Modelling of Microwave Induced Plasmas
Manu Jim
Sign up for access to the world's latest research
checkGet notified about relevant papers
checkSave papers to use in your research
checkJoin the discussion with peers
checkTrack your impact
Abstract
AI
AI
This research presents a comprehensive modeling approach for understanding Microwave Induced Plasmas (MIPs) through the development of multiple interconnected models: the Electromagnetic Model, Chemistry Model, and Deposition Model. The Grand Model integrates these aspects into a self-consistent framework employing balance equations to compute plasma behavior. Detailed validation against experimental results showcases the efficacy of these models, demonstrating their role in optimizing plasma processes relevant to applications such as optical fiber production.
Related papers
Introduction: Plasma Parameters and Simplest Models
Plasma Science [Working Title], 2020
Plasma is ionized gas (partially or fully). Overwhelming majority of matter in the universe is in plasma state (stars, Sun, etc.). Basic parameters of plasma state are given briefly as well as classification of plasma types: classic-quantum, idealnonideal, etc. Differences between plasma and neutral gas are presented. Plasma properties are determined by long distance electrostatic forces. If spatial dimensions of a system of charged particles exceed the so-called Debye radius, the system may be considered as plasma, that is, a medium with qualitatively new properties. The expressions for Debye radius for classical and quantum plasma are carried out. Basic principles of plasma description are presented. It is shown that plasma is a subject to specific electrostatic (or Langmuir) oscillations and instabilities. Simplest plasma models are given briefly: the model of "test" particle and model of two (electron and ion) fluids. As an example, Buneman instability is presented along with qualitative analysis of its complicate dispersion relation. Such analysis is typical in plasma theory. It allows to easily obtain the growth rate.
Numerical simulation of plasma and reacting flows
Fluid Dynamics Conference, 1996
AN INTRODUCTION TO BASIC PHENOMENA OF PLASMA PHYSICS
Shabd Publication, 2020
Plasma is a set of neutral and charged particles which reveals a number of collective behaviors. The very long range coulomb forces enable the charged particles in plasma to work together with one another simultaneously. The study of plasma is actually a really ancient area of investigation in plasma physics and it remains to be among the vital fields due to the crucial role of its in most plasma uses including plasma processing, fabrication of semiconductor systems, etching, etc. except the presence of just ions and electrons, the plasma in many instances, has a number of other species of ions like negative ions which impact the complete plasma behaviour. Within this paper we study about the fundamental ideas of plasma physics.
Theoretical plasma physics. Final report
1996
Portions of this document may be illegible in electronic image products. Images are produced from the best available original document.
Special Issue on the Numerical Simulation of Plasmas
IEEE Transactions on Plasma Science, 2000
Physics of Radio-Frequency Plasmas
2009
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
ISPC21, on Plasma Cairns, Chemistry Queensland
2013
Recently, a magnetohydrodynamic modeling of a 3-phase plasma torch has been developed giving a fair correlation with experiment results. In this paper, parallels instead coplanar electrodes have been considered. Results show a different arc discharge behavior controlled by repulsive magnetic forces instead of hydrodynamic electrode jet forces. These forces give a particular arc discharge influenced by frequency, current and gas flow rate.
Simulation for a Plasma Discharge Model in Microwave Transmitter-Receiver Waveguide by COMSOL Multi Physics Software
Hyperscience International Journals, 2021
Rapid plasma formation and evolution during microwave gas discharge device produce a macroscopic plasma shield to the microwave transmission, which can severely limit the performance of the device. In this paper, the electromagnetic (TE)- plasma interaction and the chlorine Discharge Global modeled in a standard rectangular waveguide WR 284 (72.14 mm× 32.04 mm) by COMSOL multiphysics provide to be a very good compromise between flexibility and work efficiency.
Modeling of gas discharge plasmas: What can we learn from it?
Surface and Coatings Technology, 2005
This paper describes some of our modeling efforts for gas discharges, used for plasma surface engineering applications. Depending on the application, we use either a fluid approach or particle-in-cell-Monte Carlo (PIC-MC) models to simulate the plasma behavior. The examples shown in this paper include fluid modeling for nanoparticle formation in silane discharges and for nitrogen dielectric barrier discharges, as well as PIC-MC simulations for a magnetron discharge. D
Related topics
Related papers
Modelling of discharges and non-thermal plasmas—applications to plasma processing
1993
We present an overview of models of low pressure, non-thermal gas discharges as commonly used in plasma processing. Significant progress has been made in the past decade towards the goal of a self-consistent model of the electrical properties of discharges, whether d.c., r.f. or microwave discharges. These models are based on solutions of the charged particle transport equations coupled with Poisson's equation for the electric field, and provide the space and time distribution of charged particle densities, current densities and electric field or potential. Some of the most sophisticated models also provide the electron and ion velocity distribution functions in the discharge at any point in space or time. It is now possible to describe reasonably accurately the physical properties of a discharge (including the plasma, the electrode regions and the walls) for two-dimensional cylindrical geometries, even for complex electrode configurations involving e.g. a hollow cathode or anode. A survey of the available models is presented here and we illustrate the current state ofthe art by results from one-and two-dimensional models ofd.c., r.f. and transient discharges.
Fundamental Concepts and Discussion of Plasma Physics
TECHNO REVIEW Journal of Technology and Management
Plasma physics is the state of matter, which consists of charged particles. Plasma is usually produced by heating a gas so that the electrons are separated from the atom or molecule from which it is made. Upper ionization can be performed using high power laser or microwave lighting. Plasma occurs naturally in stars and space. In physics, a plasma is an electrical conductor that has the same number of positively and negatively charged particles. What happens when atoms of a gas are ionized. It is sometimes called the fourth state of matter. Unlike rigid bodies, liquids and gases, negative ions are often carried by electrons. Every work has a reverse side. Positive charges are usually carried by atoms or molecules that do not have identical electrons. In some rare but curious cases, the missing electrons of one type of atom or molecule bond with another. As a result, positive and negative ions are present in the plasma. The most severe cases of this type occur when the dust is low. B...
On The Mechanism And Behavior Of Plasma
Mathematical Theory and Modeling, 2013
The charged particles' action of E and B fields have three diverse levels of modeling, Starting with the simplest one to the most complicated. In this paper we consider the generalization of Newtonian force law in geometrical term is to describe charged particles' (plasma) trajectories on electromagnetic fields in the kinetic or microscopic model.
A three-dimensional investigation of the effects of excitation frequency and sheath gas mixing in an atmospheric-pressure inductively coupled plasma system
Journal of Physics D: Applied Physics, 2010
A three-dimensional numerical model for the simulation of the behaviour of a commercial inductively coupled plasma torch with non-axisymmetric reaction chamber has been developed, taking into account turbulence and gas mixing through RNG k-theory and the combined diffusion approach of Murphy, respectively.
Computer Simulations for Processing Plasmas
Plasma Processes and Polymers, 2006
Numerical model of the plasmaline microwave plasma source
The Plasmaline ® , a linearly extended microwave (2.45 GHz) plasma source, is well suited to generate large-scale (> 1 m 2) dense plasmas for technical use in the low-pressure range. In this paper, we present a numerical model of microwave Argon plasma that solves the coupled system of Maxwell's equations, continuity equations for electrons and metastable states and the electron heat equation. The solutions are self-consistently calculated with the COMSOL Multiphysics finite element software in case of axial symmetry. This model can successfully predict the transient and spatial development of the Plasmaline ® 's plasma parameters and field distribution. The simulations are in good qualitative agreement with experimental results.
A formulary for plasma physics
1990
Page 1. for Plasma Physics by Andre Anders Page 2. ... Page 3. Andre Anders A Formulary for Plasma Physics Page 4. Page 5. A Formulary for Plasma Physics by Andre Anders Akademie-Verlag Berlin Page 6. Author: Dr. rer. nat. ...
A Maxwell formulation for the equations of a plasma
2012
In light of the analogy between the structure of electrodynamics and fluid dynamics, the fluid equations of motion may be reformulated as a set of Maxwell equations. This analogy has been explored in the literature for incompressible turbulent flow and compressible flow but has not been widely explored in relation to plasmas. This letter introduces the analogous fluid Maxwell equations and formulates a set of Maxwell equations for a plasma in terms of the species canonical vorticity and its cross product with the species velocity. The form of the source terms is presented and the magnetohydrodynamic (MHD) limit restores the typical variety of MHD waves.
Plasma Physics Abstracts 1987-2007
2015
Pre-Disruption MHD Activity in the LT-4 Tokamak" Nuclear Fusion 27(5), 843-847, (1987).
Loading Preview
Sorry, preview is currently unavailable. You can download the paper by clicking the button above.