Papers by bahareh khodadadi
Abstracf-Thin films of SnOl were pdpared by a sol-gel technique using tin tetrachloride (SnC4) ah... more Abstracf-Thin films of SnOl were pdpared by a sol-gel technique using tin tetrachloride (SnC4) ahd isopropyl alcohol solution. Applying standard lithography process, high sensitivity SDOZ gas sensors were miniaturized on maeromachined Si substrates. Conductivity measurements of the films annealed at different temperatures have been carried out in dry air and in the presence of 5ppm to lOOppm ethanol. Response and recovery times OF the sensors annealed at 55O0C a t the optimum operating temperature were found to be about 5 and 40 seconds, respectively. Also sensitivity of the sensors was studied towards SQOppm CO and 1OOOppm Hz at different temperatures, indicating the satisfactory selectivity for ethanol.
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Papers by bahareh khodadadi