concavity vibratorとは 意味・読み方・使い方

The problem is solved by adopting the manufacturing method of the piezoelectric vibrator including steps of: adhering a thin piezoelectric substrate to a thin substrate to which a plurality of holes are formed to form through-holes in order to apply concavity processing to the thin piezoelectric substrate; and applying etching to the through-holes until the thin substrate is extinguished.例文帳に追加

課題を解決するために本発明は、薄板状圧電基板に凹状加工を施すために、複数の孔加工を施し貫通孔を形成した薄板状基板に、該薄板状圧電基板を貼り合わせる工程と、該貫通孔側を該薄板状基板が消滅するまでエッチングを施す工程と、を備えた圧電振動子の製造方法により課題を解決する。 - 特許庁