Academia.eduAcademia.edu

Recent Advances in Mechanical Micromachining

Profile image of D. DornfeldD. Dornfeld

2006, CIRP Annals - Manufacturing Technology

Abstract

This paper reviews some of the main drivers, developments and future requirements in the field of micromanufacturing as related to the machining process from the perspective of the recent research and development literature. For the purposes of this paper micromachining includes creation of precise two and three dimensional workpieces with dimensions in the range of a few tens of nanometers to some few millimeters by cutting using defined geometry cutting tools. The review includes topics of process physics, including materials and microstructural effects, machine tools, tooling and sensing, workpiece and design issues, software and simulation tools, and other issues, e.g. surface and edge finish, and outlook for future developments.

Figures (33)
Figure 1: Micromachining capability over time [2]. and where it fits relative to other microfabrication processes. Alting, et al [5] covers a broad range of fabrication techniques for small scale parts and placed microfabrication processes relative the broader field of “microengineering” and discussed the design of microproducts. This paper focuses primarily on material removal by geometrically defined cutting edges for the purpose of creation of precise three dimensional workpieces with dimensions in the range of a few tens of nanometers to some few millimeters. The motivation for increasingly smaller components parallels the improvements in cutting technology as outlined in [2]. Demand for reduced weight, reduced dimensions, higher surface quality and part accuracy, while at the same time decreasing component costs and reducing batch sizes for components of devices ranging from electro-mechanical instruments to medical devices force us along Taniguchi’s curve. These are the forces driving miniaturization. The response of the scientific community has been energetic but mixed. That is, while the development of machine tools for micromachining follows more traditional paths of scaling down conventional
Figure 1: Micromachining capability over time [2]. and where it fits relative to other microfabrication processes. Alting, et al [5] covers a broad range of fabrication techniques for small scale parts and placed microfabrication processes relative the broader field of “microengineering” and discussed the design of microproducts. This paper focuses primarily on material removal by geometrically defined cutting edges for the purpose of creation of precise three dimensional workpieces with dimensions in the range of a few tens of nanometers to some few millimeters. The motivation for increasingly smaller components parallels the improvements in cutting technology as outlined in [2]. Demand for reduced weight, reduced dimensions, higher surface quality and part accuracy, while at the same time decreasing component costs and reducing batch sizes for components of devices ranging from electro-mechanical instruments to medical devices force us along Taniguchi’s curve. These are the forces driving miniaturization. The response of the scientific community has been energetic but mixed. That is, while the development of machine tools for micromachining follows more traditional paths of scaling down conventional
Weule et al. [16] concluded that the roundness of a cutting edge is very important in micromilling due to the size effect. Since the tool edge is relatively large compared to other tool dimensions and the tool is relatively weak due to micro- tool fabrication methods, it is important to choose proper cutting parameters.
Weule et al. [16] concluded that the roundness of a cutting edge is very important in micromilling due to the size effect. Since the tool edge is relatively large compared to other tool dimensions and the tool is relatively weak due to micro- tool fabrication methods, it is important to choose proper cutting parameters.
Figure 6. Lucca et al. [32] also found that the total specific energy is seen to significantly increase at small depths of cut in micromachining of OFHC copper. Hence, the specific energy is closely related to the minimum chip thickness and can be another indicator for cutting mechanism changes and process control.
Figure 6. Lucca et al. [32] also found that the total specific energy is seen to significantly increase at small depths of cut in micromachining of OFHC copper. Hence, the specific energy is closely related to the minimum chip thickness and can be another indicator for cutting mechanism changes and process control.
Figure 8: Micromachined chips of aluminum showing folded sections in the form of a curl [44].
Figure 8: Micromachined chips of aluminum showing folded sections in the form of a curl [44].
The aforementioned FE modeling is primarily for isotropic micromachining where no crystallographic effects were considered. Chuzhoy et al. [63, 64] developed a FE model for micromachining of heterogeneous material, Figure 11. Their model was capable of describing the microstructure of multi phase materials and thus captured the microcutting mechanism in cast iron. Microcutting of multi phase materials exerts larger variations in the resulting chip shape and the cutting force than seen in cutting of a single phase material. Figure 11: Computed equivalent stress for 125 wm depth of cut and 25 yam edge radius at t=0.00012 s with (a) ferritic workpiece, (b) ductile iron workpiece [63].
The aforementioned FE modeling is primarily for isotropic micromachining where no crystallographic effects were considered. Chuzhoy et al. [63, 64] developed a FE model for micromachining of heterogeneous material, Figure 11. Their model was capable of describing the microstructure of multi phase materials and thus captured the microcutting mechanism in cast iron. Microcutting of multi phase materials exerts larger variations in the resulting chip shape and the cutting force than seen in cutting of a single phase material. Figure 11: Computed equivalent stress for 125 wm depth of cut and 25 yam edge radius at t=0.00012 s with (a) ferritic workpiece, (b) ductile iron workpiece [63].
Figure 12: Actual (left column) and simulated (right column) microstructures of different ferrous materials [65].
Figure 12: Actual (left column) and simulated (right column) microstructures of different ferrous materials [65].
Figure 16: Components of cutting force per unit width in round edge cutting model (friction coefficient: 0.3, rake angle: 0°, workpiece: copper (CDA110), edge radius of the tool: 0.01 sm) [90].
Figure 16: Components of cutting force per unit width in round edge cutting model (friction coefficient: 0.3, rake angle: 0°, workpiece: copper (CDA110), edge radius of the tool: 0.01 sm) [90].
Figure 19: Various microgrooves and their fabrication by rotational cutting tools [111]. One of the more interesting applications of micromachining is in micropattern generation either on flat or curved surfaces. These patterns can work as reflectors, abrasives, and other functions. Traffic signs, Fresnel lenses, and possible CMP (chemical mechanical planarization) pad surfaces are typical examples. Various microgrooves can be created by feeding a rotating cutting tool along one direction relative to the workpiece, as illustrated in Figure 19 [111].
Figure 19: Various microgrooves and their fabrication by rotational cutting tools [111]. One of the more interesting applications of micromachining is in micropattern generation either on flat or curved surfaces. These patterns can work as reflectors, abrasives, and other functions. Traffic signs, Fresnel lenses, and possible CMP (chemical mechanical planarization) pad surfaces are typical examples. Various microgrooves can be created by feeding a rotating cutting tool along one direction relative to the workpiece, as illustrated in Figure 19 [111].
Figure 20: Various kinds of trapezoid microgrooves (first row: 20 wm, second row: 50 wm depth) [unpublished data from Y. Takeuchij]. Changing the angle and depth of groove, six different trapezoid microgrooves were created on a brass surface, as shown in Figure 20. The grooving was done with cutting conditions of 50 mm/min feed rate, 13 m/sec cutting speed, and 1 wm depth of cut for finishing and 5 wm for rough cutting. A diamond tool was used to create the trapezoidal microgrooves. With respect to these grooves, it was found that the machined surfaces are very smooth with sharp edges similar to more _ conventional V-shaped microgrooves. Trapezoidal microgrooves were successfully applied to bond two small parts without adhesives.
Figure 20: Various kinds of trapezoid microgrooves (first row: 20 wm, second row: 50 wm depth) [unpublished data from Y. Takeuchij]. Changing the angle and depth of groove, six different trapezoid microgrooves were created on a brass surface, as shown in Figure 20. The grooving was done with cutting conditions of 50 mm/min feed rate, 13 m/sec cutting speed, and 1 wm depth of cut for finishing and 5 wm for rough cutting. A diamond tool was used to create the trapezoidal microgrooves. With respect to these grooves, it was found that the machined surfaces are very smooth with sharp edges similar to more _ conventional V-shaped microgrooves. Trapezoidal microgrooves were successfully applied to bond two small parts without adhesives.
Figure 18: Process chain of micro-injection molding [110]. Bissacco et al. [110] investigated a wide range of processing methods for mold fabrication. Figure 18 illustrates the process chain for micro-injection molding for micro-fluidic systems. MEMS technology provides high precision processing capabilities but is very limited in achievable shapes allowing only molds in 2.5-D and those with a number of stackable layers.
Figure 18: Process chain of micro-injection molding [110]. Bissacco et al. [110] investigated a wide range of processing methods for mold fabrication. Figure 18 illustrates the process chain for micro-injection molding for micro-fluidic systems. MEMS technology provides high precision processing capabilities but is very limited in achievable shapes allowing only molds in 2.5-D and those with a number of stackable layers.
Figure 17: Portion of micromilled trenches with stepped and straight walls (scale bar = 100 wm) [106]. Freidrich and Vasile [106] were able to produce trench features 8 «am wide and 62 um deep for an aspect ratio of nearly 8, over a length of 8 mm, Figure 17. This aspect ratio is good enough for most micromolding applications including X-ray masks.
Figure 17: Portion of micromilled trenches with stepped and straight walls (scale bar = 100 wm) [106]. Freidrich and Vasile [106] were able to produce trench features 8 «am wide and 62 um deep for an aspect ratio of nearly 8, over a length of 8 mm, Figure 17. This aspect ratio is good enough for most micromolding applications including X-ray masks.
Figure 22: Machined 3-focus micro-Fresnel lens [113].
Figure 22: Machined 3-focus micro-Fresnel lens [113].
Figure 27: Coordinate relationship in tool making and machining [3].
Figure 27: Coordinate relationship in tool making and machining [3].
Figure 26: Principle of elliptical vibration cutting [103]. Egashira) and Masuzawa [123] conducted _ similar microdrilling tests using ultrasonic vibration but the vibration was applied to the workpiece instead of the tool. Quartz glass work material and a sintered diamond tool were used for the tests and they succeeded in drilling holes as small as 5 wm diameter.
Figure 26: Principle of elliptical vibration cutting [103]. Egashira) and Masuzawa [123] conducted _ similar microdrilling tests using ultrasonic vibration but the vibration was applied to the workpiece instead of the tool. Quartz glass work material and a sintered diamond tool were used for the tests and they succeeded in drilling holes as small as 5 wm diameter.
Figure 28: Commercial 5-axis control ultraprecision machining center [132]. Furukawa et al. [130] built a machine using alumina-based ceramics for the structural members because of their high rigidity and thermal reliability and surface-restricted type aerostatic slideways to avoid friction. Takeuchi et al. [131] developed a 5-axis ultraprecision milling machine using non-friction servomechanisms for the creation of 3D microparts with translational resolution of 1 nm, rotational resolution of 0.00001 degree, and slideway straightness of about 10 nm/200mm. Figure 28 shows a commercial 5-axis ultraprecision machining center employing aerostatic guideways and coreless linear motors to provide non- contact, high resolution drive mechanisms achieving 1nm motion accuracy. To ensure thermal stability, alumina ceramics were used for structural components [132].
Figure 28: Commercial 5-axis control ultraprecision machining center [132]. Furukawa et al. [130] built a machine using alumina-based ceramics for the structural members because of their high rigidity and thermal reliability and surface-restricted type aerostatic slideways to avoid friction. Takeuchi et al. [131] developed a 5-axis ultraprecision milling machine using non-friction servomechanisms for the creation of 3D microparts with translational resolution of 1 nm, rotational resolution of 0.00001 degree, and slideway straightness of about 10 nm/200mm. Figure 28 shows a commercial 5-axis ultraprecision machining center employing aerostatic guideways and coreless linear motors to provide non- contact, high resolution drive mechanisms achieving 1nm motion accuracy. To ensure thermal stability, alumina ceramics were used for structural components [132].
Figure 29: Scaling effect on tool geometry and wear (work material: 40CrMnMo/7, 50 HRC, cutting speed: V, = 200/100 m/min, depth / width of cut: a, = ae = 0.04 xd, feed: f, = 0.01 x d, number of teeth: 2, down milling, tool material: cemented carbide with TiAIN coating) [47]. Fabrication of micro-tools is another challenge in micromachining. Imprecise geometry and the irregularity of tools often negate the advantages of ultra precision process control, state of the art machine tools, and ultra fine tuning of process parameters. Figure 29 a-c shows the tool geometry deviation with respect to the size of the tool; as the tool size decreases from 2 mm to 0.2 mm, the deviation of the given tool geometry from the tool design increases. Also, scaling effects can play a significant role in process physics, which are closely related to the cutting mechanism, caused by a change in tool geometry during cutting. Figure 29 d-f demonstrate tool wear occurring during the micromilling of hardened steel as a function of the engagement length and tool diameter [47].
Figure 29: Scaling effect on tool geometry and wear (work material: 40CrMnMo/7, 50 HRC, cutting speed: V, = 200/100 m/min, depth / width of cut: a, = ae = 0.04 xd, feed: f, = 0.01 x d, number of teeth: 2, down milling, tool material: cemented carbide with TiAIN coating) [47]. Fabrication of micro-tools is another challenge in micromachining. Imprecise geometry and the irregularity of tools often negate the advantages of ultra precision process control, state of the art machine tools, and ultra fine tuning of process parameters. Figure 29 a-c shows the tool geometry deviation with respect to the size of the tool; as the tool size decreases from 2 mm to 0.2 mm, the deviation of the given tool geometry from the tool design increases. Also, scaling effects can play a significant role in process physics, which are closely related to the cutting mechanism, caused by a change in tool geometry during cutting. Figure 29 d-f demonstrate tool wear occurring during the micromilling of hardened steel as a function of the engagement length and tool diameter [47].
Figure 30: Overviews of produced micro-tools under optimum machining conditions: (a) Ultra precise tool (b) Extremely large aspect ratio micro-tool [155].
Figure 30: Overviews of produced micro-tools under optimum machining conditions: (a) Ultra precise tool (b) Extremely large aspect ratio micro-tool [155].
Figure 32: Micro-end milling under dry ice supply (work material: NiTi shape memory alloy, cutting speed: V, = 19 m/min, depth of cut: a, = 10 um, width of cut: a, = 10 ym, feed: f, = 20 um, micro-end mill: cemented carbide with TiAIN coating, d=400 um, nozzle distance: 80 mm, intermittent supply of dry ice) [47].
Figure 32: Micro-end milling under dry ice supply (work material: NiTi shape memory alloy, cutting speed: V, = 19 m/min, depth of cut: a, = 10 um, width of cut: a, = 10 ym, feed: f, = 20 um, micro-end mill: cemented carbide with TiAIN coating, d=400 um, nozzle distance: 80 mm, intermittent supply of dry ice) [47].

Key takeaways

  • In this review, micromachining is strictly defined as mechanical cutting of features with tool engagement less than 1 mm with geometrically defined cutting edges.
  • Moriwaki and Okuda [13] pioneered research on the practical issues in micromachining in the late 1980s and investigated fundamental aspects of micromachining including chip formation, crystallographic orientation effects and grain boundary effects (to be discussed in a later section), tool edge radius effects, cutting force, etc. and conducted ultra precision diamond cutting on copper material with depths of cut from 3 μm to 2.5 nm.
  • Many researchers have observed changes in various parameters, such as cutting force, chip formation, and surface roughness over multi phases or multi grains in micromachining.
  • Hence, the value of minimum chip thickness varies with cutting edge radius, workpiece material, and cutting processes as reported.
  • Diamond cutting tools were used in most of the early micromachining research due to their outstanding hardness (for wear resistance) and ease by which a sharp cutting edge could be generated through grinding.

Related papers

Micromachining – Review of Literature from 1980 to 2010
Zdenka Keran

Interdisciplinary Description of Complex Systems Scientific Journal, 2014

Trend of miniaturization of products and consequently its components nowadays can be evident in almost every production field. To accomplish requirements imposed by miniaturization micromachining proved to be a satisfied manufacturing technique. Herein the term micromachining refers to mechanical micro cutting techniques where material is removed by geometrically determined cutting edges. The aim of this review article is to summarize existing knowledge and highlight current challenges, restrictions and advantages in the field of micromachining.

View PDFchevron_right
Investigation of the Effect of Cutting Conditions and Tool Edge Radius on Micromachining with the Use of the Finite Elements Method
Dimitrios Manolakos

International Journal of Materials Forming and Machining Processes, 2015

Micromachining comprises manufacturing processes that are in the forefront of contemporary industry. The need for high efficiency, high precision, better quality and lower cost makes the study of these processes and the phenomena of the micro regime that accompany, e.g. the size effect, of great importance. The quite popular for modeling manufacturing processes Finite Element Method is applicable in micromachining, too. However, assumptions and simplifications need to be made in order to provide a realistic simulation. In the present paper a numerical simulation using the Third Wave AdvantEdge® software is presented. A FEM model of micromachining of AISI 1045 is used for a parametric analysis of the simulation of micro-cutting. The effect of cutting conditions and tool geometry are investigated and size-effect theories are tested with the aid of the numerical model. From the analysis several useful conclusions are drawn.

View PDFchevron_right
Study of Micro-Machining Strategies
Stefan Dimov

Micro-milling is one of the technologies widely used to manufacture microstructures and tooling inserts for micro-injection moulding and hot embossing. A number of manufacturing constraints remain that limit the application of this technology. One of these constraints is that the existing machining strategies are not appropriate for the manufacture of features that are common in micro parts. This paper discusses an approach for optimising these strategies. The aim is to provide users of CAM systems with tools enabling them to generate cutter paths that take into account the specific conditions arising during micro-milling. The paper studies the advantages and disadvantages of using different machining strategies for micro-milling and then verifies their capabilities experimentally. Also, an approach is proposed for storing and re-using expert knowledge about micro machining strategies associated with different feature types.

View PDFchevron_right
Generating and Characteristic of Surfaces in Mechanical Machining of Micro-Parts
Branislav Sredanovic

Proceedings on Engineering Sciences

Development of micro-devices parts is intensified with developments in medical device and energetic industry. In production of micro-parts (micro-pump, micro-gears, micro-manipulators, etc.), a wide range of engineering materials is encountered. Strict requirements are set in terms of characteristic of micro-parts machined surfaces, such are low surface roughness, advanced tribological characteristic, etc. In this paper is analysed possibilities of different metallic materials mechanical micro-machining. The analysis includes the analysis of the generating and characteristics of the machined surfaces, and influence of a whole set of parameters on surface characteristic. The results showed the benefits of mechanical micromachining and proved that it can achieve satisfactory results of the surface characteristics indicators.

View PDFchevron_right
Review of Optimized Technologies for Micro Machining
Neeraj Kumar Sharma

International Journal of Engineering Research & Technology (IJERT) IJERT , 2015

Micromachining is the most basic technology for the production of miniaturized parts and components. It includes bulk micromachining processes which produce structures inside a substrate and surface micromachining processes which are based on the deposition and etching of different structural layers on top of the substrate. On the other hand, in "mechanical/conventional" micromachining the material removal process resembles macroscopic machining processes such as drilling, milling and others. From such a point of view, micromachining encompasses microelectromechanical systems (MEMS), microsystems technologies (MST) and, in addition, includes processes related to the production and packaging of microsystems [MAS 00a]. Micromachining by precision technology such as 3D microEDM, microlaser machining, microcutting, microgrinding, etc. can produce microscopic and mesoscopic mechanical structures of complex shapes.

View PDFchevron_right

Related topics

  • Environmental Engineering
  • Mechanical Engineering
  • Manufacturing Engineering

    • Cited by

    Evaluation of Superficial and Dimensional Quality Features in Metallic Micro-Channels Manufactured by Micro-End-Milling
    Héctor Siller

    Materials, 2013

    Miniaturization encourages the development of new manufacturing processes capable of fabricating features, like micro-channels, in order to use them for different applications, such as in fuel cells, heat exchangers, microfluidic devices and micro-electromechanical systems (MEMS). Many studies have been conducted on heat and fluid transfer in micro-channels, and they appeared significantly deviated from conventional theory, due to measurement errors and fabrication methods. The present research, in order to deal with this opportunity, is focused on a set of experiments in the micro-milling of channels made of aluminum, titanium alloys and stainless steel, varying parameters, such as spindle speed, depth of cut per pass (a p ), channel depth (d), feed per tooth (f z ) and coolant application. The experimental results were analyzed in terms of dimensional error, channel profile shape deviation from rectangular and surface quality (burr and roughness). The micro-milling process was capable of offering quality features required on the micro-channeled devices. Critical phenomena, like run-out, ploughing, minimum chip thickness and tool wear, were encountered as an explanation for the deviations in shape and for the surface quality of the micro-channels. The application of coolant and a low depth of cut per pass were significant to obtain better superficial quality features and a smaller dimensional error. In conclusion, the integration of superficial and

    View PDFchevron_right
    Influence of inclusion contents on the micro-machinability of three plastic mold steels
    André Zanatta, F. Mahr

    The International Journal of Advanced Manufacturing Technology, 2013

    For the manufacturing of micro molds, usually, the same sort of materials is used as for conventional machining. However, phenomena that occur when the depth of cut approaches the cutting edge radius have to be considered. This paper presents experimental investigations on tool life tests of micromilling processes. TiAlN-coated cemented carbide tools are applied on three different mold steels for plastic injection molding. The influences of two different types of inclusions are explored on tool wear, cutting forces, chip formation, burr formation, and surface finishing of the machined specimens.

    View PDFchevron_right
    Tool Wear in Micro-Endmilling: Material Microstructure Effects, Modeling and Experimental Validation
    Stefan Dimov

    This paper reports an investigation of material microstructure effects on tool wear in micro-scale machining of multi-phase materials. A new generic approach is proposed to estimate the tool wear that utilises empirical data about the effects of micro milling process on cutting edge radius. Experiments were conducted to study independently the influence of two main phases in steel, pearlite and ferrite, on tool wear under different cutting conditions. Based on this empirical data two regression models were created to estimate the increase of cutting edge radius when machining single and multi-phase steels. To validate the models they were applied to predict the tool wear when machining two different multi-phase steel samples. The results showed a good agreement between the estimated and the actual tool wear.

    View PDFchevron_right
    Sparse representation and its applications in micro-milling condition monitoring: noise separation and tool condition monitoring
    Jian-ting Cao

    The International Journal of Advanced Manufacturing Technology, 2014

    In this paper, sparse representation (factorization) of a data matrix is first discussed. An overcomplete basis matrix is estimated by using the K−means method. We have proved that for the estimated overcomplete basis matrix, the sparse solution (coefficient matrix) with minimum l 1 −norm is unique with probability of one, which can be obtained using a linear programming algorithm. The comparisons of the l 1 −norm solution and the l 0 −norm solution are also presented, which can be used in recoverability analysis of blind source separation (BSS). Next, we apply the sparse matrix factorization approach to BSS in the overcomplete case. Generally, if the sources are not sufficiently sparse, we perform blind separation in the time-frequency domain after preprocessing the observed data using the wavelet packets transformation. Third, an EEG experimental data analysis example is presented to illustrate the usefulness of the proposed approach and demonstrate its performance. Two almost independent components obtained by the sparse representation method are selected for phase synchronization analysis, and their periods of significant phase synchronization are found which are related to tasks. Finally, concluding remarks review the approach and state areas that require further study.

    View PDFchevron_right
    An accurate and efficient control over the present numerical model of depth of sputtering in focused ion beam milling
    Sanket Bhavsar

    Proceedings of The Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, 2009

    In many applications, such as fabrication of microtools, microsurgical instruments, microgears, and so on, material must be removed precisely with a focused ion beam (FIB) milling process to generate a specified geometry on substrate material. A mathematical model is available to calculate depth of sputtering at each point on substrate material in order to generate a specified geometry, but the results of the existing model deviates from experimental data. In the current paper, normalized pixel spacing and ratio of redeposition to beam velocity are the two parameters that have been considered in calculation of depth of sputtering during the FIB milling process. A proposed mathematical model incorporating the effect of redeposition has been simulated for parabolic and rectangular trench profiles, and it has been proven to be better than the existing model through comparison with experimental data of parabolic and rectangular geometry on silicon material. In addition, efforts have been made to reduce the amount of numerical calculation in the simulation process by utilizing a Gaussian mask in the existing model instead of the usual Gaussian intensity function. The Gaussian mask prevents the need for repeated calculation of Gaussian intensity function in the mathematical model of depth of sputtering, and in turn reduces the time of computation.

    View PDFchevron_right

    Related papers

    Overview of Micro-Machining and Micro-Electromechanical Systems (MEMS
    lukman A animashaun

    The quest for technological advancement for parts and systems with lightweight, low energy consumption, greater mobility, as well as higher efficiency and reliability, has birthed an era of miniaturized (micro-size) components and microsystems. These systems have found applications in inkjet printers, computer disk drives, accelerometers, projection display chips, blood pressure sensors, optical switches, microvalves, and biosensors, among others. Micromachining is a process that uses specialized tools and techniques to create small parts and components with precise dimensions and tolerances. It is a fabrication technology to produce components that make up micro-electro-mechanical systems (MEMS) with sizes in the range of micrometers to millimeters. The ability to fabricate and manipulate microscale structures and devices has the potential to revolutionize many aspects of technology and industry. In this review paper, an overview of the history of MEMS is provided, including classifications of MEMS, principles, and applications of micro-machining and MEMS. This review paper also provided insights into MEMS fabrication methods, the challenges, and the future prospects of these technologies.

    View PDFchevron_right
    Fundamentals and Applications of Micro And Nano Machining
    Sanket Bhavsar

    In this age of miniaturization, the dimensions produced are becoming very small up to micro and nano levels. Surface roughness and material removal rate are given in terms of atomic sizes, i.e. surface roughness in nm unit and material removal rate in terms of number of atoms per unit time. In this paper different micro and nano fabrication processes are discussed with processing parameters. Energy required to remove nano level of material is larger than conventional material removal techniques. This paper presents an overview on micro nano machining techniques.

    View PDFchevron_right
    Micromilling strategies for machining thin features
    Stefan Dimov

    Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2006

    Micromilling of metal structures with 'thin' features represents a major challenge towards broadening the use of this technology in a range of microengineering applications, for example in producing multi-channel microstructures, housing for mechanical microdevices, and surgical instruments. The most common thin features seen in microengineering products are ribs and webs.

    View PDFchevron_right
    Development and Investigation of Micro Mechanical Machine Tools and Processes
    Chaneel Park

    2013

    Micro-mechanical machining using diamond tools is advantageous to other micromanufacturing techniques as it can create complicated geometric features with high precision, and it is applicable to a wide range of materials including polymers and metals. The effectiveness of manufacturing micro-scale features can be enhanced by understanding the process and interactions between the tools and materials.

    View PDFchevron_right
    Recent Developments and Research Issues in Microultrasonic Machining
    Apurbba Kumar Sharma

    ISRN Mechanical Engineering, 2011

    Demand for micromachining has been on the rise in recent years owing to increasing miniaturization. Production of parts in microscale, especially with brittle materials, is challenging. Ultrasonic micromachining has been gaining popularity as a new alternative in fabrication of such parts. The process gives a machining option for geometrically challenging and/or brittle material parts that are difficult to machine by conventional processes. In the recent years, possibilities have been explored to improve the “Unit Removal” in microultrasonic machining (micro-USM). However, the research in the area is yet to attain momentum. The present paper is an attempt to present the state of the art in the area of micro-USM based on the literature. Developments in the critical areas of the process like machine tool technology, machining tool head, transducers, and precision attainable in the process with challenges have been discussed. Potential research issues have been explored for future work...

    View PDFchevron_right
    Development of a precision machine to perform and study orthogonal micro-cutting
    Jacques Giovanola

    Production Engineering, 2016

    This article presents a laboratory machine designed to perform orthogonal micro-cutting experiments. The machine allows an accurate control of the various cutting parameters and a direct comparison of micro-and macrocutting tool-material data bases. Research with the machine will focus on validating the application of macrocutting data to at least a range of microcutting applications and to define the limits beyond which such applications are no longer possible. The paper describes the machine and its design specifications and provides the validation of the performances claimed. The machine can cut in a reproducible manner with depths of cut as low as 1 lm, at speeds in the range 50-1000 mm/s, while measuring the cutting and thrust forces. The variability in nominal depth of cut is equal or better than 1 lm. Application examples illustrate the influence of lubrication and lead additions on the cutting process and demonstrate that the machine is indeed suitable for the application for which it was designed.

    View PDFchevron_right
    Precision micro-milling process: state of the art
    Lorcan O'Toole

    Advances in Manufacturing, 2020

    Micro-milling is a precision manufacturing process with broad applications across the biomedical, electronics, aerospace, and aeronautical industries owing to its versatility, capability, economy, and efficiency in a wide range of materials. In particular, the micro-milling process is highly suitable for very precise and accurate machining of mold prototypes with high aspect ratios in the microdomain, as well as for rapid micro-texturing and micro-patterning, which will have great importance in the near future in bio-implant manufacturing. This is particularly true for machining of typical difficult-to-machine materials commonly found in both the mold and orthopedic implant industries. However, inherent physical process constraints of machining arise as macro-milling is scaled down to the microdomain. This leads to some physical phenomena during micro-milling such as chip formation, size effect, and process instabilities. These dynamic physical process phenomena are introduced and d...

    View PDFchevron_right
    Investigation of the effects of machining parameters on surface integrity in micromachining
    Dr Ayhan Etyemez

    Open Chemistry, 2022

    In this study, the effect of cutting conditions on surface integrity was investigated in micromilling of magnesium alloy (AZ91). Microtool diameter, cutting speed, feed rate, and depth of cut parameters are used. These variables were investigated at three different levels with the Taguchi L 9 experimental design method. The leastbest objective function was used. As a result of the experiments, surface roughness values were obtained. It has been determined that surface roughness values and depth of cut are effective parameters. After evaluating the results obtained, variance and regression analyses were performed. Based on the analysis of variance, 58.73% feed rate was found for the 1.0 mm diameter tool, on the other hand, for the 0.8 mm diameter tool, the depth of cut was found to be an effective parameter with 53.6%.

    View PDFchevron_right
    A study of micro-machining thin workpieces
    Kushendarsyah Saptaji

    for their assistance in using the equipments, and also to my friends, Wahyu (Baim) for his valuable help with EBSD analysis and Azhar for helping with the use of high speed camera.

    View PDFchevron_right
    Design and Optimization of Micromilling Cutting Tools
    DR JURI SAEDON

    MATEC Web of Conferences, 2018

    With the trend towards miniaturization, micromachining become more and more important in fabricating micro parts. The micromachining process that involved in this study is micro milling. The focus of the study is on the comparison performance between various numbers of flutes (4-flutes, 6-flutes and 8-flutes) with various helix angle (25º,30º and 35º) in micro end milling tool geometry with the conventional micro end milling, 2-flutes micro end milling. Cemented carbide is the material that been used for this study. The main problem about the two flutes micro end milling is it easily wears in a short time. In this study, finite element analysis of the model using cantilever beam principle theory. The tools will be modelled and simulate using Abaqus/CAE 6.10. The tool performance of the designed tool will be evaluated by using the maximum principal stress, σ_max. According to the analysis, weakest geometry is 2-flutes micro end milling and the strongest is 8-flutes micro end milling. 8-flutes micro end milling can be the option to replace the conventional micro end milling.

    View PDFchevron_right