GF 6 & 7G CHEMICAL _PSD ACTIVITY

S/N ACTIVITY DESCRIPTION OEM LOCATION GF PIC GF PIC WT SOXAL PIC SOXAL PIC WT

MAIN PIC

ACTIVITY SUPERVISION

3.00 H2SO4 SOXAL ADR VASANTH TING

7.00 H3PO4 SOXAL ADR VASANTH TING

8.00 HNO3-COMPLETED ON 3~ 5-12-14 SOXAL ADR

1.00 NH4OH SOXAL CDR PUI CARLOS

23.20 2% NH4OH Blender System Outstanding Work SOXAL PANEL 4 CMP JOHANAS ALAGAR

17.00 Field I/O_Removal SOXAL FIO JOHANAS ALAGAR

20 TCM _FIO-Related activity TCM FIO JOHANAS

22 SOLENOID CHNG TO FESTO _14 UNIT_TCM FESTO SOLENOID JOHANAS FESTO

With FESTO

18 TCM _PDB TCM PDB SIM NA

25 OXIDE FAETH SLURRY BETTY DON / BILL

26 TUNGSTEN FAETH SLURRY BETTY DON / BILL

19 TCM _PLC battery change TCM TCM PUI NA

21 DATA CON 1 ethernet card faulty GF TCM ZAWAI NA

23.10 Preparation for the CDM RX3i Upgrade SOXAL TCM ZAWAI ALAGAR

23.30 VMB Expansion/Removal SOXAL TCM ZAWAI ALAGAR

 TCM PIC TCM PIC WT WT H/P

RAMLI 97182551 / 95

M.T / RAMAN / 181

AHNAND /
EDER 97 /

AHNAND / 97 /
EDER

KOK/ SASHI 173 / 172 97188577 /

97188576

CHIN / RAM K 174 / 180

CHIN / RAM K 174 / 180

HAMAR
CHIN / RAM K 174 / 180

CHIN / RAM K 174 / 180

ZEP

ZEP / RAZAK 95 / CHUNG /

PUVA /
ZEP / RAZAK 95 / MICHEAL

ZUL

ZUL

ZUL

ZAINAL
GF Fab7 PSD Y2021( 09 JAN 2021) - Manpower on shift
08-Jan (Night Shift) 09-Jan (Dayift) 09-Jan (Night Shift) 10-Jan (Day shift)
FRIDAY SATURDAY SATURDAY SUNDAY
ACTIVITY DESCRIPTION

2100

2200

2300

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0300

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0900

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1.00 NORMAL SHIFT

Yong, Raman, Ramkumar,Vignesh OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT

Azizi OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT

Lau , Wee

Sumesh,Brian OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT

BREAKFAST

DINNER
Syszwan (Sample co-ordination & result publish),Prabhu OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT

LUNCH
1.00 Team A ( SUNDAY NIGHT SHIFT)

Rajan, Kamaruddin, Vicky,Kok Tong ling, Firdaus OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT OT

2.00 Team B ( SUNDAY DAY SHIFT)

Raja, Jeya, Devaraj, Durai, Ong Yong Xiang OT OT OT OT OT OT OT OT OT OT OT OT D D D D D D D D D D D D

3.00 Team C ( SATURDAY NIGHT SHIFT)

Nelson, Aiman, Naveen, Amirul, Andy N N N N N N N N N N N N N N N N N N N N N N N N

4.00 Team D ( SATURDAY DAY SHIFT)

Mayyer, Chung, Thambirajah, Yulanda, Faiz D D D D D D D D D D D D OT OT OT OT OT OT OT OT OT OT OT OT

D/N Normal operation

OT OT
 GF- FAB7 CHEMICAL PSD Y2021 ACTIVITIES

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38
1

9
ACTIVITY DESCRIPTION TCM PIC TCM Vendor PIC

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Team Member

SATURDAY SUNDAY
Single system force on testing
1 - A515, NE111

1.01 A515- Single system force on testing

Raman Koo

1.02 NE111 Single system force on testing

2 VMB leak rectification (DF 18 vmb valve leak & Dowanol vmb valve leak)

2.01 Dowanol-VMB #17 Sampling send out & waiting for result

2.02 H2SO4-VMB #21 Raman Ramkumar

2.03 TMAH-VMB #09

2.04 DF18-VMB #05

3 Diode for MSDB-15 to be replaced.

Ramkumar Naga
3.01 Diode for MSDB-15 to be replaced.

4 NE111 Corroded PLC Rack to be replaced during PSD (Single System)

Ramkumar Raman
4.01 NE111 Corroded PLC Rack & lighting to be replaced

5 Chemical Global & Room EMO Testing

Yong Raman &
Ramkumar
5.01 Chemical Global & Room EMO Testing

6 Acid Dispense Room PN2 line tie in for NE111 (Single System)
Raman Ramkumar
6.01 Acid Dispense Room PN2 line tie in for NE111 (Single System)

7 Relocate system EMO button: C6618#2 , C6618#3 ,C-SPARE ,CSL9044#2 & CSL9044#3

7.01 C6618#2 Ramkumar Koo

7.03 CSL9044#2

8 Back up DATA CON

Ashik Kannan
8.01 BACK UP DATA CON

9 TMAH VMB Turn On

Syazwan &
Kumar Razudin
9.01 TMAH VMB Turn On

10 SLURRY & CHEMICAL - PLC BATTERY REPLACEMENT

Ashik Ramkumar
10.01 SLURRY & CHEMICAL - PLC BATTERY REPLACEMENT

11 Chemical System (Single Systems) A515, C260, CLK888 & NE111 SMC Solenoid bank CDA inlet connector Replacement
Raman Ramkumar
11.01 Chemical System (Single Systems) A515, C260, SMC CDA inlet solenoid bank Replacement

12 Single system critical valve replacement : NE111 , CLK888 , EG , C260, A515

12.01 C260

12.02 NE111

Raman Ramkumar
12.03 CLK888

12.04 EG

12.05 A515

13 DHF310#2 Critical Valve Replacement

Raman TC Bong
13.01 DHF310#2 Critical Valve Replacement Sampling send out & waiting for result

14 W7300-A9 Slurry flushing RAJAN Kamaruddin Sampling send out & waiting for result

15 W7300-AB21 Slurry flushing

RAJA (Day) / Jeya (Day) / Sampling send out & waiting for result
Meyyar Chung

16 SS25E#2 slurry flushing NELSON Vicky Sampling send out & waiting for result
17 C6618#4
YONG Sampling send out & waiting for result
RAMAN
18 CSL9044#2
RAMKUMAR Sampling send out & waiting for result
19 C6618#2
VIGNESH Sampling send out & waiting for result
MEYYAR
20 CSL9044#1
Chung Sampling send out & waiting for result

Activity
Sampling send out & waiting for result
GF FAB7 CHEMICAL PSD 2021

ACTIVITY DESCRIPTION

1.00
2.00
2.01
3.00
4.00
5.00
6.00
7.00
8.00
9.00
10.00
11.00
12.00
13.00
14.00
15.00
16.00
17.00
18.00
19.00
20.00
AB7 CHEMICAL PSD 2021 ACTIV

ACTIVITY DESCRIPTION

Single system force on testing, change solenoid bank:

- A515, C260,
VMB leak rectification
VMB leak rectification
Diode for MSDB-15 to be replaced.
NE111 Corroded PLC Rack & lighting to be replaced during PSD (Single System)
Chemical Global & Room EMO Testing
Acid Dispense Room PN2 line tie in for NE111 (Single System)
Relocate system EMO button: C6618#2 , C6618#3 ,C-SPARE ,CSL9044#2 & CSL9044#3
Back up DATA CON
TMAH VMB Turn On
SLURRY & CHEMICAL - PLC BATTERY REPLACEMENT

Chemical System (Single Systems) A515, C260, CLK888 & NE111 SMC CDA inlet solenoid bank Replacemen

Single system critical valve replacement : NE111 , CLK888 , EG , C260, A515

DHF310#2 Critical Valve Replacement
W7300-A9 flushing
W7300-AB21 flushing
SS25E#2 flushing
C6618#4 flushing
C6618#2 flushing
CSL9044#1 flushing
CSL9044#2 flushing
VITY

Sampling Required (Yes/ No) Type Of analysis

No
Yes ( DOWANOL VMB#07 ) ICPMS
No
No
No
No
No
No
No
No
No
No
No
Yes ICPMS
Yes Solid Content
Yes Solid Content
Yes Solid Content
Yes Solid Content
Yes Solid Content
Yes Solid Content
Yes Solid Content
 Estimated
Number Of Estimate sample send Result Received
samples set timing (Hr)

1 1500 @ 9 Jan 2021

1 2200 @ 9 Jan 2021

1 0200 @ 10 Jan 2021
1 0200 @ 10 Jan 2021
1 0200 @ 10 Jan 2021
1 0200 @ 10 Jan 2021
1 0200 @ 10 Jan 2021
1 0200 @ 10 Jan 2021
1 0200 @ 10 Jan 2021
SN Activities description Time (hour)
1 Mix tank ,Day tank & Loop slurry dump to drain 1
2 Mix tank ,Day tank & Loop DIW flush 0.5
3 Charge in 5% KOH to Mix tank ,Day tank & Loop 0.5
4 Communicate with user to flush tool side 0.5
5 5% KOH recirculate in the loop for a minimum 1 hour to flush CMP tools. 1
6 Communicate with user to stop demand 0.5
7 Charge in DIW to the system and supply loop to drain to bring down PH to about pH=7 3

System maintenance ( Mix tank load cell verification & cleaning, Pump inspection and impeller change
8 if needed, Critical valve change if needed, Electrical compartment inspection, Metrology instrucment 3
calibration if needed)
9 Charge in 3% H2O2 to Mix tank ,Day tank & Loop ( Except SS25E ,STI2305 & W7300-A9 ) 1
10 Communicate with user to flush tool side 0.5
11 3% H2O2 recirculate in the loop for a minimum 1 hour to flush CMP tools. 1
12 Communicate with user to stop demand 0.5

13 Charge in DIW to the system and supply loop to drain until DIW return is < 0.3% H2O2 by 1.5
manual titration.
14 Charge in Sacrificial Slurry 2
15 Communicate with user to flush tool side 0.5
16 Tools slurry flushing 1
17 Communicate with user to stop demand 0.5
18 Charge in qualify Slurry and collect sample 2
19 Pending for sampling result 4
Total 24.5