CASE2

Design Optimization of MEMS Comb Accelerometer

From the analysis it is concluded that the device behavior
strongly depends upon various design parameters. By adjusting
design parameters, desired sensitivity can be obtained. Based
on the simulation results, a set of optimized design parameters
for the comb accelerometer is decided. The ANSYS simulation
results show that the device has displacement sensitivity of
3nm/g. The above-proposed MEMS comb accelerometer may be
used for many applications, such as automobile airbag
deployment and navigations, fabrication sequence of the comb
accelerometer is also proposed. The device is to be fabricated
using surface-micro machining process with sacrificial layer
technique.
If there is any acceleration a along horizontal direction parallel to the device plan,
the proof mass Ms experiences an inertial force -Ms·a along the opposite direction.
As a result, the beams deflect and the movable mass and movable fingers move
for a certain displacement x along the direction of the inertial force. The left and
right capacitance gaps are changed, hence the differential capacitances C1 and C2
will also be changed. By measuring this small differential capacitance change, we know the
value and the direction of the experienced acceleration. This is the working principle of the MEMS
comb accelerometer.
 Figure 3. Model of optimized design

Figure 4. The relationship between device sensitivity and beam width for MEMS accelerometer
Figure 5. The relationship between sensitivity and beam length of the comb accelerometer

Figure 6. The relationship between sensitivity and mass width of the comb accelerometer
Electrostatic Micro-Actuators
 Single chip Projector.
Three chip Projector.

A three-chip DLP
projector uses a
prism to split light
from the lamp, and
each primary color of
light is then routed to
its own DLP chip,
then recombined and
routed out through
the lens. Three chip
systems are found in
higher-end home
theater projectors,
large venue
https://www.youtube.com/watch?v=CI0cwk25CAs projectors and DLP
Cinema projection
systems found in
https://www.youtube.com/watch?v=9nb8mM3uEIc digital movie
theaters.
Electrostatic Micro-Actuators
https://en.wikipedia.org/wiki/Paschen%27s_law
http://electronicdesign.com/communications/digital-rf-mems-c
apacitor-maximizes-smart-phone-antenna-efficiency
 SMARTPHONE CAMERA
AUTOFOCUS?
• As long as cell phones were over 10 mm thick, manufacturers had no problem of getting the camera
to autofocus.
• Usually, one of more of the lenses in the camera are moved in or out using a linear actuator, while an
algorithm calculates a figure of merit for the sharpness of image for that location of the lens. The best
focus for the scene is achieved by repeating this procedure.
• This was going fine, until form factors started to get thinner. Manufacturers made thinner phones(<
5mm form factor) --- requirement of speed, power and performance also changed, and altogether,
forced manufacturers to abandon the old method of Voice Coil Motor in favor of a MEMS linear
actuator.
• The Voice Coil Motor (VCM) operated using the principle of electromagnetism. When electricity
passes through a coil, it produces a magnetic field that reacts with a permanent magnet to either
repel or attract the coil.
• The main disadvantage of the VCM are the hysteresis of its stroke, high requirement of power and
de-centering and lens-tilting while operating.
• The MEMS technology for autofocus integrates the three functions of a linear actuator. It provides a
linear vertical movement, has a spring to provide the restoring force and uses an electrostatic comb
as a drive to displace the lens. The MEMS technology saves on power since it does not use
electromagnetism.
• The MEMS technology allows only one lens to move very precisely, while the other lenses are locked
in the most optimal position. This approach offers an excellent image quality over the entire focal
range within the 5 mm allowed in a thin smartphone.

Ref:
https://www.westfloridacomponents.com/blog/how-does-a-s
martphone-camera-autofocus/