MSQBR

(mm)
Size FU
70 55.4
100 55.5
200 74.7

(Max. approx. FU)

(mm)
Size AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB
70 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5
100 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 100h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5
200 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 116h9 118h9 64H9 24 32H9 16.5 9 5.5 15 32 14.2 20 12.5
(mm)
Size JC JD JJ JK JU Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC
70 M12 x 1.75 18 M8 x 1.25 10 M20 x 1.5 53 170 18 79 34.2 75 32.5 5H9 5.5 M8 x 1.25 12.5 67 54 5H9 3.5 39 5H9 3.5
100 M12 x 1.75 18 M8 x 1.25 10 M20 x 1.5 59 189 22 90 34.3 86 37.5 6H9 6.5 M10 x 1.5 14.5 77 59 6H9 4.5 49 6H9 4.5
200 M16 x 2 25 M12 x 1.75 13 M27 x 1.5 74 240 29 108 40.2 106 44 8H9 8.5 M12 x 1.75 16.5 90 69 8H9 4.5 54 8H9 6.5

11-9-22
 23

Rotary Table: Basic Type/High Precision Type

W/ External Shock Absorber, Rack/Pinion Style

Series MSQ
Size: 10, 20, 30, 50

How to Order CRB2

CRBU2
MSQ B 10 L 2 M9B S CRB1
Number of auto switch
A High precision type Size Nil 2 pcs. MSU
B Basic type 10 S 1 pc.
n n pcs.
20 CRJ
30 Auto switch
50
Nil Without auto switch (Built-in magnet) CRA1
Shock absorber type ∗ For the applicable auto switch model, refer to the table below.
∗ Auto switches are shipped together, (but not assembled). CRQ2
L Shock absorber for low energy
H Shock absorber for high energy
MSQ
Port location/Rotation
2 Standard 180
Rotation MRQ
3 type 90
180
90

4 Symmetric 180
2: Standard type, 180
3: Standard type, 90
D-
90

Symmetric type Standard type

5 type
Connecting port

Connecting port
Refer to the table to the right.
Connecting port position

20-

4: Symmetric type, 180
5: Symmetric type, 90

Connecting port

Connecting port
Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.
Load voltage Lead wire length (m) ∗
Special Electrical Indicator Wiring Auto switch model
Type

function entry (Output) 0.5 3 5 Applicable load

light DC AC (Nil) (L) (Z)
Perpendicular In-line
No 2-wire 24 V 5 V, 12 V 100 V or less A90V A90    Relay, PLC
Reed switch

3-wire IC circuit
 Grommet  5V  A96V A96    
Yes (NPN equiv.)

2-wire 24 V 12 V 100 V A93V A93     Relay, PLC

3-wire (NPN) M9NV M9N   
5 V, 12 V IC circuit
 3-wire (PNP) M9PV M9P   
Solid state switch

2-wire 12 V M9BV M9B    

Diagnostic Grommet Yes 3-wire (NPN) 24 V  F9NWV F9NW    Relay, PLC
indication 5 V, 12 V IC circuit
(2-color 3-wire (PNP) F9PWV F9PW   
display) F9BWV F9BW   
Improved
water 2-wire 12 V ∗∗ 
 F9BA   
resistance
(2-color display)
∗∗ Though it is possible to mount water resistant auto switch, the rotary table itself is not water resistance type.
∗ Lead wire length symbols: 0.5 mNil (Example) M9N
3 m L (Example) M9NL
5 m Z (Example) M9NZ
∗Solid state switches marked "" are produced upon receipt of order.

Made to Order
Please contact SMC.

• –50 Without indicator light
• –61 Flexible lead wire
• Pre-wire connector

11-9-23
 24

Series MSQ
Specifications

Size 10 20 30 50
Fluid Air (non-lube)
Maximum operating pressure 1 MPa
Minimum operating pressure 0.2 MPa
Ambient and fluid temperature 0 to 60
C (with no freezing)
Cushion Shock absorber

Shock absorber For low energy RB0805 RB1006 RB1411

type For high energy RB0806 RB1007 RB1412
Rotation 90
, 180

Angle adjusting range Each rotation end 3

Cylinder bore size ø15 ø18 ø21 ø25
End ports M5 x 0.8 Rc 1/8
Port size
Side ports M5 x 0.8

JIS Symbol End ports Side ports

Allowable Kinetic Energy and

Rotation Time Adjustment Range

Allowable kinetic energy (mJ) Rotation time adjustment range

Size
Shock absorber for low energy Shock absorber for high energy for stable operation (s/90
)
10 161 231
20 574 1060 Note)
0.2 to 1.0
30 805 1210
50 1310 1820
Note) Values above indicate the time between the start of rotation and the deceleration caused by
the shock absorber. Although the time required by the rotary table to reach the rotation end
after deceleration differs depending on the operating conditions (inertial moment of the
load, rotation speed and operating pressure), approximately 0.2 to 2 seconds are required.
The range of angles within which the shock absorber operates is between the rotation end
and the values shown below.
Size 10 20 30 50
For low energy 7.1
6.9
6.2
9.6

For high energy 8.6
8.0
7.3
10.5

Weight (g)

Size 10 20 30 50
90
specifications 630 1200 1520 2480
Basic type
180
specifications 600 1140 1450 2370


High precision 90 specifications 700 1390 1750 2810
type 180
specifications 670 1340 1680 2690
Note) Values above do not include auto switch weights.

11-9-24
 25

Rotary Table Series MSQ

Rotation Direction and Rotation Angle
. The rotary table turns in the clockwise direction where the A port is pressurized, and in the counterclockwise direction when the B port is pressurized.
. By adjusting the shock absorber, the rotation end can be set within the ranges shown in the drawing.

Standard type
For 180
For 90

Positioning pin hole Positioning pin hole

Counterclockwise

3


A port A port

3


A port
CRB2

3
22.5
3
22.5

CRBU2

e 84

ge 96

n rang
CRB1
3

n ran
atio
B port
MSU

90

3

atio
4

rot
17

um

r ot
Clockwise
se

k wi

ge

im
Clo c

6

CRJ

um
an

3
nr

in
18
M

im
ti o 3
rota

e
g

ax
Mini m u m
an M
nr CRA1
180 tatio Clo
c k wise
ro
um
Maxim
Positioning pin hole Positioning pin hole CRQ2
MSQ
MRQ
Position of bottom positioning pin hole Position of bottom positioning pin hole
D-

Symmetric type 20-

For 180
For 90

Positioning pin hole Positioning pin hole

Counterclockwise

3


3

B port

3
22.5
3
22.5

n range 84

ange 96





3

tion r
atio
A port
3

rot
90

4

rota
17

A port
um

Clockwise A port
um

se

ge

im

Clo c k wi n 3
6

ra

in

im

n 3 M
18

ax

tio
rota
M

e
Mini m u m
ng Clo
180 tion
ra c k wise
ta
m ro
Maximu

Positioning pin hole Positioning pin hole

Position of bottom positioning pin hole Position of bottom positioning pin hole

With external shock absorber

Size Adjustment angle per rotation of angle adjustment screw Note) ⋅ The drawings show the rotation range for the top positioning pin
10 1.4
hole of the table.
20 1.2
⋅ The pin hole position in the drawing shows the counterclockwise
1.1

rotation end when the shock absorbers are tightened equally
30
and the rotation is adjusted to 180
and 90
.
50 1.3

11-9-25
 26

Series MSQ
Construction

e t r w o
y u q i

Component Parts
No. Description Material
q End cover Aluminium alloy
w Table Aluminium alloy
e Arm Chrome molybdenum steel
r Shock absorber holder Aluminium alloy
t Hexagon socket head set bolt Stainless steel
y Hexagon socket head set bolt Stainless steel
u Taper plug Steel wire
i Hexagon nut Steel wire
o Shock absorber 

Replacement Parts
Kit no.
Description Note
10 20 30 50
Seal kit P523010-6 P523020-6 P523030-6 P523040-6 Seal washer @7 is excluded from the kit contents described on page 11-9-20.

11-9-26
 27

Rotary Table Series MSQ

Dimensions: With External Shock Absorber Size: 10, 20, 30, 50
Basic type: MSQBL
H

e)
8-WD depth WE

ng
ra
(Circumference: 8 equivalents)

ing
EB

at
2-M5 x 0.8 Note 1

er
op
Symmetric type Piping port (Plugged)

WB th WC
rm
dep
(A
Piping port

effe
GE
2

ctiv
WA

e
CRB2

22.5
EB
(Max. approx. EE)
CRBU2

YB effective depth YC

GA

GB
(Max. approx. EA)
CRB1

EC
ED
MSU

ND
2-J through
BD
JA counterbore depth JB
2 YA EF
2-K
CRJ

W
Position of bottom positioning pin hole Shock absorber

F
øDD CRA1

depth FB
Effective
øD
BB 2-P
2-JC depth JD CRQ2
GD

FA
NA øDE
GC 0.5

Piping port
MSQ
NC
NB

H
(UU)
FD
MRQ
CB
SE

Q
BC

D-

depth FC
SD

Effective
SF øDF
CA (Through)
A
AA BA øDG BA
20-
Note 1) This part is not available with 180
specification. S
YB effective

YA 2
depth YC

High precision type øDI

View
MSQA L H
øDH
øDJ
NF

HA
NE

FE

(mm)
(UV)

Size DH DI DJ DK DL FE HA NE NF UV
10 45 46 20H8 5 15H8 10 18.5 11 18 52.5
20 60 61 28H8 9 17H8 15.5 26 17 25.5 63
øDK (Through) 30 65 67 32H8 9 22H8 16.5 27 18 26.5 67
øDL 50 75 77 35H8 10 26H8 17.5 30 18.5 29.5 76

(mm)
Size AA A BA BB BC BD CA CB D DD DE DF DG EA EB EC ED EE EF FA FB FC FD GA GB GC GD GE H
10 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13
20 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17
30 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17
50 85.4 80 15.5 63 37.5 100 10 37.5 75 77 35H9 10 26H9 86.7 71.4 56 22 158.1 130 12 5 3 7.5 32 28 18 11.5 72.9 20

(mm)
Size J JA JB JC JD K NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC
10 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5
20 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5
30 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9 4.5
50 10.5 18 10.5 M12 x 1.75 18 M14 x 1.5 19 8.5 19.5 6 Rc 1/8 46 152 14.5 15 75 66 26.5 5H9 5.5 M8 x 1.25 12 55 33 5H9 5.5

11-9-27
 28

Series MSQ
Proper Auto Switch Mounting Position at Rotation End

Size: 1 to 7

A A B B

When D-F9 and M9 are used When D-F8 is used

Solid state switch

D-F9W D-M9 D-F8
Size Rotation
Operating Hysteresis Operating Hysteresis Operating Hysteresis
A angle θ m angle A angle θ m angle B angle θ m angle
1 190° 20.9 40° 10° 20.9 55° 10° 16.9 20° 10°
2 190° 22.8 35° 10° 22.8 45° 10° 18.8 20° 10°
3 190° 24.4 30° 10° 24.4 40° 10° 20.4 15° 10°
7 190° 28.7 25° 10° 28.7 40° 10° 24.7 15° 10°
Operating angle θ m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
Hysteresis angle : Value of auto switch hysteresis converted to an angle.

Size: 10 to 200
B
A

Magnet

Operating range at proper

mounting position (Lm/2)

Most sensitive position

Operating range of
single auto switch Lm

Reed switch Solid state switch

D-M9V, D-F9W,
D-A9, D-A9V D-M9
Size Rotation D-F9WV, D-F9BAL
Operating Hysteresis Operating Hysteresis Operating Hysteresis
A B angle θ m angle A B angle θ m angle A B angle θ m angle
10 190° 17 36 90° 10° 21 40 90° 10° 21 40 60° 10°
20 190° 23 50 80° 10° 27 54 80° 10° 27 54 50° 10°
30 190° 27 66 65° 10° 31 60 65° 10° 31 60 50° 10°
50 190° 33 68 50° 10° 37 72 50° 10° 37 72 40° 10°
70 190° 37 78 45° 10° 41 82 45° 10° 41 82 40° 10°
100 190° 44 91 40° 10° 48 95 40° 10° 48 95 30° 10°
200 190° 57 115 35° 10° 61 19 35° 10° 61 19 20° 10°
Operating angle θ m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
Hysteresis angle: Value of auto switch hysteresis converted to an angle.

11-9-28
 29

Series MSQ
Specific Product Precautions 1
Be sure to read before handling.

Speed Adjustment Rotation Adjustment

Warning Caution
1. Perform speed adjustment gradually from 1. As a standard feature, the rotary table is equipped with a rotation
adjustment screw (adjustment bolt or shock absorber) that can be CRB2
the low speed side. used to adjust the rotation. The table below shows the rotation
Speed adjustment from the high speed side can cause product
damage leading to human injury and damage to equipment an
adjustment per single rotation of the rotation adjustment screw. CRBU2
Please refer to following pages for the rotation direction, rotation
machinery.
angle and rotation angle range.
MSQ size1 to 7
page 11-9-13
CRB1
Caution MSQ size10 to 200
page 11-9-18
MSU
MSQ with external shock absorber
page 11-9-25
1. When operating at high speed with a large
load weight, a large amount of energy is With adjustment bolt, With external shock absorber
CRJ
applied to the actuator and can cause Size Rotation adjustment per single rotation of rotation adjustment screw
damage. 1 8.2

Refer to the model selection on page 11-9-5 to find the proper 2 10.0
CRA1
operating time. 3 10.9

7 10.2
CRQ2
2. Do not machine the fixed orifice of the port
10 10.2

to enlarge its size. If the fixed orifice size is 20 7.2
MSQ
enlarged, the actuator operating speed and 30 6.5

50 8.2

impact force will increase and cause MRQ
70 7.0

damage. 100 6.1

200 4.9
D-
With external shock absorber
Lubrication 20-
Size Rotation adjustment per single rotation of rotation adjustment screw
10 1.4

Caution 20 1.2

30 1.1

1. Use the product without lubrication. 50 1.3

This product is lubricated with grease at the factory, and further
lubrication will result in a failure to meet the product's specifica- The rotation adjustment range for the external shock absorber is
tions. 3
at each rotation end. When adjusted beyond this range, note
that the shock absorber's durability may decrease.
2. Series MSQ is equipped with a rubber bumper or shock absorber.
Therefore, perform rotation adjustment in the pressurized condition
(minimum operation pressure: 0.1 MPa or more for adjustment bolt
and internal shock absorber types, and 0.2 MPa or more for exter-
nal shock absorber type.)

11-9-29
 30

Series MSQ
Specific Product Precautions 2
Be sure to read before handling.

Shock Absorber External Shock Absorber

Caution Caution
1. Refer to the table below for tightening torques of the shock The threaded orifices shown below are not connecting ports. Never
absorber setting nut. remove the plugs as this will cause malfunction.

Size 10 20 30 50 70 100 200

Tightening torque 1.67 10.8 62.8
N.m 3.14 23.5

2. Never rotate the bottom screw of the shock absorber. (It is not an
adjustment screw.) This may cause oil leakage.
Bottom screw cannot be rotated

Threaded orifices

3. When rotation of the rotary table with internal shock absorber is

set at a value smaller than the table below, the piston stroke
becomes smaller than the shock absorber's effective stroke and Speed Controller and Fittings
energy absorption capacity decreases.

Size 10 20 30 50 70 100 200

Caution
Size 1, 2, and 3 use M3 x 0.5 piping ports. When connecting a speed
52
43
40
60
71
62
82

Minimum rotation without energy
absorption capacity decrease controller or fittings directly, use the following series.

4. Products with shock absorber are not designed to smooth stop but  Speed controller
to absorb the kinetic energy of the load. If the load has to be AS121F/Elbow type
stopped smoothly, a shock absorber of the optimum size meeting AS131F/Universal type
the operating conditions must be installed external to the  One-touch fittings
equipment. One-touch miniature fittings Series K J
 Miniature fittings Series M3
5. Shock absorbers are consumable parts. When a decrease in
energy absorption capacity is noticed, it must be replaced.

With internal shock absorber Auto Switch

Size Shock absorber model
10 RBA0805-X692 Caution
20 In the case of sizes 1, 2, 3 and 7, when 2 pieces of auto switches are
RBA1006-X692
30 installed in one switch groove, the minimum detectable rotation
50 RBA1411-X692 angles are as follows.
70
RBA2015-X821 Size Minimum detectable rotation
100
200 RBA2725-X821 1 25

2 25

With external shock absorber
3 20

Size Type Shock absorber model
7 20

For low energy RB0805
10 For high energy RB0806
For low energy RB1006
20 Maintenance
For high energy RB1007
For low energy RB1006
30 For high energy RB1007 Caution
For low energy RB1411
50 Because sizes 1, 2, 3 and 7 require special tools, they cannot be
For high energy RB1412 disassembled.
Because sizes 10, 20, 30 and 50 have the table press fit into an
angular type bearing, they cannot be disassembled.

11-9-30