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Printing Techniques Overview 2011

The document discusses different types of lithography techniques used in semiconductor manufacturing including contact printing, proximity printing, and projection printing. Projection printing is further broken down into catadioptric and refractive methods. The document also mentions the short lifetime of masks as an issue with lithography techniques. It is attributed to Dr. Gargi Raina VIT 2011.

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41 views21 pages

Printing Techniques Overview 2011

The document discusses different types of lithography techniques used in semiconductor manufacturing including contact printing, proximity printing, and projection printing. Projection printing is further broken down into catadioptric and refractive methods. The document also mentions the short lifetime of masks as an issue with lithography techniques. It is attributed to Dr. Gargi Raina VIT 2011.

Uploaded by

Govarthanan
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd

Dr.

Gargi Raina VIT 2011


Dr. Gargi Raina VIT 2011
(i) Contact Printing

(i) Proximity Printing

(i) Projection Printing


• Reflection & Catadioptric
(Combination of reflective & refractive
components)
• Refractive

Dr. Gargi Raina VIT 2011


Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
(iii) Short life-time of mask

Dr. Gargi Raina VIT 2011


Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
E

Dr. Gargi Raina VIT 2011


Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011
Dr. Gargi Raina VIT 2011

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