Papers by Sylwester Bargiel
This article is an open access article distributed under the terms and conditions of the Creative... more This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY
In the frame the European project VIAMOS (www.viamos.eu) we developed a microsystem based on Mira... more In the frame the European project VIAMOS (www.viamos.eu) we developed a microsystem based on Mirau interferometry and applied for optical coherence tomography (OCT) imaging of living tissues. The objective is to benefit from advanced MOEMS technologies, enabling a new generation of miniature and low-cost instruments using the concept of the swept-source OCT (SS-OCT) microsystem based on spectrally tuned Mirau interferometry, into which a doublet of microlens matrices (4×4) and a wafer of movable reference mirrors are included, building the active Mirau interferometer.
Proceedings of SPIE, Feb 27, 2015
We describe an original integration technological platform for the miniaturization of micromachin... more We describe an original integration technological platform for the miniaturization of micromachined on-chip optical microscopes, such as the laser scanning confocal microscope. The platform employs the multi-wafer vertical integration approach, combined with integrated glass-based micro-optics as well as micro-electro-mechanical systems (MEMS) components, where the assembly uses the heterogeneous bonding and interconnecting technologies. Various heterogeneous components are disposed in vertically stacked building blocks (glass microlens, MEMS actuator, beamsplitter, etc.) in a minimum space. The platform offers the integrity and potential of MEMS microactuators integrated with micro-optics, providing miniaturized and low cost solutions to create micromachined on-chip optical microscopes.
Proceedings of SPIE, Sep 13, 2012
ABSTRACT
Proceedings of SPIE, Apr 26, 2016
In this paper, we present construction, fabrication and characterization of an electrostatic MOEM... more In this paper, we present construction, fabrication and characterization of an electrostatic MOEMS vertical microscanner for generation of an optical phase shift in array-type interferometric microsystems. The microscanner employs asymmetric comb-drives for a vertical displacement of a large 4x4 array of reference micromirrors and for in-situ position sensing. The device is designed to be fully compatible with Mirau configuration and with vertical integration strategy. This enables further integration of the device within an "active" multi-channel Mirau micro-interferometer and implementation of the phase shifting interferometry (PSI) technique for imaging applications. The combination of micro-interferometer and PSI is particularly interesting in the swept-source optical coherence tomography, since it allows not only strong size reduction of a system but also improvement of its performance (sensitivity, removal of the image artefacts). The technology of device is based on double-side DRIE of SOI wafer and vapor HF releasing of the suspended platform. In the static mode, the device provides vertical displacement of micromirrors up to 2.8μm (0 - 40V), whereas at resonance (fo=500 Hz), it reaches 0.7 μm for only 1VDC+1VAC. In both operation modes, the measured displacement is much more than required for PSI implementation (352nm peak-to-peak). The presented device is a key component of array-type Mirau micro-interferometer that enables the construction of portable, low-cost interferometric systems, e.g. for in vivo medical diagnostics.
HAL (Le Centre pour la Communication Scientifique Directe), Apr 3, 2016
In this paper, we present construction, fabrication and characterization of an electrostatic MOEM... more In this paper, we present construction, fabrication and characterization of an electrostatic MOEMS vertical microscanner for generation of an optical phase shift in array-type interferometric microsystems. The microscanner employs asymmetric comb-drives for a vertical displacement of a large 4x4 array of reference micromirrors and for in-situ position sensing. The device is designed to be fully compatible with Mirau configuration and with vertical integration strategy. This enables further integration of the device within an "active" multi-channel Mirau micro-interferometer and implementation of the phase shifting interferometry (PSI) technique for imaging applications. The combination of micro-interferometer and PSI is particularly interesting in the swept-source optical coherence tomography, since it allows not only strong size reduction of a system but also improvement of its performance (sensitivity, removal of the image artefacts). The technology of device is based on double-side DRIE of SOI wafer and vapor HF releasing of the suspended platform. In the static mode, the device provides vertical displacement of micromirrors up to 2.8μm (0 - 40V), whereas at resonance (fo=500 Hz), it reaches 0.7 μm for only 1VDC+1VAC. In both operation modes, the measured displacement is much more than required for PSI implementation (352nm peak-to-peak). The presented device is a key component of array-type Mirau micro-interferometer that enables the construction of portable, low-cost interferometric systems, e.g. for in vivo medical diagnostics.
HAL (Le Centre pour la Communication Scientifique Directe), 2009
Micromachines, Jun 24, 2023
This article is an open access article distributed under the terms and conditions of the Creative... more This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY
HAL (Le Centre pour la Communication Scientifique Directe), Jul 4, 2016
International audienceNous présentons un système d’imagerie miniature basé sur une matrice d’inte... more International audienceNous présentons un système d’imagerie miniature basé sur une matrice d’interféromètres et réalisé à partir de technologies des microsystèmes opto-electromécaniques (MOEMS). En particulier, les composants des interféromètres sont fabriqués par des techniques collectives et assemblés par intégration verticale multisubstrats. La matrice d’interféromètres est ensuite intégrée au sein d’un système d’illumination et d’imagerie pour constituer un dispositif de tomographie à cohérence optique (OCT) dédié à l’analyse des pathologies de la peau. Le système repose sur une architecture matricielle d’interféromètres de Mirau, permettant une approche pleinchamp multicanaux. Cela lui confère des caractéristiques adaptées à l’imagerie de la peau comme un grand champ de vue latéral
HAL (Le Centre pour la Communication Scientifique Directe), 2022
We report on the fabrication of micro-axicons made of glass by laser-assisted wet etching (LAE) a... more We report on the fabrication of micro-axicons made of glass by laser-assisted wet etching (LAE) and laser polishing. The employed technique, relying on a direct-writing process using a femtosecond laser, allows revealing high fidelity profiles when the exposed glass samples are etched in a heated potassium hydroxide (KOH) solution. The remaining surface roughness is then decreased by carbon dioxide (CO 2) laser polishing. Such polishing is limited to the superficial layer of the component so that the tip is only slightly rounded, with a radius of curvature of nearly 200 µm. It is then shown with 500 µm-diameter axicons that a quasi-Bessel beam is generated closely after the tip, and features a 5.3 µm diameter maintained over a propagation distance of almost 3.5 mm.
HAL (Le Centre pour la Communication Scientifique Directe), 2004
Journal of Applied Physics, Jun 1, 2023
The specific conical shape of the axicon makes them well suited for the generation of so-called B... more The specific conical shape of the axicon makes them well suited for the generation of so-called Bessel beams. We present here a technological micro-glass blowing platform developed for miniaturization of microoptical components. This employs the glass-blowing process, silicon micromachining and heterogeneous bonding. Here, we focus on the unconventional fabrication method for micromachined micro-axicons in borosilicate glass. The generation of Bessel beams is demonstrated and experimentally validated.
HAL (Le Centre pour la Communication Scientifique Directe), Nov 2, 2021
Femtosecond laser 3D processing technologies of transparent dielectrics have known an important d... more Femtosecond laser 3D processing technologies of transparent dielectrics have known an important development in recent years. One of them, known as "Femtosecond Laser Irradiation Followed by Chemical Etching" (FLICE), can achieve volumetric (3D), high-precision and low-cost processing of common glasses such as fused silica. Using a laser system (f100 aHead Enhanced from FEMTOprint) dedicated to the FLICE technique and applied to glass samples subsequently laser-polished, we manufacture custom-made micro-optical components that can be used for integration in imaging micro-systems.
International journal of microwave and optical technology, 2014
In this work we describe the bonding and contacting of a micro machined vertically integrated 3-D... more In this work we describe the bonding and contacting of a micro machined vertically integrated 3-D micro scanner, which is a keycomponent for a number of scanning imaging micro systems, such as confocal microscopes onchip or optical coherence tomography (OCT) probes for micro endoscopy. The 3-D micro scanner is composed of two electrostatic silicon MEMS micro actuators which are vertically aligned and bonded with glass and ceramic components to create hermetically sealed cavity for scanning micro lenses. In addition, the through wafer vias (TWV) technology is employed to establish electrical connection from the top to the bottom through a stack of two SOI wafers, one glass wafer and one ceramic wafer. Presented methods are of general importance for various silicon-based vertically integrated devices.
HAL (Le Centre pour la Communication Scientifique Directe), Jun 26, 2019
International audienceWe report techniques based on cesium dispensers to fill microfabricated vap... more International audienceWe report techniques based on cesium dispensers to fill microfabricated vapor cells for miniature atomic clocks applications. Two main types of dispensers are considered, which take the form of pills or paste. Whereas the pill contains a large quantity of Cs, the paste is more compatible with wafer-level fabrication. In both cases, the main advantage is the release of the cesium vapor only once the cell has been sealed, ensuring an optimal cell fabrication. Activation is thus performed through local heating of the dispenser with a laser. Cells using both dispenser types are shown to be compatible with atomic clocks requirements, namely a clock frequency instability below 1 × 10-11 at one day integration time
The specific conical shape of the axicon makes them well suited for the generation of so-called B... more The specific conical shape of the axicon makes them well suited for the generation of so-called Bessel beams. We present here a technological micro-glass blowing platform developed for miniaturization of micro-optical components. This employs the glass-blowing process, silicon micromachining and heterogeneous bonding. Here, we focus on the unconventional fabrication methods of micro-optical components in borosilicate glass. As an example, an original concept of a micro-machined micro-axicons for generation of Bessel beams is demonstrated and experimentally validated.
Applied Physics Letters, 2017
A method for filling alkali vapor cells with cesium from a dispensing paste is proposed and its c... more A method for filling alkali vapor cells with cesium from a dispensing paste is proposed and its compliance with miniature atomic clock applications is evaluated. The paste is an organic-inorganic composition of cesium molybdate, zirconium-aluminum powder, and a hybrid organic-inorganic binder. It is compatible with collective deposition processes such as micro-drop dispensing, which can be done under ambient atmosphere at the wafer-level. After deposition and sealing by anodic bonding, cesium is released from the consolidated paste through local heating with a high power laser. Linear absorption signals have been observed over one year in several cells, showing a stable atomic density. For further validation of this technology for clock applications, one cell has been implemented in a coherent population trapping clock setup to monitor its frequency stability. A fractional frequency aging rate around-4.4 Â 10 À12 per day has been observed, which is compliant with a clock frequency instability below 1 Â 10 À11 at one day integration time. This filling method can drastically reduce the cost and the complexity of alkali vapor cell fabrication. Published by AIP Publishing.
Procedia Chemistry, 2009
Silicon/glass micromachined, fiber optics based, lab-on-chip device and metrological instrumentat... more Silicon/glass micromachined, fiber optics based, lab-on-chip device and metrological instrumentation for quality evaluation of animal oocytes by VIS/NIR transmission cell-by-cell measurement (400-950 nm) is shown. Several porcine and bovine oocytes were tested. 3 quality classes of porcine and 4 quality classes of bovines oocytes have been identified in a good agreement to classical veterinarian methodology.
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Papers by Sylwester Bargiel