cleanliness monitorとは 意味・読み方・使い方

A specimen is picked up from a processed substrate by the use of a focused ion beam in an in-line monitor, and the processed substrate which has been subjected to processing is cleaned to satisfy the cleanliness level required for the following substrate treatment and then returned to a semiconductors production line.例文帳に追加

インラインモニタにおいて被処理基板を集束イオンビーム加工して試験片をピックアップし、加工後の被処理基板を、次段の基板処理工程において要求される清浄度にクリーニングしてから半導体製造ラインに戻す。 - 特許庁