"Simultaneous flare level and flare variation minimization with ..."

Shao-Yun Fang, Yao-Wen Chang (2012)

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DOI: 10.1145/2228360.2228578

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Shao-Yun Fang, Yao-Wen Chang:
Simultaneous flare level and flare variation minimization with dummification in EUVL. DAC 2012: 1179-1184

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