Conference Papers by Teguh Santoso
To address the increase in tight tolerance requirements for small parts produced by precision man... more To address the increase in tight tolerance requirements for small parts produced by precision manufacturing, on-machine optical areal surface topography instruments are emerging. To calibrate these instruments and estimate their measurement uncertainty, their metrological characteristics need to be determined according to ISO 25178 part 600. In this paper, the amplification coefficient and linearity deviation metrological characteristics in the vertical axis of a prototype compact on-machine focus variation areal surface texture and form measurement sensor are determined. With a series of experiments in different positions of the vertical axis using calibrated materials measures with heights from 0.2 µm to 1000 µm, we determine the amplification coefficient and linearity deviation for the vertical axis. In addition, with a procedure derived from ISO 10360 part 8, the maximum permissible unidirectional stationary error of the vertical axis is determined.
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Conference Papers by Teguh Santoso