EE143 S06
Semiconductor Tutorial
EE143 Semiconductor Tutorial
-Electrons and Holes - Dopants in Semiconductors - Electron Energy Band Diagram - Mobility - Resistivity and Sheet Resistance
Professor N Cheung, U.C. Berkeley
EE143 S06
Semiconductor Tutorial
Why bother knowing Electrons and Holes ?
Microfabrication controls dopant concentration distribution ND(x) and NA(x)
Electron Concentration n(x) Hole Concentration p(x)
Electric Field Carrier Mobility Fermi level Ef (x) E(x) Effect
Electrical resistivity Sheet Resistance
Professor N Cheung, U.C. Berkeley
PN Diode Characteristics MOS Capacitor MOS Transistor
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EE143 S06
Semiconductor Tutorial
Electron Potential Energy
Conduction Band and Valence Band
Available states at discreet energy levels Available states as continuous energy levels inside energy bands
Isolated atoms
Professor N Cheung, U.C. Berkeley
Atoms in a solid
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EE143 S06
Semiconductor Tutorial
Professor N Cheung, U.C. Berkeley
EE143 S06
Semiconductor Tutorial
The Simplified Electron Energy Band Diagram
Professor N Cheung, U.C. Berkeley
EE143 S06
Semiconductor Tutorial
Density of States at Conduction Band: The Greek Theater Analogy Note that the number of available seats at same potential energy increases with higher electron energy
Energy Gap (no available seats)
Electron Energy
Plan View of the amphitheatre at Epidarus
Amphitheatre at Epidarus, Greece. Built c350 BC.
Professor N Cheung, U.C. Berkeley
EE143 S06
Semiconductor Tutorial
Concept of a hole An unoccupied electronic state in the valence band is called a hole
Conduction Band
Valence Band
Professor N Cheung, U.C. Berkeley
EE143 S06
Semiconductor Tutorial
Professor N Cheung, U.C. Berkeley
EE143 S06
Semiconductor Tutorial
Electron and Hole Concentrations for homogeneous semiconductor at thermal equilibrium
n: electron concentration (cm-3) p : hole concentration (cm-3) ND: donor concentration (cm-3) NA: acceptor concentration (cm-3) 1) Charge neutrality condition: 2) Law of Mass Action :
Assume completely ionized to form ND+ and NAND + p = NA + n n p = ni2
Note: Carrier concentrations depend on NET dopant concentration (ND - NA) !
Professor N Cheung, U.C. Berkeley
EE143 S06
Semiconductor Tutorial
How to find n, p when Na and Nd are known n- p = Nd - Na (1) pn = ni2 (2) (i) If Nd -Na > 10 ni : n Nd -Na (ii) If Na - Nd > 10 ni : p Na- Nd
Professor N Cheung, U.C. Berkeley
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EE143 S06
Carrier Mobility
|v|=E
Semiconductor Tutorial
Mobile charge-carrier drift velocity v is proportional to applied E-field:
n
Mobility depends on (ND + NA) !
(Unit: cm2/Vs)
Professor N Cheung, U.C. Berkeley
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EE143 S06
Semiconductor Tutorial
Electrical Resistance of Layout Patterns (Unit of RS: ohms/square) W = 1m Metal contact Top View 1m
R = Rs
L=1m
R = Rs
1m
R 2.6Rs R = 3Rs R = Rs/2
Professor N Cheung, U.C. Berkeley
R = 2Rs
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EE143 S06
Semiconductor Tutorial
Resistance of Arbitrary Layout Patterns
Resistor Paper Pattern IC Resistor Pattern
You know RS resistor of of a microfabricated layer by 4-point probe method. Will this layout pattern give the desired R value ?
microns centimeters magnified
Before you do the layout and fabricate the structure which is expensive and time consuming. Cut out a similar pattern on a resistor paper with a known RS paper Measure Rpaper experimentally across the two terminals
You can deduce
Professor N Cheung, U.C. Berkeley
RIC resistor = Rpaper
RSresistor RSpaper
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