While trying to build Roslyn master I'm getting the exception InvalidProgramException ("Common Language Runtime detected an invalid program.".) Stack trace is listed below.

Environment:
Windows 7 64bit, Visual studio 2013 update 4.

I open a visual studio command prompt and type "msbuild /t:Build /p:CIBuild=true" to pick up the Roslyn2013 solution.

Stack:
at System.Collections.Immutable.SecurePooledObject1.Use[TCaller](TCaller& caller) at System.Collections.Immutable.SortedInt32KeyNode1.Enumerator.PushLeft(SortedInt32KeyNode1 node) at System.Collections.Immutable.SortedInt32KeyNode1.Enumerator..ctor(SortedInt32KeyNode1 root) at System.Collections.Immutable.ImmutableDictionary2.Enumerator..ctor(SortedInt32KeyNode1 root, Builder builder) at System.Collections.Immutable.ImmutableDictionary2.GetEnumerator()
at System.Collections.Immutable.ImmutableDictionary2.System.Collections.Generic.ICollection<System.Collections.Generic.KeyValuePair<TKey,TValue>>.CopyTo(KeyValuePair2[] array, Int32 arrayIndex)
at System.Linq.Buffer1..ctor(IEnumerable1 source)
at System.Linq.OrderedEnumerable1.<GetEnumerator>d__0.MoveNext() at System.Linq.Enumerable.WhereSelectEnumerableIterator2.MoveNext()
at System.Linq.Buffer1..ctor(IEnumerable1 source)
at System.Linq.Enumerable.ToArray[TSource](IEnumerable1 source) at System.Collections.Immutable.ImmutableArray.CreateRange[T](IEnumerable1 items)
at Microsoft.CodeAnalysis.CSharp.DeclarationTable.Cache.<>c__DisplayClass5_0.<.ctor>b__0()
at System.Lazy1.CreateValue() at System.Lazy1.LazyInitValue()
at Microsoft.CodeAnalysis.CSharp.DeclarationTable.Cache.<.ctor>b__5_3()
at System.Lazy1.CreateValue() at System.Lazy1.LazyInitValue()
at System.Lazy1.get_Value() at Microsoft.CodeAnalysis.CSharp.DeclarationTable.GetMergedReferenceDirectives() at System.Lazy1.CreateValue()
at System.Lazy1.LazyInitValue() at Microsoft.CodeAnalysis.CSharp.DeclarationTable.get_ReferenceDirectives() at Microsoft.CodeAnalysis.CommonReferenceManager2.GetCompilationReferences(TCompilation compilation, DiagnosticBag diagnostics, ImmutableArray1& references, IDictionary2& boundReferenceDirectives, ImmutableArray1& referenceDirectiveLocations) at Microsoft.CodeAnalysis.CommonReferenceManager2.ResolveMetadataReferences(TCompilation compilation, ImmutableArray1& references, IDictionary2& boundReferenceDirectiveMap, ImmutableArray1& boundReferenceDirectives, ImmutableArray1& assemblies, ImmutableArray`1& modules, DiagnosticBag diagnostics)
at Microsoft.CodeAnalysis.CSharp.CSharpCompilation.ReferenceManager.CreateAndSetSourceAssemblyFullBind(CSharpCompilation compilation)
at Microsoft.CodeAnalysis.CSharp.CSharpCompilation.ReferenceManager.CreateSourceAssemblyForCompilation(CSharpCompilation compilation)
at Microsoft.CodeAnalysis.CSharp.CSharpCompilation.GetBoundReferenceManager()
at Microsoft.CodeAnalysis.CSharp.CSharpCompilation.GetDiagnostics(CompilationStage stage, Boolean includeEarlierStages, CancellationToken cancellationToken)
at Microsoft.CodeAnalysis.CommonCompiler.RunCore(TextWriter consoleOutput, CancellationToken cancellationToken)
at Microsoft.CodeAnalysis.CommonCompiler.Run(TextWriter consoleOutput, CancellationToken cancellationToken)
at Microsoft.CodeAnalysis.CSharp.CSharpCompiler.Run(TextWriter consoleOutput, CancellationToken cancellationToken)
at Microsoft.CodeAnalysis.CompilerServer.CSharpCompilerServer.Run(TextWriter consoleOutput, CancellationToken cancellationToken)
at Microsoft.CodeAnalysis.CompilerServer.CompilerRequestHandler.CSharpCompile(String currentDirectory, String libDirectory, String responseFileDirectory, String tempPath, String[] commandLineArguments, TextWriter output, CancellationToken cancellationToken, Boolean& utf8output)
at Microsoft.CodeAnalysis.CompilerServer.CompilerRequestHandler.CSharpCompile(BuildRequest req, CancellationToken cancellationToken)
at Microsoft.CodeAnalysis.CompilerServer.CompilerRequestHandler.HandleRequest(BuildRequest req, CancellationToken cancellationToken)
at Microsoft.CodeAnalysis.CompilerServer.ServerDispatcher.Connection.<>c__DisplayClass6_0.b__0()