{"article":{"@attributes":{"key":"journals\/mj\/TangTZJLLCL21","mdate":"2021-12-15"},"author":["Xin Tang","Junwang Tian","Jiafeng Zhao","Zhong Jin","Yunpeng Liu","Junfu Liu","Taotao Chen","Junhui Li"],"title":"Structure design and optimization of SOI high-temperature pressure sensor chip.","pages":"105245","year":"2021","volume":"118","journal":"Microelectron. J.","ee":"https:\/\/doi.org\/10.1016\/j.mejo.2021.105245","url":"db\/journals\/mj\/mj118.html#TangTZJLLCL21"}}