Visionary Sensor Technology

CDG045D
High Precision Vacuum Gauge

True pressure measurement

CDG045D Vacuum Gauge

The INFICON temperature controlled CDG Capacitance Diaphragm Gauge line is designed for the highest accurate total
pressure measurement available today. The temperature controlled corrosion resistant ultra-pure ceramic sensor provides
superior span stability over many years paired with state-of-the-art zero stability. Advanced electronics offer the user a wide
range of suitable filters yielding solutions for all applications and a choice of fieldbus interfaces. A unique sensor shield
(patents granted) protects the gauge from undesired process byproducts.

Typical applications
• Quality control, reference vacuum • PVD, CVD, Etch
• Load Lock • Analytical
• Puller, ovens • Oxidation
• Industrial
 Temperature control Gauge protection for increased lifetime CDG working principle
Span stability

CDG045D Vacuum Gauge Any mounting orientation

• Temperature controlled Level 1 Baffle
p
Direct pressure measurement
by diaphragm
at ± 0.1°C Stops coating, particles
ΔC
ΔC Δd ~ p
• Fast warm up p
Capacitance readout
• Immune to ambient environment Level 2 Shield Δd
1
Protects diaphragm ~p
ΔC
p

p
Electrode
Level 3 Protective coating
Diaphragm
Corrosion protection
p = pressure

Interface I/O

• Classic analog signal 0 … 10V

Fully ceramic sensor • Wide range power supply
• Zero adjust, push button / remote DI
• 2 individual setpoints
Bonded ceramic structure combined with
• Status LED
digital signal processing provides superior
• Diagnostic port
measurement performance.
• Fieldbus: DeviceNet, Profibus,
EtherCAT, RS-232

DeviceNet

Profibus

EtherCAT

Gas type independence

CDG sensor technology
Other typical sensor technologies

(mbar)
The INFICON temperature controlled CDG Capacitance Diaphragm Gauge line is designed for the highest accurate total
pressure measurement available today. The temperature controlled corrosion resistant ultra-pure ceramic sensor provides Digital signal processing

Indicated pressure
superior span stability over many years paired with state-of-the-art zero stability. Advanced electronics offer the user a wide Uout = a • p + b (a = slope / b = off-set) Longtime full scale stability
range of suitable filters yielding solutions for all applications and a choice of fieldbus interfaces. A unique sensor shield U
standard
dynamic Ceramic sensor
(patents granted) protects the gauge from undesired process byproducts. gain offset technology offers superior
+
long-term stability.

F.S. stability
slow
Typical applications
• Quality control, reference vacuum • PVD, CVD, Etch
fast
• Load Lock • Analytical
• Puller, ovens • Oxidation measured at PTB

• Industrial 10 time
Setable output P Digital filters
True pressure (mbar) Measuring points of one gauge (years)
 CDG045D temperature controlled
ADVANTAGES AT A GLANCE

• Unprecedented Full Scale stability

• No periodical recalibration required
• Digital signal processing
• Corrosion resistant Alumina sensor

Measurement ranges Temperature coefficient

°C
Full Scale (Torr)
50 In-situ architecture
0.1 0.15% Accuracy
assures an excellent
1 temperature stability of
zero and span.
10
25

100

1000
5

0.00001 0.0001 0.001 0.01 0.1 1 10 100 1000 Pressure Temperature coefficient/accuracy
(Torr)
Excellent Customer Support is a Commitment
INFICON provides a global network of sales and service
centers. These centers are staffed with local service and
application experts who can assist you in choosing the best
solution for your individual product application and provide
fast support if service is needed.

Asia and Pacifica

CHINA KOREA
INFICON Ltd. INFICON Ltd.
Beijing Kyunggi-do
Phone: +86.10.6590.0164 Phone: +82.31.783.2942
E-mail: reach.china@inficon.com E-mail: reach.korea@inficon.com

INDIA SINGAPORE and AUSTRALIA

INFICON PVT. Ltd. INFICON PTE Ltd.
Pune Singapore
Phone: +91. 20. 4120. 4854 Phone: +65.6631.0300
Americas Europe, Middle East E-mail: reach.india@inficon.com E-mail: reach.singapore@inficon.com
and Africa
INFICON Inc. JAPAN TAIWAN
East Syracuse, NY INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd.
Cologne Yokohama-shi, Kanagawa-ken Chupei City
Phone: +1.315.434.1100
Phone: +49.221.567.881.00 Phone: +81.45.471.3328 Phone: +886.3.552.5828
E-mail: reach.us@inficon.com
E-mail: reach.germany@inficon.com E-mail: reach.japan@inficon.com E-mail: reach.taiwan@inficon.com

inf icon.com reachus@inf ic o n .co m

Due to our continuing program of product improvements, specifications are subject to change without notice.

tibc21e1 ©2012 INFICON