Micro Actuators

Torsional micro-actuators have found variety of applications in optical switches, displays, interferometry, spectroscopy, abbreviation correction and biomedical imaging. In order to improve the performance of these systems, it is usually desirable to maximize their operating angle amplitude and their switching frequency. To reach this, the overshoot and the settling time of the system in following desired outputs should be minimized. The objective of this paper is to propose an optimal fuzzy controller to stabilize the angle of a torsion micro-actuator beyond its pull-in range. To do so, a dynamic model considering both rotational and translational degrees of freedom is considered. Using Lagrange equations, the differential equations of motion are derived. In the next step, the static behavior of the system is briefly reviewed. Also the effects of applied voltage and damping coefficient on both degrees of freedom are studied briefly. Based on the resulting understanding from the system, the required linguistic IF-THEN rules are derived. Using the famous combination of singleton fuzzifier, product inference engine and center average defuzzifier along with the fuzzy IF-THEN rules as the heart of the fuzzy system, a fuzzy controller is designed and simulated. The results show that the use of the designed controller and the closed-loop system can perfectly follow the commands either within or beyond the pull-in range with an acceptable overshoot and small settling time. It is expected that the designed controller be successfully utilized in analysis and optimization of torsional micro-actuators for better dynamic performance.

Birds and insects move relatively bulky wings respect to their size at high frequencies to stay in the air and precisely control their flight with very intricate adjustments. Insects are known to manage their power and precision by using power and control muscles. In this paper, use of the DC and piezo motor combination is proposed to benefit from the high torque of DC motors, energy storing ability of a flywheel, and precise motion of piezo motors to obtain excellent flying power, gliding capability and performing precise moves efficiently. The proposed design flaps the wings by using a DC motor. Two piezo motors are proposed to control the gliding and precise maneuvers by small wing motions. The forces created by the wing motions and forces at the pins are experimentally obtained and study indicated that the specs of the commercially available piezo motors are at the borderline of moving the two structural pins to realize the proposed design.

This study presents the fabrication of a 3D micro-transformer using MEMS technology in 10-600 kHz frequency range. The fabrication processes is developed for high-performance and low-cost realization with respect to planner design. The coil winding and the magnetic cores were fabricated by electro-deposition using copper and Ni/Fe Permalloy materials, respectively. In step-up configuration, the micro-transformer achieved 73.75% efficiency. The inductance achieved was 90 and 164 µH for primary and secondary coils, respectively. Characterization results and fabrication process of the fabricated transformer (2560×1240 µm) on alumina ceramic substrate are presented.

As the characteristic size of a flying robot decreases, the challenges for successful flight revert to basic questions of fabrication, actuation, fluid mechanics, stabilization, and power, whereas such questions have in general been answered for larger aircraft. When developing a flying robot on the scale of a common housefly, all hardware must be developed from scratch as there is nothing ‘off-the-shelf’ which can be used for mechanisms, sensors, or computation that would satisfy the extreme mass and power limitations. This technology void also applies to techniques available for fabrication and assembly of the aeromechanical components: the scale and complexity of the mechanical features requires new ways to design and prototype at scales between macro and microeletromechanical systems, but with rich topologies and material choices one would expect when designing human-scale vehicles. With these challenges in mind, we present progress in the essential technologies for insect-scale...

This paper aims the studying, modeling and testing of models of linear motors which use ultrasonic waves to achieve the movement. The studied motors are characterized by the positioning accuracy, small inertia, wide speed control (does not require gears and gearboxes), easy control, high torque per unit weight, miniaturization, simple structure, low noise, decreasing time-speed characteristic. Theme is nature transdisciplinary work, addressing elements of the electrical machines and electronics, electrical materials, mechanics, waves, computer and numerical methods, modeling of electromechanical systems and not least the technical and scientific creativity.

An electromagnetic (EM) micro-actuator with silicon membrane has been fabricated and characterized. The studied silicon based membrane is used as an actuator of a micropump system driven by magnetic force. The actuator consists of two main parts, namely, the electromagnetic part that generates electromagnetic field and the magneto mechanical part that enables the membrane deformation depending on the magnetic force strength on the silicon membrane. A standard Micro Electronic Mechanical System (MEMS) process was implemented to fabricate the actuator with an additional bonding between the actuator membrane and electromagnetic coil. The measurement results show that the 20 μm thin silicone membrane is capable of deformation with a maximum membrane deflection of approximately 4.5 μm which will be useful for a reliable fluids pump in a continuous drug delivery system. 

An electromagnetic (EM) micro-actuator with silicon membrane has been fabricated and characterized. The studied silicon based membrane is used as an actuator of a micropump system driven by magnetic force. The actuator consists of two main parts, namely, the electromagnetic part that generates electromagnetic field and the magneto mechanical part that enables the membrane deformation depending on the magnetic force strength on the silicon membrane. A standard Micro Electronic Mechanical System (MEMS) process was implemented to fabricate the actuator with an additional bonding between the actuator membrane and electromagnetic coil. The measurement results show that the 20 μm thin silicone membrane is capable of deformation with a maximum membrane deflection of approximately 4.5 μm which will be useful for a reliable fluids pump in a continuous drug delivery system. 

Abstract:-This paper aims the studying, modeling and testing of models of linear motors which use ultrasonic waves to achieve the movement. The studied motors are characterized by the positioning accuracy, small inertia, wide speed control (does not require gears and ...

In this work, a new piezoelectric motor is described wherein the stator is a bolted Langevin structure excited in flexural vibration. Two piezoelectric disks are sandwiched by two cylindrical inertial masses and their metallization is divided in four sectors. By applying suitable electrical signals to the four sectors, a traveling rotating thickness deformation is excited, and if the structure is excited at its natural flexural frequency, a well-sustained traveling rotating flexural deformation takes place in the Langevin vibrator. The bolt exceeds in length the inertial masses of the Langevin vibrator, acting as a central axle animated by a wide precessional motion. The rotor is a cylindrical permanent magnet pressed in contact with the top surface of the axle by means of a little nylon axle. A slipping takes place between the stator and the rotor and a torque is generated. The motor is able to give relatively high speed (≈2800 rpm) and torque (15 N m). The very robust structure of the stator makes this motor easy scalable in size and suitable for high power applications. A simple mathematical model to design the working frequency of the stator is described; theoretical results and experimental measurements were compared.

Despite comprehensive reports on the utilization of SAW (surface acoustic wave) devices as micro/nano actuators, there are still unexplored potentials to be pursued. Most current SAW actuators utilize 128˚ Y-X cut lithium niobate (LiNbO3) piezoelectric substrates due to the high electromechanical coupling coefficient in this crystal direction. However, these substrates have a major disadvantage of being highly anisotropic, the piezoelectric coupling is therefore exceptionally dependent on the propagation direction and cut. Utilization of LiNbO3-based SAW devices as linear microactuators has been extensively reported; however, work on extending the work to rotate a solid object has been limited. At the same time, SAW based microfluidics applications has been gaining interest in the past decade; however, extension of this work, using piezoelectric materials other than LiNbO¬3 has rarely been reported. Hence, there is a need to advance this field further. This thesis proposes the use o...

Most of the actual MEMS (Micro-Electro-Mechanical Systems) are Silicon capacitive devices. The reported research provides the means for approaching towards novel concepts combining silicon technology with piezoelectric materials into Piezo-MEMS systems. The presented technology is based on the bonding and patterning of bulk PMN-PT piezoelectric material on a Silicon wafer rather than sputtering thin piezoelectric films (a complementary method generally providing worse piezoelectric propertie)s. On the other hand bulk piezoelectric materials are more suited for micromanipulation actuators or energy harvesters. The advantage of PMN-PT piezoelectric material with respect to the classical PZT ceramics is presented in the context of the latest works. The technology and some results for actuation and energy harvesting are depicted in the paper.

An electromagnetic (EM) micro-actuator with silicon membrane has been fabricated and characterized. The studied silicon based membrane is used as an actuator of a micropump system driven by magnetic force. The actuator consists of two main parts, namely, the electromagnetic part that generates electromagnetic field and the magneto mechanical part that enables the membrane deformation depending on the magnetic force strength on the silicon membrane. A standard Micro Electronic Mechanical System (MEMS) process was implemented to fabricate the actuator with an additional bonding between the actuator membrane and electromagnetic coil. The measurement results show that the 20 μm thin silicone membrane is capable of deformation with a maximum membrane deflection of approximately 4.5 μm which will be useful for a reliable fluids pump in a continuous drug delivery system. 

This paper focuses on the development of micro-actuators used in data storage fabrication and advocates new numerical analysis methods to acquire their frequency response characteristics. Two new kinds of MEMS-based storage micro-actuation principles are presented, by analyzing the characteristics of the fold flexure manufactured in the micro actuators and a new equivalent numerical model is advocated to simulate the fold flexure and then transform the total storage micro-actuate mechanism into FEM (Finite element model) of masses and spring structures. By this new method of model transformation, the frequency response curves are obtained by simulating the actual work procession and the experiment of natural frequency results are in good accord with the simulation results.

We present a distributed compliant mechanism, which acts like a transmission between a flapping wing of a micro air vehicle and a laminated piezoelectric actuator. The piezoelectric bimorph actuator is connected in the cantilever configuration with the compliant mechanism at its free tip. The mechanism takes translational deflection at its input from the piezoelectric actuator to provide angular displacement at its output, which causes flapping. We used topology optimization to obtain the design concept. The design of the mechanism is finalised using nonlinear elastic analysis. The final mechanism is a planar structure of 1 mm thickness and 40 mm × 24 mm in-plane footprint. The compliant mechanism exhibits 711 N/m input stiffness and 0.014 Nm/rad output torsional stiffness. The mechanism produces around 7 angular displacement per 1 mm input stroke, and around 8 angular displacement per 1 N force at its input. The mechanism has a fundamental frequency of 391 Hz, which is almost eight...

Bio-inspired underwater micro-robots with inspire from dynamic variant spaces of animals utilizing of the ICPF (Ionic Conducting Polymer Films) actuator as a propulsion is developed recently. These micro-robots with multi Degrees of Freedom cause them walk smoothly in underwater environments have urgently been demanded with variety kinds of application such as medical, detection, and industry. In this micro-robot with inspire from the motional mechanism by ICPF actuators of an inchworm motion for grasping to the OOZE, and also the movement mechanism of jellyfish for sampling from the surface of the water in limited places according to the difference of the density of the water are used at the moment. We calculated and simulated the mechanism and walking speed of the micro-robot. A preliminary pattern was designed and also a collection of the research for appraisal the locomotion and the floating speed motion were done in detail. Employing ICPF as micro actuators to fabricate a four-finger gripper and six micro actuators were used to implement grasping.

In this paper we present the development of electromagnetic (EM) microfluidic pumps incorporating the magnetic polymer composite for the transport of microfluidic bio-sample. The pump system includes the electromagnetic field generator, a flexible actuator membrane made of polymer material with embedded magnetic particles and valve-less microfluidic channel and chamber. The micropump is fabricated using a MEMS process with additional bonding process. Various types of the magnetic membrane as well as electromagnetic coils were fabricated and characterized to find optimum pump performance. As the results, it is found that the fabricated pump systems were able to deliver fluidic sample within a large flow-rate range from 6 ml/min down to several nl/min which can be adjusted by setting the input electrical current parameters, such as intensity, frequency and type of the current signal.

We introduce Bee + , a 95-mg four-winged microrobot with improved controllability and open-loop-response characteristics with respect to those exhibited by state-of-the-art twowinged microrobots with the same size and similar weight (i.e., the 75-mg Harvard RoboBee). The key innovation that made possible the development of Bee + is the introduction of an extremely light (28-mg) pair of twinned unimorph actuators, which enabled the design of a new microrobotic mechanism that flaps four wings independently. A first main advantage of the proposed design, compared to those of two-winged flyers, is that by increasing the number of actuators from two to four, the number of direct control inputs increases from three to four when simple sinusoidal excitations are employed. A second advantage of Bee + is that its four-wing configuration and flapping mode naturally damp the rotational disturbances that commonly affect the yaw degree of freedom of two-winged microrobots. In addition, the proposed design greatly reduces the complexity of the associated fabrication process compared to those of other microrobots, as the unimorph actuators are fairly easy to build. Lastly, we hypothesize that given the relatively low wing-loading affecting their flapping mechanisms, the life expectancy of Bee + s must be considerably higher than those of the two-winged counterparts. The functionality and basic capabilities of the robot are demonstrated through a set of simple control experiments. Index Terms-Micro/nano robots, automation at micro-nano scales, aerial systems: mechanics and control. I. INTRODUCTION I NSECT-SIZED aerial robots have the potential to be employed in a great number of tasks such as infrastructure inspection, search and rescue after disasters, artificial pollination, reconnaissance, surveillance, et cetera, which has motivated the interest of many research groups. Consistently, as an emerging field, research on cm-scale flapping-wing robots driven by piezoelectric actuators has produced numerous design innovations over the course of more than two decades [1]-[4]. However, state-of-the-art flying microrobots, such as those reported in [5] and [6], do not adequately replicate the astounding capabilities exhibited by flying insects. An obstacle that has limited progress is the fact that unlike insects which simultaneously use multiple distributed muscles for flapping and control [7], flapping-wing flying robots are driven by a small number of discrete actuators due to stringent constraints in size and weight as well as fabrication challenges.

We discuss the problem of designing and implementing controllers for insect-scale flapping-wing micro air vehicles (FWMAVs), from a unifying perspective and employing two different experimental platforms; namely, a Harvard RoboBee-like two-winged robot and the four-winged USC Bee + . Through experiments, we demonstrate that a method that employs quaternion coordinates for attitude control, developed to control quadrotors, can be applied to drive both robotic insects considered in this work. The proposed notion that a generic strategy can be used to control several types of artificial insects with some common characteristics was preliminarily tested and validated using a set of experiments, which include position-and attitude-controlled flights. We believe that the presented results are interesting and valuable from both the research and educational perspectives.

Piezoelectric motors have been widely employed since 1980s when the first commercial model was invented. Various types of ultrasonic motors have been constructed and manufactured. The piezoelectric motors have been noticed in the last few decades in the field of autofocus cameras, miniature robotics and car applications due to the significant mechanical characteristics such as lightweight , simplicity of design and compact. The aim of this study is to design and analyze a novel piezoelectric rotary motor with the cyclic symmetric stator. Hence, a novel cyclic symmetric stator design with evenly-spaced protrusion fingers was developed. The natural frequencies and mode structures of the cyclic symmetric stator was examined by using the finite element method. The deformation relationship between stator disk and protrusion fingers in repeat and split modes will be discussed in this article. Furthermore, this modeling study focused more on displacement strength and deforming direction of the protrusion fingertips using the Fourier coefficients. The piezoelectric buzzer was attached to the cyclic symmetric stator prototype for driving the stator's natural frequencies. An experimental prototype is built to examine the consistency with the simulation results.

An electromagnetic (EM) micro-actuator with silicon membrane has been fabricated and characterized. The studied silicon based membrane is used as an actuator of a micropump system driven by magnetic force. The actuator consists of two main parts, namely, the electromagnetic part that generates electromagnetic field and the magneto mechanical part that enables the membrane deformation depending on the magnetic force strength on the silicon membrane. A standard Micro Electronic Mechanical System (MEMS) process was implemented to fabricate the actuator with an additional bonding between the actuator membrane and electromagnetic coil. The measurement results show that the 20 μm thin silicone membrane is capable of deformation with a maximum membrane deflection of approximately 4.5 μm which will be useful for a reliable fluids pump in a continuous drug delivery system. 

Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane has been characterized. The study is aimed to see the effect of the geometry and the structure of the actuator system on the actuating performance of the silicon-based membrane for fluid injection purposes. The actuator system consists of two main parts, namely, the electromagnetic part that generates an electromagnetic field and the magneto-mechanical part that enable the membrane deformation depending on the magnetic force on the silicon membrane. A standard MEMS process was implemented to fabricate the actuator system with an additional bonding between the actuator part and microfluidic part to complete the system for fluid injection purpose. The simulation using COMSOL Multiphysics was done to see the generation of the magnetic force and to see its effect on the membrane deformation. It was found that the height of the generated magnetic force increases significantly with the applie...

Insect-scale aerial vehicles are useful tools for communication, environmental sensing and surveying confined spaces. However, the lack of lightweight high-power-density batteries has limited the untethered flight durations of these micro aerial vehicles. Wireless power transmission using radiofrequency electromagnetic waves could potentially offer transmissivity through obstacles, wave-targeting/focusing capabilities and non-mechanical steering of the vehicles via phased-array antennas. But the use of radiofrequency power transmission has so far been limited to larger vehicles. Here we show that a wireless radiofrequency power supply can be used to drive an insect-scale flapping-wing aerial vehicle. We use a sub-gram radiofrequency power receiver with a power-to-weight density of 4,900 W kg–1, which is five times higher than that of off-the-shelf lithium polymer batteries of similar mass. With this system, we demonstrate the untethered take off of the flapping-wing micro aerial veh...

In this work, a theoretical analysis on the magnetic force generation of micro-actuator driven by planar microcoil is reported. The actuator design is optimized to increase the magnetic force and flux density that is useful for mechanical membrane deformation of an actuator. Therefore, this work is focused on the design and simulation of actuator material and structure using a finite element analysis method. As the results, the obtained magnetic force of maximum 11.4 mN has been observed for the actuator design having coil geometry of width w = 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm with NdFeB as magnet material. Hence, the optimized design geometry of the coil can be used as reference for the fabrication of electromagnetic actuator for micropump application.

An electromagnetic (EM) micro-actuator with silicon membrane has been fabricated and characterized. The studied silicon based membrane is used as an actuator of a micropump system driven by magnetic force. The actuator consists of two main parts, namely, the electromagnetic part that generates electromagnetic field and the magneto mechanical part that enables the membrane deformation depending on the magnetic force strength on the silicon membrane. A standard Micro Electronic Mechanical System (MEMS) process was implemented to fabricate the actuator with an additional bonding between the actuator membrane and electromagnetic coil. The measurement results show that the 20 μm thin silicone membrane is capable of deformation with a maximum membrane deflection of approximately 4.5 μm which will be useful for a reliable fluids pump in a continuous drug delivery system. 

In order to free microelectromechanical systems and other microsystems from wire tethering, an inductive link with integrated receiving coil is shown to transfer power onto silicon chips. Link efficiency (ratio of power delivered to the load to power into the driving coil) benefits from receiver coils with both large interception areas and low resistances, contradictory conditions for integrated coils due to high specific resistance from planar fabrication. To address this, an 'inlaid electroplating' procedure is developed to fabricate microcoils on silicon substrates. Copper coils of 14 mm side length, 54 µm height and 100 µm pitch are electroplated and planarized to allow further lithography. Sidewalls between Cu lines are selectively removed to modify coil capacitances. Thin film and electroplated microcoils with and without sidewalls are characterized and compared as link receivers. Little difference in power delivery is observed between plated microcoils with and without sidewalls. Powering efficiency to a 50 load reached 85% for a link coupling of ∼0.75. Since link properties are affected by parasitic effects from silicon chips, an equivalent circuit is developed, providing a good prediction of link efficiency. Link optimization is discussed using our model.

Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane has been characterized. The study is aimed to see the effect of the geometry and the structure of the actuator system on the actuating performance of the silicon-based membrane for fluid injection purposes. The actuator system consists of two main parts, namely, the electromagnetic part that generates an electromagnetic field and the magneto-mechanical part that enable the membrane deformation depending on the magnetic force on the silicon membrane. A standard MEMS process was implemented to fabricate the actuator system with an additional bonding between the actuator part and microfluidic part to complete the system for fluid injection purpose. The simulation using COMSOL Multiphysics was done to see the generation of the magnetic force and to see its effect on the membrane deformation. It was found that the height of the generated magnetic force increases significantly with the applied power. The measurement of the membrane deformation done at a 20-µm silicon membrane showed a maximum deflection of 4.6 µm. The measurement results of the electrical characteristic of the device were compared with the simulation to validate the analysis. This study is very important to get the general insight of the silicon-based actuator membrane capability for the fluidic injection system in lab-on-chip.

This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 µm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5% has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip.

This paper proposes a compact ultrasonic motor with low manufacturing costs, a simpler driving circuit, and scalability. The stator of the motor presented in this paper consists of a hollow metal cylinder, whose outside surface was flattened on two sides at 90 degrees t o each other, on which two rectangular piezoelectric plates were bonded.

This paper proposes a compact ultrasonic motor with low manufacturing costs, a simpler driving circuit, and scalability. The stator of the motor presented in this paper consists of a hollow metal cylinder, whose outside surface was flattened on two sides at 90 degrees t o each other, on which two rectangular piezoelectric plates were bonded. Because the cylinder has a partially square/partially circular outside surface, the stator has two degenerated hending modes that are orthogonal t o each other. A wobbling motion is generated on the cylinder when only one piezoelec-tric plate is excited at a frequency between the two orthogonal bending modes. A rod through a pair of ferrules was used as the rotor of this motor. The prototype motor, whose stator was 2.4 mm in diameter and 10 mm in length, operated at 69.5 kHz, was experimentally characterbed, and a maximum torque of 1.8 mNm was obtained.

An optical wireless quadristable micro-actuator based on antagonistic pre-shaped beams for two rows (inner, outer) is presented in this article. The actuator was developed using the Timoshenko-based mathematical model and analyzed for output force and energy values. The actuator was fabricated by the deep reactive ion etching (DRIE) technique, using bonded silicon on insulator (SOI) wafer. The quadristable frame possessed bistable beams with a thickness of 25 µm and theoretical stroke values of 300 µm and 200 µm for the inner and outer rows, respectively. The actuation of the system was performed by Nitinol shape memory alloy (SMA) elements, laser heated to switch the positions of stability for the inner bistable beams and outer quadristable beams. An 8 µm layer of [silicon dioxide] was deposited upon one side of each SMA element (0.1 × 1 × 3 mm), to provide a biasing force during actuation, eliminating the load effect of SMA elements and introducing a two-way shape memory effect. The stroke of the SMA element was analytically modeled, for force measurements and the effect of phase transitions between austenite and martensite.
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Prepared for the 8th Conference on Smart Structures and Materials (SMART 2017) and the 6th International Conference on Smart Materials and Nanotechnology in Engineering (SMN 2017), both held in Madrid, Spain from the 5 - 8 June 2017. The conference article can be found from pages 1610 -1621 in the conference proceedings e-book. Other authors include Mr. Hani-Al Hajjar, Mr. Santiago V. Bayona, Mr. Xingxing Liu, Dr. Emmanuel Doré and Dr. Frédéric Lamarque. Research and analysis was performed at the ROBERVAL Laboratory, University of Technology of Compiègne, Compiègne, France.  Published by the International Center for Numerical Methods in Engineering (CIMNE).

The main purpose of this work was to spear head research and development in Micro Aerial Vehicles (MAVs) especially in the development small flapping wing systems which can greatly be used for defense as well as surveillance purposes. This project focused on the development of a flapping wing mechanism with a wing span of just 3 cm using a piezoelectric bimorph actuator.

A novel technique for the fabrication of micro electromagnetic actuators was proposed and a prototype was designed and fabricated in this study. The constituent parts of the designed actuator are comprised of a diaphragm, a micro coil, and a magnet. When an electrical current was applied to the micro coils, the magnetic force between the magnet and the coil was produced and caused the diaphragm to deflect and become the source of actuation. The structure of the actuating device used polyimide as the insulating barrier and electroplated copper as the coils. The diaphragm deflection can be regulated by varying the current passed through the micro coil and hence the actuating effects can be controlled. The results show that the maximum diaphragm deflection within elastic limits is 150 µm, obtained as applying a current of 0.6 A through the micro coil with 100 µm line width. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its plane structure.

A study of synthesization and magnetic properties of cured polymer composite on nickel (Ni) as an actuator membrane is prepared in this work. SU8 3050 polymer is used to mix with magnetic nanoparticles Ni to produce a hybrid material. The mixing process are done by using mechanical stirrer, ultrasonication and manually hand stirring. In this work an easy sol-gel method is selected to embed magnetic particles into the polymer matrix. Characterization of particle distribution is observed by metallurgical microscopy and scanning electron microscope (SEM). It is observed that the spreading of Ni particles inside the polymer chain are constant without clustering effects. Magnetization curves of each sample are traced at room temperature using vibration sample magnetometer (VSM). A good compromising magnetic properties with patternable high aspect ratio structures have been successfully fabricated using a standard MEMS process.

A  new spring shape is  designed  for a MEMS three
dimensional electrostatic actuat
or. A low spring constant in
Z direction for a thick structural layer is achieved.
Characteristic  features and challenges of this design are
described and the analytical analysis is verified  by FEM
simulations using CoventorWare
TM
. The analytical models
are derived  for two types  of serpentine  springs namely  a
square serpentine spring (SSS)
and curved serpentine spring
(CSS). The analytical results  are in very good agreement
with the simulations.

The four-port matrix modeling is here applied to the power transfer mechanism through the different sec- tions of the acoustic fiber motor, in order to evaluate the performances of the design. Analytical results are com- pared with experimental measurements on a motor proto- type (fiber length 115 mm and diameter 0.8 mm, maximum torque 1.4 mNm, maximum speed 3200 rpm), showing a good agreement.

A design and optimization of the magnetic particles embedded inside a flexible membrane and factors contributing to the membrane performance have been studied. In this work, Nickel (Ni) is used as magnetic particles and Polydimethylsiloxane (PDMS) is used for membrane material which is considered a matrix component of the flexible membrane. Ni particles with various particle sizes, arrangement and spaces between Ni particles are simulated by using Comsol Multiphysics 4.2. As a result, the optimum design of magnetic particles embedded in membrane for large deflection is by having circular shape membrane with low density of tiny magnetic particles in planar distribution. A preliminary simulation result has been also compared with the theoretical calculation to validate the analysis.

This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150µm/100µm; 100µm/100µm and 50µm/100µm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50µm/100µm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.

A study of synthesization and magnetic properties of cured polymer composite on nickel (Ni) as an actuator membrane is prepared in this work. SU8 3050 polymer is used to mix with magnetic nanoparticles Ni to produce a hybrid material. The mixing process are done by using mechanical stirrer, ultrasonication and manually hand stirring. In this work an easy sol-gel method is selected to embed magnetic particles into the polymer matrix. Characterization of particle distribution is observed by metallurgical microscopy and scanning electron microscope (SEM). It is observed that the spreading of Ni particles inside the polymer chain are constant without clustering effects. Magnetization curves of each sample are traced at room temperature using vibration sample magnetometer (VSM). A good compromising magnetic properties with patternable high aspect ratio structures have been successfully fabricated using a standard MEMS process.

This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50μm/100μm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.

A study of synthesization and magnetic properties
of cured polymer composite on nickel (Ni) as an actuator
membrane is prepared in this work. SU8 3050 polymer is used to
mix with magnetic nanoparticles Ni to produce a hybrid material.
The mixing process are done by using mechanical stirrer,
ultrasonication and manually hand stirring. In this work an easy
sol-gel method is selected to embed magnetic particles into the
polymer matrix. Characterization of particle distribution is
observed by metallurgical microscopy and scanning electron
microscope (SEM). It is observed that the spreading of Ni
particles inside the polymer chain are constant without clustering
effects. Magnetization curves of each sample are traced at room
temperature using vibration sample magnetometer (VSM). A
good compromising magnetic properties with patternable high
aspect ratio structures have been successfully fabricated using a
standard MEMS process.