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Microwave Heating of Low-Temperature Plasma and Its Application

2021, Microwave Heating - Electromagnetic Fields Causing Thermal and Non-Thermal Effects

Abstract

In this chapter, the results of theoretical and experimental studies of the interaction of an electromagnetic field with a plasma (fundamental interaction of the wave-particle type) both in the regime of standing waves (in the case of a resonator) and in the case of traveling waves in a waveguide are presented. The results of computer modeling the distribution of a regular electromagnetic field for various designs of electrodynamic structures are considered. The most attractive designs of electrodynamic structures for practical application are determined. A brief review and analysis of some mechanisms of stochastic plasma heating are given as well as the conditions for the formation of dynamic chaos in such structures are determined. Comparison analysis of microwave plasma heating in a regular electromagnetic field (in a regime with dynamical chaos) with plasma heating by random fields is considered. It is shown, that stochastic heating of plasma is much more efficient in comparison...