I am getting the following error when I try and generate a webdeploy package using .net 5:
C:\Program

Files\dotnet\sdk\5.0.300\Sdks\Microsoft.NET.Sdk.Publish\targets\CopyTargets\Microsoft.NET.Sdk.Publish.CopyFiles.targets(80,5): error MSB4006: There is a circular dependency in the target dependency graph involving target "Publish". Since "_CopyAspNetCoreFilesToIntermediateOutputPath" has "DependsOn" dependence on "Publish", the circular is "Publish<-_CopyAspNetCoreFilesToIntermediateOutputPath<-CorePublish<-DotNetPublish<-_PublishBuildAlternative<-Publish"

Repro steps:
dotnet new mvc -n mvcApp
cd mvcApp
dotnet restore
dotnet publish /p:WebDeployMethod=package /p:DeployOnBuild=true;

expected result:
Web Deploy Package produced

actual result:
Microsoft (R) Build Engine version 16.10.0+4242f381a for .NET
Copyright (C) Microsoft Corporation. All rights reserved.

Determining projects to restore...
All projects are up-to-date for restore.
mvcApp -> C:\Temp\mvcApp\bin\Debug\net5.0\mvcApp.dll
mvcApp -> C:\Temp\mvcApp\bin\Debug\net5.0\mvcApp.Views.dll
C:\Program Files\dotnet\sdk\5.0.300\Sdks\Microsoft.NET.Sdk.Publish\targets\CopyTargets\Microsoft.NET.Sdk.Publish.CopyFiles.targets(80,5): error MSB4006: There is a circular dependency in the target dependency graph involving target "Publish". Since "_CopyAspNetCoreFilesToIntermediateOutputPath" has "DependsOn" dependence on "Publish", the circular is "Publish<-_CopyAspNetCoreFilesToIntermediateOutputPath<-CorePublish<-DotNetPublish<-_PublishBuildAlternative<-Publish". [C:\Temp\mvcApp\mvcApp.csproj]

This seems to be similar to dotnet/sdk#16474 but I'm not using Visual Studio. dotnet clean doesn't seem to help.