{"id":9041,"date":"2024-06-17T15:39:00","date_gmt":"2024-06-17T13:39:00","guid":{"rendered":"https:\/\/raith.com\/?post_type=type-systems&#038;p=9041"},"modified":"2025-12-18T13:21:11","modified_gmt":"2025-12-18T12:21:11","slug":"vector","status":"publish","type":"type-systems","link":"https:\/\/raith.com\/products\/vector\/","title":{"rendered":"VECTOR"},"content":{"rendered":"<div class='breakdance'><section id=\"introduction\" class=\"bde-section-9041-251 bde-section s-keyfeaturepitch\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><div class=\"bde-columns-9041-252 bde-columns\"><div class=\"bde-column-9041-253 bde-column\">\n  \n  \n\t\n\n\n\n<h2 class=\"bde-heading-9041-407 bde-heading teaser-left-col\">\nIntroduction\n<\/h2>\n<\/div><div class=\"bde-column-9041-255 bde-column\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-256 bde-text\">\nThe transfer of innovation from Lab-to-Fab requires Fab-compatible processes and protocols in Labs. VECTOR combines key capabilities such as process characterization, lithography process control, defect review, and inspection in one automated SEM. Precise and automated measurements are crucial in transferring cutting-edge nanotechnology into new industry devices. VECTOR bridges the gap between manual analytical SEMs and dedicated costly CD-SEMs production systems, making it the most suitable solution for academia, core facilities, and industry.\n<\/div>\n<\/div><\/div><div class=\"bde-columns-9041-257 bde-columns s-keyfeaturepitch__column content-indent-sidebar-left\"><div class=\"bde-column-9041-258 bde-column\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-259 bde-div\" data-parallax=\"true\">\n  \n  \n\t\n\n\n\n\n<\/div>\n<\/div><div class=\"bde-column-9041-260 bde-column\">\n  \n  \n\t\n\n\n\n<div class=\"bde-columns-9041-261 bde-columns\"><div class=\"bde-column-9041-262 bde-column\">\n  \n  \n\t\n\n\n\n<h3 class=\"bde-heading-9041-263 bde-heading\">\nKey features\n<\/h3><div class=\"bde-rich-text-9041-264 bde-rich-text breakdance-rich-text-styles\">\n<ul>\n<li>Ultra precise navigation over full wafers and dies<\/li>\n<li>1 nm resolution due to laser interferometric stage positioning measurements<\/li>\n<li>Fully automated acquisition of 10.000s real POIs (images and\/or measurement points) on full wafers<\/li>\n<li>KLA result file import for automated defect review<\/li>\n<li>Integrated image evaluation capabilities and graphical display of results linked to a comprehensive database<\/li>\n<li>Highest stability due to a temperature controlled environmental shield<\/li>\n<li>Accurate full FOV (field of view) measurements due to non-linear in-field distortion corrections<\/li>\n<li>CAD-navigation on wafers and dies<\/li>\n<li>Connectivity solutions with RAITH\u2019s nanofabrication tools<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div>\n<\/div><\/div><div class=\"bde-div-9041-374 bde-div\">\n  \n  \n\t\n\n\n\n<div class=\"bde-fancy-divider-9041-375 bde-fancy-divider\" data-entrance=\"slideLeft\">\n\n\n<div class=\"bde-fancy-divider__wrapper\">\n  <div class=\"bde-fancy-divider__separator   \">\n  \t  <\/div>\n<\/div>\n\n<\/div>\n<\/div><\/div>\n<\/section><section id=\"benefits\" class=\"bde-section-9041-135 bde-section s-benfits3col\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><div class=\"bde-text-9041-136 bde-text TxColorGray\">\nBenefits\n<\/div><h2 class=\"bde-heading-9041-137 bde-heading\">\nTaking SEM measurements to the next level\n<\/h2><div class=\"bde-columns-9041-138 bde-columns\"><div class=\"bde-column-9041-139 bde-column\">\n  \n  \n\t\n\n\n\n<div class=\"bde-grid-9041-140 bde-grid\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-141 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-142 bde-div tile-minimal__inner\">\n  \n  \n\t\n\n\n\n<h3 class=\"bde-heading-9041-143 bde-heading\">\nAutomated workflows without user influence\n<\/h3><div class=\"bde-text-9041-144 bde-text\">\nWith CAD-file and \/ or KLARF import, VECTOR has ultimate navigation and automation capabilities. Recipe based job files for automated acquisition and evaluation of 10.000s of images can be easily generated.\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-145 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-146 bde-div tile-minimal__inner\">\n  \n  \n\t\n\n\n\n<h3 class=\"bde-heading-9041-147 bde-heading\">\nPrecision guaranteed\n<\/h3><div class=\"bde-text-9041-148 bde-text\">\nHigh-resolution sensors and automated calibration routines guarantee the mandatory precision and accuracy for full-wafer inspections.\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-149 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-150 bde-div tile-minimal__inner\">\n  \n  \n\t\n\n\n\n<h3 class=\"bde-heading-9041-151 bde-heading\">\nEnhanced positioning accuracy\n<\/h3><div class=\"bde-text-9041-152 bde-text\">\nThe integrated laser interferometer stage achieves 1 nm positioning accuracy across the wafer \u2013 no more image counting. Plus, the environmental shield eliminates external influences like vibrations, temperature drifts, and magnetic fields.\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-153 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-154 bde-div tile-minimal__inner\">\n  \n  \n\t\n\n\n\n<h3 class=\"bde-heading-9041-155 bde-heading\">\nConnectivity\n<\/h3><div class=\"bde-text-9041-156 bde-text\">\nVECTOR can be connected to all RAITH nano\u00adfabrication systems to fuel yield and productivity improvements, as well as enhance ease of use. Innovation cycle times will be reduced.\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div><\/div><div class=\"bde-post-loop-9041-270 bde-post-loop\">\n<div class=\"bde-loop bde-loop-grid ee-posts ee-posts-grid\">    <article class=\"bde-loop-item ee-post\">\n        <div class='breakdance'><\/div>    <\/article>\n    <article class=\"bde-loop-item ee-post\">\n        <div class='breakdance'><\/div>    <\/article>\n    <article class=\"bde-loop-item ee-post\">\n        <div class='breakdance'><\/div>    <\/article>\n<\/div>\n\n<\/div><\/div>\n<\/section><section class=\"bde-section-9041-271 bde-section s-introduction\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><h2 class=\"bde-heading-9041-272 bde-heading\">\n3-in-1 solution for characterization and verification of nanostructuring processes\n<\/h2><div class=\"bde-div-9041-273 bde-div\">\n  \n  \n\t\n\n\n\n<div class=\"bde-accordion-9041-274 bde-accordion adv-accordion-large-title\"><div class=\"bde-accordion__content-wrapper-9041-275 bde-accordion__content-wrapper\">\n<h3 class=\"bde-accordion__title-tag\">\n  <button type=\"button\" class=\"bde-accordion__button\" id=\"accordion-button-275\" aria-controls=\"accordion-panel-275\" aria-expanded=\"false\">\n     <span class=\"bde-accordion__title\" >Streamlined metrology analysis<\/span>\n     <span class=\"bde-accordion__icon bde-accordion__icon--default\"><\/span>\n     <span class=\"bde-accordion__icon bde-accordion__icon--active\"><\/span>\n  <\/button>\n<\/h3>\n\n<div role=\"region\" class=\"bde-accordion__panel\" id=\"accordion-panel-275\" aria-labelledby=\"accordion-button-275\">\n    <div class=\"bde-accordion__panel-content\">\n        <div class=\"bde-text-9041-276 bde-text\">\nAutomatically evaluate metrology parameters such as CD variation, gap size, LER, etc., facilitating efficient process window analysis and control\n<\/div>\n    <\/div>\n<\/div>\n\n\n\n<\/div>\r\n\r\n<\/div><div class=\"bde-div-9041-279 bde-div\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-280 bde-text\">\nAutomated SEM imaging\n<\/div>\n<\/div><div class=\"bde-div-9041-408 bde-div\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-409 bde-text\">\nMetrology\n<\/div>\n<\/div><div class=\"bde-div-9041-410 bde-div\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-411 bde-text\">\nDefect inspection\n<\/div>\n<\/div>\n<\/div><\/div>\n<\/section><section id=\"software\" class=\"bde-section-9041-185 bde-section s-softwaresection\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><h2 class=\"bde-heading-9041-186 bde-heading TxColorGray\">\nSoftware\n<\/h2><h2 class=\"bde-heading-9041-187 bde-heading\">\nCreating information out of data\n<\/h2><div class=\"bde-div-9041-188 bde-div image-acaption-wrapper\">\n  \n  \n\t\n\n\n\n<div class=\"bde-image-9041-189 bde-image\">\n<figure class=\"breakdance-image breakdance-image--9475\">\n\t<div class=\"breakdance-image-container\">\n\t\t<div class=\"breakdance-image-clip\"><img decoding=\"async\" class=\"breakdance-image-object\" src=\"https:\/\/raith.com\/wp-content\/uploads\/2024\/06\/raith-digital-raith-solution-nanotechnology-software.jpg\" width=\"2200\" height=\"1467\" srcset=\"https:\/\/raith.com\/wp-content\/uploads\/2024\/06\/raith-digital-raith-solution-nanotechnology-software.jpg 2200w, https:\/\/raith.com\/wp-content\/uploads\/2024\/06\/raith-digital-raith-solution-nanotechnology-software-300x200.jpg 300w, https:\/\/raith.com\/wp-content\/uploads\/2024\/06\/raith-digital-raith-solution-nanotechnology-software-1024x683.jpg 1024w, https:\/\/raith.com\/wp-content\/uploads\/2024\/06\/raith-digital-raith-solution-nanotechnology-software-768x512.jpg 768w, https:\/\/raith.com\/wp-content\/uploads\/2024\/06\/raith-digital-raith-solution-nanotechnology-software-1536x1024.jpg 1536w, https:\/\/raith.com\/wp-content\/uploads\/2024\/06\/raith-digital-raith-solution-nanotechnology-software-2048x1366.jpg 2048w\" sizes=\"(max-width: 2200px) 100vw, 2200px\"><\/div>\n\t<\/div><\/figure>\n\n<\/div><div class=\"bde-div-9041-190 bde-div image-acaption-wrapper__caption\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-191 bde-text\">\nDesign and execute complex patterns \n<\/div>\n<\/div>\n<\/div><\/div>\n<\/section><section class=\"bde-section-9041-159 bde-section s-introductionplusenumeration\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><div class=\"bde-columns-9041-160 bde-columns\"><div class=\"bde-column-9041-161 bde-column\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-162 bde-text txColorDarkGray smallTextIndentation\">\nThe proprietary Digital RAITH Nanosuite control software, with its various modules, is the most comprehensive platform for integrated solutions and additional external software modules.\n<\/div>\n<\/div><div class=\"bde-column-9041-163 bde-column\">\n  \n  \n\t\n\n\n\n<div class=\"bde-grid-9041-164 bde-grid\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-165 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-166 bde-div tile-minimal__inner\">\n  \n  \n\t\n\n\n\n<h2 class=\"bde-heading-9041-167 bde-heading\">\nConfigurable analysis capabilities\n<\/h2><div class=\"bde-text-9041-168 bde-text\">\n- Metrology<br>- Defect review<br>- SEM-inspection\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-169 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-170 bde-div tile-minimal__inner\">\n  \n  \n\t\n\n\n\n<h2 class=\"bde-heading-9041-171 bde-heading\">\nPython scripting\n<\/h2><div class=\"bde-text-9041-172 bde-text\">\nInterface with Python scripting for extended automation and customizing.\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-173 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-174 bde-div tile-minimal__inner\">\n  \n  \n\t\n\n\n\n<h2 class=\"bde-heading-9041-175 bde-heading\">\nConnectivity\n<\/h2><div class=\"bde-text-9041-176 bde-text\">\nDirect import of inspection poins\/areas of interest from RAITH nanofabrication tools like electron, laser, or ion beam writers.\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div><\/div><\/div>\n<\/section><section class=\"bde-section-9041-192 bde-section s-bigtypoanimated\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><div class=\"bde-text-9041-193 bde-text s-bigtypoanimated\" data-parallax=\"true\">\n100 person-years of software programming\n<\/div><\/div>\n<\/section><section id=\"technical_data\" class=\"bde-section-9041-281 bde-section s-technicaldata\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><h2 class=\"bde-heading-9041-282 bde-heading TxColorGray\">\nTechnical data\n<\/h2><div class=\"bde-grid-9041-283 bde-grid\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-284 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-285 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-286 bde-text tile-minimal__text-bmargin-l\">\nProcess Repeatability\n<\/div><div class=\"bde-div-9041-287 bde-div\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-288 bde-text\">\n\u2264 5 nm 3 sigma\n<\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-289 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-290 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-291 bde-text tile-minimal__text-bmargin-l\">\nMeasurement precision\n<\/div><div class=\"bde-div-9041-292 bde-div\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-293 bde-text\">\n\u2264 2 nm 3 sigma\n<\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-294 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-295 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-296 bde-text tile-minimal__text-bmargin-l\">\nConnectivity\n<\/div><div class=\"bde-div-9041-297 bde-div\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-298 bde-text\">\nto EBL systems\n<\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-304 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-305 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-306 bde-text tile-minimal__text-bmargin-l\">\nGlobal position stability\n<\/div><div class=\"bde-text-9041-412 bde-text\">\n< 10 nm\/h*\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-309 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-310 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-311 bde-text tile-minimal__text-bmargin-l\">\n8 inch compatibility\n<\/div><div class=\"bde-text-9041-413 bde-text\">\nfrom 10 mm to 200 mm samples\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-314 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-315 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-316 bde-text tile-minimal__text-bmargin-l\">\nImage resolution\n<\/div><div class=\"bde-text-9041-414 bde-text\">\n2 nm at 1 kV**<br>1 nm at 20 kV**\n<\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"bde-text-9041-434 bde-text tile-minimal__text-bmargin-l\">\n* closed loop with drift correction<br>** edge detection filter  - 65\/35 criteria\n<\/div><\/div>\n<\/section><section class=\"bde-section-9041-427 bde-section s-downloads1col\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><div class=\"bde-div-9041-428 bde-div download-box download-box--grey-bg download-box-spacing-l\">\n  \n  \n\t\n\n\n\n<div class=\"bde-columns-9041-429 bde-columns\"><div class=\"bde-column-9041-430 bde-column\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-431 bde-text download-box__title\">\nAre you interested in more details and insights?\n<\/div>\n<\/div><div class=\"bde-column-9041-432 bde-column\">\n  \n  \n\t\n\n\n\n<div class=\"bde-post-loop-9041-433 bde-post-loop\">\n<div class=\"bde-loop bde-loop-grid ee-posts ee-posts-grid\">    <div class=\"bde-loop-item ee-post\">\n        <div class='breakdance'><div class=\"bde-div-10392-115-17390-10392-1 bde-div download-box__element bde-div-10392-115\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-10392-122-17390-10392-1 bde-div bde-div-10392-122\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-10392-116-17390-10392-1 bde-text download-box__element__title download-box__headline bde-text-10392-116\">\nVECTOR brochure (.pdf)\n<\/div><div class=\"bde-code-block-10392-117-17390-10392-1 bde-code-block bde-code-block-10392-117\">\n\n  <div class='w3eden'><!-- WPDM Link Template: Default Template -->\n\n<div class=\"link-template-default card mb-2\">\n    <div class=\"card-body\">\n        <div class=\"media\">\n            <div class=\"mr-3 img-48\"><img decoding=\"async\" class=\"wpdm_icon\" alt=\"Icon\" src=\"https:\/\/raith.com\/wp-content\/plugins\/download-manager\/assets\/file-type-icons\/pdf.svg\" \/><\/div>\n            <div class=\"media-body\">\n                <h3 class=\"package-title\"><a href='https:\/\/raith.com\/download\/vector-brochure-pdf\/'>VECTOR brochure (.pdf)<\/a><\/h3>\n                <div class=\"text-muted text-small\"><i class=\"fas fa-copy\"><\/i> 1 file(s) <i class=\"fas fa-hdd ml-3\"><\/i> 982.58 KB<\/div>\n            <\/div>\n            <div class=\"ml-3\">\n                <a href='#unlock' class='wpdm-download-link wpdm-download-locked btn btn-primary btn-sm' data-package='17390'>Download<\/a>\n            <\/div>\n        <\/div>\n    <\/div>\n<\/div>\n\n<\/div>  \n\n\n<\/div><div class=\"bde-icon-10392-123-17390-10392-1 bde-icon download-box__element__icon bde-icon-10392-123\">\n\n    \n            <div class=\"bde-icon-icon breakdance-icon-atom\" >\n    \n                    <svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" id=\"a\" width=\"24\" height=\"24\" viewBox=\"0 0 24 24\"><rect x=\"1.44\" y=\"21.59\" width=\"21.12\" height=\"2\" stroke-width=\"0\"\/><polygon points=\"22.56 7.88 21.13 6.47 13 14.75 13 .41 11 .41 11 14.74 2.87 6.47 1.44 7.88 9.98 16.55 9.98 16.55 12 18.62 13.89 16.69 13.89 16.69 22.56 7.88\" stroke-width=\"0\"\/><\/svg>\n        \n        \n        \n            <\/div>\n    \n\n\n<\/div>\n<\/div>\n<\/div><\/div>    <\/div>\n<\/div>\n\n<\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/section><section id=\"application_pattern\" class=\"bde-section-9041-212 bde-section s-applicationlist\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><div class=\"bde-text-9041-213 bde-text TxColorGray tiny-padding-left\">\nApplication use cases\n<\/div><h2 class=\"bde-heading-9041-214 bde-heading\">\nBringing applications to perfection\n<\/h2><div class=\"bde-grid-9041-376 bde-grid content-indent-sidebar-left\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-9041-377 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-image-9041-415 bde-image\">\n<figure class=\"breakdance-image breakdance-image--17397\">\n\t<div class=\"breakdance-image-container\">\n\t\t<div class=\"breakdance-image-clip\"><img decoding=\"async\" class=\"breakdance-image-object\" src=\"https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/SEM-design-file-VECTOR.jpg\" width=\"1333\" height=\"1000\" srcset=\"https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/SEM-design-file-VECTOR.jpg 1333w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/SEM-design-file-VECTOR-300x225.jpg 300w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/SEM-design-file-VECTOR-1024x768.jpg 1024w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/SEM-design-file-VECTOR-768x576.jpg 768w\" sizes=\"(max-width: 1333px) 100vw, 1333px\" alt=\"Definition of imaging locations based on design file\"><\/div>\n\t<\/div><\/figure>\n\n<\/div><div class=\"bde-div-9041-417 bde-div tile-usecase__content\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-418 bde-text\">\nDefinition of imaging locations<br>based on design file\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-419 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-image-9041-420 bde-image\">\n<figure class=\"breakdance-image breakdance-image--17398\">\n\t<div class=\"breakdance-image-container\">\n\t\t<div class=\"breakdance-image-clip\"><img decoding=\"async\" class=\"breakdance-image-object\" src=\"https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/wafer-map-VECTOR.jpg\" width=\"1333\" height=\"1000\" srcset=\"https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/wafer-map-VECTOR.jpg 1333w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/wafer-map-VECTOR-300x225.jpg 300w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/wafer-map-VECTOR-1024x768.jpg 1024w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/wafer-map-VECTOR-768x576.jpg 768w\" sizes=\"(max-width: 1333px) 100vw, 1333px\" alt=\"Wafer map of critical dimension created from more than 10000 imaging sites\"><\/div>\n\t<\/div><\/figure>\n\n<\/div><div class=\"bde-div-9041-421 bde-div tile-usecase__content\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-422 bde-text\">\nWafer map of critical dimension created from more than 10000 imaging sites\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-9041-423 bde-div tile-minimal\">\n  \n  \n\t\n\n\n\n<div class=\"bde-image-9041-424 bde-image\">\n<figure class=\"breakdance-image breakdance-image--17395\">\n\t<div class=\"breakdance-image-container\">\n\t\t<div class=\"breakdance-image-clip\"><img decoding=\"async\" class=\"breakdance-image-object\" src=\"https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/sensitivity.png\" width=\"7054\" height=\"5971\" srcset=\"https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/sensitivity.png 7054w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/sensitivity-300x254.png 300w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/sensitivity-1024x867.png 1024w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/sensitivity-768x650.png 768w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/sensitivity-1536x1300.png 1536w, https:\/\/raith.com\/wp-content\/uploads\/2025\/01\/sensitivity-2048x1734.png 2048w\" sizes=\"(max-width: 7054px) 100vw, 7054px\" alt=\"Sensitivity map of detected anomalies\"><\/div>\n\t<\/div><\/figure>\n\n<\/div><div class=\"bde-div-9041-425 bde-div tile-usecase__content\">\n  \n  \n\t\n\n\n\n<div class=\"bde-text-9041-426 bde-text\">\nSensitivity map of detected anomalies\n<\/div>\n<\/div>\n<\/div>\n<\/div><\/div>\n<\/section><section class=\"bde-section-9041-240 bde-section s-solutions\">\n  \n  \n\t\n\n\n\n<div class=\"section-container\"><div class=\"bde-text-9041-241 bde-text TxColorGray\">\nSolutions\n<\/div><h2 class=\"bde-heading-9041-242 bde-heading\" data-entrance=\"slideLeft\">\nRAITH offers integrated solutions that increase performance and create market opportunities. In any production environment.\n<\/h2><div class=\"bde-post-loop-9041-243 bde-post-loop\">\n<div class=\"bde-loop bde-loop-grid ee-posts ee-posts-grid\">    <article class=\"bde-loop-item ee-post\">\n        <div class='breakdance'><div class=\"bde-div-6172-100-8880-6172-1 bde-div card-solution add-box-link bde-div-6172-100\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-6172-101-8880-6172-1 bde-div bde-div-6172-101\">\n  \n  \n\t\n\n\n\n<div class=\"bde-image-6172-102-8880-6172-1 bde-image bde-image-6172-102\">\n<figure class=\"breakdance-image breakdance-image--11523\">\n\t<div class=\"breakdance-image-container\">\n\t\t<div class=\"breakdance-image-clip\"><img decoding=\"async\" class=\"breakdance-image-object\" src=\"https:\/\/raith.com\/wp-content\/uploads\/2024\/07\/raith-solution_process-control-tile.svg\" width=\"185\" height=\"125\" sizes=\"(max-width: 185px) 100vw, 185px\" alt=\"RAITH Process control: Understanding and controlling nanofabrication processes.\"><\/div>\n\t<\/div><\/figure>\n\n<\/div><div class=\"bde-div-6172-103-8880-6172-1 bde-div bde-div-6172-103\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-6172-104-8880-6172-1 bde-div card-solution__headline-wrapper bde-div-6172-104\">\n  \n  \n\t\n\n\n\n<h3 class=\"bde-heading-6172-105-8880-6172-1 bde-heading bde-heading-6172-105\">\nProcess Control\n<\/h3><div class=\"bde-icon-6172-106-8880-6172-1 bde-icon card-solution__plus-icon bde-icon-6172-106\">\n\n    \n            <div class=\"bde-icon-icon breakdance-icon-atom\" >\n    \n                    <svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" id=\"a\" width=\"28\" height=\"28\" viewBox=\"0 0 28 28\"><polygon points=\"28 13.12 14.88 13.12 14.88 0 13.12 0 13.12 13.12 0 13.12 0 14.88 13.12 14.88 13.12 28 14.88 28 14.88 14.88 28 14.88 28 13.12\" stroke-width=\"0\"\/><\/svg>\n        \n        \n        \n            <\/div>\n    \n\n\n<\/div>\n<\/div><div class=\"bde-text-6172-107-8880-6172-1 bde-text bde-text-6172-107\">\n<p>Revolutionize nanofabrication quality management, enable extensive data acquisition at the nanoscale, and beyond.<\/p>\n\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-6172-110-8880-6172-1 bde-div card-bottom-link card-bottom-link--short bde-div-6172-110\">\n  \n  \n\t\n\n\n\n<div class=\"bde-button-6172-112-8880-6172-1 bde-button card-solution__button bde-button-6172-112\">\n    \n                                    \n    \n    \n    \n    \n            \n                    \n            \n            \n\n    \n    \n    \n    \n    \n    <a class=\"breakdance-link button-atom button-atom--text bde-button__button\" href=\"https:\/\/raith.com\/solutions\/process-control\/\" target=\"_self\" data-type=\"url\"  >\n\n    \n        <span class=\"button-atom__text\">Process Control Solution<\/span>\n\n        \n        \n                <\/a>\n\n    \n\n\n<\/div>\n<\/div>\n<\/div><\/div>    <\/article>\n    <article class=\"bde-loop-item ee-post\">\n        <div class='breakdance'><div class=\"bde-div-6172-100-8871-6172-1 bde-div card-solution add-box-link bde-div-6172-100\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-6172-101-8871-6172-1 bde-div bde-div-6172-101\">\n  \n  \n\t\n\n\n\n<div class=\"bde-image-6172-102-8871-6172-1 bde-image bde-image-6172-102\">\n<figure class=\"breakdance-image breakdance-image--11521\">\n\t<div class=\"breakdance-image-container\">\n\t\t<div class=\"breakdance-image-clip\"><img decoding=\"async\" class=\"breakdance-image-object\" src=\"https:\/\/raith.com\/wp-content\/uploads\/2024\/07\/raith-solution_mix-and-match-tile.svg\" width=\"185\" height=\"125\" sizes=\"(max-width: 185px) 100vw, 185px\" alt=\"RAITH Mix and Match: mixing different lithography methods with ease.\"><\/div>\n\t<\/div><\/figure>\n\n<\/div><div class=\"bde-div-6172-103-8871-6172-1 bde-div bde-div-6172-103\">\n  \n  \n\t\n\n\n\n<div class=\"bde-div-6172-104-8871-6172-1 bde-div card-solution__headline-wrapper bde-div-6172-104\">\n  \n  \n\t\n\n\n\n<h3 class=\"bde-heading-6172-105-8871-6172-1 bde-heading bde-heading-6172-105\">\nMix and Match\n<\/h3><div class=\"bde-icon-6172-106-8871-6172-1 bde-icon card-solution__plus-icon bde-icon-6172-106\">\n\n    \n            <div class=\"bde-icon-icon breakdance-icon-atom\" >\n    \n                    <svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" id=\"a\" width=\"28\" height=\"28\" viewBox=\"0 0 28 28\"><polygon points=\"28 13.12 14.88 13.12 14.88 0 13.12 0 13.12 13.12 0 13.12 0 14.88 13.12 14.88 13.12 28 14.88 28 14.88 14.88 28 14.88 28 13.12\" stroke-width=\"0\"\/><\/svg>\n        \n        \n        \n            <\/div>\n    \n\n\n<\/div>\n<\/div><div class=\"bde-text-6172-107-8871-6172-1 bde-text bde-text-6172-107\">\n<p>Seamless blending of laser direct writing, ion beam, and electron beam technologies, unlocking new nanostructuring horizons.<\/p>\n\n<\/div>\n<\/div>\n<\/div><div class=\"bde-div-6172-110-8871-6172-1 bde-div card-bottom-link card-bottom-link--short bde-div-6172-110\">\n  \n  \n\t\n\n\n\n<div class=\"bde-button-6172-112-8871-6172-1 bde-button card-solution__button bde-button-6172-112\">\n    \n                                    \n    \n    \n    \n    \n            \n                    \n            \n            \n\n    \n    \n    \n    \n    \n    <a class=\"breakdance-link button-atom button-atom--text bde-button__button\" href=\"https:\/\/raith.com\/solutions\/mix-and-match\/\" target=\"_self\" data-type=\"url\"  >\n\n    \n        <span class=\"button-atom__text\">Mix and Match Solution<\/span>\n\n        \n        \n                <\/a>\n\n    \n\n\n<\/div>\n<\/div>\n<\/div><\/div>    <\/article>\n<\/div>\n\n<\/div><\/div>\n<\/section><\/div>","protected":false},"excerpt":{"rendered":"<p>Introduction The transfer of innovation from Lab-to-Fab requires Fab-compatible processes and protocols in Labs. VECTOR combines key capabilities such as process characterization, lithography process control, defect review, and inspection in one automated [&hellip;]<\/p>\n","protected":false},"author":8,"featured_media":12208,"parent":0,"menu_order":17,"template":"","product-category":[38],"class_list":["post-9041","type-systems","type-type-systems","status-publish","has-post-thumbnail","hentry","product-category-imaging-analysis"],"acf":[],"_links":{"self":[{"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/type-systems\/9041","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/type-systems"}],"about":[{"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/types\/type-systems"}],"author":[{"embeddable":true,"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/users\/8"}],"version-history":[{"count":4,"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/type-systems\/9041\/revisions"}],"predecessor-version":[{"id":19562,"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/type-systems\/9041\/revisions\/19562"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/media\/12208"}],"wp:attachment":[{"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/media?parent=9041"}],"wp:term":[{"taxonomy":"product-category","embeddable":true,"href":"https:\/\/raith.com\/wp-json\/wp\/v2\/product-category?post=9041"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}