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Piezoelectric Acoustic Sensor for Energy Harvesting

2016

Abstract

This paper proposes to harvest energy from the mechanical vibration by piezoelectric material. Principle of piezoelectricity is to convert “pressure-to-electricity”. Piezoelectric energy harvester has an edge on electromagnetic & electrostatic energy harvesters because of higher feasibility of material and power density factors. The sensor structure consists of silicon substrate and ZnO which is sandwiched between two aluminium electrodes. The proposed acoustic sensor has been designed to withstand the dynamic sound pressure of 96-106dB and produces a maximum of 390μV/Pa. The simulation is done by Coventorware and verified by analytical method.