Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2010
... Damiano Giubertoni, Giancarlo Pepponi, Mehmet Alper Sahiner, Stephen P. Kelty, Salvatore Genn... more ... Damiano Giubertoni, Giancarlo Pepponi, Mehmet Alper Sahiner, Stephen P. Kelty, Salvatore Gennaro, Massimo Bersani, Max Kah, Karen J ... measurements, extended x-ray absorption fine structure spectroscopy (EXAFS), and secondary ion mass spectrometry (SIMS) gave an ...
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Papers by Karen J Kirkby