tag: ALD

Litho Patterning of Conformal Thin-Film Coatings on Complex 3D Structures (KTH Royal)
By Technical Paper Link - 20 Jul, 2026 - Comments: 0

Researchers at KTH Royal Institute of Technology published a technical paper titled “Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.” Abstract Excerpt: “Here we present a robust approach for patterning of conformal thin-film coatings on complex 3D structures.” “It is agnostic to the used thin-film deposition process and en... » read more

When Semiconductor Materials Misbehave
By Gregory Haley - 27 Apr, 2026 - Comments: 0

Key Takeaways Material behavior in production depends on the process context that no development environment can fully replicate. In advanced packaging, the interactions that cross domain boundaries are increasingly where failures originate. The most accurate materials data is also the most commercially sensitive, leaving simulation models calibrated against generic inputs rather tha... » read more

Detecting Chemical Variability At Advanced Nodes
By Gregory Haley - 10 Mar, 2026 - Comments: 2

Key Takeaways Yield loss is increasingly driven by molecular variability in thin films, interfaces, and contamination rather than visible defects. Reliability issues often appear first as parametric drift or margin erosion under workload and thermal stress. Detection requires correlating molecular metrology, embedded electrical telemetry, and AI-driven wafer inspection. As s... » read more

Three New ALD/MLD Processes for Co-organic Thin Films (Aalto University, RUB et al.)
By Technical Paper Link - 24 Feb, 2026 - Comments: 0

A new technical paper, "Amido-Amine Co(II) Precursor-Based Atomic/Molecular Layer Deposition Processes for Cobalt-Organic Thin Films and Their Thermal Conversion to CoO Thin Films," was published by researchers at Aalto University, Ruhr University Bochum, Tyndall National Institute, ESRF et al. "Atomic/molecular layer deposition (ALD/MLD) offers a comprehensive process and application portfo... » read more

When Cleaning Chips Isn’t Clean Enough
By Gregory Haley - 19 Feb, 2026 - Comments: 0

Key Takeaways Contamination is becoming much more difficult to identify at the most advanced nodes, forcing fabs to rethink how control is achieved. Issues may show up as electrical or statistical anomalies, not particles, and not at time zero. Reliable classification is needed to identify critical contamination and reduce time and effort spent on nuisance failures. For much... » read more

Catching Critical Defects In TSVs And Stacked Chips
By Laura Peters - 10 Feb, 2026 - Comments: 0

Key Takeaways Variation is becoming a bigger problem in multi-die assemblies with TSVs and hybrid bonding. Multi-modal approaches are required to test these devices. AI plays a role in improving defect capture rate and distinguishing between yield-killing and false positives. New methods for interconnecting devices using through-silicon vias (TSVs) and hybrid bonding in stac... » read more

Rutile TiO2 As A Post-ZrO2 Dielectric Platform for Next-Gen DRAM Capacitors (KIST)
By Technical Paper Link - 07 Feb, 2026 - Comments: 0

Researchers at Korea Institute of Science and Technology (KIST) published "Beyond ZrO2: Rutile TiO2 as the Dielectric Platform for Next-Generation DRAM Capacitors." Abstract "As DRAM technology nodes move into the sub-10 nm regime, capacitor scaling is increasingly constrained by both footprint loss and a hard physical thickness limit for the entire electrode–dielectric–electrode stac... » read more

Overview of ALD-Driven Oxide Semiconductors for High Density, Low Power Memory Architectures (Hanyang Univ., imec)
By Technical Paper Link - 25 Jan, 2026 - Comments: 0

A new technical paper titled "Oxide Semiconductor for Advanced Memory Architectures: Atomic Layer Deposition, Key Requirement and Challenges" was published by researchers a Hanyang University and imec. Abstract "Oxide semiconductors (OSs), introduced by the Hosono group in the early 2000s, have evolved from display backplane materials to promising candidates for advanced memory and logic ... » read more

Every Atom Now Counts In Advanced Chip Manufacturing
By Gregory Haley - 22 Jan, 2026 - Comments: 0

Artificial-intelligence workloads are pushing semiconductor design to a point where traditional scaling strategies are running out of room. Performance improvements that once came from shrinking transistors now depend increasingly on how devices are stacked, interconnected, and isolated. Transistor scaling still matters, but advanced device architectures no longer can accommodate the power dens... » read more

Research Bits: Jan. 20
By Jesse Allen - 20 Jan, 2026 - Comments: 0

ALD for Ru wiring Researchers from Ulsan National Institute of Science and Technology (UNIST), Hongik University, and Tanaka Precious Metal Technologies developed an atomic layer deposition (ALD) process for creating chip interconnects using a ruthenium (Ru) precursor with a thermal stability up to 400 °C. The high-temperature ALD process can produce dense, high-quality Ru films without deg... » read more

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