Micro Actuators

This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150µm/100µm; 100µm/100µm and 50µm/100µm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50µm/100µm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.

The main purpose of this work was to spear head research and development in Micro Aerial Vehicles (MAVs) especially in the development small flapping wing systems which can greatly be used for defense as well as surveillance purposes. This project focused on the development of a flapping wing mechanism with a wing span of just 3 cm using a piezoelectric bimorph actuator.

This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50μm/100μm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.

A  new spring shape is  designed  for a MEMS three
dimensional electrostatic actuat
or. A low spring constant in
Z direction for a thick structural layer is achieved.
Characteristic  features and challenges of this design are
described and the analytical analysis is verified  by FEM
simulations using CoventorWare
TM
. The analytical models
are derived  for two types  of serpentine  springs namely  a
square serpentine spring (SSS)
and curved serpentine spring
(CSS). The analytical results  are in very good agreement
with the simulations.

The four-port matrix modeling is here applied to the power transfer mechanism through the different sec- tions of the acoustic fiber motor, in order to evaluate the performances of the design. Analytical results are com- pared with experimental measurements on a motor proto- type (fiber length 115 mm and diameter 0.8 mm, maximum torque 1.4 mNm, maximum speed 3200 rpm), showing a good agreement.

ABSTRACT This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150µm/100µm; 100µm/100µm and 50µm/100µm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50µm/100µm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.

A study of synthesization and magnetic properties
of cured polymer composite on nickel (Ni) as an actuator
membrane is prepared in this work. SU8 3050 polymer is used to
mix with magnetic nanoparticles Ni to produce a hybrid material.
The mixing process are done by using mechanical stirrer,
ultrasonication and manually hand stirring. In this work an easy
sol-gel method is selected to embed magnetic particles into the
polymer matrix. Characterization of particle distribution is
observed by metallurgical microscopy and scanning electron
microscope (SEM). It is observed that the spreading of Ni
particles inside the polymer chain are constant without clustering
effects. Magnetization curves of each sample are traced at room
temperature using vibration sample magnetometer (VSM). A
good compromising magnetic properties with patternable high
aspect ratio structures have been successfully fabricated using a
standard MEMS process.