Title Page

APPLIED MATERIALS

300mm Ultima HDP-CVD

Schematics Manual

January 2000 Revision 001

 Confidentiality Notice

The materials and information contained herein are being provided by

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PUBLICATION HISTORY

Revision: 001
Date: January 2000
Cleanroom Part Number 0230-00122
Standard Part Number 0230-00121

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Copyright  Applied Materials, Inc., 1999, 2000

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Applied Materials manuals.

Name Owner

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X-Acto Registered trademark of Hunt Manufacturing Co.
CONTENT C 300mm Ultima HDP-CVD SCHEMATICS 311-019-02 C-1

Table of Contents

Title Page

1 AC Power Distribution Schematics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

2 Chamber Interconnect Schematics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

3 Cables And Harnesses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

4 Printed Circuit Boards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

5 Gas Panel Schematic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

6 Chamber I/O Assignment Lists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

C-2 311-019-02 300mm Ultima HDP-CVD SCHEMATICS CONTENT C

Engineering Part No. 0140-01122 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

List of Figures Figure 3-11. 300mm Ultima HDP-CVD Motor Driver Interface Harness (1 of 2)
Engineering Part No. 0140-01140 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Title Page
Figure 3-12. 300mm Ultima HDP-CVD Motor Driver Interface Harness (2 of 2)
Engineering Part No. 0140-01140 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Figure 1-1. 300mm Ultima HDP-CVD AC Rack Wiring Diagram Figure 3-13. 300mm Ultima HDP-CVD Pressure Transducer (1–6) Harness
Engineering Part No. 0080-00177. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2 Engineering Part No. 0140-01157 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Figure 1-2. 300mm Ultima HDP-CVD Primary AC Box Schematic (1 of 5) Figure 3-14. 300mm Ultima HDP-CVD Pressure Transducer (7–12) Harness
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3 Engineering Part No. 0140-01158 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
Figure 1-3. 300mm Ultima HDP-CVD Primary AC Box Schematic (2 of 5) Figure 3-15. 300mm Ultima HDP-CVD Gas Panel Door Interlock Harness
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4 Engineering Part No. 0140-01159 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
Figure 1-4. 300mm Ultima HDP-CVD Primary AC Box Schematic (3 of 5) Figure 3-16. 300mm Ultima HDP-CVD Gas Distribution Board to EV Manifold Harness
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5 Engineering Part No. 0140-01160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
Figure 1-5. 300mm Ultima HDP-CVD Primary AC Box Schematic (4 of 5) Figure 3-17. 300mm Ultima HDP-CVD DC DNET I/O Distribution Harness
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6 Engineering Part No. 0140-01161 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
Figure 1-6. 300mm Ultima HDP-CVD Primary AC Box Schematic (5 of 5) Figure 3-18. 300mm Ultima HDP-CVD DC Filter Interlock
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7 Engineering Part No. 0140-01175 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
Figure 1-7. 300mm Ultima HDP-CVD Secondary AC Box Schematic (1 of 4) Figure 3-19. 300mm Ultima HDP-CVD Water Leak Detect
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8 Engineering Part No. 0140-01176 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
Figure 1-8. 300mm Ultima HDP-CVD Secondary AC Box Schematic (2 of 4) Figure 3-20. 300mm Ultima HDP-CVD Smoke Sensor Harness
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9 Engineering Part No. 0140-01226 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
Figure 1-9. 300mm Ultima HDP-CVD Secondary AC Box Schematic (3 of 4) Figure 3-21. 300mm Ultima HDP-CVD Pressure Transducer (7–12) Harness
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10 Engineering Part No. 0140-01654 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
Figure 1-10. 300mm Ultima HDP-CVD Secondary AC Box Schematic (3 of 4) Figure 3-22. 300mm Ultima HDP-CVD Baratron Service Line
Engineering Part No. 0180-00201. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11 Engineering Drawing No. 0150-1126 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
Figure 2-1. 300mm Ultima HDP-CVD DNET Interconnect Figure 3-23. 300mm Ultima HDP-CVD Ground 1, RF Rack
Engineering Drawing No. 0180-00291 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2 Engineering Drawing No. 0150-01132 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24
Figure 2-2. 300mm Ultima HDP-CVD Interconnect Diagram (1 of 5) Figure 3-24. 300mm Ultima HDP-CVD AC Distribution Cable Assembly
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3 Engineering Drawing No. 0150-01194 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25
Figure 2-3. 300mm Ultima HDP-CVD Interconnect Diagram (2 of 5) Figure 3-25. 300mm Ultima HDP-CVD Chamber Pneumatic Cable Assembly
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4 Engineering Drawing No. 0150-01252 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
Figure 2-4. 300mm Ultima HDP-CVD Interconnect Diagram (3 of 5) Figure 3-26. 300mm Ultima HDP-CVD Mainframe-Chamber Interlock
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5 Engineering Part No. 0150-01253 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
Figure 2-5. 300mm Ultima HDP-CVD Interconnect Diagram (4 of 5) Figure 3-27. 300mm Ultima HDP-CVD Source RF Generator Remote Control
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6 Engineering Part No. 0150-01254 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
Figure 2-6. 300mm Ultima HDP-CVD Interconnect Diagram (5 of 5) Figure 3-28. 300mm Ultima HDP-CVD Turbo Control
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7 Engineering Part No. 0150-01255 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
Figure 2-7. 300mm Ultima HDP-CVD RF Rack Interconnect Figure 3-29. 300mm Ultima HDP-CVD Cable Assy. DNET I/O Backplane
Engineering Drawing No. 0140-76468 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8 Engineering Part No. 0150-01264 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
Figure 2-8. 300mm Ultima HDP-CVD Chamber Interlocks (1 of 2) . . . . . . . . . . . . . . . . . .2-9 Figure 3-30. 300mm Ultima HDP-CVD Motor Interface Harness
Figure 2-9. 300mm Ultima HDP-CVD Chamber Interlocks (2 of 2) . . . . . . . . . . . . . . . . . .2-10 Engineering Part No. 0150-01267 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
Figure 3-1. 300mm Ultima HDP-CVD Water Leak Detect Harness Figure 3-31. 300mm Ultima HDP-CVD Chamber-Gas Panel Interlocks Harness
Engineering Part No. 0140-01052. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2 Engineering Part No. 0150-01279 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
Figure 3-2. 300mm Ultima HDP-CVD DNET I/O Ribbon Figure 3-32. 300mm Ultima HDP-CVD Chassis Ground Gas Panel PCB
Engineering Part No. 0140-01113. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3 Engineering Part No. 0150-01284 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33
Figure 3-3. 300mm Ultima HDP-CVD Microwave and Helium Control Harness (1 of 2) Figure 3-33. 300mm Ultima HDP-CVD Pump Interlock Cable
Engineering Part No. 0140-01119. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4 Engineering Part No. 0150-01511 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
Figure 3-4. 300mm Ultima HDP-CVD Microwave and Helium Control Harness (2 of 2) Figure 3-34. 300mm Ultima HDP-CVD Top Source/ Chamber RF Gen Control
Engineering Part No. 0140-01119. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5 Engineering Part No. 0150-01819 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
Figure 3-5. 300mm Ultima HDP-CVD Water Leak and Flow Harness (1 of 2) Figure 3-35. 300mm Ultima HDP-CVD Side Source/ Chamber RF Gen Control
Engineering Part No. 0140-01120. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6 Engineering Part No. 0150-01820 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36
Figure 3-6. 300mm Ultima HDP-CVD Water Leak and Flow Harness (2 of 2) Figure 3-36. 300mm Ultima HDP-CVD Bias / Chamber RF Gen Control
Engineering Part No. 0140-01120. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7 Engineering Part No. 0150-01821 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37
Figure 3-7. 300mm Ultima HDP-CVD Chamber and Foreline Pressure Harness (1 of 2) Figure 3-37. 300mm Ultima HDP-CVD Echuck Control
Engineering Part No. 0140-01121. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8 Engineering Part No. 0150-01822 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
Figure 3-8. 300mm Ultima HDP-CVD Chamber and Foreline Pressure Harness (2 of 2) Figure 3-38. 300mm Ultima HDP-CVD Cable l/O Block 44 Pos.
Engineering Part No. 0140-01121. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9 Engineering Part No. 0150-36656 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
Figure 3-9. 300mm Ultima HDP-CVD Chamber Interconnect Harness (1 of 2) Figure 3-39. 300mm Ultima HDP-CVD Cable l/O Block 66 Pos.
Engineering Part No. 0140-01122. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-10 Engineering Part No. 0150-36657 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-40
Figure 3-10. 300mm Ultima HDP-CVD Chamber Interconnect Harness (2 of 2) Figure 4-1. 300mm Ultima HDP-CVD Gas Panel Distribution Board . . . . . . . . . . . . . . . . 4-2
CONTENT C 300mm Ultima HDP-CVD SCHEMATICS 311-019-02 C-3

Figure 4-2. 300mm Ultima HDP-CVD Remote Distribution Board

Engineering Part No. 0100-00444 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Figure 4-3. 300mm Ultima HDP-CVD Remote Distribution Board Schematic (1 of 2)
Engineering Part No. 0100-00444 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Figure 4-4. 300mm Ultima HDP-CVD Remote Distribution Board Schematic (2 of 2)
Engineering Part No. 0100-00444 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Figure 4-5. 300mm Ultima HDP-CVD Gas Panel Controller Backplane
Engineering Drawing No. 0100-00446 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Figure 4-6. 300mm Ultima HDP-CVD Gas Panel Controller Backplane
Engineering Drawing No. 0110-00446 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Figure 4-7. 300mm Ultima HDP-CVD Gas Panel Controller Backplane
Engineering Drawing No. 0130-00446 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Figure 4-8. 300mm Ultima HDP-CVD Smoke/ Water Distribution Board
Engineering Part No. 0110-00445 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Figure 4-9. 300mm Ultima HDP-CVD Smoke/ Water Distribution Board
Engineering Part No. 0130-00445 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Figure 4-10. 300mm Ultima HDP-CVD Chamber Distribution PCB
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
Figure 4-11. 300mm Ultima HDP-CVD Chamber Distribution PCB (1 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
Figure 4-12. 300mm Ultima HDP-CVD Chamber Distribution PCB (2 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Figure 4-13. 300mm Ultima HDP-CVD Chamber Distribution PCB (3 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
Figure 4-14. 300mm Ultima HDP-CVD Chamber Distribution PCB (4 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
Figure 4-15. 300mm Ultima HDP-CVD Chamber Distribution PCB (5 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
Figure 4-16. 300mm Ultima HDP-CVD Chamber Distribution PCB (6 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
Figure 4-17. 300mm Ultima HDP-CVD Chamber Distribution PCB (7 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
Figure 4-18. 300mm Ultima HDP-CVD Chamber Distribution PCB (8 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
Figure 5-1. 300mm Ultima HDP-CVD FSG-SiN Gas Panel Schematic (1 of 2)
Engineering Drawing No. 0080-00335 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Figure 5-2. 300mm Ultima HDP-CVD FSG-SiN Gas Panel Schematic (2 of 2)
Engineering Drawing No. 0080-00335 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Figure 5-3. 300mm Ultima HDP-CVD PSG Gas Panel Schematic (1 of 2)
Engineering Drawing No. 0080-00289 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Figure 5-4. 300mm Ultima HDP-CVD PSG Gas Panel Schematic (2 of 2)
Engineering Drawing No. 0080-00289 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Figure 5-5. 300mm Ultima HDP-CVD USG Gas Panel Schematic (1 of 2)
Engineering Drawing No. 0080-00358 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Figure 5-6. 300mm Ultima HDP-CVD USG Gas Panel Schematic (2 of 2)
Engineering Drawing No. 0080-00358 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
C-4 311-019-02 300mm Ultima HDP-CVD SCHEMATICS CONTENT C

List of Tables

Title Page

Table 6-1. 300mm Ultima HDP-CVD Chmaber MAC ID Assignments . . . . . . . . . . . . . . 6-2

Table 6-2. 300mm Ultima HDP-CVD Chamber I/O Listing . . . . . . . . . . . . . . . . . . . . . . . 6-3
CHAPTER 1 AC Power Distribution Schematics 311-019-02 1-1

1 AC Power Distribution Schematics

List Of Figures
Title Page

Figure 1-1 300mm Ultima HDP-CVD AC Rack Wiring Diagram

Engineering Part No. 0080-00177 . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Figure 1-2 300mm Ultima HDP-CVD Primary AC Box Schematic (1 of 5)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-3 300mm Ultima HDP-CVD Primary AC Box Schematic (2 of 5)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Figure 1-4 300mm Ultima HDP-CVD Primary AC Box Schematic (3 of 5)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Figure 1-5 300mm Ultima HDP-CVD Primary AC Box Schematic (4 of 5)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-6 300mm Ultima HDP-CVD Primary AC Box Schematic (5 of 5)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Figure 1-7 300mm Ultima HDP-CVD Secondary AC Box Schematic (1 of 4)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Figure 1-8 300mm Ultima HDP-CVD Secondary AC Box Schematic (2 of 4)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Figure 1-9 300mm Ultima HDP-CVD Secondary AC Box Schematic (3 of 4)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Figure 1-10 300mm Ultima HDP-CVD Secondary AC Box Schematic (3 of 4)
Engineering Part No. 0180-00201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
 1-2 311-019-02 AC Power Distribution Schematics CHAPTER 1

MAIN CB (MAIN CB
400A 400A)
Main CB 400A
Main Contactor 400A
2 Secondary CB’s Ch. A,B - 150A Each
GFI 3 Independent Loops (30 mA each)
3 Sub Panels MF - 24 Positions, Ch. A,B - 30 Positions Each
MASTER 24V AC 2 XFMR’s 120 VAC 4 KVA, 3 KVA
EMO 1/2 KVA
CIRCUITRY
4 Contactors 50A each (2 per Chamber)
XFMR
Drivers 2 Drivers per Chamber (8"x8"x8")
UPS 3 KVA MF, 1 KVA (To Support 4 Chambers)
MAIN Smoke/Water PCB + 2 Sensors (Rear and Front) MAIN
CONTACTOR CONTACTOR
400A 400A

CH. A CH. B
T.B. T.B.

CBMF & SEE DETAIL A

COMMON FOR CH. C/D
CH. A CONFIG. CH. B
MAIN CB MAIN CB CB MF &
150A 150A GFI CIRCUIT
MF GFI
CIRCUIT
CH. A CH. A
GFI MF COMMON GFI
CIRCUIT CIRCUIT
3P CB 80A
CH. A LOADS CH. B LOADS
2P CB 30A MF COMMON MF SWLL 2P CB 30A
MAINFRAME
GFI CIRCUIT
CH. A DRIVER #1 3P CB 30A 3P CB 20A CH. B DRIVER #1
CH. A DRIVER CH. B DRIVER
T. BLOCK CONTACTOR CONTACTOR T. BLOCK
3P CB 50A 3P CB 50A
50A MAINFRAME MF XFER 50A

CH. A DRIVER #2 3P CB 40A 3P CB 20A CH. B DRIVER #2

CH. A ASTRON CH. B ASTRON
T. ASTRON CONTACTOR CONTACTOR T. ASTRON
3P CB 30A 3P CB 30A
50A 50A
MAINFRAME MF XFER

CH. A TURBO 2P CB 50A 2P CB 20A CH. B TURBO

2P CB 20A 2P CB 20A

CH. A HE/ MF SWLL CH. B HE/

SPARE SPARE
2P CB 30A
3P CB 30A 3P CB 30A

CH. A PUMP CH. B PUMP

3P CB 30A 3P CB 30A
CH A/B 3KVA CABINET
120 VAC CH. A/B 3-KVA
CH. A TOP RF CB 80A CH. B TOP RF XFMR
3P CB 40A 3P CB 40A CB 20A
MF 120V
CH. A SIDE RF MF 120V MF 120V CH. B SIDE RF
3P CB 40A 3P CB 40A 3-KVA 120VAC
XFMR
CH. A BIAS RF CH A 120V FACTORY CH. B BIAS RF
3P CB 70A 3P CB 70A
120V
CH. A RF CTRL CH. B RF CTRL
2P CB 20A CH B 120V 2P CB 20A
FACTORY CABINET
CH. C CH. D
120 VAC
CH. A SPARE CH. B SPARE 120 VAC 120 VAC
120V UPS
3P CB 30A 3P CB 30A

CH A/B 4-KVA MF 3-KVA UPS

120 VAC MF 120V WORK
2P CB 30A

CHAMBERS

GND GND
VME
CONTROLLER

T.B. A (12P) T.B. C (3P) T.B. B (3P) T.B. B (2P) T.B. B (2P) T.B. B (3P) T.B. C (3P) T.B. A (12P)

150A, 3P 150A, 3P
CB CB

CH. A SMC CH. B

PUMP HE PUMP

Figure 1-1. 300mm Ultima HDP-CVD AC Rack Wiring Diagram

Engineering Part No. 0080-00177
 CHAPTER 1 AC Power Distribution Schematics 311-019-02 1-3

Figure 1-2. 300mm Ultima HDP-CVD Primary AC Box Schematic (1 of 5)

Engineering Part No. 0180-00201
 1-4 311-019-02 AC Power Distribution Schematics CHAPTER 1

Figure 1-3. 300mm Ultima HDP-CVD Primary AC Box Schematic (2 of 5)

Engineering Part No. 0180-00201
 CHAPTER 1 AC Power Distribution Schematics 311-019-02 1-5

Figure 1-4. 300mm Ultima HDP-CVD Primary AC Box Schematic (3 of 5)

Engineering Part No. 0180-00201
 1-6 311-019-02 AC Power Distribution Schematics CHAPTER 1

Figure 1-5. 300mm Ultima HDP-CVD Primary AC Box Schematic (4 of 5)

Engineering Part No. 0180-00201
 CHAPTER 1 AC Power Distribution Schematics 311-019-02 1-7

Figure 1-6. 300mm Ultima HDP-CVD Primary AC Box Schematic (5 of 5)

Engineering Part No. 0180-00201
 1-8 311-019-02 AC Power Distribution Schematics CHAPTER 1

Figure 1-7. 300mm Ultima HDP-CVD Secondary AC Box Schematic (1 of 4)

Engineering Part No. 0180-00201
 CHAPTER 1 AC Power Distribution Schematics 311-019-02 1-9

Figure 1-8. 300mm Ultima HDP-CVD Secondary AC Box Schematic (2 of 4)

Engineering Part No. 0180-00201
 1-10 311-019-02 AC Power Distribution Schematics CHAPTER 1

Figure 1-9. 300mm Ultima HDP-CVD Secondary AC Box Schematic (3 of 4)

Engineering Part No. 0180-00201
 CHAPTER 1 AC Power Distribution Schematics 311-019-02 1-11

Figure 1-10. 300mm Ultima HDP-CVD Secondary AC Box Schematic (3 of 4)

Engineering Part No. 0180-00201
1-12 311-019-02 AC Power Distribution Schematics CHAPTER 1
CHAPTER 2 Chamber Interconnect Schematics 311-019-02 2-1

2 Chamber Interconnect Schematics

List Of Figures
Title Page

Figure 2-1 300mm Ultima HDP-CVD DNET Interconnect

Engineering Drawing No. 0180-00291 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Figure 2-2 300mm Ultima HDP-CVD Interconnect Diagram (1 of 5)
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Figure 2-3 300mm Ultima HDP-CVD Interconnect Diagram (2 of 5)
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Figure 2-4 300mm Ultima HDP-CVD Interconnect Diagram (3 of 5)
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Figure 2-5 300mm Ultima HDP-CVD Interconnect Diagram (4 of 5)
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Figure 2-6 300mm Ultima HDP-CVD Interconnect Diagram (5 of 5)
Engineering Drawing No. 0180-00225 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
Figure 2-7 300mm Ultima HDP-CVD RF Rack Interconnect
Engineering Drawing No. 0140-76468 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Figure 2-8 300mm Ultima HDP-CVD Chamber Interlocks (1 of 2)
Engineering Part No. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Figure 2-9 300mm Ultima HDP-CVD Chamber Interlocks (2 of 2)
Engineering Part No. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
 2-2 311-019-02 Chamber Interconnect Schematics CHAPTER 2

Figure 2-1. 300mm Ultima HDP-CVD DNET Interconnect

Engineering Drawing No. 0180-00291
 CHAPTER 2 Chamber Interconnect Schematics 311-019-02 2-3

Figure 2-2. 300mm Ultima HDP-CVD Interconnect Diagram (1 of 5)

Engineering Drawing No. 0180-00225
 2-4 311-019-02 Chamber Interconnect Schematics CHAPTER 2

Figure 2-3. 300mm Ultima HDP-CVD Interconnect Diagram (2 of 5)

Engineering Drawing No. 0180-00225
 CHAPTER 2 Chamber Interconnect Schematics 311-019-02 2-5

Figure 2-4. 300mm Ultima HDP-CVD Interconnect Diagram (3 of 5)

Engineering Drawing No. 0180-00225
 2-6 311-019-02 Chamber Interconnect Schematics CHAPTER 2

Figure 2-5. 300mm Ultima HDP-CVD Interconnect Diagram (4 of 5)

Engineering Drawing No. 0180-00225
 CHAPTER 2 Chamber Interconnect Schematics 311-019-02 2-7

Figure 2-6. 300mm Ultima HDP-CVD Interconnect Diagram (5 of 5)

Engineering Drawing No. 0180-00225
 2-8 311-019-02 Chamber Interconnect Schematics CHAPTER 2

0150-01822
0150-01820

0150-01819

Figure 2-7. 300mm Ultima HDP-CVD RF Rack Interconnect

Engineering Drawing No. 0140-76468
 CHAPTER 2 Chamber Interconnect Schematics 311-019-02 2-9

Figure 2-8. 300mm Ultima HDP-CVD Chamber Interlocks (1 of 2)

 2-10 311-019-02 Chamber Interconnect Schematics CHAPTER 2

Figure 2-9. 300mm Ultima HDP-CVD Chamber Interlocks (2 of 2)

CHAPTER 3 Cables And Harnesses 311-019-02 3-1

3 Cables And Harnesses

List of Figures List of Figures

Title Page Title Page

Figure 3-1 300mm Ultima HDP-CVD Water Leak Detect Harness Figure 3-21 300mm Ultima HDP-CVD Pressure Transducer (7-12) Harness
Engineering Part No. 0140-01052 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 Engineering Part No. 0140-01654 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-22
Figure 3-2 300mm Ultima HDP-CVD DNET I/O Ribbon Figure 3-22 300mm Ultima HDP-CVD Baratron Service Line
Engineering Part No. 0140-01113 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3 Engineering Drawing No. 0150-1126 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-23
Figure 3-3 300mm Ultima HDP-CVD Microwave and Helium Control Harness (1 of 2) Figure 3-23 300mm Ultima HDP-CVD Ground 1, RF Rack
Engineering Part No. 0140-01119 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4 Engineering Drawing No. 0150-01132 . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-24
Figure 3-4 300mm Ultima HDP-CVD Microwave and Helium Control Harness (2 of 2) Figure 3-24 300mm Ultima HDP-CVD AC Distribution Cable Assembly
Engineering Part No. 0140-01119. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5 Engineering Drawing No. 0150-01194 . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25
Figure 3-5 300mm Ultima HDP-CVD Water Leak and Flow Harness (1 of 2) Figure 3-25 300mm Ultima HDP-CVD Chamber Pneumatic Cable Assembly
Engineering Part No. 0140-01120 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6 Engineering Drawing No. 0150-01252 . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26
Figure 3-6 300mm Ultima HDP-CVD Water Leak and Flow Harness (2 of 2) Figure 3-26 300mm Ultima HDP-CVD Mainframe-Chamber Interlock
Engineering Part No. 0140-01120 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7 Engineering Part No. 0150-01253 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-27
Figure 3-7 300mm Ultima HDP-CVD Chamber and Foreline Pressure Harness (1 of 2) Figure 3-27 300mm Ultima HDP-CVD Source RF Generator Remote Control
Engineering Part No. 0140-01121 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8 Engineering Part No. 0150-01254 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-28
Figure 3-8 300mm Ultima HDP-CVD Chamber and Foreline Pressure Harness (2 of 2) Figure 3-28 300mm Ultima HDP-CVD Turbo Control
Engineering Part No. 0140-01121 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9 Engineering Part No. 0150-01255 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-29
Figure 3-9 300mm Ultima HDP-CVD Chamber Interconnect Harness (1 of 2) Figure 3-29 300mm Ultima HDP-CVD Cable Assy. DNET I/O Backplane
Engineering Part No. 0140-01122 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10 Engineering Part No. 0150-01264 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-30
Figure 3-10 300mm Ultima HDP-CVD Chamber Interconnect Harness (2 of 2) Figure 3-30 300mm Ultima HDP-CVD Motor Interface Harness
Engineering Part No. 0140-01122 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11 Engineering Part No. 0150-01267 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-31
Figure 3-11 300mm Ultima HDP-CVD Motor Driver Interface Harness (1 of 2) Figure 3-31 300mm Ultima HDP-CVD Chamber-Gas Panel Interlocks Harness
Engineering Part No. 0140-01140 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12 Engineering Part No. 0150-01279 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-32
Figure 3-12 300mm Ultima HDP-CVD Motor Driver Interface Harness (2 of 2) Figure 3-32 300mm Ultima HDP-CVD Chassis Ground Gas Panel PCB
Engineering Part No. 0140-01140 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13 Engineering Part No. 0150-01284 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-33
Figure 3-13 300mm Ultima HDP-CVD Pressure Transducer(1-6) Harness Figure 3-33 300mm Ultima HDP-CVD Pump Interlock Cable
Engineering Part No. 0140-01157 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14 Engineering Part No. 0150-01511 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-34
Figure 3-14 300mm Ultima HDP-CVD Pressure Transducer(7-12) Harness Figure 3-34 300mm Ultima HDP-CVD Top Source/ Chamber RF Gen Control
Engineering Part No. 0140-01158 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15 Engineering Part No. 0150-01819 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-35
Figure 3-15 300mm Ultima HDP-CVD Gas Panel Door Interlock Harness Figure 3-35 300mm Ultima HDP-CVD Side Source/ Chamber RF Gen Control
Engineering Part No. 0140-01159 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16 Engineering Part No. 0150-01820 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-36
Figure 3-16 300mm Ultima HDP-CVD Gas Distribution Board to EV Manifold Harness Figure 3-36 300mm Ultima HDP-CVD Bias / Chamber RF Gen Control
Engineering Part No. 0140-01160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17 Engineering Part No. 0150-01821 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-37
Figure 3-17 300mm Ultima HDP-CVD DC DNET I/O Distribution Harness Figure 3-37 300mm Ultima HDP-CVD Echuck Control
Engineering Part No. 0140-01161 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18 Engineering Part No. 0150-01822 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-38
Figure 3-18 300mm Ultima HDP-CVD DC filter Interlock Figure 3-38 300mm Ultima HDP-CVD Cable l/O Block 44 Pos.
Engineering Part No. 0140-01175 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19 Engineering Part No. 0150-36656 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-39
Figure 3-19 300mm Ultima HDP-CVD Water Leak Detect Figure 3-39 300mm Ultima HDP-CVD Cable l/O Block 66 Pos.
Engineering Part No. 0140-01176 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20 Engineering Part No. 0150-36657 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-40
Figure 3-20 300mm Ultima HDP-CVD Smoke Sensor Harness
Engineering Part No. 0140-01226 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
 3-2 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-1. 300mm Ultima HDP-CVD Water Leak Detect Harness

Engineering Part No. 0140-01052
 CHAPTER 3 Cables And Harnesses 311-019-02 3-3

Figure 3-2. 300mm Ultima HDP-CVD DNET I/O Ribbon

Engineering Part No. 0140-01113
 3-4 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-3. 300mm Ultima HDP-CVD Microwave and Helium Control Harness (1 of 2)
Engineering Part No. 0140-01119
 CHAPTER 3 Cables And Harnesses 311-019-02 3-5

Figure 3-4. 300mm Ultima HDP-CVD Microwave and Helium Control Harness (2 of 2)
Engineering Part No. 0140-01119.
 3-6 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-5. 300mm Ultima HDP-CVD Water Leak and Flow Harness (1 of 2)
Engineering Part No. 0140-01120
 CHAPTER 3 Cables And Harnesses 311-019-02 3-7

Figure 3-6. 300mm Ultima HDP-CVD Water Leak and Flow Harness (2 of 2)
Engineering Part No. 0140-01120
 3-8 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-7. 300mm Ultima HDP-CVD Chamber and Foreline Pressure Harness (1 of 2)
Engineering Part No. 0140-01121
 CHAPTER 3 Cables And Harnesses 311-019-02 3-9

Figure 3-8. 300mm Ultima HDP-CVD Chamber and Foreline Pressure Harness (2 of 2)
Engineering Part No. 0140-01121
 3-10 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-9. 300mm Ultima HDP-CVD Chamber Interconnect Harness (1 of 2)

Engineering Part No. 0140-01122
 CHAPTER 3 Cables And Harnesses 311-019-02 3-11

Figure 3-10. 300mm Ultima HDP-CVD Chamber Interconnect Harness (2 of 2)

Engineering Part No. 0140-01122
 3-12 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-11. 300mm Ultima HDP-CVD Motor Driver Interface Harness (1 of 2)

Engineering Part No. 0140-01140
 CHAPTER 3 Cables And Harnesses 311-019-02 3-13

Figure 3-12. 300mm Ultima HDP-CVD Motor Driver Interface Harness (2 of 2)

Engineering Part No. 0140-01140
 3-14 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-13. 300mm Ultima HDP-CVD Pressure Transducer (1–6) Harness

Engineering Part No. 0140-01157
 CHAPTER 3 Cables And Harnesses 311-019-02 3-15

Figure 3-14. 300mm Ultima HDP-CVD Pressure Transducer (7–12) Harness

Engineering Part No. 0140-01158
 3-16 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-15. 300mm Ultima HDP-CVD Gas Panel Door Interlock Harness
Engineering Part No. 0140-01159
 CHAPTER 3 Cables And Harnesses 311-019-02 3-17

Figure 3-16. 300mm Ultima HDP-CVD Gas Distribution Board to EV Manifold Harness
Engineering Part No. 0140-01160
 3-18 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-17. 300mm Ultima HDP-CVD DC DNET I/O Distribution Harness

Engineering Part No. 0140-01161
 CHAPTER 3 Cables And Harnesses 311-019-02 3-19

Figure 3-18. 300mm Ultima HDP-CVD DC Filter Interlock

Engineering Part No. 0140-01175
 3-20 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-19. 300mm Ultima HDP-CVD Water Leak Detect

Engineering Part No. 0140-01176
 CHAPTER 3 Cables And Harnesses 311-019-02 3-21

Figure 3-20. 300mm Ultima HDP-CVD Smoke Sensor Harness

Engineering Part No. 0140-01226
 3-22 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-21. 300mm Ultima HDP-CVD Pressure Transducer (7–12) Harness

Engineering Part No. 0140-01654
 CHAPTER 3 Cables And Harnesses 311-019-02 3-23

Figure 3-22. 300mm Ultima HDP-CVD Baratron Service Line

Engineering Drawing No. 0150-1126
 3-24 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-23. 300mm Ultima HDP-CVD Ground 1, RF Rack

Engineering Drawing No. 0150-01132
 CHAPTER 3 Cables And Harnesses 311-019-02 3-25

Figure 3-24. 300mm Ultima HDP-CVD AC Distribution Cable Assembly

Engineering Drawing No. 0150-01194
 3-26 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-25. 300mm Ultima HDP-CVD Chamber Pneumatic Cable Assembly

Engineering Drawing No. 0150-01252
 CHAPTER 3 Cables And Harnesses 311-019-02 3-27

Figure 3-26. 300mm Ultima HDP-CVD Mainframe-Chamber Interlock

Engineering Part No. 0150-01253
 3-28 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-27. 300mm Ultima HDP-CVD Source RF Generator Remote Control

Engineering Part No. 0150-01254
 CHAPTER 3 Cables And Harnesses 311-019-02 3-29

Figure 3-28. 300mm Ultima HDP-CVD Turbo Control

Engineering Part No. 0150-01255
 3-30 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-29. 300mm Ultima HDP-CVD Cable Assy. DNET I/O Backplane
Engineering Part No. 0150-01264
 CHAPTER 3 Cables And Harnesses 311-019-02 3-31

Figure 3-30. 300mm Ultima HDP-CVD Motor Interface Harness

Engineering Part No. 0150-01267
 3-32 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-31. 300mm Ultima HDP-CVD Chamber-Gas Panel Interlocks Harness

Engineering Part No. 0150-01279
 CHAPTER 3 Cables And Harnesses 311-019-02 3-33

Figure 3-32. 300mm Ultima HDP-CVD Chassis Ground Gas Panel PCB
Engineering Part No. 0150-01284
 3-34 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-33. 300mm Ultima HDP-CVD Pump Interlock Cable

Engineering Part No. 0150-01511
 CHAPTER 3 Cables And Harnesses 311-019-02 3-35

Figure 3-34. 300mm Ultima HDP-CVD Top Source/ Chamber RF Gen Control
Engineering Part No. 0150-01819
 3-36 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-35. 300mm Ultima HDP-CVD Side Source/ Chamber RF Gen Control
Engineering Part No. 0150-01820
 CHAPTER 3 Cables And Harnesses 311-019-02 3-37

Figure 3-36. 300mm Ultima HDP-CVD Bias / Chamber RF Gen Control

Engineering Part No. 0150-01821
 3-38 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-37. 300mm Ultima HDP-CVD Echuck Control

Engineering Part No. 0150-01822
 CHAPTER 3 Cables And Harnesses 311-019-02 3-39

Figure 3-38. 300mm Ultima HDP-CVD Cable l/O Block 44 Pos.

Engineering Part No. 0150-36656
 3-40 311-019-02 Cables And Harnesses CHAPTER 3

Figure 3-39. 300mm Ultima HDP-CVD Cable l/O Block 66 Pos.

Engineering Part No. 0150-36657
CHAPTER 4 Printed Circuit Boards 311-019-02 4-1

4 Printed Circuit Boards

List of Figures

Title Page

Figure 4-1 300mm Ultima HDP-CVD Gas Panel Distribution Board

Engineering Part No. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Figure 4-2 300mm Ultima HDP-CVD Remote Distribution Board
Engineering Part No. 0100-00444 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Figure 4-3 300mm Ultima HDP-CVD Remote Distribution Board Schematic (1 of 2)
Engineering Part No. 0100-00444 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Figure 4-4 300mm Ultima HDP-CVD Remote Distribution Board Schematic (2 of 2)
Engineering Part No. 0100-00444 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Figure 4-5 300mm Ultima HDP-CVD Gas Panel Controller Backplane
Engineering Part No. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Figure 4-6 300mm Ultima HDP-CVD Gas Panel Controller Backplane
Engineering Part No. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Figure 4-7 300mm Ultima HDP-CVD Gas Panel Controller Backplane
Engineering Part No. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Figure 4-8 300mm Ultima HDP-CVD Smoke/ Water Distribution Board
Engineering Part No. 0110-00445 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Figure 4-9 300mm Ultima HDP-CVD Smoke/ Water Distribution Board
Engineering Part No. 0130-00445 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Figure 4-10 300mm Ultima HDP-CVD Chamber Distribution PCB
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
Figure 4-11 300mm Ultima HDP-CVD Chamber Distribution PCB (1 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
Figure 4-12 300mm Ultima HDP-CVD Chamber Distribution PCB (2 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Figure 4-13 300mm Ultima HDP-CVD Chamber Distribution PCB (3 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
Figure 4-14 300mm Ultima HDP-CVD Chamber Distribution PCB (4 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
Figure 4-15 300mm Ultima HDP-CVD Chamber Distribution PCB(5 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
Figure 4-16 300mm Ultima HDP-CVD Chamber Distribution PCB (6 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
Figure 4-17 300mm Ultima HDP-CVD Chamber Distribution PCB (7 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
Figure 4-18 300mm Ultima HDP-CVD Chamber Distribution PCB (8 of 8)
Engineering Part No. 0100-00439 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
 4-2 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-1. 300mm Ultima HDP-CVD Gas Panel Distribution Board

 CHAPTER 4 Printed Circuit Boards 311-019-02 4-3

Figure 4-2. 300mm Ultima HDP-CVD Remote Distribution Board

Engineering Part No. 0100-00444
 4-4 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-3. 300mm Ultima HDP-CVD Remote Distribution Board Schematic (1 of 2)

Engineering Part No. 0100-00444
 CHAPTER 4 Printed Circuit Boards 311-019-02 4-5

Figure 4-4. 300mm Ultima HDP-CVD Remote Distribution Board Schematic (2 of 2)

Engineering Part No. 0100-00444
 4-6 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-5. 300mm Ultima HDP-CVD Gas Panel Controller Backplane

Engineering Drawing No. 0100-00446
 CHAPTER 4 Printed Circuit Boards 311-019-02 4-7

Figure 4-6. 300mm Ultima HDP-CVD Gas Panel Controller Backplane

Engineering Drawing No. 0110-00446
 4-8 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-7. 300mm Ultima HDP-CVD Gas Panel Controller Backplane

Engineering Drawing No. 0130-00446
 CHAPTER 4 Printed Circuit Boards 311-019-02 4-9

Figure 4-8. 300mm Ultima HDP-CVD Smoke/ Water Distribution Board

Engineering Part No. 0110-00445
 4-10 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-9. 300mm Ultima HDP-CVD Smoke/ Water Distribution Board

Engineering Part No. 0130-00445
 CHAPTER 4 Printed Circuit Boards 311-019-02 4-11

Figure 4-10. 300mm Ultima HDP-CVD Chamber Distribution PCB

Engineering Part No. 0100-00439
 4-12 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-11. 300mm Ultima HDP-CVD Chamber Distribution PCB (1 of 8)

Engineering Part No. 0100-00439
 CHAPTER 4 Printed Circuit Boards 311-019-02 4-13

Figure 4-12. 300mm Ultima HDP-CVD Chamber Distribution PCB (2 of 8)

Engineering Part No. 0100-00439
 4-14 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-13. 300mm Ultima HDP-CVD Chamber Distribution PCB (3 of 8)

Engineering Part No. 0100-00439
 CHAPTER 4 Printed Circuit Boards 311-019-02 4-15

Figure 4-14. 300mm Ultima HDP-CVD Chamber Distribution PCB (4 of 8)

Engineering Part No. 0100-00439
 4-16 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-15. 300mm Ultima HDP-CVD Chamber Distribution PCB (5 of 8)

Engineering Part No. 0100-00439
 CHAPTER 4 Printed Circuit Boards 311-019-02 4-17

Figure 4-16. 300mm Ultima HDP-CVD Chamber Distribution PCB (6 of 8)

Engineering Part No. 0100-00439
 4-18 311-019-02 Printed Circuit Boards CHAPTER 4

Figure 4-17. 300mm Ultima HDP-CVD Chamber Distribution PCB (7 of 8)

Engineering Part No. 0100-00439
 CHAPTER 4 Printed Circuit Boards 311-019-02 4-19

Figure 4-18. 300mm Ultima HDP-CVD Chamber Distribution PCB (8 of 8)

Engineering Part No. 0100-00439
4-20 311-019-02 Printed Circuit Boards CHAPTER 4
CHAPTER 5 Gas Panel Schematic 311-019-02 5-1

5 Gas Panel Schematic

List of Figures

Title Page

Figure 5-1 300mm Ultima HDP-CVD FSG-SiN Gas Panel Schematic (1 of 2)

Engineering Drawing No. 0080-00335 . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Figure 5-2 300mm Ultima HDP-CVD FSG-SiN Gas Panel Schematic (2 of 2)
Engineering Drawing No. 0080-00335 . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Figure 5-3 300mm Ultima HDP-CVD PSG Gas Panel Schematic (1 of 2)
Engineering Drawing No. 0080-00289 . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Figure 5-4 300mm Ultima HDP-CVD PSG Gas Panel Schematic (2 of 2)
Engineering Drawing No. 0080-00289 . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Figure 5-5 300mm Ultima HDP-CVD USG Gas Panel Schematic (1 of 2)
Engineering Drawing No. 0080-00358 . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Figure 5-6 300mm Ultima HDP-CVD USG Gas Panel Schematic (2 of 2)
Engineering Drawing No. 0080-00358 . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
 5-2 311-019-02 Gas Panel Schematic CHAPTER 5

Figure 5-1. 300mm Ultima HDP-CVD FSG-SiN Gas Panel Schematic (1 of 2)

Engineering Drawing No. 0080-00335
 CHAPTER 5 Gas Panel Schematic 311-019-02 5-3

Figure 5-2. 300mm Ultima HDP-CVD FSG-SiN Gas Panel Schematic (2 of 2)

Engineering Drawing No. 0080-00335
 5-4 311-019-02 Gas Panel Schematic CHAPTER 5

Figure 5-3. 300mm Ultima HDP-CVD PSG Gas Panel Schematic (1 of 2)

Engineering Drawing No. 0080-00289
 CHAPTER 5 Gas Panel Schematic 311-019-02 5-5

Figure 5-4. 300mm Ultima HDP-CVD PSG Gas Panel Schematic (2 of 2)

Engineering Drawing No. 0080-00289
 5-6 311-019-02 Gas Panel Schematic CHAPTER 5

Figure 5-5. 300mm Ultima HDP-CVD USG Gas Panel Schematic (1 of 2)

Engineering Drawing No. 0080-00358
 CHAPTER 5 Gas Panel Schematic 311-019-02 5-7

Figure 5-6. 300mm Ultima HDP-CVD USG Gas Panel Schematic (2 of 2)

Engineering Drawing No. 0080-00358
5-8 311-019-02 Gas Panel Schematic CHAPTER 5
CHAPTER 6 Chamber I/O Assignment Lists 311-019-02 6-1

6 Chamber I/O Assignment Lists

Because of DNET communications the I/O and MAC ID assignments are not chamber specific, e.g., the isolation valve
DI/O for chamber B is the same as chamber.

This chapter contains the following:

• Table 6-1, 300mm HDP-CVD Chamber MAC ID Assignments

• Table 6-2, 300mm HDP-CVD Chamber I/O Listing
6-2 311-019-02 Chamber I/O Assignment Lists CHAPTER 6

Table 6-1. 300mm Ultima HDP-CVD Chamber MAC ID Assignments

NODE NAME NODE LOCATION MAC ID

SCANNER VME CONTROLLER 0
STEPPER CONTROLLER #1 CHAMBER CONTROLLER BOX 1
STEPPER CONTROLLER #2 CHAMBER CONTROLLER BOX 2
DOME SECONDARY TC CHAMBER SOURCE CONDITIONING BOX 11
AI/O CARD CHAMBER CONTROLLER BOX, SLOT#1 15
DI/O CARD #1 CHAMBER CONTROLLER BOX, SLOT#3 17
DI/O CARD #2 CHAMBER CONTROLLER BOX, SLOT#4 18
DI/O CARD INTLK PCB, CHAMBER CONTROLLER BOX, SLOT#5 19
I/O CARD DRY PUMP 24
MFC #1 GAS PANEL 25
MFC #2 GAS PANEL 26
MFC #3 GAS PANEL 27
MFC #4 GAS PANEL 28
MFC #5 GAS PANEL 29
MFC #6 GAS PANEL 30
MFC #7 GAS PANEL 31
MFC #8 GAS PANEL 32
MFC #9 GAS PANEL 33
MFC #10 GAS PANEL 34
MFC #11 GAS PANEL 35
MFC #12 GAS PANEL 36
DI/O CARD GAS PANEL 3U RACK, SLOT#3 37
AI/O CARD GAS PANEL, 3U RACK, SLOT#4 38
TBD -RESERVED INTLK PCB, GAS PANEL 3U RACK, SLOT#5 39
COMBO DIO/AIO CARD RF RACK 51
CHAPTER 6 Chamber I/O Assignment Lists 311-019-02 6-3

Table 6-2. 300mm Ultima HDP-CVD Chamber I/O Listing

300mm Ultima HDP-CVD I/O Description PCB I/O (MAC ID) Bit # Display / Meaning Remarks (If applicable compatible 200mm HDPCVD I/O)

CHAMBER PRESSURE 100 MTORR MANO AI-15- 0 0…0FFF CHAMBER PRESSURE 100 MTORR MANO
FORELINE PRESSURE 10 TORR CAP MANO AI-15- 1 0…0FFF FORELINE PRESSURE <50 TORR CAP MANO
CHAMBER PRESSURE 10 TORR CAP MANO AI-15- 2 0…0FFF CHAMBER PRESSURE <50 TORR CAP MANO
CHAMBER PRESSURE 1000 TORR CAP MANO AI-15- 3 0…0FFF CHAMBER PRESSURE 1000 TORR CAP MANO
CHAMBER BODY TEMP. AI-15- 4
BIAS RF VOLTAGE AI-15- 5
BIAS RF CURRENT AI-15- 6
TOP ANTENNA CURRENT MONITOR AI-15- 7
TOP ANTENNA VOLTAGE MONITOR AI-15- 8
SIDE ANTENNA CURRENT MONITOR AI-15- 9
SIDE ANTENNA VOLTAGE MONITOR AI-15- 10
IHC # 1 (INNER) PFC FLOW FEEDBACK AI-15- 15 0…0FFF IHC # 1 PFC FLOW FEEDBACK
IHC # 1 (INNER) MANOMETER PRESSURE AI-15- 16 0…0FFF IHC # 1 MANOM PRESSURE
IHC # 2 (OUTER) PFC FLOW FEEDBACK AI-15- 17 0…0FFF IHC # 2 PFC FLOW FEEDBACK
IHC # 2 (OUTER) MANOMETER PRESSURE AI-15- 18 0…0FFF IHC # 2 MANO PRESSURE
EMISSION 1X AI-15- 19 0…0FFF AI # 1 (ENDPOINT)
EMISSION 20X AI-15- 20 0…0FFF AI # 2 (ENDPOINT)
TURBO RPM AI-15- 21 0…0FFF
CURRENT LEVEL OUT AI-15- 22 0…0FFF
VOLTAGE LEVEL OUTPUT AI-15- 23 0…0FFF

IHC # 1 (INNER) PRESSURE SETPOINT AO-15- 0 0…0FFF IHC # 1 PRESSURE SETPOINT

IHC # 2 (OUTER) PRESSURE SETPOINT AO-15- 1 0…0FFF IHC # 2 PRESSURE SETPOINT
HV SETPOINT AO-15- 2 0…0FFF

GATE VALVE ENABLE DI-17- 0 OK 0V="1" GATE VALVE ENABLE DI

GATE VALVE OPEN SENSE DI-17- 2 OK 0V="1" GATE VALVE OPEN SENSE
GATE VALVE CLOSED SENSE DI-17- 3 OK 0V="1" GATE VALVE CLOSED SENSE
CHAMBER SLIT VALVE OPEN SENSE DI-17- 4 OK 0V="1"
CHAMBER SLIT VALVE CLOSED SENSE DI-17- 5 OK 0V="1"
PLASMA ON DETECT DI-17- 6 TBD
OVER TEMP DETECT DI-17- 7 TBD
SHORT SSR DETECT DI-17- 8 TBD
ASTRON READY DI-17- 10 OK 0V="1" ASTRON READY
6-4 311-019-02 Chamber I/O Assignment Lists CHAPTER 6

Table 6-2. 300mm Ultima HDP-CVD Chamber I/O Listing (Continued)

300mm Ultima HDP-CVD I/O Description PCB I/O (MAC ID) Bit # Display / Meaning Remarks (If applicable compatible 200mm HDPCVD I/O)
PLASMA OK DI-17- 11 OK 0V="1" ASTRON PLASMA OK
AC OK DI-17- 12 OK 0V="1" ASTRON AC OK
MW PLASMA ON DI-17- 13 OK 0V="1" MICROWAVE PLASMA DETECT
ENDPOINT FAULT DI-17- 15 OK 0V="1" DI(ENDPOINT FAULT)
TURBO AT SPEED DI-17- 18 OK 0V="1"
CHAMBER READY SW DI-17- 19 OK 0V="1" GENERATOR ENABLE DI
HEATER ENABLE SW DI-17- 20 OK 0V="1" HEATER ENABLE DI
GAS FINAL VALVE ENABLE SW DI-17- 22 OK 0V="1" GAS PANEL ENABLE DI
SLIT VALVE CLOSED DI-17- 23 OK 0V="1" MF SLIT VALVE (CH_D) CLOSED
SLIT VALVE OPEN DI-17- 24 OK 0V="1" MF SLIT VALVE (CH_D) OPENED
WAFER LIFT UP (REVERSE LOGIC) DI-17- 30 OK open="0" WAFER LIFT UP
WAFER LIFT DOWN (REVERSE LOGIC) DI-17- 31 OK open="0" WAFER LIFT DOWN
WAFER CLAMP UP (REVERSE LOGIC) DI-17- 32 OK open="0" WAFER CLAMP UP

CHAMBER 50 TORR INTLK RTN DI-19- 0 OK 24V="1" CH 50 TORR PRESSURE SW RTN

FORELINE 10 TORR MANO SW RTN DI-19- 1 OK 24V="1" FORLINE <50 TORR INTLK
BIAS-IN-PLACE SW RTN DI-19- 2 OK 24V="1"
COAX-IN-PLACE RTN DI-19- 3 OK 24V="1" COAX-IN-PLACE RTN
HEATER BOX COVER SW RTN DI-19- 4 OK 24V="1" HEATER READY INTLK RETURN
CHAMBER COVER INTLK RETURN DI-19- 5 OK 24V="1" COVER INTLK RETURN
LID-IN-PLACE REUTRN DI-19- 6 OK 24V="1" LID-IN-PLACE REUTRN
OVER TEMP INTLK RTN DI-19- 7 OK 24V="1"
E-CHUCK WATER FLOW RTN DI-19- 8 OK 24V="1"
TURBO WATER FLOW RTN DI-19- 9 OK 24V="1"
CHAMBER LID WATER FLOW RTN DI-19- 10 OK 24V="1" WATER FLOW SW RETURN
CHAMBER WATER LEAK DETECT RTN DI-19- 11 OK 24V="1"
CUSTOM INTLK SW RTN DI-19- 12 OK 24V="1"
BIAS-GEN-IN-PLACE-RTN DI-19- 13 OK 24V="1"
REMOTE WATER LEAK SW RTN DI-19- 14 OK 24V="1"
XFR LID OPEN SW RTN DI-19- 15 OK 24V="1"
XFR 1/2 ATM SW RTN DI-19- 16 OK 24V="1"

GATE VALVE OPEN/CLOSE DO DO-17- 1 "1"=ON 0V GATE VALVE OPEN/CLOSE

PLASMA ON/OFF DO-17- 9 "1"=ON 0V ASTRON PLASMA ON
ENDPOINT STANDBY DO-17- 14 "1"=ON 0V DO(ENDPOINT) STANDBY
ENDPOINT RESET DO-17- 16 "1"=ON 0V DO(ENDPOINT RESET)
CHAPTER 6 Chamber I/O Assignment Lists 311-019-02 6-5

Table 6-2. 300mm Ultima HDP-CVD Chamber I/O Listing (Continued)

300mm Ultima HDP-CVD I/O Description PCB I/O (MAC ID) Bit # Display / Meaning Remarks (If applicable compatible 200mm HDPCVD I/O)
TURBO ON DO-17- 17 "1"=ON 0V TURBO ON DO
HEATER ON/OFF DO-17- 21 "1"=ON 0V

EV-1 - HELIUM # 1 (INNER) WAFER VACUUM (DUMP) VALVE DO-18- 0 "1"=ON 0V EV-01- HELIUM # 1 WAFER VACUUM (DUMP) VALVE
EV-2 - HELIUM #2 (OUTER) WAFFER VACUUM (DUMP) VALVE DO-18- 1 "1"=ON 0V EV-02 - HELIUM #2 WAFFER VACUUM (DUMP) VALVE
EV-3 - HELIUM # 1 (INNER) WAFER FINAL VALVE DO-18- 2 "1"=ON 0V EV-11 - HELIUM # 1 WAFER FINAL VALVE
EV-4 - HELIUM # 2 (OUTER) WAFER FINAL VALVE DO-18- 3 "1"=ON 0V EV-12 - HELIUM # 2 WAFER FINAL VALVE
EV- 15 - HELIUM SUPPLY VALVE TO IHC DO-18- 4 "1"=ON 0V EV-08- HELIUM SUPPLY VALVE TO IHC #1
EV- 16 - HELIUM BYPASS VALVE DO-18- 5 "1"=ON 0V
EV- 17 - SPARE DO-18- 6 SPARE
EV-18 - MICROWAVE CLEAN FINAL VALVE DO-18- 7 "1"=ON 0V EV-15B - MICROWAVE CLEAN FINAL VALVE
EV- 19 - SPARE DO-18- 8 MOVED TO EV 6 EV- 13 - CHAMBER 100 MTORR MANO ISOLATION VALVE
EV- 5 -CHAMBER 10 T MANO ISOLATION VALVE DO-18- 9 SPARE
EV- 6 - CHAMBER 100mT MANOMETER ISOLATION VALVE SPARE DO-18- 10 "1"=ON 0V
EV- 7 - CHAMBER VENT VALVE DO-18- 11 "1"=ON 0V EV- 15A - CHAMBER VENT VALVE
EV- 8 - TURBO PURGE VAVLE DO-18- 12 "1"=ON 0V EV- 05 - TURBO PURGE VAVLE
EV- 9 -TURBO VACCUM ISOLATION VALVE DO-18- 13 "1"=ON 0V EV-06 -TURBO VACCUM (ISOLATION) VALVE
EV - 10 - SPARE DO-18- 14 SPARE
EV - 11 - SPARE DO-18- 15 SPARE
EV - 12 - SPARE DO-18- 16 SPARE
EV- 13A - SPARE(GATE VALVE OPEN) DO-18- 17 "1"=ON 0V CAN BE USED FOR ANOTHER GATE VALVE TYPE
EV-13B - SPARE(GATE VALVE CLOSED) DO-18- 18 "1"=ON 0V CAN BE USED FOR ANOTHER GATE VALVE TYPE
EV- 14 - CHAMBER VACUUM (ROUGH) VALVE DO-18- 19 "1"=ON 0V EV-07A - CHAMBER VACUUM (ROUGH) VALVE
EV-20A - WAFER CLAMP DOWN DO-18- 20 "1"=ON 0V EV-18A - WAFER CLAMP DOWN
EV-20B - WAFER CLAMP UP DO-18- 21 "1"=ON 0V EV-18B - WAFER CLAMP UP
EV-21A - WAFER LIFT DOWN DO-18- 22 "1"=ON 0V EV-19A - WAFER LIFT DOWN
EV-21B - WAFER LIFT UP DO-18- 23 "1"=ON 0V EV-19B - WAFER LIFT UP
EV-22A - CHAMBER SLIT VALVE OPEN DO-18- 24 "1"=ON 0V EV-20B - SLIT VALVE OPEN
EV-22B - CHAMBER SLIT VALVE CLOSED DO-18- 25 "1"=ON 0V EV-20A - SLIT VALVE CLOSED
EV-23A - SPARE DO-18- 26 SPARE
EV-23B - SPARE DO-18- 27 SPARE

(TURBO THROTTLE) DI/O-1- As per API Dnet SPEC

(ROUGH THROTTLE) DI/O-2- As per API Dnet SPEC

PUMP ON STATUS DI-24- 0 "1"=ON for ALCATEL + CDN118

6-6 311-019-02 Chamber I/O Assignment Lists CHAPTER 6

Table 6-2. 300mm Ultima HDP-CVD Chamber I/O Listing (Continued)

300mm Ultima HDP-CVD I/O Description PCB I/O (MAC ID) Bit # Display / Meaning Remarks (If applicable compatible 200mm HDPCVD I/O)
PUMP WARNING OIL PRESSURE (REVERSE LOGIC) DI-24- 1 "0"=OK for ALCATEL + CDN118
PUMP WARNING N2 FLOW (REVERSE LOGIC) DI-24- 2 "0"=OK for ALCATEL + CDN118
PUMP OVERTEMP HAZARD (REVERSE LOGIC) DI-24- 3 "0"=OK for ALCATEL + CDN118

PUMP ON/OFF DO-24- 0 "1"=ON for ALCATEL + CDN118

TOP SOURCE REFLECTED POWER AI+ AI-51- 0 0…0FFF TOP SOURCE REFLECTED POWER
TOP SOURCE FORWARDED POWER AI+ AI-51- 1 0…0FFF TOP SOURCE FORWARD POWER
SIDE SOURCE REFLECTED POWER AI+ AI-51- 2 0…0FFF SIDE SOURCE REFLECTED POWER
SIDE SOURCE FORWARDED POWER AI+ AI-51- 3 0…0FFF SIDE SOURCE FORWARD POWER
BIAS GEN REFLECTED POWER AI+ AI-51- 4 0…0FFF BIAS GEN REFLECTED POWER
BIAS GEN FORWARDED POWER AI+ AI-51- 5 0…0FFF BIAS GEN FORWARD POWER

TOP SOURCE FWD POWER SETPOINT AO+ AO-51- 0 0…0FFF TOP SOURCE FWD POWER SETPOINT AO+
SIDE SOURCE FWD POWER SETPOINT AO+ AO-51- 1 0…0FFF SIDE SOURCE FWD POWER SETPOINT AO+
BIAS GEN FWD POWER SETPOINT AO+ AO-51- 2 0…0FFF BIAS GEN FWD POWER SETPOINT AO+

TOP SOURCE RF POWER ON (REVERSED LOGIC) DI-51- 8 TBD TOP SOURCE RF POWER ON DI (REVERSE)
SIDE SOURCE RF POWER ON (REVERSED LOGIC) DI-51- 9 TBD SIDE SOURCE RF POWER ON DI (REVERSE)
BIAS GEN OVER TEMP DI-51- 10 OK 0V="1" BIAS GEN OVER TEMP
BIAS GEN AC ON DI-51- 11 OK 0V="1" BIAS GEN AC ON

TOP SOURCE RF ON/OFF DO-51- 0 "1"=ON 0V TOP SOURCE RF ON/OFF (RELAY NO)
SIDE SOURCE RF ON/OFF DO-51- 1 "1"=ON 0V SIDE SOURCE RF ON/OFF (RELAY NO)
BIAS GEN RF ON/OFF DO-51- 2 "1"=ON 0V BIAS GEN RF ON/OFF (RELAY NO)

CTR TC MONITOR AI-11- TBD TBD CENTER TC AI

TOP TC MONITOR AI-11- TBD TBD TOP TC AI
GROUND TC MONITOR AI-11- TBD TBD GROUND TC AI
SIDE TC MONITOR AI-11- TBD TBD SIDE TC AI
Applied Materials, Inc.
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Santa Clara, CA 95054-3299

Address correspondence to:

Applied Materials, Inc.
P.O. Box 58039
Santa Clara, CA 95052-8039
Tel: (408) 727-5555
Telex: 6719476 AMTUW
Fax: (408) 727-9943
Web Site: http://www.AppliedMaterials.com

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Applied Materials, Inc. 1999. All rights reserved. Printed in U.S.A. 12/1199 IBSS