S. Kurth

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Behnam Dezfouli

The University of Iowa

Azman Azid

Universiti Sultan Zainal Abidin, Terengganu, Malaysia

Dr. Abhijeet Kshirsagar

University of Alberta

Romolo Marcelli

Consiglio Nazionale delle Ricerche (CNR)

Manivannan Pillai

Annamalai University

Javier Oyarzun Goyalde

Mondragon University

MA Jalil Chowdhury

Bangabandhu Sheikh Mujib Medical University

Krassimir Denishev

Technical University - Sofia

Nick Mamalis

University of Utah

Dr. Suresh K . Pandey

University of Utah

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Papers by S. Kurth

Microwave Phase Shifter with Electromagnetic Signal Coupling in Silicon Bulk Technology

This contribution presents a Distributed MEMS Transmission Line (DMTL) phase shifter for the 24 G... more This contribution presents a Distributed MEMS Transmission Line (DMTL) phase shifter for the 24 GHz ISM band fabricated in silicon bulk technology. Using this technology enables the suspension of all capacitive loads on one movable plate and therefore allows wide range analog and homogeneous tuning. To avoid commonly used metallic feed-throughs for signal connection, an electromagnetic signal coupler guides the microwave signal non-galvanically from printed circuit board level, through the chip substrate into the MEMS device. The first available prototypes of the phase shifter are characterized to provide 50°/dB loss normalized differential phase shift at 24 GHz. The achievable normalized insertion loss of the coupling structure has been determined with 0.13-0.17 dB.

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A novel 24-kHz resonant scanner for high-resolution laser display

SPIE Proceedings, 2005

ABSTRACT This contribution deals with design, fabrication and test of a micromachined resonant sc... more ABSTRACT This contribution deals with design, fabrication and test of a micromachined resonant scanner usable for horizontal deflection of the laser beam in a projection display. The electrostatically driven plate is separated from the mirror in order to reduce air damping and electrostatic non linearity. The device consists of a circularly shaped mirror which is suspended by torsion beams in the center of an elastically suspended driving plate. A resonator with two rotational degrees of freedom is arranged in this way. The rotation axes of mirror and driving plate are the same. A suitable design of the properties of the two degrees of freedom resonator leads to a significant amplification of the oscillation of the mirror compared to the oscillation of the driving plate. The first resonant mode is a rotation of both plates with nearly the same magnitude at a frequency of approx. 5 kHz. The second mode with paraphase deflection at 24 kHz shows a deflection amplification by a ratio of 53 and is used for scanning operation. A supporting part made of glass carries two electrodes in the region of the driving plate and has a micro sandblasted hole beneath the mirror. Bulk micromachining KOH wet etching of the electrode gap size on the back side of the driving plate, reactive ion etching for contour shaping of the mirror, of the driving plate and of the torsion beams and anodic bonding have been used for fabrication of the mechanical structure. The mirror is evaporated by an aluminum layer. Applying a voltage of 380V results in a mechanical deflection of +/- 5.5 degrees at 24 kHz at atmosphere pressure. The device shows very small dynamic warp (

Reliability enhancement of Ohmic RF MEMS switches

SPIE Proceedings, 2011

This contribution deals with capacitively actuated Ohmic switches in series single pole single th... more This contribution deals with capacitively actuated Ohmic switches in series single pole single throw (SPST) configuration for DC up to 4 GHz signal frequency (&amp;amp;amp;amp;amp;lt;0.5 dB insertion loss, 35 dB isolation) and in shunt switch SPST configuration for a frequency range from DC up to 80 GHz (&amp;amp;amp;amp;amp;lt;1.2 dB insertion loss, 18 dB isolation at 60 GHz). A novel high

Micro arc welding for electrode gap reduction of high aspect ratio microstructures

Sensors and Actuators A: Physical, 2012

ABSTRACT

Experimental adaptation of model parameters for microelectromechanical systems (MEMS)

Sensors and Actuators A: Physical, 1997

With the use of simulation tools it is possible to predict the mechanical behaviour of micromecha... more With the use of simulation tools it is possible to predict the mechanical behaviour of micromechanical devices. However, there often are some differences between theoretical and experimental results characterizing the behaviour. Some problems of experimental analysis of capacitively operated coupled mass-spring oscillators, of setting up a suitable model and experimental identification of unknown or erroneous model parameters are discussed in this paper. The measurement of transfer functions and an adaptation method for model parameters are explained for cells of a capacitive micromechanical array. A more accurate simulation of the behaviour is possible using such an improved model.

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Slot-antenna for autonomous sensor systems mounted on overhead power lines

2011 IEEE MTT-S International Microwave Symposium, 2011

ABSTRACT A slot antenna for mounting on overhead power lines is presented. The antenna enables au... more ABSTRACT A slot antenna for mounting on overhead power lines is presented. The antenna enables autonomous sensor systems to communicate in the 2.4 GHz band. Using two radiating slots the simulated antenna gain is 7.9 dBi. The usable bandwidth is more than 300 MHz. The general concept of the sensor system is outlined. It contains a DC-isolating bandpass filter with 1.5 dB insertion loss and more than 60 dB attenuation at frequencies below 1.0 GHz. Experiments performed on a deactivated power line confirm that the conductors and the power poles do not influence the radiation characteristic significantly. The transmission follows the Friis transmission equation. Using only 7.5 dBm of transmitted power yields -79.9 dBm at the receiver side at a distance of 1420 m. The immunity to interference of the communication system was tested by exposing it to strong artificially generated partial discharges.

Novel post-process gap reduction technology of high aspect ratio microstructures ultilizing micro welding

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011

This paper presents a novel post-process gap reduction technology of high aspect ratio microstruc... more This paper presents a novel post-process gap reduction technology of high aspect ratio microstructures. The gap reduction procedure uses the well known electrostatic deflection of a movable microstructure. In contrast to other solutions, micro welding is utilized to create the final, permanent locking. The fabrication technology, the functional principle of the gap reduction mechanism and the experimental set-up is presented.

Microwave Phase Shifter with Electromagnetic Signal Coupling in Silicon Bulk Technology

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A novel 24-kHz resonant scanner for high-resolution laser display

SPIE Proceedings, 2005