Influence of metal stress on RF MEMS capacitive switches
Sensors and Actuators A-physical, 2007
The electrical and mechanical response of radio frequency (RF) microelectromechanical systems (ME... more The electrical and mechanical response of radio frequency (RF) microelectromechanical systems (MEMS) switches depends critically on the profile of the released structure. Stress gradients within the material can significantly alter the structural profile thereby changing the spring constant and the resulting switch release times. To investigate the influence of metal stress on spring constant and release time, a series of
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