Papers by Vladimir Stavrov
Direct-Write 3D Nano-Printing of Thermal High-Resolution Nano-Probes
1 Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Graz, AUSTRIA... more 1 Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Graz, AUSTRIA 2 Graz Centre for Electron Microscopy, Graz, AUSTRIA 3 GETec Microscopy GmbH, Vienna, AUSTRIA 4 SCL Sensor Tech. Fabrication GmbH, Vienna, AUSTRIA 5 AMG Technology Ltd., Bovegrad, BULGARIA 6 Laboratory for Bioand Nano-Instrumentation, EPFL, Lausanne, SWITZERLAND Direct-Write Fabrication of Electric and Thermal High-Resolution Nanoprobes on Self-Sensing AFM Cantilever
SelectiveSensitivity of contact MEMS position sensors with sidewall piezoresistors
2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME), 2017
Some results in characterization of two contact MEMS position sensors with sidewall piezoresistor... more Some results in characterization of two contact MEMS position sensors with sidewall piezoresistors are presented. Devices with in-plane travel range of about 50pm comprise of one and the same symmetrical transducer with two Π-shaped flexures. For first time, just by means of different configuration of the same sidewall piezoresistors in the same flexures, position sensors which are selectively sensitive in X or Y direction were prototyped and tested. Experimentally measured ratio of the displacement sensitivities in Y vs. X direction of the first type sensor was 16.5 and same ratio of the sensitivities in X vs. Y direction of the second type was 27.6.
2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME), 2017
Training course on practical aspects in design, technology and prototype fabrication of microsyst... more Training course on practical aspects in design, technology and prototype fabrication of microsystems with piezoresistive feedback, exploiting the shared infrastructure is presented. The course content is considered in the scope of building a sustainable Knowledge Alliance between the partners in Erasmus+ Project# 562206-EPP-1-2015-1-BG-EPPKA2-KA-MECA
Physica Status Solidi (a), 1989
Nanotechnology, 2016
The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on t... more The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on the accuracy of the piezoactuator. However, nonlinear properties of piezoactuators can distort the image, necessitating sensor-based closed-loop actuators to achieve high accuracy AFM imaging. The advent of high-speed AFM has made the requirements on the position sensors in such a system even more stringent, requiring higher bandwidths and lower sensor mass than traditional sensors can provide. In this paper, we demonstrate a way for high-speed, high-precision closed-loop AFM nanopositioning using a novel, miniaturized MEMS position sensor in conjunction with a simple PID controller. The sensor was developed to respond to the need for small, lightweight, high-bandwidth, long-range and subnm-resolution position measurements in high-speed AFM applications. We demonstrate the use of this sensor for closed-loop operation of conventional as well as high-speed AFM operation to provide distortion-free images. The presented implementation of this closed-loop approach allows for positioning precision down to 2.1 Å, reduces the integral nonlinearity to below 0.2%, and allows for accurate closed loop imaging at line rates up to 300 Hz.
Optical and electrical properties of nanolaminate dielectric structures
Journal of Physics: Conference Series, 2016
The aim of this study was formation of a multilayered transparent conductive nanolaminate structu... more The aim of this study was formation of a multilayered transparent conductive nanolaminate structure with optimized conductivity vs. transparency parameters. The nanolayered structure comprised one or two thin layers of dielectric materials. The overall electrical conductivity was modified by tuning the size of the planar metal granules. Magnetron sputtering system with three different targets was used for layers deposition. The advantages are: the good reproducibility of a low-temperature process allows for effective process control and, optionally, selective formation of conductive areas in a dielectric structure. Our studies revealed that the relation between the sheet resistance and the maximum transparency in the visible spectral range depends on the size of the metal granules and the film thickness of the dielectric coating. The technology provides transparent conductive coatings with well-controlled optical and electrical properties.
Procedia Engineering, 2016
Thorough inves aled a certain g wall embedded One goal of the wall piezoresist ween various par e... more Thorough inves aled a certain g wall embedded One goal of the wall piezoresist ween various par e sensors might es and dynami V/μm and 5mV er supply voltag
In-line thickness control of self-sensing cantilevers for advanced AFM applications
2017 40th International Spring Seminar on Electronics Technology (ISSE), 2017
Thickness control data measured at different fabrication stages of atomic force microscopy (AFM) ... more Thickness control data measured at different fabrication stages of atomic force microscopy (AFM) self-sensing cantilevers are presented in this paper. Specifically, the thicknesses of multilayered structures comprising silicon, silicon dioxide and thin patterned layers have been measured in-line during multi-step devices' processing. The data of the electrically detected resonance frequencies of the cantilevers have been correlated with the optically thickness measurement. Data interpretation has revealed that optical measurement of the cantilevers' thickness can provide reliable information for both purposes: pre-selection of completed cantilevers in accordance with the specified resonance frequency and in-line control of double-side patterning.
MEMS piezoresistive sensors are more favourable and attractive option for strain detection due to... more MEMS piezoresistive sensors are more favourable and attractive option for strain detection due to a number of key advantages such as high sensitivity, low noise, better scaling characteristics, low cost and their ability to have the detection electronics circuit further away from the sensor or on the same sensing board. This paper represents the results obtained at characterization of novel transducers to be employed into force monitoring systems. Each transducer comprises a coherently designed mechanical transducer and a position MEMS sensor with very high accuracy. The exploited position MEMS microsensor and the mechanical transducer are presented in this paper. The particular MEMS sensor provides a voltage output signal having sensitivity in the range of 240μV/μm at 1V DC voltage supply. The range of operation of the mechanical transducer is optimized to fit the 300μm travel range of position microsensor. Respectively, the flexures’ stiffness corresponds to achieve the max displa...
Analysis of existing solutions and development of load cell of force measurement using micro-electromechanical sensor (MEMS)
MEMS piezoresistive strain sensors are more favorable and attractive due to a number of key advan... more MEMS piezoresistive strain sensors are more favorable and attractive due to a number of key advantages such as high sensitivity, low noise, better scaling characteristics, low cost and their ability to have the detection electronics circuit further away from the sensor or on the same sensing board. Moreover, they have high potential for monolithic integration with low-power CMOS electronics. Furthermore, piezoresistive strain sensors need less complicated conditioning circuit. The main objective of this work is to develop a load cell for measure of a force using MEMS sensor. A survey was made available for development of measures of stress, including support platform with MEMS sensor. Analyze of the existing MEMS sensors and MEMS devices, and some methods for their production is discussed. The main aim of the work is to develop an appropriate carrier platform and attached to it silicon MEMS sensors. A decision of support platform for serving as the elastic transmission of the sensor...
Self-sensing cantilevers with nano-laminated Dielectric-Metal-Dielectric resistors
Results obtained at integration of nano-laminated Dielectric-Metal-Dielectric (DMD) resistors in ... more Results obtained at integration of nano-laminated Dielectric-Metal-Dielectric (DMD) resistors in silicon MEMS sensors are presented in this paper. Fabrication technology with significantly reduced thermal budged for integration of DMD resistors in four-cantilever device has been developed. The ultrathin layers have been deposited in a consecutive RF sputtering process, without exposure to air, exploiting a lift-off patterning technique. The results proved that: i) very good stability of the DMD resistors was achieved, and ii) strain-sensing behavior of nano-laminated structures has been demonstrated.
Piezoresistive cantilevers' platform for bio-chemical sensing
2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
Journal of Physics: Conference Series
We report the results of a study on the optical and electrical properties of nanolaminate TiO 2 /... more We report the results of a study on the optical and electrical properties of nanolaminate TiO 2 /Pt/TiO 2 structures fabricated using RF magnetron sputtering. The effect was investigated of the discontinuous Pt layer on the optical transmittance, electrical conductivity and morphology of the TiO 2 /Pt/TiO 2 structure. On the basis of the theory of electronic tunneling transport between metal granulates in a dielectric matrix, a new technological approach is proposed of preparing high-sensitivity strain sensors based on resistors with a nanolaminate structure containing Pt granulates.
MEMS piezoresistive sensors are a favourable and attractive option for strain detection due to a ... more MEMS piezoresistive sensors are a favourable and attractive option for strain detection due to a number of key advantages such as high sensitivity, low noise, good scaling characteristics, low cost and their ability to have the detection electronics circuit farther away from the sensor or on the same sensing board. This paper represents the results obtained at characterization of novel transducers to be employed into force monitoring systems. Each transducer comprises a coherently designed novel mechanical transducer and a positional MEMS sensor with very high accuracy. The exploited positional MEMS microsensor and the mechanical transducer are presented in this paper. The particular MEMS sensor provides a voltage output signal having sensitivity in the range of 240 μV/μm at 1V DC voltage supply. The range of operation of the mechanical transducer is optimized to fit the 500 μm travel range of the microsensor. A finite element model is constructed to simulate the system structure us...
Piezoresistive MEMS Enabled Solutions for IoT
2021 12th National Conference with International Participation (ELECTRONICA)
The present paper reviews recent developments in the exploitation of contact displacement microse... more The present paper reviews recent developments in the exploitation of contact displacement microsensors with embedded flexures and piezoresistors for monitoring of forces for object recognition. A method for precise calibration of the sensors was developed and the advantages of using those sensors with high dynamic range and digitally tunable sensitivity are illustrated.
Force monitoring transducers with more than 100,000 scale intervals
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 2015
Future of analytical and manufacturing methods based on micro-mechanical cantilevers, depends cri... more Future of analytical and manufacturing methods based on micro-mechanical cantilevers, depends critically on the ability to implement parallel operation and fast signal processing (1). There are two mean reasons: high throughput requirement and complexity (multidimensionality) of analyzed value. In order to get parallel function, any single device should be simultaneously: recognizable, autonomously actuated and independently accessible for readout. Devices, fulfilling these requirements, are suffering from a substantial increase in complexity of both layout and manufacturing technology. In present paper, we demonstrate a novel design of a MEMS (Micro-Electro-Mechanical Systems) cell designed for e-NOSE applications, using results of previous works (2,3), which solves above mentioned problems. The cell consists of four integrated cantilevers, each having a separate piezoresistor. Additionally, the cantilevers are designed to be different in length and thus having different resonance ...
Lateral displacement MEMS sensor
Procedia Engineering, 2010
Lateral displacement MEMS sensor with sidewall embedded piezoresistors has been designed and manu... more Lateral displacement MEMS sensor with sidewall embedded piezoresistors has been designed and manufactured. Experimental data confirm lateral displacement sensitivity of 2.32 mV/μm.V. Besides high sensitivity, lateral actuated MEMS sensor reveals better parameter reproducibility and tight control of both: electrical and mechanical characteristics. Additionally, analyses of experimental data, found without any output signal amplification, show very good noise immunity of the developed sensors.
IFIP TC5/WG5.5 Publications, 2010
Pick-and-place of micro/nano sized objects means handling of very tiny and very different in prop... more Pick-and-place of micro/nano sized objects means handling of very tiny and very different in properties objects having specific behavior. Besides formal requirements of assembly processes, the tools for controllable manipulation with these objects should not affect the examined micro/nano environment, i.e. should be “small and passive” in any sense. Despite of the recent progress, most available micro-grippers are still suffering
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Papers by Vladimir Stavrov