"Monitoring virtual metrology reliability in a sampling decision system."

Daniel Kurz, Cristina De Luca, Jürgen Pilz (2013)

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DOI: 10.1109/COASE.2013.6653949

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Daniel Kurz, Cristina De Luca, Jürgen Pilz:
Monitoring virtual metrology reliability in a sampling decision system. CASE 2013: 20-25

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