This paper describes ultrasound enhanced electrostatic batch assembly (U2EBA) as a low-cost, batc... more This paper describes ultrasound enhanced electrostatic batch assembly (U2EBA) as a low-cost, batch microassembly method to assemble 3D microsystems. U2EBA involves placing the die in an external DC electric field perpendicular to the substrate and actuating the die with an off-chip, bulk-piezoelectric ceramic. The foremost advantages of this method are the simplicity of the assembly setup, applicability to a broad range of surface micromachining processes, lack of any additional fabrication steps or unusual materials, and fully off-chip nature that requires no electrical or mechanical contact to the assembled microstructures. After an investigation of the forces involved in U2EBA, experiments aiming to quantify the anti-stiction effect of ultrasonic actuation are described. Yield rates reaching up to 100% are reported from 8 × 8 arrays of hinged mirror/paddle structures with dimensions of 97 m × 180 m. Reasons of failure for the unassembled structures and the maximum limit for the electrostatic assembly forces are discussed. Experiments on different hinged microstructures allowed comparison of design parameters and revealed a 22% improvement in the assembly yield due to the addition of dimples over the paddle region of the microstructures.
Special thanks goes to Jessie Anna Childs, who has always supported me. I give thanks to Jo and P... more Special thanks goes to Jessie Anna Childs, who has always supported me. I give thanks to Jo and Philip Childs for welcoming me into their home. I also thank the Visser family for the amazing meals we had together.
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, 2009
ABSTRACT This paper reports on semi-permanent angular positioning of hinged or compliant, polysil... more ABSTRACT This paper reports on semi-permanent angular positioning of hinged or compliant, polysilicon plates by using off-chip generated ultrasonic and electrostatic forces. Building upon our previous results of realizing 90deg vertical assembly, we now show how intermediate angles can be realized by built-in stops for the moving plate. By novel lock-in structures and pulsed actuation, the mirrors can be trapped and freed from different rotation angles, such that zero static power is needed to maintain an angular position. Moreover, lack of on-chip actuators and electrical interconnects on the die enable the realization of very high-fill factors.
2009 IEEE International Ultrasonics Symposium, 2009
ABSTRACT We studied the actuation, vibration and rotation properties of acoustically-driven surfa... more ABSTRACT We studied the actuation, vibration and rotation properties of acoustically-driven surface-macromahcined ultrasonic micromotors with different stator dimensions to achieve optimized performances. The motors have been operating continuously in air for over six months without any visible wear. This very long lifetime operation, indicative of motor reliability, in possible by non-contact operation, where the vibration of the stator, which is driven by a die-attached PZT plate, is acoustically coupled to the rotor without contact. The contact is due to fluidic coupling between the rotor and stator. When the resonant frequency of the ont of the sator's vibration mode is close to PZT plate's thickness mode resonance (~4.2MHz), rotating wave is generated on the stator. The rotational threshold and maximum rotation speed of the motor varies with the size of the stator. While larger stator (820¿m) has lower rotation threshold (3.5V), its maximum rotation speed (180 rpm) is significantly lower than smaller stator (740¿m), whose maximum rotation speed is over 320 rpm with rotation threshold of 8.5V.
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013
This paper describes ultrasound enhanced electrostatic batch assembly (U2EBA) as a low-cost, batc... more This paper describes ultrasound enhanced electrostatic batch assembly (U2EBA) as a low-cost, batch microassembly method to assemble 3D microsystems. U2EBA involves placing the die in an external DC electric field perpendicular to the substrate and actuating the die with an off-chip, bulk-piezoelectric ceramic. The foremost advantages of this method are the simplicity of the assembly setup, applicability to a broad range of surface micromachining processes, lack of any additional fabrication steps or unusual materials, and fully off-chip nature that requires no electrical or mechanical contact to the assembled microstructures. After an investigation of the forces involved in U2EBA, experiments aiming to quantify the anti-stiction effect of ultrasonic actuation are described. Yield rates reaching up to 100% are reported from 8 × 8 arrays of hinged mirror/paddle structures with dimensions of 97 m × 180 m. Reasons of failure for the unassembled structures and the maximum limit for the electrostatic assembly forces are discussed. Experiments on different hinged microstructures allowed comparison of design parameters and revealed a 22% improvement in the assembly yield due to the addition of dimples over the paddle region of the microstructures.
Special thanks goes to Jessie Anna Childs, who has always supported me. I give thanks to Jo and P... more Special thanks goes to Jessie Anna Childs, who has always supported me. I give thanks to Jo and Philip Childs for welcoming me into their home. I also thank the Visser family for the amazing meals we had together.
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, 2009
ABSTRACT This paper reports on semi-permanent angular positioning of hinged or compliant, polysil... more ABSTRACT This paper reports on semi-permanent angular positioning of hinged or compliant, polysilicon plates by using off-chip generated ultrasonic and electrostatic forces. Building upon our previous results of realizing 90deg vertical assembly, we now show how intermediate angles can be realized by built-in stops for the moving plate. By novel lock-in structures and pulsed actuation, the mirrors can be trapped and freed from different rotation angles, such that zero static power is needed to maintain an angular position. Moreover, lack of on-chip actuators and electrical interconnects on the die enable the realization of very high-fill factors.
2009 IEEE International Ultrasonics Symposium, 2009
ABSTRACT We studied the actuation, vibration and rotation properties of acoustically-driven surfa... more ABSTRACT We studied the actuation, vibration and rotation properties of acoustically-driven surface-macromahcined ultrasonic micromotors with different stator dimensions to achieve optimized performances. The motors have been operating continuously in air for over six months without any visible wear. This very long lifetime operation, indicative of motor reliability, in possible by non-contact operation, where the vibration of the stator, which is driven by a die-attached PZT plate, is acoustically coupled to the rotor without contact. The contact is due to fluidic coupling between the rotor and stator. When the resonant frequency of the ont of the sator's vibration mode is close to PZT plate's thickness mode resonance (~4.2MHz), rotating wave is generated on the stator. The rotational threshold and maximum rotation speed of the motor varies with the size of the stator. While larger stator (820¿m) has lower rotation threshold (3.5V), its maximum rotation speed (180 rpm) is significantly lower than smaller stator (740¿m), whose maximum rotation speed is over 320 rpm with rotation threshold of 8.5V.
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013
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Papers by Serhan Ardanuc