{"id":250627,"date":"2024-05-14T19:25:06","date_gmt":"2024-05-14T11:25:06","guid":{"rendered":"https:\/\/docs.pingcode.com\/ask\/ask-ask\/250627.html"},"modified":"2024-05-14T19:25:14","modified_gmt":"2024-05-14T11:25:14","slug":"5nm%e5%b7%a5%e8%89%ba%e5%88%b6%e7%a8%8b%e6%98%af%e5%90%a6%e6%98%af%e7%9b%ae%e5%89%8d%e9%9b%86%e6%88%90%e7%94%b5%e8%b7%af%e8%8a%af%e7%89%87%e7%9a%84%e6%9e%81%e9%99%90","status":"publish","type":"post","link":"https:\/\/docs.pingcode.com\/ask\/250627.html","title":{"rendered":"5nm\u5de5\u827a\u5236\u7a0b\u662f\u5426\u662f\u76ee\u524d\u96c6\u6210\u7535\u8def\u82af\u7247\u7684\u6781\u9650"},"content":{"rendered":"<p style=\"text-align:center\"><img decoding=\"async\" src=\"https:\/\/cdn-kb.worktile.com\/kb\/wp-content\/uploads\/2024\/04\/25195531\/01de086b-0b06-494d-9386-1e8eaeeae719.webp\" alt=\"5nm\u5de5\u827a\u5236\u7a0b\u662f\u5426\u662f\u76ee\u524d\u96c6\u6210\u7535\u8def\u82af\u7247\u7684\u6781\u9650\" \/><\/p>\n<p><p>\u96c6\u6210\u7535\u8def\u82af\u7247\u76845nm\u5de5\u827a\u5236\u7a0b\u5f53\u524d\u4e0d\u662f\u5236\u7a0b\u6280\u672f\u7684\u6781\u9650\u3002<strong>\u5148\u8fdb\u7684\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u523b\u6280\u672f\u51fa\u73b0\u540e\u30013nm\u751a\u81f3\u66f4\u5c0f\u5c3a\u5bf8\u7684\u5de5\u827a\u5236\u7a0b\u5f00\u53d1\u5df2\u5728\u8fdb\u884c\u4e2d<\/strong>\u3002\u4f8b\u5982\uff0c\u53f0\u79ef\u7535\uff08TSMC\uff09\u548c\u4e09\u661f\u7535\u5b50\u7b49\u9886\u5148\u7684\u82af\u7247\u5236\u9020\u5546\u5df2\u7ecf\u5728\u7814\u53d1\u548c\u8ba1\u5212\u751f\u4ea7\u66f4\u52a0\u5148\u8fdb\u7684\u5de5\u827a\u8282\u70b9\uff0c\u65e8\u5728\u8fdb\u4e00\u6b65\u7f29\u5c0f\u6676\u4f53\u7ba1\u5c3a\u5bf8\u3001\u63d0\u5347\u96c6\u6210\u5ea6\u4ee5\u53ca\u6027\u80fd\uff0c\u540c\u65f6\u964d\u4f4e\u80fd\u8017\u30023nm\u5de5\u827a\u88ab\u9884\u8ba1\u5c06\u5728\u672a\u6765\u51e0\u5e74\u5185\u6295\u5165\u5546\u4e1a\u751f\u4ea7\u3002\u66f4\u5c0f\u5c3a\u5bf8\u7684\u5de5\u827a\u7814\u53d1\u4e5f\u5728\u4e0d\u65ad\u63a8\u8fdb\uff0c\u663e\u793a\u51fa\u96c6\u6210\u7535\u8def\u5de5\u827a\u6280\u672f\u7684\u6301\u7eed\u8fdb\u6b65\u5e76\u975e\u505c\u6ede\u3002<\/p>\n<\/p>\n<p><p>\u5148\u8fdb\u76843nm\u5de5\u827a\u5df2\u5438\u5f15\u4e86\u82f9\u679c\u7b49\u6280\u672f\u5de8\u5934\u7684\u6ce8\u610f\uff0c\u4ed6\u4eec\u8ba1\u5212\u4f7f\u7528\u8fd9\u4e9b\u66f4\u9ad8\u5bc6\u5ea6\u7684\u82af\u7247\u6765\u63d0\u5347\u5176\u8bbe\u5907\u7684\u6027\u80fd\u548c\u80fd\u6548\u3002\u6b64\u5916\uff0c\u968f\u7740\u5bf9\u91cf\u5b50\u9650\u5236\u548c\u539f\u5b50\u7ea7\u5de5\u827a\u5236\u9020\u7684\u7814\u7a76\u8d8a\u6765\u8d8a\u6df1\u5165\uff0c\u672a\u6765\u5f00\u53d1\u6bd43nm\u66f4\u5c0f\u7684\u5de5\u827a\u5236\u7a0b\u662f\u6709\u53ef\u80fd\u7684\uff0c\u5c3d\u7ba1\u8fd9\u4f1a\u5e26\u6765\u5de8\u5927\u7684\u6280\u672f\u6311\u6218\u3002<\/p>\n<\/p>\n<p><h3>\u4e00\u3001EUV\u5149\u523b\u6280\u672f<\/h3>\n<\/p>\n<p><p><strong>\u6781\u7d2b\u5916\u5149\u523b\u6280\u672f\uff08EUV\uff09\u662f\u76ee\u524d\u63a8\u52a8\u5de5\u827a\u5236\u7a0b\u8fdb\u4e00\u6b65\u53d1\u5c55\u7684\u5173\u952e\u8981\u7d20<\/strong>\u3002EUV\u5149\u523b\u5141\u8bb8\u66f4\u5c0f\u7684\u56fe\u6848\u5c3a\u5bf8\u523b\u753b\u5728\u6676\u7247\u4e0a\uff0c\u4f7f\u5f97\u6676\u4f53\u7ba1\u5bc6\u5ea6\u53ef\u4ee5\u5f97\u5230\u6781\u5927\u63d0\u9ad8\u3002\u4e0e\u4f20\u7edf\u7684\u6df1\u7d2b\u5916\u5149\u523b\u6280\u672f\uff08DUV\uff09\u76f8\u6bd4\uff0cEUV\u63d0\u4f9b\u4e86\u66f4\u9ad8\u7684\u5206\u8fa8\u7387\u548c\u66f4\u9ad8\u7684\u8986\u76d6\u7387\u3002<\/p>\n<\/p>\n<p><p>EUV\u6280\u672f\u5bf9\u4e8e\u5b9e\u73b05nm\u4ee5\u4e0b\u7684\u5de5\u827a\u8282\u70b9\u662f\u5fc5\u4e0d\u53ef\u5c11\u7684\u30025nm\u8282\u70b9\u662f\u9996\u4e2a\u5e7f\u6cdb\u4f7f\u7528EUV\u8fdb\u884c\u591a\u5c42\u56fe\u6848\u5316\u7684\u5904\u7406\u8282\u70b9\uff0c\u8fd9\u6807\u8bb0\u4e86\u6676\u7247\u5de5\u827a\u5236\u9020\u6280\u672f\u7684\u91cd\u8981\u8f6c\u53d8\u3002\u8fd9\u79cd\u6280\u672f\u7684\u8fdb\u6b65\u4e0d\u4ec5\u63d0\u5347\u4e86\u82af\u7247\u6027\u80fd\uff0c\u800c\u4e14\u6709\u52a9\u4e8e\u964d\u4f4e\u6210\u672c\uff0c\u56e0\u4e3a\u5b83\u53ef\u4ee5\u51cf\u5c11\u751f\u4ea7\u6676\u7247\u6240\u9700\u7684\u5236\u9020\u6b65\u9aa4\u548c\u590d\u6742\u6027\u3002<\/p>\n<\/p>\n<p><h3>\u4e8c\u30013nm\u6280\u672f\u53d1\u5c55<\/h3>\n<\/p>\n<p><p>3nm\u5de5\u827a\u5236\u7a0b\u662f<strong>\u7ee75nm\u5de5\u827a\u4e4b\u540e\u7684\u4e0b\u4e00\u4ee3\u534a\u5bfc\u4f53\u5236\u7a0b\u6280\u672f<\/strong>\uff0c\u5b83\u5c06\u4f7f\u7528\u66f4\u5148\u8fdb\u7684EUV\u5149\u523b\u6280\u672f\u3001\u65b0\u7684\u6676\u4f53\u7ba1\u8bbe\u8ba1\u548c\u6750\u6599\u6765\u5b9e\u73b0\u66f4\u9ad8\u7684\u6676\u4f53\u7ba1\u5bc6\u5ea6\u3001\u66f4\u597d\u7684\u6027\u80fd\u4ee5\u53ca\u66f4\u4f4e\u7684\u529f\u8017\u3002\u76f8\u6bd4\u4e8e5nm\u5de5\u827a\uff0c3nm\u5de5\u827a\u9884\u8ba1\u5c06\u5e26\u676515-30%\u7684\u6027\u80fd\u63d0\u5347\uff0c\u4ee5\u53ca25-50%\u7684\u80fd\u6548\u6539\u5584\u3002<\/p>\n<\/p>\n<p><p>\u76ee\u524d\uff0c\u53f0\u79ef\u7535\u548c\u4e09\u661f\u90fd\u5728\u79ef\u6781\u5730\u7814\u53d13nm\u5de5\u827a\u6280\u672f\u3002\u53f0\u79ef\u7535\u8ba1\u5212\u4e8e2022\u5e74\u5f00\u59cb\u98ce\u9669\u751f\u4ea73nm\u5de5\u827a\u5236\u7a0b\uff0c\u5e76\u9884\u8ba1\u5728\u4e4b\u540e\u7684\u51e0\u5e74\u5185\u91cf\u4ea7\u3002\u4e09\u661f\u4e5f\u8ba1\u5212\u5728\u4e0d\u4e45\u7684\u5c06\u6765\u5b9e\u73b03nm\u5de5\u827a\u7684\u91cf\u4ea7\u3002<\/p>\n<\/p>\n<p><h3>\u4e09\u3001\u4e0b\u4e00\u4ee3\u5de5\u827a\u6280\u672f<\/h3>\n<\/p>\n<p><p>\u57283nm\u4e4b\u4e0b\u7684\u5de5\u827a\u5236\u7a0b\uff0c\u4f8b\u59822nm\u548c1nm\uff0c\u76ee\u524d\u4ecd\u5904\u4e8e\u7814\u7a76\u548c\u65e9\u671f\u5f00\u53d1\u9636\u6bb5\u3002<strong>\u4ea7\u4e1a\u754c\u548c\u79d1\u7814\u673a\u6784\u6b63\u5728\u63a2\u7d22\u4e0b\u4e00\u4ee3\u6676\u4f53\u7ba1\u8bbe\u8ba1\u548c\u5efa\u9020\u65b9\u6cd5\uff0c\u4ee5\u89e3\u51b3\u7269\u7406\u548c\u6280\u672f\u4e0a\u7684\u9650\u5236<\/strong>\u3002\u4e00\u4e9b\u6982\u5ff5\uff0c\u5982Gate-All-Around (GAA)\u6676\u4f53\u7ba1\u3001\u78b3\u7eb3\u7c73\u7ba1\u6676\u4f53\u7ba1\u3001\u4ee5\u53ca\u4e8c\u7ef4\u6750\u6599\u6676\u4f53\u7ba1\u7b49\uff0c\u6b63\u88ab\u4f5c\u4e3a\u66ff\u4ee3\u4f20\u7edf\u6676\u4f53\u7ba1\u7684\u6f5c\u5728\u6280\u672f\u7814\u7a76\u3002<\/p>\n<\/p>\n<p><p>\u5728\u8fd9\u4e00\u9886\u57df\u5185\uff0c\u7eb3\u7c73\u7ebf\u3001\u7eb3\u7c73\u7247\u6280\u672f\u548cGAA\u67b6\u6784\u88ab\u8ba4\u4e3a\u5bf9\u672a\u6765\u51e0\u4ee3\u82af\u7247\u81f3\u5173\u91cd\u8981\uff0c\u56e0\u4e3a\u5b83\u4eec\u53ef\u80fd\u63d0\u4f9b\u8d85\u8d8a\u4f20\u7edf\u6676\u4f53\u7ba1\u6781\u9650\u7684\u6027\u80fd\u548c\u5c3a\u5bf8\u7f29\u51cf\u3002\u7136\u800c\uff0c\u5e94\u7528\u8fd9\u4e9b\u524d\u6cbf\u6280\u672f\u5e76\u751f\u4ea7\u5546\u4e1a\u82af\u7247\u4ecd\u9762\u4e34\u8bf8\u591a\u6280\u672f\u548c\u6210\u672c\u6311\u6218\u3002<\/p>\n<\/p>\n<p><h3>\u56db\u3001\u91cf\u5b50\u9650\u5236\u548c\u539f\u5b50\u7ea7\u5236\u9020<\/h3>\n<\/p>\n<p><p>\u5f53\u5de5\u827a\u8282\u70b9\u63a5\u8fd1\u5355\u4e2a\u539f\u5b50\u5927\u5c0f\u65f6\uff0c\u4f1a\u9047\u5230\u6240\u8c13\u7684\u91cf\u5b50\u9650\u5236\u3002\u5728\u8fd9\u4e2a\u5c3a\u5ea6\u4e0a\uff0c\u91cf\u5b50\u6548\u5e94\u53d8\u5f97\u663e\u8457\uff0c\u6676\u4f53\u7ba1\u7684\u884c\u4e3a\u4f1a\u6709\u6839\u672c\u7684\u6539\u53d8\u3002\u56e0\u6b64\uff0c\u53d1\u5c55\u6bd43nm\u8fd8\u5c0f\u7684\u5de5\u827a\u5236\u7a0b\u9700\u8981\u65b0\u7684\u91cf\u5b50\u6750\u6599\u548c\u539f\u7406\u3002<\/p>\n<\/p>\n<p><p><strong>\u539f\u5b50\u7ea7\u5236\u9020\u662f\u6784\u5efa\u672a\u6765\u51e0\u4ee3\u82af\u7247\u7684\u53ef\u80fd\u9014\u5f84<\/strong>\u3002\u8fd9\u79cd\u6280\u672f\u6307\u7684\u662f\u9010\u4e2a\u539f\u5b50\u5730\u7ec4\u88c5\u7535\u8def\uff0c\u5b83\u53ef\u80fd\u4e3a\u96c6\u6210\u7535\u8def\u7684\u6781\u7aef\u5fae\u578b\u5316\u63d0\u4f9b\u89e3\u51b3\u65b9\u6848\u3002\u5c3d\u7ba1\u76ee\u524d\u8fd9\u79cd\u6280\u672f\u8fd8\u53ea\u5b58\u5728\u4e8e\u5b9e\u9a8c\u5ba4\u7814\u7a76\u4e2d\uff0c\u4f46\u5b83\u6709\u6f5c\u529b\u663e\u8457\u63a8\u8fdb\u534a\u5bfc\u4f53\u5de5\u4e1a\u7684\u8fb9\u754c\u3002<\/p>\n<\/p>\n<p><h3>\u4e94\u3001\u7ed3\u8bba<\/h3>\n<\/p>\n<p><p>\u7efc\u5408\u4ee5\u4e0a\u4fe1\u606f\uff0c\u6211\u4eec\u53ef\u4ee5\u5f97\u51fa\u7ed3\u8bba\uff1a\u76ee\u524d5nm\u5de5\u827a\u5236\u7a0b\u5e76\u975e\u96c6\u6210\u7535\u8def\u82af\u7247\u7684\u6781\u9650\u3002\u968f\u7740EUV\u5149\u523b\u6280\u672f\u7684\u6210\u719f\u30013nm\u53ca\u4ee5\u4e0b\u5de5\u827a\u5236\u7a0b\u7684\u7814\u53d1\uff0c\u4ee5\u53ca\u65b0\u6676\u4f53\u7ba1\u67b6\u6784\u548c\u539f\u5b50\u7ea7\u5236\u9020\u6280\u672f\u7684\u63a2\u7d22\uff0c\u96c6\u6210\u7535\u8def\u7684\u5236\u7a0b\u6280\u672f\u4ecd\u5728\u4e0d\u65ad\u7a81\u7834\u6781\u9650\uff0c\u671d\u7740\u66f4\u5c0f\u7684\u5c3a\u5ea6\u8fdb\u53d1\u3002\u5c3d\u7ba1\u6280\u672f\u548c\u7269\u7406\u4e0a\u7684\u6311\u6218\u65e5\u76ca\u663e\u8457\uff0c\u4f46\u534a\u5bfc\u4f53\u884c\u4e1a\u7684\u521b\u65b0\u7cbe\u795e\u548c\u6301\u7eed\u7814\u7a76\u8868\u660e\uff0c\u672a\u6765\u5c06\u6709\u66f4\u5c0f\u7684\u5de5\u827a\u5236\u7a0b\u95ee\u4e16\u3002<\/p>\n<\/p>\n<h2><strong>\u76f8\u5173\u95ee\u7b54FAQs\uff1a<\/strong><\/h2>\n<p><strong>5nm\u5de5\u827a\u5236\u7a0b\u7684\u5230\u6765\u5bf9\u96c6\u6210\u7535\u8def\u82af\u7247\u6709\u4f55\u5f71\u54cd\uff1f<\/strong><\/p>\n<ul>\n<li>\u4e3a\u4ec0\u4e485nm\u5de5\u827a\u5236\u7a0b\u80fd\u591f\u6210\u4e3a\u96c6\u6210\u7535\u8def\u82af\u7247\u7684\u4e0b\u4e00\u4e2a\u91cc\u7a0b\u7891\uff1f<\/li>\n<li>5nm\u5de5\u827a\u5236\u7a0b\u76f8\u8f83\u4e8e\u4e4b\u524d\u7684\u5de5\u827a\u5236\u7a0b\u6709\u54ea\u4e9b\u663e\u8457\u6539\u8fdb\uff1f<\/li>\n<\/ul>\n<p><strong>5nm\u5de5\u827a\u5236\u7a0b\u662f\u5426\u80fd\u591f\u8fdb\u4e00\u6b65\u63d0\u5347\u96c6\u6210\u7535\u8def\u82af\u7247\u7684\u6027\u80fd\uff1f<\/strong><\/p>\n<ul>\n<li>5nm\u5de5\u827a\u5236\u7a0b\u80fd\u5426\u4e3a\u96c6\u6210\u7535\u8def\u82af\u7247\u63d0\u4f9b\u66f4\u9ad8\u7684\u5904\u7406\u80fd\u529b\u548c\u66f4\u4f4e\u7684\u529f\u8017\uff1f<\/li>\n<li>5nm\u5de5\u827a\u5236\u7a0b\u5bf9\u4e8e\u7535\u6c60\u5bff\u547d\u548c\u7eed\u822a\u80fd\u529b\u6709\u4f55\u5f71\u54cd\uff1f<\/li>\n<\/ul>\n<p><strong>5nm\u5de5\u827a\u5236\u7a0b\u5728\u82af\u7247\u5236\u9020\u8fc7\u7a0b\u4e2d\u9762\u4e34\u7684\u6311\u6218\u662f\u4ec0\u4e48\uff1f<\/strong><\/p>\n<ul>\n<li>5nm\u5de5\u827a\u5236\u7a0b\u7684\u51fa\u73b0\u662f\u5426\u589e\u52a0\u4e86\u82af\u7247\u5236\u9020\u7684\u590d\u6742\u6027\uff1f<\/li>\n<li>5nm\u5de5\u827a\u5236\u7a0b\u5bf9\u82af\u7247\u5236\u9020\u6210\u672c\u548c\u4ea7\u80fd\u662f\u5426\u5b58\u5728\u6311\u6218\uff1f<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"\u96c6\u6210\u7535\u8def\u82af\u7247\u76845nm\u5de5\u827a\u5236\u7a0b\u5f53\u524d\u4e0d\u662f\u5236\u7a0b\u6280\u672f\u7684\u6781\u9650\u3002\u5148\u8fdb\u7684\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u523b\u6280\u672f\u51fa\u73b0\u540e\u30013nm\u751a\u81f3\u66f4\u5c0f\u5c3a\u5bf8\u7684 [&hellip;]","protected":false},"author":3,"featured_media":250638,"comment_status":"closed","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[37],"tags":[],"acf":[],"_links":{"self":[{"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/posts\/250627"}],"collection":[{"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/comments?post=250627"}],"version-history":[{"count":0,"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/posts\/250627\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/media\/250638"}],"wp:attachment":[{"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/media?parent=250627"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/categories?post=250627"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/docs.pingcode.com\/wp-json\/wp\/v2\/tags?post=250627"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}